JPH0518055B2 - - Google Patents

Info

Publication number
JPH0518055B2
JPH0518055B2 JP60121725A JP12172585A JPH0518055B2 JP H0518055 B2 JPH0518055 B2 JP H0518055B2 JP 60121725 A JP60121725 A JP 60121725A JP 12172585 A JP12172585 A JP 12172585A JP H0518055 B2 JPH0518055 B2 JP H0518055B2
Authority
JP
Japan
Prior art keywords
gas
flow path
gas flow
concentration
raw material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP60121725A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61280556A (ja
Inventor
Sukeyuki Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON TYLAN KK
Original Assignee
NIPPON TYLAN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON TYLAN KK filed Critical NIPPON TYLAN KK
Priority to JP12172585A priority Critical patent/JPS61280556A/ja
Publication of JPS61280556A publication Critical patent/JPS61280556A/ja
Publication of JPH0518055B2 publication Critical patent/JPH0518055B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Chemical Vapour Deposition (AREA)
JP12172585A 1985-06-05 1985-06-05 ガス濃度測定装置 Granted JPS61280556A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12172585A JPS61280556A (ja) 1985-06-05 1985-06-05 ガス濃度測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12172585A JPS61280556A (ja) 1985-06-05 1985-06-05 ガス濃度測定装置

Publications (2)

Publication Number Publication Date
JPS61280556A JPS61280556A (ja) 1986-12-11
JPH0518055B2 true JPH0518055B2 (enrdf_load_html_response) 1993-03-10

Family

ID=14818333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12172585A Granted JPS61280556A (ja) 1985-06-05 1985-06-05 ガス濃度測定装置

Country Status (1)

Country Link
JP (1) JPS61280556A (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024182315A1 (en) * 2023-03-02 2024-09-06 Lam Research Corporation Flow-over-vapor precursor delivery

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50126293U (enrdf_load_html_response) * 1974-03-30 1975-10-16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024182315A1 (en) * 2023-03-02 2024-09-06 Lam Research Corporation Flow-over-vapor precursor delivery

Also Published As

Publication number Publication date
JPS61280556A (ja) 1986-12-11

Similar Documents

Publication Publication Date Title
US4341107A (en) Calibratable system for measuring fluid flow
US3650151A (en) Fluid flow measuring system
US4852389A (en) System for controlled humidity tests
US5265463A (en) Apparatus for measuring the transmission rate of volatile organic chemicals through a barrier material
JPS6291861A (ja) 化学的モニタのオンライン較正装置
WO2004066048A1 (ja) クラスター化する流体の流量制御方法及びこれに用いるクラスター化する流体用の流量制御装置
US2960870A (en) Method and apparatus for determination of surface areas
US5055260A (en) Reactor analysis system
JPH0535225B2 (enrdf_load_html_response)
JPH03262926A (ja) 水蒸気流量測定装置
EP0829793A1 (en) Method for momentarily identifying a gas or liquid flow, and device for carrying out the method
US3460909A (en) Catalytic combustion detector for gas chromatography
JPH08505468A (ja) ガスの発熱量および／または天然ガスのウォッベ指数の測定方法
JP3230431B2 (ja) ガス測定装置
JPH11512175A (ja) 液体または気体の揮発性成分または溶解成分の取出し及び定量のための装置及び方法
JPH0518055B2 (enrdf_load_html_response)
CN111013415A (zh) 基于温度控制的标准气体发生系统
JP2946800B2 (ja) 炭酸ガス測定装置
US5312761A (en) Method for measuring trace quantity of oxygen in gas
US3435678A (en) Apparatus for flow monitoring
JP3114137B2 (ja) 熱伝導率式ガス濃度分析計
JPH08254523A (ja) 試料の酸素透過性を測定するための測定装置および方法
SU1045083A1 (ru) Способ определени проницаемости полимерной мембраны
JPH02268826A (ja) 気化ガスの流量制御装置
JPS59185772A (ja) 高融点金属化合物における蒸発ガスの流量制御装置

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees