JPH05195189A - Induction plasma thermal spraying method - Google Patents
Induction plasma thermal spraying methodInfo
- Publication number
- JPH05195189A JPH05195189A JP3208599A JP20859991A JPH05195189A JP H05195189 A JPH05195189 A JP H05195189A JP 3208599 A JP3208599 A JP 3208599A JP 20859991 A JP20859991 A JP 20859991A JP H05195189 A JPH05195189 A JP H05195189A
- Authority
- JP
- Japan
- Prior art keywords
- alumina
- sprayed
- plasma flame
- spraying
- metal plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Plasma Technology (AREA)
- Coating By Spraying Or Casting (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明はインダクションプラズ
マ溶射装置を用いて被溶射物上にアルミナ粉体を溶射す
る方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for spraying alumina powder onto a material to be sprayed by using an induction plasma spraying device.
【０００２】[0002]
【従来の技術】被溶射物としての銅、鉄などの金属板上
にあるアルミナ（Ａｌ2 Ｏ3 ）粉体をインダクションプ
ラズマ溶射装置にて溶射して該金属板上に絶縁性のアル
ミナ皮膜を形成する場合に、従来粉体のα−アルミナは
その熱伝導性を高めるために、約３％の水素を加えたア
ルゴンガスをキャリアガスとして、このキャリアガスに
よってインダクションプラズマ炎に送り込まれ、２００
０〜３０００℃のプラズマ炎の熱によって溶融されて金
属板上に溶射される。2. Description of the Related Art Alumina (Al 2 O 3 ) powder on a metal plate such as copper or iron to be sprayed is sprayed by an induction plasma spraying apparatus to form an insulating alumina film on the metal plate. In the case of forming, conventional powdered α-alumina, in order to enhance its thermal conductivity, is supplied with argon gas containing about 3% of hydrogen as a carrier gas, and is fed into the induction plasma flame by the carrier gas.
It is melted by the heat of the plasma flame of 0 to 3000 ° C. and sprayed on the metal plate.
【０００３】[0003]
【発明が解決しようとする課題】上記のようにして金属
板上に溶射されたアルミナは、溶射終了後の急冷によっ
て、α−アルミナからγ−アルミナに変化してしまう
（溶射法ではα−アルミナは数％で、他はγ−アルミナ
である）。しかしながら、このγ−アルミナは立方晶型
で水に溶けやすく、従ってアルミナを溶射して皮膜を形
成した金属板を絶縁板として半導体装置の基板等に使用
すると、大気中の水分によって絶縁性が阻害されるとい
う問題があった。The alumina sprayed on the metal plate as described above is changed from α-alumina to γ-alumina by the rapid cooling after the completion of the spraying (in the spraying method, α-alumina is used). Is a few% and the other is γ-alumina). However, this γ-alumina is a cubic type and is easily dissolved in water. Therefore, when a metal plate on which alumina is sprayed to form a film is used as a substrate of a semiconductor device as an insulating plate, the insulating property is impeded by moisture in the atmosphere. There was a problem of being done.
【０００４】[0004]
【課題を解決するための手段】この発明は、金属板上に
アルミナ皮膜を溶射にて得る場合の上記従来の問題点を
解消して、水分に侵されない、即ち絶縁性の高い安定し
たアルミナ皮膜を得るべく検討の結果なされたものであ
る。SUMMARY OF THE INVENTION The present invention solves the above-mentioned conventional problems in the case of obtaining an alumina coating on a metal plate by thermal spraying, and prevents the moisture from being attacked, that is, a stable alumina coating having a high insulating property. It was made as a result of examination to obtain
【０００５】即ち、この発明はインダクションプラズマ
溶射装置を用いて被溶射物上にアルミナ粉体を溶射する
に際し、該溶射装置下部の被溶射物を予め２００〜４０
０℃に加熱保持したのち、該被溶射物上にアルミナ粉体
を溶射し、その後アルミナ被覆した被溶射物を徐冷する
ことを特徴とするインダクションプラズマの溶射方法を
提供するものである。That is, according to the present invention, when the alumina powder is sprayed onto the object to be sprayed by using the induction plasma spraying apparatus, the object to be sprayed under the spraying apparatus is preliminarily 200 to 40 times thick.
The present invention provides a method for thermal spraying induction plasma, which comprises heating and holding at 0 ° C., thermal spraying alumina powder onto the thermal spray target, and then gradually cooling the thermal spray target coated with alumina.
