JPH0518720Y2 - - Google Patents

Info

Publication number
JPH0518720Y2
JPH0518720Y2 JP19290387U JP19290387U JPH0518720Y2 JP H0518720 Y2 JPH0518720 Y2 JP H0518720Y2 JP 19290387 U JP19290387 U JP 19290387U JP 19290387 U JP19290387 U JP 19290387U JP H0518720 Y2 JPH0518720 Y2 JP H0518720Y2
Authority
JP
Japan
Prior art keywords
scanning
electron beam
window
scan
foil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP19290387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0197300U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19290387U priority Critical patent/JPH0518720Y2/ja
Publication of JPH0197300U publication Critical patent/JPH0197300U/ja
Application granted granted Critical
Publication of JPH0518720Y2 publication Critical patent/JPH0518720Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Recrystallisation Techniques (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP19290387U 1987-12-18 1987-12-18 Expired - Lifetime JPH0518720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19290387U JPH0518720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-12-18 1987-12-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19290387U JPH0518720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-12-18 1987-12-18

Publications (2)

Publication Number Publication Date
JPH0197300U JPH0197300U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-06-28
JPH0518720Y2 true JPH0518720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-05-18

Family

ID=31483730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19290387U Expired - Lifetime JPH0518720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-12-18 1987-12-18

Country Status (1)

Country Link
JP (1) JPH0518720Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH0197300U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-06-28

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