JPH0519746U - Metal diaphragm valve with built-in metal filter - Google Patents

Abstract

(57) [Abstract] [Purpose] The present invention reduces the required space by incorporating the metal diaphragm valve and the metal filter separately manufactured by different specialists into the valve box of the former to reduce the required space, The purpose is to reduce the construction cost per area. [Constitution] The present invention is a metal diaphragm valve 4, 5 which is made of a metal material whose all-contacting gas surface is mirror-finished.
The valve box 1 is characterized in that a metal filter 8 formed only of a metal material is built in.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a metal diaphragm valve with a built-in metal filter, which is mainly applied to an ultra-high purity gas flow system.

[0002]

[Prior Art]

 In the semiconductor industry, there is a demand for downsizing of piping parts and the like in order to improve the tendency of the construction cost per unit floor area to increase along with the improvement of the performance of manufacturing equipment. In the conventional example of No. 1, as shown in FIG. 5, a plurality of valves b and a connecting portion c provided in a valve box a are connected to each other via a flow path d to form one composite valve. There is.

On the other hand, as ultra-high purity gas used with high integration of semiconductor devices has been required to have an impurity concentration of 1 ppb level or less, a valve or a filter installed in its distribution system is required. As will be described later, the piping parts such as are made of metal with a small amount of occluded gas emission on the entire gas contact surface (meaning the entire surface with which the circulating gas comes into contact), and are manufactured separately by their respective specialists. ..

Further, in the current metal diaphragm valve, a small amount of metal particles are generated due to an impact when the diaphragm forming the valve seat and the valve body are closed. In order to prevent these, it was necessary to install a filter on the secondary side of the valve.

That is, a composite of only the same model (valve) as in the first conventional example shown in FIG. 5 can be manufactured by a single manufacturer who specializes in the model. When combining different models manufactured separately such as a filter and a filter, it is necessary to provide a pipe e between the valve b and the filter f as in the second conventional example shown in FIG. ..

[0006]

[Problems to be solved by the device]

 If the pipe e is interposed between the valve b and the filter f as in the second conventional example, a wide space is inevitably required, which in turn increases the construction cost per unit floor area.

[0007] Further, also in the construction work, the number of man-hours required for pipe welding and joint welding is large, and the number of joint connection points is large. Therefore, there is a problem that gas inside the valve may leak to the outside. There is.

The present invention has been made to solve the above problems, and an object of the present invention is to provide a metal diaphragm valve with a built-in metal filter, which requires a small space and helps to reduce the construction cost per unit floor area. To do.

[0009]

[Means for Solving the Problems]

 The present invention is characterized in that a valve box of a metal diaphragm valve whose all-gas contact surface is made of a metal material having a mirror finish has a metal filter made of only a metal material. ..

[0010]

[Action]

 In the above configuration, the metal diaphragm valve is made of a metal material with the gas contact surface that is mirror-finished, and the metal filter built into the valve box is made of only a metal material, so that both are occluded. Since the amount of released gas is small, the concentration of impurities in the ultra high purity gas that is circulated is kept below the 1 ppb level. Moreover, since the metal filter is built into the valve box of the metal diaphragm valve, no piping is required to connect the two, and the equipment is simple and the space required is small.

[0011]

【Example】

 Hereinafter, embodiments of the present invention will be described with reference to FIGS. In FIG. 1, a valve box 1 includes a main body 2 and a filter support portion 3 that is detachably attached to the main body 2. The main body 2 is provided with metal diaphragm valves 4, 5 and connecting portions 6, 7 described later. Further, the filter supporting portion 3 has a metal filter 8 (see FIG. 4) described later built therein and a connecting portion 9 provided therein. That is, the valve box 1 constitutes a valve box common to the metal diaphragm valves 4 and 5 and has the metal filter 8 built therein. As shown in FIG. 2, the flow paths 10 to 13 are provided, and the flow path is formed of an appropriate metal material (for example, SUS316L) that absorbs and releases a small amount of gas, the main body 2, the filter support portion 3, and the connection. All the gas contact surfaces including the parts 6, 7, 9 etc. are mirror-finished with Rmax of 0.5 μm or less.

The metal diaphragm valves 2 and 3 can be brought into and out of contact with the valve seat 14 provided in the valve box 1 as proposed by the present applicant (Japanese Patent Application No. 63-200008, see FIG. 3). The opposing metal diaphragms 15 are provided, and the all-contacting gas surface is made of a metal material having a mirror finish as described above.

The metal filter 8 is the same as that known as a metal filter for ultra-high purity gas, and the surface thereof is slippery from an appropriate metal material (for example, S USF316L) having a small amount of stored and released gas. It is formed into a three-dimensional mesh by the ultrafine wire formed on the sea urchin.

Next, the operation of the above embodiment will be described. When the desired gas flows in from the connecting portion 9, it is filtered by the metal filter 8 and then guided to the metal diaphragm valves 4 and 5, and either or both of the connecting portions 6 and 7 are opened or closed depending on the opening or closing of these. It is leaked from one side. Further, when different gases flow from the connecting portions 6 and 7, the mixed gas or one of the gases passes through the metal filter 8 in response to the opening and closing of the metal diaphragm valves 4 and 5. It flows out from the connection part 9.

Further, since the entire gas contact surface is made of a metal material, and the metal filter 8 has a smooth surface, and the other gas contact surfaces are mirror-finished, it is possible to distribute ultra high It is possible to maintain the impurity concentration of the pure gas below the 1 ppb level.

Moreover, since the metal filter 8 is housed in the valve box 1 together with the metal diaphragm valves 4 and 5, there is no need to intervene pipes to connect the two, and the installation is simple and the space required is small. As a result, the construction cost per unit floor area of the factory can be effectively reduced, and the amount of gas released is further reduced due to the smaller gas contact area, and the amount of gas leakage is also reduced due to the reduction in the number of connections. Decrease.

The present invention is not limited to the above-described embodiments, and the number of metal diaphragm valves, metal filters and connecting portions provided in one valve box can be set appropriately. In addition, various modifications and applications are possible within the scope of the gist of the present invention.

[0018]

[Effect of the device]

 As described above in detail, according to the present invention, the space required is small, the construction cost per unit floor area is reduced, and the amount of released and leaked gas is further reduced, and the metal diaphragm valve with built-in metal filter is more reliable. Can be provided. Further, in the piping system that directly flows into the semiconductor manufacturing process chamber, a filter can be compactly installed on the secondary side of the valve to supply clean gas in which particles are not mixed.

[Brief description of drawings]

FIG. 1 is a side view showing an embodiment of the present invention.

FIG. 2 is a flow diagram of the same embodiment.

FIG. 3 is a sectional view showing a metal diaphragm valve in the same embodiment.

FIG. 4 is a partial cross-sectional view showing an enlarged metal filter and filter support portion in the embodiment.

FIG. 5 is a sectional view showing a first conventional example.

FIG. 6 is a connection diagram showing a second conventional example.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Valve box, 2 ... Main body, 3 ... Filter support part, 4, 5 ... Metal diaphragm valve, 8 ... Metal filter, 10-13
… Flow path.

Claims (1)

[Scope of utility model registration request] 1. A metal diaphragm valve in which all gas contact surfaces are made of a metal material having a mirror finish,
A metal diaphragm valve with a built-in metal filter, wherein a metal filter made of only a metal material is built in the valve box of the metal diaphragm valve.