【０００６】[0006]
【作用】この発明は、上記のようにインダクションプラ
ズマ溶射によるアルミナ粉体の溶射前に、被溶射物とし
ての金属板（以下、被溶射物を金属板とする）を予め２
００〜４００℃に加熱保持しておくこと、そしてアルミ
ナ粉体を溶射した後の金属板を徐冷すること、が要点で
あり、これによって溶射終了後プラズマ炎の熱がなくな
っても金属板の温度を急激に降下させることがないの
で、溶射されるα−アルミナ粉体がプラズマ炎の高熱に
よってγ−アルミナに変化して溶射されても徐冷によっ
てその８０％以上を三方晶型のα−アルミナに変化させ
ることができ、この結果空気中の水分にも侵されない安
定したアルミナ皮膜を有する金属板が得られるのであ
る。According to the present invention, as described above, before the alumina powder is sprayed by the induction plasma spraying, the metal plate as the sprayed object (hereinafter, the sprayed object is referred to as a metal plate) is preliminarily used.
The main points are to keep the temperature at 00 to 400 ° C., and to gradually cool the metal plate after the alumina powder is sprayed, so that even if the heat of the plasma flame disappears after the spraying ends, Since the temperature does not drop sharply, even if the sprayed α-alumina powder changes to γ-alumina due to the high heat of the plasma flame and is sprayed, 80% or more of that is trigonal α- It can be changed to alumina, and as a result, a metal plate having a stable alumina coating that is not affected by moisture in the air can be obtained.
【０００７】[0007]
【実施例】次に、この発明の一実施例を図により説明す
る。図１は透明石英で形成された外側管１、中間管２、
キャリアガス導入管３からなる三重構造のトーチとその
下方外周に水冷誘導コイル４を設けたこの発明で使用す
るインダクションプラズマ溶射装置であり、この装置の
下部に台座１１上に載置した金属板１０が設置されてい
る。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to the drawings. FIG. 1 shows an outer tube 1, an intermediate tube 2 made of transparent quartz,
A torch having a triple structure composed of a carrier gas introducing pipe 3 and a water cooling induction coil 4 provided on the lower outer periphery thereof is an induction plasma spraying device used in the present invention, and a metal plate 10 placed on a pedestal 11 at the bottom of the device. Is installed.
【０００８】この装置の構造について概略説明すると、
外側管１は下端が開口し、上端が中間管２の上部外周に
結合することで閉じられ、その上端部内に外側ガス供給
路５が接線方向に開口している。中間管２は下端が外側
管１の下端よりも上方に位置し、その下端部外径が拡大
形成されていて、外側管１の内周面との間にガスの速度
を増して冷却効率を高めるため環状の約１ｍｍの小間隙
６を形成し、その上端がキャリアガス導入管３の上部外
周に結合することで閉じられ、その上端部内に中間ガス
供給路７が外側ガス供給路５と同じ周方向に沿うように
接線方向に開口している。キャリアガス導入管３はその
下端部が中間管２内の下端近くに開口しており、上端部
がキャリアガス供給路８となっている。９はプラズマ炎
である。The structure of this device will be briefly described below.
The outer pipe 1 is closed at the lower end and the upper end is joined to the upper outer periphery of the intermediate pipe 2, and the outer gas supply passage 5 is tangentially opened inside the upper end. The lower end of the intermediate pipe 2 is located higher than the lower end of the outer pipe 1, and the outer diameter of the lower end is enlarged. The intermediate pipe 2 and the inner peripheral surface of the outer pipe 1 increase the gas velocity to improve cooling efficiency. An annular small gap 6 of about 1 mm is formed to increase the height, and its upper end is closed by being joined to the outer periphery of the upper part of the carrier gas introducing pipe 3, and the intermediate gas supply passage 7 is the same as the outer gas supply passage 5 in its upper end. It opens tangentially along the circumferential direction. The lower end of the carrier gas introduction pipe 3 is opened near the lower end in the intermediate pipe 2, and the upper end serves as a carrier gas supply passage 8. 9 is a plasma flame.
【０００９】この装置は、プラズマ炎９による高温から
外側管１を冷却するために、外側ガス供給路５から外側
ガスとしてアルゴンまたは窒素ガスを供給し、中間ガス
供給路７からは中間ガスとしてアルゴンを、キャリアガ
ス供給路８からはキャリアガスとしてアルゴンを夫々供
給して誘導コイル４を作動させて使用する。This apparatus supplies argon or nitrogen gas as an outer gas from the outer gas supply passage 5 and argon as an intermediate gas from the intermediate gas supply passage 7 in order to cool the outer pipe 1 from the high temperature caused by the plasma flame 9. Argon is supplied as a carrier gas from the carrier gas supply passage 8 to operate the induction coil 4 for use.
【００１０】外側ガスは、外側管１内に外側ガス供給路
から接線方向に導入されるので、螺旋状に回転しながら
流出する。キャリアガスを流さない状態でプラズマ炎を
発生させると、扁平したフレーム状となるが、キャリア
ガスを流して流量を増加させると、プラズマ炎の中心が
凹状になってくる。この時、セラミックスあるいは金属
などの粉体をキャリアガス供給路内に投入すると、プラ
ズマ炎によって粉体が溶融され、プラズマ炎の下部に設
けられた金属板に溶融された粉体がキャリアガスの力で
溶射され、皮膜が形成される。Since the outer gas is introduced into the outer tube 1 in the tangential direction from the outer gas supply passage, it flows out while rotating spirally. When a plasma flame is generated without flowing the carrier gas, a flat flame shape is formed, but when the flow rate is increased by flowing the carrier gas, the center of the plasma flame becomes concave. At this time, when powder such as ceramics or metal is put into the carrier gas supply passage, the powder is melted by the plasma flame, and the powder melted on the metal plate provided under the plasma flame is generated by the carrier gas. Is sprayed and a film is formed.
【００１１】このような構造の溶射装置にて、この発明
の方法を実施するに当たっては、まず溶射開始前に金属
板１０を載置した鉄板製台座１１をヒータ等（図示せ
ず）にて２００〜４００℃に加熱保持する。次に、装置
に外側ガス、中間ガスとしてアルゴンを、水素ガスを３
〜１０％加えたアルゴンガスをキャリアガスとして供給
し、誘導コイル４に高周波を印加して作動させ、プラズ
マ炎９を発生させると、金属板１０は２０００〜３００
０℃に加熱される。その後、α−アルミナ粉体をキャリ
アガスとともに装置内に投入すると、プラズマ炎９によ
って溶融され、金属板１０上に溶射される。溶射が終了
すると、プラズマ炎の熱がないため、金属板１０の温度
は直ちに降下していくが、金属板１０を載置している台
座１１がヒータ等にて２００〜４００℃に保持されてい
ることと、その熱容量が大きいことから金属板１０も２
００〜４００℃に維持される。その後、台座１１の加熱
を停止すると、徐々に放熱して約１〜２時間で台座１１
は常温に戻る。この間に、台座１１上の金属板１０も台
座の温度下降に対応して徐冷される。In carrying out the method of the present invention in the thermal spraying apparatus having such a structure, first, the iron plate pedestal 11 on which the metal plate 10 is placed before starting thermal spraying is heated by a heater or the like (not shown) to 200 Heat and hold at ~ 400 ° C. Next, the apparatus is provided with an outer gas, argon as an intermediate gas, and hydrogen gas of 3
When the argon gas added with 10% is supplied as a carrier gas and a high frequency is applied to the induction coil 4 to operate it and generate a plasma flame 9, the metal plate 10 is 2000 to 300.
Heat to 0 ° C. After that, when the α-alumina powder is introduced into the apparatus together with the carrier gas, it is melted by the plasma flame 9 and sprayed onto the metal plate 10. When the thermal spraying is completed, the temperature of the metal plate 10 immediately drops because there is no heat of the plasma flame, but the pedestal 11 on which the metal plate 10 is placed is held at 200 to 400 ° C. by a heater or the like. And the large heat capacity of the metal plate 10
The temperature is maintained at 00 to 400 ° C. After that, when the heating of the pedestal 11 is stopped, the heat is gradually dissipated and the pedestal 11 is heated in about 1 to 2 hours.
Returns to room temperature. During this time, the metal plate 10 on the pedestal 11 is also gradually cooled corresponding to the temperature decrease of the pedestal.
【００１２】この結果、この発明の方法では溶射される
α−アルミナ粉体は、溶射時プラズマ炎の熱によってγ
−アルミナに変化して溶射されるが、溶射後の１〜２時
間かけての徐冷によってγ−アルミナはその８０％以上
が三方晶型のα−アルミナに形を変えて金属板上に被覆
される。このため、金属板にはα−アルミナによる熱伝
導性、耐電圧の高い、また空気中の水分にも侵されるこ
とのない絶縁性の高い安定したアルミナ皮膜が得られる
のである。As a result, the α-alumina powder sprayed by the method of the present invention is γ by the heat of the plasma flame during spraying.
-Although it changes to alumina and is sprayed, 80% or more of γ-alumina is transformed into trigonal α-alumina by gradual cooling for 1-2 hours after spraying and is coated on the metal plate. To be done. Therefore, a stable alumina film having a high thermal conductivity and a high withstand voltage due to α-alumina and a high insulating property which is not affected by moisture in the air can be obtained on the metal plate.
