JPH0517476B2 - - Google Patents

Info

Publication number
JPH0517476B2
JPH0517476B2 JP61130609A JP13060986A JPH0517476B2 JP H0517476 B2 JPH0517476 B2 JP H0517476B2 JP 61130609 A JP61130609 A JP 61130609A JP 13060986 A JP13060986 A JP 13060986A JP H0517476 B2 JPH0517476 B2 JP H0517476B2
Authority
JP
Japan
Prior art keywords
chamber
processing
bestible
processing chamber
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61130609A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62288489A (ja
Inventor
Tadayuki Choshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chugai Ro Co Ltd
Original Assignee
Chugai Ro Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chugai Ro Co Ltd filed Critical Chugai Ro Co Ltd
Priority to JP13060986A priority Critical patent/JPS62288489A/ja
Publication of JPS62288489A publication Critical patent/JPS62288489A/ja
Publication of JPH0517476B2 publication Critical patent/JPH0517476B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Tunnel Furnaces (AREA)
JP13060986A 1986-06-04 1986-06-04 多室式竪型加圧雰囲気炉 Granted JPS62288489A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13060986A JPS62288489A (ja) 1986-06-04 1986-06-04 多室式竪型加圧雰囲気炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13060986A JPS62288489A (ja) 1986-06-04 1986-06-04 多室式竪型加圧雰囲気炉

Publications (2)

Publication Number Publication Date
JPS62288489A JPS62288489A (ja) 1987-12-15
JPH0517476B2 true JPH0517476B2 (enrdf_load_html_response) 1993-03-09

Family

ID=15038308

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13060986A Granted JPS62288489A (ja) 1986-06-04 1986-06-04 多室式竪型加圧雰囲気炉

Country Status (1)

Country Link
JP (1) JPS62288489A (enrdf_load_html_response)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS536085A (en) * 1976-07-06 1978-01-20 Mitsubishi Electric Corp Digital temperature display device
US4756815A (en) * 1979-12-21 1988-07-12 Varian Associates, Inc. Wafer coating system
JPS5812983A (ja) * 1981-07-15 1983-01-25 株式会社ヤマザキ電機 連続加熱炉
JPS6176876A (ja) * 1984-09-19 1986-04-19 株式会社神戸製鋼所 ロ−タリ式連続熱間静水圧加圧設備

Also Published As

Publication number Publication date
JPS62288489A (ja) 1987-12-15

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