JPH05223098A - Vacuum pump driving canned motor - Google Patents
Vacuum pump driving canned motorInfo
- Publication number
- JPH05223098A JPH05223098A JP4059298A JP5929892A JPH05223098A JP H05223098 A JPH05223098 A JP H05223098A JP 4059298 A JP4059298 A JP 4059298A JP 5929892 A JP5929892 A JP 5929892A JP H05223098 A JPH05223098 A JP H05223098A
- Authority
- JP
- Japan
- Prior art keywords
- frame
- motor
- mounting flange
- pump
- vacuum pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Structures Of Non-Positive Displacement Pumps (AREA)
- Motor Or Generator Cooling System (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明はポンプと軸を共有し、且
つポンプに直結される真空ポンプ駆動用キャンドモータ
に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum pump driving canned motor that shares a shaft with a pump and is directly connected to the pump.
【０００２】[0002]
【従来技術】従来、モータフレームの一端に取付けたポ
ンプ取付フランジを介して該モータフレームとポンプフ
レームが連結され、モータ軸とポンプ軸とが一体的に連
結され、且つモータ固定子がフレームとキャンで密封さ
れた構造の真空ポンプ駆動用キャンドモータにおいて、
その冷却方法は一般に、固定子が挿入されたフレーム外
周に水冷室又は冷却フィンを設けてモータ固定子及び回
転子から発する熱を外部に放出して冷却している。2. Description of the Related Art Conventionally, a motor frame and a pump frame are connected via a pump mounting flange attached to one end of a motor frame, the motor shaft and the pump shaft are integrally connected, and the motor stator is connected to the frame and the cam frame. In a canned motor for driving a vacuum pump with a structure sealed by
In general, the cooling method is to provide a water cooling chamber or cooling fins on the outer periphery of the frame in which the stator is inserted to radiate the heat generated from the motor stator and the rotor to the outside for cooling.
【０００３】[0003]
【発明が解決しようとする課題】上記のようにポンプと
軸を共用し、且つポンプに直結される真空ポンプ駆動用
キャンドモータにおいては、固定子や回転子で発生する
熱に加え、キャンで発熱する熱（渦流損による熱）及び
真空ポンプより伝導される熱によってモータの温度が上
昇する。そのためその対策として、モータの絶縁層を厚
くしたり絶縁性能の優れた材料を用いる等して絶縁性能
の向上を図ったり、モータの大型化（大容量化）を図る
必要があった。そのためコストアップ、寸法の増大及び
重量増大等の問題が存在する。As described above, in the vacuum pump driving canned motor that shares the shaft with the pump and is directly connected to the pump, in addition to the heat generated by the stator and the rotor, heat is generated by the can. The temperature of the motor rises due to the heat generated (heat due to eddy current loss) and the heat conducted from the vacuum pump. Therefore, as a countermeasure, it is necessary to increase the insulation performance of the motor by thickening the insulation layer of the motor or using a material having excellent insulation performance, and to increase the size (capacity) of the motor. Therefore, there are problems such as increased cost, increased size, and increased weight.
【０００４】本発明は上述の点に鑑みてなされたもの
で、モータで発生した熱や真空ポンプより伝導される熱
を効率良く除去できる真空ポンプ駆動用キャンドモータ
を提供することを目的とする。The present invention has been made in view of the above points, and an object of the present invention is to provide a canned motor for driving a vacuum pump capable of efficiently removing the heat generated in the motor and the heat conducted by the vacuum pump.