【００１３】[0013]
【発明の効果】以上説明したように、この発明の方法は
被溶射物である金属板を予め２００〜４００℃に保持
し、α−アルミナ粉体がγ−アルミナの形に変わって金
属板上に溶射された後、金属板を徐冷することによって
γ−アルミナをα−アルミナの形に変えて皮膜として形
成するものであり、熱伝導性、耐電圧が高く、絶縁性に
すぐれているので、この金属板は半導体装置用基板とし
て特に有用である。As described above, according to the method of the present invention, the metal plate, which is the object to be sprayed, is kept at 200 to 400 ° C. in advance, and the α-alumina powder is changed to the form of γ-alumina, and the After being sprayed on, the metal plate is gradually cooled to form γ-alumina in the form of α-alumina to form a film, which has high thermal conductivity, high withstand voltage, and excellent insulating properties. This metal plate is particularly useful as a substrate for semiconductor devices.
【図１】この発明の方法で用いるインダクションプラズ
マ溶射装置の断面図である。FIG. 1 is a sectional view of an induction plasma spraying apparatus used in the method of the present invention.
１ 外側管 ２ 中間管 ３ キャリアガス導入管 ４ 誘導コイル ９ プラズマ炎 １０ 被溶射物 １１ 台座 1 Outer Tube 2 Intermediate Tube 3 Carrier Gas Introducing Tube 4 Induction Coil 9 Plasma Flame 10 Thermal Sprayed Object 11 Pedestal
───────────────────────────────────────────────────── フロントページの続き (72)発明者 エミリオ 藤原 大阪府大阪市東淀川区淡路２丁目14番３号 株式会社三社電機製作所内 (72)発明者 村田 裕康 大阪府大阪市東淀川区淡路２丁目14番３号 株式会社三社電機製作所内 (72)発明者 橘 秀久 大阪府大阪市東淀川区淡路２丁目14番３号 株式会社三社電機製作所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Emilio Fujiwara 2-14-3 Awaji, Higashiyodogawa-ku, Osaka-shi, Osaka Prefecture Sansha Electric Manufacturing Co., Ltd. (72) Hiroyasu Murata 2-chome, Awaji, Higashi-yodogawa-ku, Osaka Sanyo Denki Seisakusho Co., Ltd. (72) Inventor Hidehisa Tachibana 2-14-3 Awaji, Higashiyodogawa-ku, Osaka-shi, Osaka
Claims (1)
て被溶射物上にアルミナ粉体を溶射するに際し、該溶射
装置下部の被溶射物を予め２００〜４００℃に加熱保持
したのち、該被溶射物上にアルミナ粉体を溶射し、その
後アルミナ被覆した被溶射物を徐冷することを特徴とす
るインダクションプラズマ溶射方法。1. When thermally spraying alumina powder onto an object to be sprayed by using an induction plasma spraying apparatus, the object to be sprayed under the thermal spraying apparatus is heated and held in advance at 200 to 400 ° C., and then on the object to be sprayed. 1. An induction plasma spraying method, which comprises spraying an alumina powder on a substrate, and then gradually cooling the sprayed object coated with alumina.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3208599A JPH0713289B2 (en) | 1991-07-24 | 1991-07-24 | Induction plasma spraying method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3208599A JPH0713289B2 (en) | 1991-07-24 | 1991-07-24 | Induction plasma spraying method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05195189A true JPH05195189A (en) | 1993-08-03 |
| JPH0713289B2 JPH0713289B2 (en) | 1995-02-15 |
Family
ID=16558877
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3208599A Expired - Fee Related JPH0713289B2 (en) | 1991-07-24 | 1991-07-24 | Induction plasma spraying method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0713289B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011129731A (en) * | 2009-12-18 | 2011-06-30 | Fuji Electric Co Ltd | Wiring board, method of manufacturing the same, and semiconductor module |
| KR101157707B1 (en) * | 2003-05-12 | 2012-06-20 | 신에쓰 가가꾸 고교 가부시끼가이샤 | Plasma-resistant member and method of producing the same |
| WO2018088252A1 (en) * | 2016-11-10 | 2018-05-17 | 東京エレクトロン株式会社 | Plasma thermal spray device and thermal spray control method |
-
1991
- 1991-07-24 JP JP3208599A patent/JPH0713289B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101157707B1 (en) * | 2003-05-12 | 2012-06-20 | 신에쓰 가가꾸 고교 가부시끼가이샤 | Plasma-resistant member and method of producing the same |
| JP2011129731A (en) * | 2009-12-18 | 2011-06-30 | Fuji Electric Co Ltd | Wiring board, method of manufacturing the same, and semiconductor module |
| WO2018088252A1 (en) * | 2016-11-10 | 2018-05-17 | 東京エレクトロン株式会社 | Plasma thermal spray device and thermal spray control method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0713289B2 (en) | 1995-02-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 19960109 |