JPH052173B2 - - Google Patents
Info
- Publication number
- JPH052173B2 JPH052173B2 JP18610985A JP18610985A JPH052173B2 JP H052173 B2 JPH052173 B2 JP H052173B2 JP 18610985 A JP18610985 A JP 18610985A JP 18610985 A JP18610985 A JP 18610985A JP H052173 B2 JPH052173 B2 JP H052173B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- bonded
- bonded piezoelectric
- vibrator
- fixing member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005452 bending Methods 0.000 claims description 20
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- 230000010287 polarization Effects 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 2
- 229920005989 resin Polymers 0.000 claims description 2
- 239000011347 resin Substances 0.000 claims description 2
- 238000001514 detection method Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 239000011889 copper foil Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 102100027340 Slit homolog 2 protein Human genes 0.000 description 1
- 101710133576 Slit homolog 2 protein Proteins 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920005749 polyurethane resin Polymers 0.000 description 1
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18610985A JPS6246267A (ja) | 1985-08-24 | 1985-08-24 | 振動センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18610985A JPS6246267A (ja) | 1985-08-24 | 1985-08-24 | 振動センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6246267A JPS6246267A (ja) | 1987-02-28 |
| JPH052173B2 true JPH052173B2 (de) | 1993-01-11 |
Family
ID=16182516
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18610985A Granted JPS6246267A (ja) | 1985-08-24 | 1985-08-24 | 振動センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6246267A (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4995592A (en) * | 1988-12-22 | 1991-02-26 | Foseco International Limited | Purifying molten metal |
| JP5211584B2 (ja) * | 2007-08-28 | 2013-06-12 | ヤマハ株式会社 | モーションセンサおよびモーションセンサの製造方法 |
-
1985
- 1985-08-24 JP JP18610985A patent/JPS6246267A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6246267A (ja) | 1987-02-28 |
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