【０００５】[0005]
【課題を解決するための手段】上記課題を解決するため
本発明は、図１に示すような、モータフレーム１の一端
に取付けたポンプ取付フランジ３を介して該モータフレ
ーム１とポンプフレーム２０が連結されると共に、モー
タ軸１２と真空ポンプ軸（図示せず）とが一体的に連結
され、且つモータ固定子２がフレーム１とキャン７で密
封された構造の真空ポンプ駆動用キャンドモータにおい
て、フレーム１の一端に絞り部１ａを設け、該絞り部１
ａの先端をポンプ取付フランジ３の内径部に嵌合させ、
且つ該絞り部１ａの外側面とポンプ取付フランジ３の側
面との間に空隙Ｂを設け、さらにキャンの一端をフレー
ム絞り部内周に密着させ、フレームの外周に外周面との
間に空隙Ａを隔ててフレーム他端からポンプ取付フラン
ジ３の側面に達するジャケット５を設け、フレーム１と
ジャケット５及び絞り部１ａの外側面とポンプ取付フラ
ンジ３の側面で囲まれた空隙Ａ，Ｂを水冷室としたこと
を特徴とする。SUMMARY OF THE INVENTION In order to solve the above problems, the present invention provides a method for connecting a motor frame 1 and a pump frame 20 via a pump mounting flange 3 mounted on one end of the motor frame 1 as shown in FIG. In the canned motor for driving a vacuum pump, which is connected, the motor shaft 12 and the vacuum pump shaft (not shown) are integrally connected, and the motor stator 2 is sealed by the frame 1 and the can 7. A narrowed portion 1a is provided at one end of the frame 1, and the narrowed portion 1a
Fit the tip of a into the inner diameter of the pump mounting flange 3,
Further, a gap B is provided between the outer surface of the throttle portion 1a and the side surface of the pump mounting flange 3, one end of the can is brought into close contact with the inner circumference of the frame throttle portion, and a gap A is provided between the outer circumference of the frame and the outer circumferential surface. A jacket 5 is provided so as to reach the side surface of the pump mounting flange 3 from the other end of the frame, and the gaps A and B surrounded by the outer surface of the frame 1, the jacket 5 and the throttle portion 1a and the side surface of the pump mounting flange 3 serve as a water cooling chamber It is characterized by having done.
【０００６】[0006]
【作用】本発明は真空ポンプ駆動用キャンドモータを上
記の如く構成することにより、ポンプ取付フランジ３に
伝えられた真空ポンプからの熱及びキャン７に発生しポ
ンプ取付フランジ３に伝えられた熱をフレーム１の絞り
部１ａの外側面とポンプ取付フランジ３の側面との間の
空隙Ｂに流れる冷水により効率良く外部に放出できるか
ら、モータ全体の温度上昇を低く抑えることが可能とな
る。According to the present invention, by constructing the canned motor for driving the vacuum pump as described above, the heat from the vacuum pump transferred to the pump mounting flange 3 and the heat generated in the can 7 and transferred to the pump mounting flange 3 are transferred. Since the cold water flowing in the gap B between the outer surface of the throttle portion 1a of the frame 1 and the side surface of the pump mounting flange 3 can be efficiently discharged to the outside, it is possible to suppress the temperature rise of the entire motor to a low level.
【０００７】[0007]
【実施例】以下、本発明の一実施例を図面に基づいて説
明する。図１は本発明の真空ポンプ駆動用キャンドモー
タの構造を示す断面図である。図１において、１はモー
タフレームであり、該モータフレーム１はプレス加工で
成形された円筒状で、且つその一端部に外径を小さくし
た絞り部１ａが形成されている。モータフレーム１の絞
り部１ａの先端はポンプ取付用フランジ３の内径部に嵌
合（圧入）して溶着し、他端は反負荷側フランジ４に嵌
合（圧入）して溶着している。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a sectional view showing the structure of a vacuum pump driving canned motor of the present invention. In FIG. 1, reference numeral 1 denotes a motor frame. The motor frame 1 has a cylindrical shape formed by press working, and a throttle portion 1a having a reduced outer diameter is formed at one end thereof. The end of the throttle portion 1a of the motor frame 1 is fitted (press-fitted) to the inner diameter portion of the pump mounting flange 3 and welded, and the other end is fitted (press-fitted) to the anti-load side flange 4 and welded.
