JPH0519767B2 - - Google Patents

Info

Publication number

JPH0519767B2

JPH0519767B2 JP18518785A JP18518785A JPH0519767B2 JP H0519767 B2 JPH0519767 B2 JP H0519767B2 JP 18518785 A JP18518785 A JP 18518785A JP 18518785 A JP18518785 A JP 18518785A JP H0519767 B2 JPH0519767 B2 JP H0519767B2

Authority

JP

Japan

Prior art keywords

substrate

magnetic

recording medium

magnetic recording

manufacturing

Prior art date

1985-08-23

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired - Lifetime

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• 239000000758 substrate Substances 0.000 claims description 57
• 230000005291 magnetic effect Effects 0.000 claims description 46
• 238000001704 evaporation Methods 0.000 claims description 19
• 238000004519 manufacturing process Methods 0.000 claims description 19
• 239000010409 thin film Substances 0.000 claims description 19
• 230000008020 evaporation Effects 0.000 claims description 17
• 238000000034 method Methods 0.000 claims description 13
• 239000002245 particle Substances 0.000 claims description 10
• 239000000696 magnetic material Substances 0.000 claims description 9
• 230000001105 regulatory effect Effects 0.000 claims description 3
• 239000003302 ferromagnetic material Substances 0.000 description 8
• 238000010438 heat treatment Methods 0.000 description 8
• 238000006243 chemical reaction Methods 0.000 description 7
• 238000010894 electron beam technology Methods 0.000 description 6
• 239000007789 gas Substances 0.000 description 6
• 238000007740 vapor deposition Methods 0.000 description 6
• -1 Fe-Si-Al Chemical class 0.000 description 4
• 238000000151 deposition Methods 0.000 description 4
• 230000008021 deposition Effects 0.000 description 4
• 229910052751 metal Inorganic materials 0.000 description 4
• 239000002184 metal Substances 0.000 description 4
• 229910020630 Co Ni Inorganic materials 0.000 description 3
• 229910002440 Co–Ni Inorganic materials 0.000 description 3
• 229910045601 alloy Inorganic materials 0.000 description 3
• 239000000956 alloy Substances 0.000 description 3
• 239000011230 binding agent Substances 0.000 description 3
• XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
• MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
• 229910002796 Si–Al Inorganic materials 0.000 description 2
• 230000000052 comparative effect Effects 0.000 description 2
• 229920001577 copolymer Polymers 0.000 description 2
• 230000007423 decrease Effects 0.000 description 2
• 229910001882 dioxygen Inorganic materials 0.000 description 2
• 230000005294 ferromagnetic effect Effects 0.000 description 2
• 230000004907 flux Effects 0.000 description 2
• 229910052742 iron Inorganic materials 0.000 description 2
• 230000005415 magnetization Effects 0.000 description 2
• 150000002739 metals Chemical class 0.000 description 2
• VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
• 239000004033 plastic Substances 0.000 description 2
• 229920003023 plastic Polymers 0.000 description 2
• 229920000642 polymer Polymers 0.000 description 2
• HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
• 229910010271 silicon carbide Inorganic materials 0.000 description 2
• LNAZSHAWQACDHT-XIYTZBAFSA-N (2r,3r,4s,5r,6s)-4,5-dimethoxy-2-(methoxymethyl)-3-[(2s,3r,4s,5r,6r)-3,4,5-trimethoxy-6-(methoxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6r)-4,5,6-trimethoxy-2-(methoxymethyl)oxan-3-yl]oxyoxane Chemical compound CO[C@@H]1[C@@H](OC)[C@H](OC)[C@@H](COC)O[C@H]1O[C@H]1[C@H](OC)[C@@H](OC)[C@H](O[C@H]2[C@@H]([C@@H](OC)[C@H](OC)O[C@@H]2COC)OC)O[C@@H]1COC LNAZSHAWQACDHT-XIYTZBAFSA-N 0.000 description 1
• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
• UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
• 229910052684 Cerium Inorganic materials 0.000 description 1
• 229910020632 Co Mn Inorganic materials 0.000 description 1
• 229910020678 Co—Mn Inorganic materials 0.000 description 1
• 229910020707 Co—Pt Inorganic materials 0.000 description 1
• 229910020516 Co—V Inorganic materials 0.000 description 1
• 229910020514 Co—Y Inorganic materials 0.000 description 1
• 239000001856 Ethyl cellulose Substances 0.000 description 1
• ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
• 229910017082 Fe-Si Inorganic materials 0.000 description 1
• 229910002549 Fe–Cu Inorganic materials 0.000 description 1
• 229910017133 Fe—Si Inorganic materials 0.000 description 1
• 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
• 229910018657 Mn—Al Inorganic materials 0.000 description 1
• 229910018054 Ni-Cu Inorganic materials 0.000 description 1
• 239000000020 Nitrocellulose Substances 0.000 description 1
• 229910018481 Ni—Cu Inorganic materials 0.000 description 1
• 229910018605 Ni—Zn Inorganic materials 0.000 description 1
• 239000004952 Polyamide Substances 0.000 description 1
• 239000004697 Polyetherimide Substances 0.000 description 1
• 239000004642 Polyimide Substances 0.000 description 1
• 229920001328 Polyvinylidene chloride Polymers 0.000 description 1
