JPH0518330B2 - - Google Patents

Info

Publication number
JPH0518330B2
JPH0518330B2 JP8307688A JP8307688A JPH0518330B2 JP H0518330 B2 JPH0518330 B2 JP H0518330B2 JP 8307688 A JP8307688 A JP 8307688A JP 8307688 A JP8307688 A JP 8307688A JP H0518330 B2 JPH0518330 B2 JP H0518330B2
Authority
JP
Japan
Prior art keywords
electrode
plasma
grounded
grounded electrode
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP8307688A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01256541A (ja
Inventor
Yoshikazu Kondo
Yukio Tsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kanebo Ltd
Original Assignee
Kanebo Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kanebo Ltd filed Critical Kanebo Ltd
Priority to JP63083076A priority Critical patent/JPH01256541A/ja
Priority to US07/214,179 priority patent/US4968918A/en
Priority to DE3887933T priority patent/DE3887933T2/de
Priority to EP88110707A priority patent/EP0298420B1/en
Priority to KR1019880008345A priority patent/KR950001541B1/ko
Publication of JPH01256541A publication Critical patent/JPH01256541A/ja
Publication of JPH0518330B2 publication Critical patent/JPH0518330B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treatment Of Fiber Materials (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP63083076A 1987-07-06 1988-04-06 プラズマ処理装置 Granted JPH01256541A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP63083076A JPH01256541A (ja) 1988-04-06 1988-04-06 プラズマ処理装置
US07/214,179 US4968918A (en) 1987-07-06 1988-07-01 Apparatus for plasma treatment
DE3887933T DE3887933T2 (de) 1987-07-06 1988-07-05 Plasma-Bearbeitungsgerät.
EP88110707A EP0298420B1 (en) 1987-07-06 1988-07-05 Apparatus for plasma treatment
KR1019880008345A KR950001541B1 (ko) 1987-07-06 1988-07-06 플라즈마처리용 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63083076A JPH01256541A (ja) 1988-04-06 1988-04-06 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPH01256541A JPH01256541A (ja) 1989-10-13
JPH0518330B2 true JPH0518330B2 (enrdf_load_html_response) 1993-03-11

Family

ID=13792085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63083076A Granted JPH01256541A (ja) 1987-07-06 1988-04-06 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPH01256541A (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPH01256541A (ja) 1989-10-13

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