JPH0520889U - Board transfer chuck and board transfer device - Google Patents

Abstract

(57) [Summary] [Purpose] A substrate transfer chuck and a substrate that can transfer a substrate from a predetermined place to a predetermined place without carelessly damaging the substrate or making it electrically defective. An object is to provide a carrier device. [Structure] A plurality of chuck elements provided with a chuck body which is arranged so as to be movable in a horizontal direction and is capable of moving up and down, and a bag body which is attached to the chuck body and expands and contracts by supplying and discharging a pressure fluid. And a substrate transfer chuck including: Further, it is a substrate transfer device incorporating the above-mentioned substrate transfer chuck.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a substrate transfer chuck used when transferring an electric substrate to which various electronic devices are attached or printed, and a substrate transfer device incorporating the substrate transfer chuck, and more particularly, The present invention relates to an improved structure of a portion for directly grasping a substrate.

[0002]

[Prior Art]

 In the manufacturing line of various electronic devices, various electronic devices are incorporated on the board or electronic circuits are printed on the board.At this time, the board is appropriately placed in a predetermined place so as to go through a plurality of steps. Are transported to the specified place. Conventionally, this type of substrate transfer operation has been performed by a belt conveyor or a transfer robot.

[0003]

[Problems to be solved by the device]

 The above-mentioned conventional configuration has the following problems. Since there is a limit to the configuration that can be carried only by the belt conveyor, various transfer robots are used in the meantime. The transfer robot generally has a configuration in which a thin plate-like substrate is held by being grasped from both sides, transferred to a predetermined place, and then separated. However, when a transfer robot having such a configuration is used, the substrate may be damaged. In addition, when the board is gripped, the circuit on the board may be electrically connected, which may damage the circuit on the board.

The present invention has been made on the basis of such a point. The object of the present invention is to remove a substrate from a predetermined place without carelessly damaging the substrate or making it electrically defective. It is an object of the present invention to provide a substrate transfer chuck and a substrate transfer device that enable transfer to a predetermined place.

[0005]

[Means for Solving the Problems]

 In order to achieve the above object, the substrate transfer chuck according to the present invention comprises a chuck body that is horizontally movable and vertically movable, and a chuck body that is attached to the chuck body to supply and discharge pressure fluid. A plurality of chuck elements having a bag body that expands and contracts, and by supplying a pressure fluid into the bag bodies of the plurality of chuck elements, the bag body is inflated and the side portion of the substrate is expanded. The feature is that the bag body is contracted by gripping and discharging the pressure fluid to separate the substrate.

Further, the substrate transfer apparatus according to the present invention comprises an apparatus main body, and a transfer means which is attached to the apparatus main body and receives a substrate transferred from another adjacent place and transfers it to a predetermined position in the apparatus main body. A raising means attached to the apparatus main body for raising a predetermined amount of the substrate conveyed by the conveying means to a predetermined position, and a substrate attached to the apparatus main body raised by the raising means to a predetermined place A substrate transfer chuck according to claim 1, which is for transferring, is provided. At that time, the substrate transfer chuck is configured to move a plurality of chuck elements in two orthogonal directions and fix them at an arbitrary position, and thereby appropriately configure the size of the substrate. Can be considered.

[0007]

[Action]

 First, a substrate transfer chuck according to the present invention is provided with a plurality of chuck elements, and a bag body is attached to each chuck element. The bag body is configured to expand and contract by supplying and discharging pressure fluid. When grasping the substrate, the bag is inflated by supplying a pressure fluid, and the substrate is grasped from the side by the plurality of bags. Further, when the gripped substrate is released, the pressure fluid may be discharged to shrink the bag.

Further, in the case of the substrate transfer device according to the present invention, the substrate is transferred onto the transfer means from another place. The carried-in board is carried to a predetermined place by the carrying means. Next, the substrate is raised by a predetermined amount by the raising means. Next, the substrate transfer chuck descends and grips the substrate. Next, the substrate transfer chuck that holds the substrate moves to transfer the substrate to a predetermined location. Then, the grasped substrate is released. Further, when each chuck element of the substrate transfer chuck is provided so as to be movable in the biaxial directions orthogonal to each other, it is fixed in advance at a position corresponding to the size of the substrate.

[0009]

【Example】

 An embodiment of the present invention will be described below with reference to FIGS. First, there is an apparatus main body 1, and the apparatus main body 1 is arranged, for example, at a predetermined place on a board manufacturing line. The apparatus body 1 is composed of four legs 3 and various frames, as shown in the figure. A transport means 5 is installed in the apparatus body 1. As shown in FIG. 2, the conveying means 5 is composed of a pair of belt conveyors 7 and 7'arranged on both left and right sides. As shown in FIG. 1, the belt conveyor 7 includes a drive motor 9, a plurality of (four in the figure) rotating bodies 11, and a belt 13 wound around the rotating body 11. The belt conveyor 7'has a similar structure.

