JPH0518918B2 - - Google Patents
Info
- Publication number
- JPH0518918B2 JPH0518918B2 JP23006583A JP23006583A JPH0518918B2 JP H0518918 B2 JPH0518918 B2 JP H0518918B2 JP 23006583 A JP23006583 A JP 23006583A JP 23006583 A JP23006583 A JP 23006583A JP H0518918 B2 JPH0518918 B2 JP H0518918B2
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- current
- metal
- electrolytic polishing
- solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 claims description 36
- 238000005202 decontamination Methods 0.000 claims description 30
- 230000003588 decontaminative effect Effects 0.000 claims description 28
- 238000005498 polishing Methods 0.000 claims description 24
- 229910052751 metal Inorganic materials 0.000 claims description 23
- 239000002184 metal Substances 0.000 claims description 23
- 230000010287 polarization Effects 0.000 claims description 22
- 230000000737 periodic effect Effects 0.000 claims description 17
- 239000008151 electrolyte solution Substances 0.000 claims description 11
- 229910044991 metal oxide Inorganic materials 0.000 claims description 11
- 150000004706 metal oxides Chemical class 0.000 claims description 11
- 239000000243 solution Substances 0.000 claims description 10
- 230000008569 process Effects 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims 1
- 239000000523 sample Substances 0.000 description 27
- 238000005259 measurement Methods 0.000 description 17
- 239000010410 layer Substances 0.000 description 12
- 238000012544 monitoring process Methods 0.000 description 12
- 238000010586 diagram Methods 0.000 description 11
- 238000005260 corrosion Methods 0.000 description 8
- 230000007797 corrosion Effects 0.000 description 8
- 238000005868 electrolysis reaction Methods 0.000 description 8
- 230000004044 response Effects 0.000 description 7
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 239000003792 electrolyte Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 239000010814 metallic waste Substances 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000013074 reference sample Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 230000001052 transient effect Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 150000001450 anions Chemical class 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000011088 calibration curve Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011038 discontinuous diafiltration by volume reduction Methods 0.000 description 1
- 238000004043 dyeing Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000036284 oxygen consumption Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000003449 preventive effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007634 remodeling Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910052938 sodium sulfate Inorganic materials 0.000 description 1
- 235000011152 sodium sulphate Nutrition 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 230000004580 weight loss Effects 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23006583A JPS60121300A (ja) | 1983-12-06 | 1983-12-06 | 金属酸化皮膜の検出方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23006583A JPS60121300A (ja) | 1983-12-06 | 1983-12-06 | 金属酸化皮膜の検出方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60121300A JPS60121300A (ja) | 1985-06-28 |
| JPH0518918B2 true JPH0518918B2 (OSRAM) | 1993-03-15 |
Family
ID=16901992
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23006583A Granted JPS60121300A (ja) | 1983-12-06 | 1983-12-06 | 金属酸化皮膜の検出方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60121300A (OSRAM) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2699028B2 (ja) * | 1991-02-22 | 1998-01-19 | 大日本スクリーン製造株式会社 | 面出し方法及び装置 |
-
1983
- 1983-12-06 JP JP23006583A patent/JPS60121300A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60121300A (ja) | 1985-06-28 |
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