【０００８】５はジャケットで、該ジャケット５は円筒
状でモータフレーム１の外周に位置し該モータフレーム
１の外周面との間に空隙Ａを隔てて配置される。ジャケ
ット５の一端はポンプ取付用フランジ３に嵌合（圧入）
して溶着し、他端は反負荷側フランジ４に嵌合（圧入）
して溶着している。ジャケット５にはネジ加工され空隙
Ａに連通するソケット６が２個溶着されている。ポンプ
取付用フランジ３のモータ側の側面は凹状に形成されて
おり、該側面とモータフレーム１の絞り部１ａの外側面
との間に空隙Ｂが形成されている。前記２個のソケット
の内、一方が冷却水の入口配管に接続され、もう一方は
冷却水の出口配管に接続されている。即ち、モータフレ
ーム１の外周とジャケット５の内周の間の空隙Ａと絞り
部１ａの外側面とポンプ取付用フランジ３の側面の間の
空隙Ｂとで水冷室を形成している。Reference numeral 5 denotes a jacket, which is cylindrical and is located on the outer periphery of the motor frame 1 and is arranged with a gap A between it and the outer peripheral surface of the motor frame 1. One end of the jacket 5 is fitted (press fit) into the pump mounting flange 3.
And then welded, and the other end is fitted (press-fitted) to the counter-load side flange 4.
Then welded. Two sockets 6 which are screwed and communicate with the space A are welded to the jacket 5. The side surface of the pump mounting flange 3 on the motor side is formed in a concave shape, and a gap B is formed between the side surface and the outer side surface of the throttle portion 1 a of the motor frame 1. One of the two sockets is connected to the cooling water inlet pipe, and the other is connected to the cooling water outlet pipe. That is, the space A between the outer periphery of the motor frame 1 and the inner periphery of the jacket 5 and the space B between the outer surface of the throttle portion 1a and the side surface of the pump mounting flange 3 form a water cooling chamber.
【０００９】モータフレーム１の内部には固定子２が固
定され、該固定子２の内側円筒面には、薄い円筒状のキ
ャン７が挿入され、その一端部はポンプ取付用フランジ
３の内径部に溶着されたモータフレーム１の絞り部１ａ
の先端部内面に密着され、他端は反負荷側フランジ４に
密着されている。さらにキャン７はその両端で絞り部１
ａ及び反負荷側フランジ４に溶着される。A stator 2 is fixed inside the motor frame 1, and a thin cylindrical can 7 is inserted into an inner cylindrical surface of the stator 2, one end of which is an inner diameter portion of a pump mounting flange 3. Throttle portion 1a of motor frame 1 welded to
Is closely adhered to the inner surface of the front end portion and the other end is closely adhered to the anti-load side flange 4. Further, the can 7 has a diaphragm portion 1 at both ends thereof.
a and the non-load side flange 4 are welded.
【００１０】反負荷側フランジ４の外側面には、Ｏリン
グ８を介在させて円板状の反負荷側カバー９がボルト１
０により固定されていて、真空ポンプ取付け時にポンプ
室（図示せず）及びキャン７の内側の室内の密封を確保
している。回転子１１は真空ポンプの回転軸に直結した
回転軸１２に圧入されている。On the outer surface of the anti-load side flange 4, there is a disc-shaped anti-load side cover 9 with an O-ring 8 interposed.
It is fixed by 0, and when the vacuum pump is attached, the inside of the pump chamber (not shown) and the can 7 is sealed tightly. The rotor 11 is press-fitted into a rotary shaft 12 directly connected to the rotary shaft of a vacuum pump.
【００１１】真空ポンプ駆動用キャンドモータを図１に
示すような構造とすることにより、ポンプ取付フランジ
３に伝えられた真空ポンプ（図示せず）からの熱及びキ
ャン７に発生しポンプ取付フランジ３に伝えられた渦流
損による熱は、フレーム１の絞り部１ａの外側面とポン
プ取付フランジ３の側面との間の空隙Ｂに流れ込む冷水
により効果的に外部に放出することができ、モータ全体
の温度上昇を低く抑えることが可能となる。By constructing the canned motor for driving the vacuum pump as shown in FIG. 1, heat from the vacuum pump (not shown) transferred to the pump mounting flange 3 and generated in the can 7 is generated in the pump mounting flange 3. The heat due to the eddy current loss transmitted to the motor can be effectively released to the outside by the cold water flowing into the gap B between the outer surface of the throttle portion 1a of the frame 1 and the side surface of the pump mounting flange 3, so that the entire motor can be discharged. It is possible to keep the temperature rise low.