A substrate (shown in phantom in FIG. 2) 15 is conveyed to the apparatus main body 1 from the right direction in the figure. As shown in FIG. 2, the conveyed substrate 15 is carried in on the belts 13, 13 of the belt conveyors 7, 7 '. The loaded substrate 15 is transported to the position shown in FIG. 2 by the belt conveyors 7 and 7 '. In this embodiment, the conveying means 5 is composed of a pair of belt conveyors 7 and 7 ', but the present invention is not limited to this, and it may be one belt conveyor or three or more belt conveyors. It may be configured as described above, and a conveying means other than the belt conveyor may be adopted.

A raising means 17 for raising the substrate 15 by a predetermined amount is provided at the left end portion of the apparatus body 1 in the figure. The lifting means 17 is composed of a pair of lift mechanisms 19 and 19 'arranged on both left and right sides. The lift mechanism 19 includes an air cylinder 21 and a table 25 fixed to a rod 23 of the air cylinder 21. The lift mechanism 19 'has the same structure. Then, by supplying air to the air cylinders 21 of the lift mechanisms 19 and 19 ', the rod 23 is extended upward in the figure, and thereby the platform 25 is raised by a predetermined amount (the phantom line in FIG. 1). ). As a result, the substrate 15 placed on the belt conveyors 7 and 7'is floated by a predetermined amount.

A substrate transfer chuck 27 is attached to the upper part of the apparatus body 1. The substrate transfer chuck 27 is attached to a rodless cylinder 29 attached to the apparatus main body 1, and the rodless cylinder 29 is movably installed in the left-right direction in the drawing. That is, the rodless cylinder 29 reciprocates from the position shown by the phantom line in FIG. 1 to the position shown by the solid line, and accordingly, the substrate transfer chuck 27 also moves from the position shown by the phantom line in the figure to the position shown by the solid line. It is something that moves.

The substrate transfer chuck 27 includes a chuck body 31, and the chuck body 31 is attached to the rodless cylinder 29 via an air cylinder 33. By supplying / discharging air to / from the air cylinder 33, the chuck main body 31 and thus the substrate transfer chuck 27 are moved up and down by a predetermined amount.

A plurality of chuck elements 35 are attached to the lower surface side of the chuck body 31. That is, an arbitrary number (three in the figure) of the substrates 15 are installed on both upper and lower sides in FIG. 2 so as to sandwich the substrate 15 from the vertical direction in FIG. The situation is shown in FIG. The chuck element 35 is composed of a short tube 37 and a bag 39 made of elastic rubber attached to the tip of the short tube 37. An air tube (not shown) is connected to the short pipe 37, and a three-way solenoid valve (not shown) is appropriately switched to supply and discharge air into the bag 39 through the air tube and the short pipe 37. Thus, as shown in FIGS. 4 and 5, the bag body 39 is inflated and contracted. Then, the bag body 39 of the plurality of chuck elements 35 expands to grip the substrate 15 from the side, and the bag body 39 contracts to release the substrate 15. The chuck element 35 may be, for example, "Air Picker (trade name)" manufactured by Bridgestone Corporation.

The plurality of chuck elements 35 are attached to the chuck body 31 so as to be movable in two orthogonal directions. That is, as shown in FIG. 2, a pair of moving bodies 41, 41 ′ is attached to the chuck body 31, and these moving bodies 41, 41 ′ are arranged in the vertical direction in FIG. It is movably mounted. The chuck elements 35 described above are attached to the pair of moving bodies 41 and 41 'in a predetermined number. Therefore, the position of the chuck element 35 in the same direction can be adjusted by moving the moving bodies 41, 41 'in the vertical direction in FIG. The moving positions of the moving bodies 41 and 41 'are fixed by screws 45.

The chuck element 35 attached to each of the moving bodies 41 and 41 'is attached so as to be movable in the longitudinal direction of the moving bodies 41 and 41' (left-right direction in FIG. 2). This moves along a guide member (not shown). The moving position is locked by the lock member 43. Therefore, the position of each chuck element 35 in the same direction can be adjusted appropriately. As described above, the chuck element 35 is movably mounted in two orthogonal directions so that the position thereof can be adjusted because a predetermined size can be set in accordance with the size of the substrate 15 being changed appropriately. This is because it is located in the place.