• 229910052777 Praseodymium Inorganic materials 0.000 description 1
• 229910052772 Samarium Inorganic materials 0.000 description 1
• BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
• FJWGYAHXMCUOOM-QHOUIDNNSA-N [(2s,3r,4s,5r,6r)-2-[(2r,3r,4s,5r,6s)-4,5-dinitrooxy-2-(nitrooxymethyl)-6-[(2r,3r,4s,5r,6s)-4,5,6-trinitrooxy-2-(nitrooxymethyl)oxan-3-yl]oxyoxan-3-yl]oxy-3,5-dinitrooxy-6-(nitrooxymethyl)oxan-4-yl] nitrate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](O[N+]([O-])=O)[C@H]1O[N+]([O-])=O)O[C@H]1[C@@H]([C@@H](O[N+]([O-])=O)[C@H](O[N+]([O-])=O)[C@@H](CO[N+]([O-])=O)O1)O[N+]([O-])=O)CO[N+](=O)[O-])[C@@H]1[C@@H](CO[N+]([O-])=O)O[C@@H](O[N+]([O-])=O)[C@H](O[N+]([O-])=O)[C@H]1O[N+]([O-])=O FJWGYAHXMCUOOM-QHOUIDNNSA-N 0.000 description 1
• 230000001133 acceleration Effects 0.000 description 1
• 239000002253 acid Substances 0.000 description 1
• 229910052787 antimony Inorganic materials 0.000 description 1
• 229910052786 argon Inorganic materials 0.000 description 1
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
• 229910052797 bismuth Inorganic materials 0.000 description 1
• 229910002091 carbon monoxide Inorganic materials 0.000 description 1
• 229920002301 cellulose acetate Polymers 0.000 description 1
• NFYLSJDPENHSBT-UHFFFAOYSA-N chromium(3+);lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Cr+3].[La+3] NFYLSJDPENHSBT-UHFFFAOYSA-N 0.000 description 1
• 230000001276 controlling effect Effects 0.000 description 1
• 238000007796 conventional method Methods 0.000 description 1
• 238000001816 cooling Methods 0.000 description 1
• 230000000694 effects Effects 0.000 description 1
• 230000005611 electricity Effects 0.000 description 1
• 229920001249 ethyl cellulose Polymers 0.000 description 1
• 235000019325 ethyl cellulose Nutrition 0.000 description 1
• 239000010408 film Substances 0.000 description 1
• 229910052737 gold Inorganic materials 0.000 description 1
• 229910002804 graphite Inorganic materials 0.000 description 1
• 239000010439 graphite Substances 0.000 description 1
• 239000001257 hydrogen Substances 0.000 description 1
• 229910052739 hydrogen Inorganic materials 0.000 description 1
• 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
• 238000007733 ion plating Methods 0.000 description 1
• 229910052746 lanthanum Inorganic materials 0.000 description 1
• 239000000463 material Substances 0.000 description 1
• 230000007246 mechanism Effects 0.000 description 1
• 239000007769 metal material Substances 0.000 description 1
• 229920000609 methyl cellulose Polymers 0.000 description 1
• 239000001923 methylcellulose Substances 0.000 description 1
• 229910003465 moissanite Inorganic materials 0.000 description 1
• 229910052759 nickel Inorganic materials 0.000 description 1
• 229920001220 nitrocellulos Polymers 0.000 description 1
• 229910052757 nitrogen Inorganic materials 0.000 description 1
• 229910052760 oxygen Inorganic materials 0.000 description 1
• 239000001301 oxygen Substances 0.000 description 1
• 239000000123 paper Substances 0.000 description 1
• FPVKHBSQESCIEP-JQCXWYLXSA-N pentostatin Chemical compound C1[C@H](O)[C@@H](CO)O[C@H]1N1C(N=CNC[C@H]2O)=C2N=C1 FPVKHBSQESCIEP-JQCXWYLXSA-N 0.000 description 1
• 229910052698 phosphorus Inorganic materials 0.000 description 1
• 229920001643 poly(ether ketone) Polymers 0.000 description 1
• 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
• 229920002492 poly(sulfone) Polymers 0.000 description 1
• 229920002647 polyamide Polymers 0.000 description 1
• 239000004417 polycarbonate Substances 0.000 description 1
• 229920000515 polycarbonate Polymers 0.000 description 1
• 229920000728 polyester Polymers 0.000 description 1
• 229920001601 polyetherimide Polymers 0.000 description 1
• 229920000139 polyethylene terephthalate Polymers 0.000 description 1
• 239000005020 polyethylene terephthalate Substances 0.000 description 1
• 229920001721 polyimide Polymers 0.000 description 1
• 239000004926 polymethyl methacrylate Substances 0.000 description 1
• 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
• 239000004810 polytetrafluoroethylene Substances 0.000 description 1
• 239000005033 polyvinylidene chloride Substances 0.000 description 1
• 239000000843 powder Substances 0.000 description 1
• QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 1
• 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
• 229910052703 rhodium Inorganic materials 0.000 description 1
• 239000000523 sample Substances 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 229910052709 silver Inorganic materials 0.000 description 1
• 238000004544 sputter deposition Methods 0.000 description 1
• WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
• 229910052721 tungsten Inorganic materials 0.000 description 1
• 239000010937 tungsten Substances 0.000 description 1
• 229910052720 vanadium Inorganic materials 0.000 description 1
• 238000004804 winding Methods 0.000 description 1
• 239000004711 α-olefin Substances 0.000 description 1