【００１２】[0012]
【発明の効果】以上説明したように本発明によれば、下
記のような優れた効果が得られる。 （１）モータフレーム外周とジャケットと絞り部外側面
とポンプ取付フランジ側面で囲まれた空隙を水冷室とし
て、該水冷室に冷却水を流すので、ポンプ取付フランジ
に接触している真空ポンプから伝導する熱及びフレーム
に密着したキャンから伝導する熱を外部に効率よく放出
でき、モータ全体の温度上昇を低く抑えることができ、
構造が簡単でモータ自体の小型化、軽量化が図れる。As described above, according to the present invention, the following excellent effects can be obtained. (1) Since the cooling water flows through the space surrounded by the outer periphery of the motor frame, the jacket, the outer surface of the throttle portion, and the side surface of the pump mounting flange as cooling water, the cooling water is conducted from the vacuum pump in contact with the pump mounting flange. The heat generated and the heat conducted from the can closely attached to the frame can be efficiently released to the outside, and the temperature rise of the entire motor can be suppressed to a low level.
The structure is simple and the motor itself can be made smaller and lighter.
【００１３】（２）また、上記のように熱を外部に効率
よく放出できるので、モータと高熱源である真空ポンプ
との熱伝受けを考慮した距離もより近接することが可能
となり、真空ポンプ装置全体の小型化が図れる。(2) Further, since the heat can be efficiently released to the outside as described above, it becomes possible to make the distance closer in consideration of heat transfer between the motor and the vacuum pump which is a high heat source, and thus the vacuum pump. The overall size of the device can be reduced.
【００１４】（３）また、真空ポンプの高速化に対応し
てインバータ電源を用いた高周波数運転においては、高
周波運転特有のキャンの渦流損が増加するが、渦流損増
加による発熱も効率よく除去できるので、真空ポンプ駆
動用キャンドモータの高速運転が可能になる。(3) Further, in the high frequency operation using the inverter power source in response to the speed increase of the vacuum pump, the eddy current loss of the can, which is peculiar to the high frequency operation, increases, but the heat generation due to the increase of the eddy current loss is efficiently removed. Therefore, the canned motor for driving the vacuum pump can be operated at high speed.
【図１】本発明の真空ポンプ駆動用キャンドモータの構
造を示す断面図である。FIG. 1 is a cross-sectional view showing the structure of a vacuum pump driving canned motor of the present invention.
１ モータフレーム １ａ 絞り部 ２ 固定子 ３ ポンプ取付フランジ ４ 反負荷側フランジ ５ ジャケット ６ ソケット ７ キャン ８ Ｏリング ９ 反負荷側カバー １０ ボルト １１ 回転子 １２ 回転軸 1 motor frame 1a throttle part 2 stator 3 pump mounting flange 4 anti-load side flange 5 jacket 6 socket 7 can 8 O-ring 9 anti-load side cover 10 bolt 11 rotor 12 rotating shaft
Claims (1)
取付フランジを介して該モータフレームとポンプフレー
ムが連結されると共に、モータ軸と真空ポンプ軸とが一
体的に連結され、且つモータ固定子が前記フレームとキ
ャンで密封された構造の真空ポンプ駆動用キャンドモー
タにおいて、 前記フレームの一端に絞り部を設け該絞り部先端を前記
ポンプ取付フランジの内径部に嵌合させ、且つ該絞り部
外側面と該ポンプ取付フランジ側面との間に空隙設け、
前記フレームの外周に外周面との間に空隙を隔ててフレ
ーム他端から前記ポンプ取付フランジ側面に達するジャ
ケットを設け、更に前記キャンの一端をフレーム絞り部
内周に密着させ、前記フレームと該ジャケット及び絞り
部外側面と該ポンプ取付フランジ側面で囲まれた空隙を
水冷室としたことを特徴とする真空ポンプ駆動用キャン
ドモータ。1. A motor frame and a pump frame are connected to each other via a pump mounting flange attached to one end of the motor frame, and a motor shaft and a vacuum pump shaft are integrally connected, and the motor stator is In a vacuum pump driving canned motor having a structure sealed by a frame and a can, a throttle portion is provided at one end of the frame, and a tip of the throttle portion is fitted into an inner diameter portion of the pump mounting flange, and an outer surface of the throttle portion is provided. A space is provided between the side surface of the pump mounting flange,
