JPH05171439A - Vacuum window - Google Patents
Vacuum windowInfo
- Publication number
- JPH05171439A JPH05171439A JP3355128A JP35512891A JPH05171439A JP H05171439 A JPH05171439 A JP H05171439A JP 3355128 A JP3355128 A JP 3355128A JP 35512891 A JP35512891 A JP 35512891A JP H05171439 A JPH05171439 A JP H05171439A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- window
- metal
- window material
- bonding metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/004—Sight-glasses therefor
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、真空装置の内部観察
用などとして用いられる真空窓に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum window used for observing the inside of a vacuum device.
【０００２】[0002]
【従来の技術】従来、真空装置の内部観察や、光その他
の電磁波照射を行う為の真空窓は、石英などの透光性窓
材と封着用金属で構成し、封着用金属をステンレス製等
のフランジに溶接するようにしていた。透光性窓材とス
テンレスは、線膨張率の差が大きく、直接、封着（金属
と窓材の接する部分を加熱することで、両者の原子を相
互に拡散させて真空封止することを言う。）することが
できなかったためである。2. Description of the Related Art Conventionally, a vacuum window for observing the inside of a vacuum device and for irradiating light and other electromagnetic waves is composed of a transparent window material such as quartz and a sealing metal, and the sealing metal is made of stainless steel or the like. It was to be welded to the flange. There is a large difference in linear expansion coefficient between the translucent window material and stainless steel, and it is directly sealed (by heating the portion where the metal and the window material are in contact with each other, the atoms of the both are mutually diffused and vacuum sealed. Because I couldn't do it.
【０００３】例えば、透光性窓材をコバールガラスとす
る場合には、封着用金属としてコバール合金を使用し、
コバールガラスの周縁部とコバール合金製の筒状金物の
端縁部を封着し、筒状金物の他端縁部をステンレス製の
フランジに溶接していた。For example, when the translucent window material is Kovar glass, Kovar alloy is used as the metal for sealing,
The peripheral edge of the Kovar glass and the edge of the tubular metal article made of Kovar alloy were sealed, and the other edge of the tubular metal article was welded to a stainless steel flange.
【０００４】また、紫外線を透過する石英を透光性窓材
とする場合には、石英とコバール合金の線膨張率の差が
大きいので、図５に示したように、石英２１とコバール
合金製の筒状金物２２の間に、線膨張率が僅かずつ異な
る、ガラス筒２３、２４、２５を介在させて、線膨張率
の差を吸収するようにしていた。すなわち、図５の場
合、筒状金物２２に封着したコバールガラスでなるガラ
ス筒２３に対して、コバールガラスの線膨張率に近く、
僅かに石英の線膨張率側に異なるガラス（中間ガラス）
でなるガラス筒２４を封着し、次いでこのガラス筒２４
に対して、ガラス筒２４のガラスの線膨張率に近く、僅
かに石英の線膨張率側に異なるガラス（中間ガラス）で
なるガラス筒２５を封着し、このガラス筒２５と石英２
１を封着していた。When quartz that transmits ultraviolet rays is used as a light-transmissive window material, since the difference in linear expansion coefficient between quartz and Kovar alloy is large, as shown in FIG. 5, quartz 21 and Kovar alloy are used. Glass cylinders 23, 24, and 25 having linear expansion coefficients slightly different from each other are interposed between the cylindrical metal articles 22 to absorb the difference in linear expansion coefficient. That is, in the case of FIG. 5, the linear expansion coefficient of Kovar glass is close to that of the glass tube 23 made of Kovar glass sealed in the tubular metal member 22,
Glass slightly different in the linear expansion coefficient side of quartz (intermediate glass)
The glass tube 24 is sealed and then the glass tube 24
On the other hand, a glass tube 25 made of different glass (intermediate glass) is sealed on the side of the linear expansion coefficient of quartz which is close to the linear expansion coefficient of the glass of the glass tube 24.
1 was sealed.
【０００５】[0005]
【発明が解決しようとする課題】前記のように、従来の
真空窓では、透光性窓材として石英を用いた場合、複数
種のガラスによる筒体を順次連ねた構造となるので、フ
ランジの外部にガラス部分が突出せざるを得ず、不意に
ガラス部分に応力（圧力差や外力による）が加わって破
壊し易い欠点があった。As described above, in the conventional vacuum window, when quartz is used as the light-transmissive window material, the structure is such that the cylindrical bodies made of a plurality of kinds of glass are sequentially connected. There is a drawback that the glass portion is forced to project to the outside, and stress (due to pressure difference or external force) is abruptly applied to the glass portion to easily break the glass portion.