The operation will be described based on the above configuration. First, the substrate 15 is transferred from the right side of the apparatus main body 1 in the figure by another transfer device (not shown), and is carried onto the belt 13 of the pair of belt conveyors 7 and 7 ′ attached to the apparatus main body 1. The carried-in substrate 15 is carried to the position shown by the phantom line in FIG. Then, the lift mechanisms 19 and 19 of the raising means 17 are driven to raise the substrate 15 placed on the belt conveyors 7 and 7'by a predetermined amount.

Next, the substrate transfer chuck 27 is lowered by a predetermined amount by driving the air cylinder 33. At this time, no air is supplied to the bag body 39 of each chuck element 35, and the bag body 39 is in a contracted state. Therefore, even if the substrate carrying chuck 27 is lowered, the bag body 39 of each chuck element 35 is not in contact with the substrate 15. This is achieved by setting the position of each chuck element 35 according to the size of the substrate 15.

Next, air is supplied into the bag body 39 of each chuck element 35 to inflate it. As a result, the substrate 15 is grasped from the side portions in two directions orthogonal to the carrying direction. At that time, the substrate 15 is softly and surely gripped by the plurality of bags 39. Next, the air cylinder 33 is driven to raise the substrate transporting chuck 27 that holds the substrate 15. Next, the rodless cylinder 29 is driven to move the substrate transfer chuck 27 holding the substrate 15 to the position shown by the solid line in FIG. Next, the air cylinder 33 is driven to lower the substrate transfer chuck 27 that holds the substrate 15 by a predetermined amount. Then, the air in the bag body 39 of each chuck element 35 is discharged and contracted. As a result, the substrate 15 is dropped and discharged, and is carried out to a predetermined position of an inspection device (not shown).

As described above, according to this embodiment, the following effects can be obtained. First, the substrate 15 can be transported from a predetermined place to a predetermined place without carelessly damaging it or making it electrically defective. This is because by expanding the bag body 39 of the plurality of chuck elements 35 of the substrate transport chuck 27, the substrate 15 can be grasped softly and surely from the side direction. In other words, since it is gripped by the inflated bag body 39, it can be softly contacted and gripped with respect to the substrate 15, and since the substrate 15 is gripped from the side instead of vertically, This is because there is no contact with the circuit. This is also because the bag body 39 is made of an insulating material.

Since each chuck element 35 of the substrate transport chuck 27 can be moved in two orthogonal directions and its position can be adjusted, it can be easily dealt with even if the size of the substrate 15 is changed. it can.

The present invention is not limited to the above-described embodiment, and various configurations other than those shown in the drawings are conceivable. Particularly, the number of chuck elements and the like can be set arbitrarily. Good. In addition, a working fluid other than air may be used as the working fluid for expanding and contracting the bag body.

[0023]

[Effect of the device]

 As described in detail above, according to the substrate transfer chuck and the substrate transfer device of the present invention, it is possible to surely move from a predetermined place to a predetermined place without inadvertently damaging the substrate or making it electrically defective. Can be transported up to.

[Brief description of drawings]

FIG. 1 is a side view of a substrate transfer device showing an embodiment of the present invention.

FIG. 2 is a plan view of a substrate transfer device showing an embodiment of the present invention.

FIG. 3 is a perspective view of a substrate transfer chuck according to an embodiment of the present invention.

FIG. 4 is a view showing an embodiment of the present invention and is a front view showing the action of the bag body of the chuck element.

FIG. 5 is a front view showing the operation of the bag body of the chuck element in a view showing an embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Device main body 5 Conveying means 15 Substrate 17 Ascending means 27 Substrate conveying chuck 29 Rodless cylinder 33 Air cylinder 35 Chuck element 39 Bag body

Claims (3)

[Scope of utility model registration request] 1. A plurality of chuck bodies, which are arranged to be movable in a horizontal direction and are arranged to be movable up and down, and a bag body attached to the chuck body, the bag body expanding and contracting by supplying and discharging a pressure fluid. A chuck element is provided, and the bag body of the plurality of chuck elements is supplied with the pressure fluid to expand the bag body to grip the side portion of the substrate and to contract the bag body by discharging the pressure fluid. A substrate transfer chuck, characterized in that the substrates are separated from each other. 2. An apparatus main body, a conveyance means which is attached to the apparatus main body and receives a substrate conveyed from another adjacent place, and conveys it to a predetermined position in the apparatus main body, and the conveyance means attached to the apparatus main body. 2. The substrate transfer chuck according to claim 1, wherein the substrate transfer chuck is mounted on the apparatus main body and grips the substrate lifted by the lifting means and transfers it to a predetermined location. A substrate transfer device comprising: 3. The substrate transfer device according to claim 2,
The substrate transfer chuck moves a plurality of chuck elements in orthogonal two axis directions and fixes them at an arbitrary position, thereby appropriately corresponding to the size of the substrate. Substrate transfer device.