JPH0518055B2 - - Google Patents

Info

Publication number
JPH0518055B2
JPH0518055B2 JP60121725A JP12172585A JPH0518055B2 JP H0518055 B2 JPH0518055 B2 JP H0518055B2 JP 60121725 A JP60121725 A JP 60121725A JP 12172585 A JP12172585 A JP 12172585A JP H0518055 B2 JPH0518055 B2 JP H0518055B2
Authority
JP
Japan
Prior art keywords
gas
flow path
gas flow
concentration
raw material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP60121725A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61280556A (ja
Inventor
Sukeyuki Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON TYLAN KK
Original Assignee
NIPPON TYLAN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON TYLAN KK filed Critical NIPPON TYLAN KK
Priority to JP12172585A priority Critical patent/JPS61280556A/ja
Publication of JPS61280556A publication Critical patent/JPS61280556A/ja
Publication of JPH0518055B2 publication Critical patent/JPH0518055B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Chemical Vapour Deposition (AREA)
JP12172585A 1985-06-05 1985-06-05 ガス濃度測定装置 Granted JPS61280556A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12172585A JPS61280556A (ja) 1985-06-05 1985-06-05 ガス濃度測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12172585A JPS61280556A (ja) 1985-06-05 1985-06-05 ガス濃度測定装置

Publications (2)

Publication Number Publication Date
JPS61280556A JPS61280556A (ja) 1986-12-11
JPH0518055B2 true JPH0518055B2 (enrdf_load_stackoverflow) 1993-03-10

Family

ID=14818333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12172585A Granted JPS61280556A (ja) 1985-06-05 1985-06-05 ガス濃度測定装置

Country Status (1)

Country Link
JP (1) JPS61280556A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024182315A1 (en) * 2023-03-02 2024-09-06 Lam Research Corporation Flow-over-vapor precursor delivery

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50126293U (enrdf_load_stackoverflow) * 1974-03-30 1975-10-16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024182315A1 (en) * 2023-03-02 2024-09-06 Lam Research Corporation Flow-over-vapor precursor delivery

Also Published As

Publication number Publication date
JPS61280556A (ja) 1986-12-11

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