A jacket is provided on the outer periphery of the frame with a gap between the frame and the outer peripheral surface to reach the side surface of the pump mounting flange from the other end of the frame, and one end of the can is brought into close contact with the inner periphery of the frame throttle portion, and the frame and the jacket A canned motor for driving a vacuum pump, wherein a space surrounded by an outer surface of the throttle portion and a side surface of the pump mounting flange is a water cooling chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4059298A JP2617849B2 (en) | 1992-02-13 | 1992-02-13 | Canned motor for driving vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4059298A JP2617849B2 (en) | 1992-02-13 | 1992-02-13 | Canned motor for driving vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05223098A true JPH05223098A (en) | 1993-08-31 |
| JP2617849B2 JP2617849B2 (en) | 1997-06-04 |
Family
ID=13109330
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4059298A Expired - Fee Related JP2617849B2 (en) | 1992-02-13 | 1992-02-13 | Canned motor for driving vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2617849B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20130111411A (en) | 2012-03-29 | 2013-10-10 | 가부시키가이샤 에바라 세이사꾸쇼 | Canned motor, vacuum pump |
| JP2018515706A (en) * | 2015-03-18 | 2018-06-14 | エドワーズ リミテッド | Pump monitoring apparatus and method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02139463U (en) * | 1989-04-27 | 1990-11-21 |
-
1992
- 1992-02-13 JP JP4059298A patent/JP2617849B2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02139463U (en) * | 1989-04-27 | 1990-11-21 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20130111411A (en) | 2012-03-29 | 2013-10-10 | 가부시키가이샤 에바라 세이사꾸쇼 | Canned motor, vacuum pump |
| US9614411B2 (en) | 2012-03-29 | 2017-04-04 | Ebara Corporation | Canned motor and vacuum pump |
| US9660496B2 (en) | 2012-03-29 | 2017-05-23 | Ebara Corporation | Canned motor and vacuum pump |
| TWI594551B (en) * | 2012-03-29 | 2017-08-01 | 荏原製作所股份有限公司 | Canned motor and vacuum pump |
| US10320260B2 (en) | 2012-03-29 | 2019-06-11 | Ebara Corporation | Canned motor and vacuum pump |
| JP2018515706A (en) * | 2015-03-18 | 2018-06-14 | エドワーズ リミテッド | Pump monitoring apparatus and method |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2617849B2 (en) | 1997-06-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4799612B2 (en) | Rotor-cooled permanent magnet excitation type electric machine | |
| KR100382308B1 (en) | Vacuum pump | |
| JP3160504B2 (en) | Turbo molecular pump | |
| US4740711A (en) | Pipeline built-in electric power generating set | |
| DE69533291D1 (en) | Unit with rotary lobe pump and motor | |
| TW201832452A (en) | Motor cooling structure, power motor and electric drive system | |
| US5486728A (en) | Micromotor | |
| KR960702693A (en) | ELECTRIC MOTOR-WHEEL WITH A ROTOR HAVING A HOUSING ENABLING AN EFFICIENT EXCHANGE OF HEAT | |
| CN110429753B (en) | Noise-reduction motor easy to dissipate heat | |
| US20040227415A1 (en) | Electrical machine having centrally disposed stator | |
| JPH05223098A (en) | Vacuum pump driving canned motor | |
| JPH07170695A (en) | Alternator for vehicle | |
| KR20180081336A (en) | Electric centrifugal compressor | |
| US3353042A (en) | Ventilation for totally enclosed dynamoelectric machine | |
| JPH05223097A (en) | Vacuum pump driving canned motor | |
| JPH0974716A (en) | Rotor cooling structure of motor | |
| JPH07213019A (en) | Liquid cooling structure of motor | |
| WO1997024532A1 (en) | Pump assembly | |
| WO2020253173A1 (en) | All-terrain vehicle | |
| JPS61170254A (en) | Liquid cooled motor | |
| JP2004270692A (en) | Heat insulation structure of molecular pump | |
| JP3484371B2 (en) | Turbo molecular pump | |
| JP2002257075A (en) | Canned motor pump | |
| CN219659543U (en) | Heat radiation structure of motor | |
| CN215580680U (en) | Quick heat dissipation and extraction device for motor interior |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |