JPH0517150Y2 - - Google Patents

Info

Publication number
JPH0517150Y2
JPH0517150Y2 JP1986196799U JP19679986U JPH0517150Y2 JP H0517150 Y2 JPH0517150 Y2 JP H0517150Y2 JP 1986196799 U JP1986196799 U JP 1986196799U JP 19679986 U JP19679986 U JP 19679986U JP H0517150 Y2 JPH0517150 Y2 JP H0517150Y2
Authority
JP
Japan
Prior art keywords
oven
plasma
vacuum container
view
electromagnetic waves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986196799U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63103738U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986196799U priority Critical patent/JPH0517150Y2/ja
Publication of JPS63103738U publication Critical patent/JPS63103738U/ja
Application granted granted Critical
Publication of JPH0517150Y2 publication Critical patent/JPH0517150Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
JP1986196799U 1986-12-23 1986-12-23 Expired - Lifetime JPH0517150Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986196799U JPH0517150Y2 (enExample) 1986-12-23 1986-12-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986196799U JPH0517150Y2 (enExample) 1986-12-23 1986-12-23

Publications (2)

Publication Number Publication Date
JPS63103738U JPS63103738U (enExample) 1988-07-05
JPH0517150Y2 true JPH0517150Y2 (enExample) 1993-05-10

Family

ID=31155935

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986196799U Expired - Lifetime JPH0517150Y2 (enExample) 1986-12-23 1986-12-23

Country Status (1)

Country Link
JP (1) JPH0517150Y2 (enExample)

Also Published As

Publication number Publication date
JPS63103738U (enExample) 1988-07-05

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