【０００６】また、製造上も、複数種のガラスを順次封
着しなければならないので、工程が多く、また熟練を要
する欠点があった。Further, in manufacturing, a plurality of types of glass must be sequentially sealed, so that there are drawbacks that the number of steps is large and skill is required.
【０００７】[0007]
【課題を解決する為の手段】この発明は前記の如くの構
造上および製造上の問題点に鑑みてなされたもので、堅
牢性があり、かつ製造容易な真空窓を提供することを目
的としている。SUMMARY OF THE INVENTION The present invention has been made in view of the above structural and manufacturing problems, and an object thereof is to provide a vacuum window which is robust and easy to manufacture. There is.
【０００８】斯る目的を達成するこの発明の真空窓は、
透光性窓材と封着用金属でなる真空窓において、石英製
の透光性窓材の真空封止部分に付着させた金属膜と、コ
バール合金製の封着用金属の真空封止部分に付着させた
金属膜を介して、透光性窓材に封着用金属が焼嵌めされ
ていることを特徴としている。The vacuum window of the present invention which achieves such an object is
In a vacuum window consisting of a translucent window material and a sealing metal, a metal film attached to the vacuum sealing part of a quartz translucent window material and a vacuum sealing part of a Kovar alloy sealing metal The sealing metal is shrink-fitted to the translucent window material through the metal film.
【０００９】透光性窓材および封着用金属に付着させた
金属膜は、金、銀、ニッケル、鉄、アルミニウム、イン
ジウム、又はコバール合金とするもので、蒸着法、スパ
ッタリング法、メッキ法などにより形成する。The metal film attached to the translucent window material and the metal for sealing is made of gold, silver, nickel, iron, aluminum, indium, or Kovar alloy, and is formed by a vapor deposition method, a sputtering method, a plating method or the like. Form.
【００１０】[0010]
【作用】この発明の真空窓によれば、透光性窓材に封着
用金属を焼嵌めたので、両部材に付着させた金属膜が、
融合又は合金化して接着し、該部が真空封止される。According to the vacuum window of the present invention, since the sealing metal is shrink-fitted to the translucent window material, the metal film adhered to both members is
It is fused or alloyed and adhered, and the portion is vacuum-sealed.
【００１１】[0011]
【実施例】以下、この発明の実施例を図を参照して説明
する。図１はステンレス製のフランジ１に取付けた実施
例の真空窓２で、円盤状とした石英製の透光性窓材３
に、筒状としたコバール合金製の封着用金属４が焼嵌め
てある。前記透光性窓材３の周面には、図２に示したよ
うに予め蒸着法（スパッタリング法でも可能）で、金薄
膜５が約１μm の厚さで付着してある一方、封着用金属
４の筒状部内面にも、図３に示したように予め蒸着法
（スパッタリング法やメッキ法でも可能）で、金薄膜６
が約１μm の厚さで付着してあり、これらを加熱した
後、図４のように透光性窓材３の外側に封着用金属４を
焼嵌めたもので、封着用金属４とフランジ１は溶接７に
よって結合してある。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows a vacuum window 2 of an embodiment attached to a flange 1 made of stainless steel, which is a disk-shaped transparent window material 3 made of quartz.
The tubular sealing metal 4 made of Kovar alloy is shrink-fitted. As shown in FIG. 2, a gold thin film 5 is attached to the peripheral surface of the translucent window material 3 in advance by vapor deposition (sputtering is also possible) to a thickness of about 1 μm, while metal for sealing is used. As shown in FIG. 3, the gold thin film 6 was previously formed on the inner surface of the cylindrical portion of No. 4 by vapor deposition (sputtering or plating is also possible).
Is adhered in a thickness of about 1 μm, and after heating these, the sealing metal 4 is shrink-fitted on the outside of the translucent window material 3 as shown in FIG. Are joined by welds 7.
【００１２】透光性窓材３と封着用金属４の当接部分
は、焼嵌めによって金薄膜５、６が互いに融合する結
果、該部が真空封止されている。The contact portions of the translucent window material 3 and the sealing metal 4 are vacuum-sealed as a result of the gold thin films 5 and 6 being fused together by shrink fitting.
【００１３】前記金薄膜５、６は、銀、ニッケル、鉄、
アルミニウム、インジウム又はコバール合金の薄膜とす
ることもできる。また、透光性窓材３側に付着する薄膜
と封着用金属４側に付着する薄膜は同一金属とするのが
望ましいが、異なる金属とし、焼嵌めによって合金化さ
せて真空封止することもできる。The gold thin films 5 and 6 are made of silver, nickel, iron,
It can also be a thin film of aluminum, indium or Kovar alloy. The thin film attached to the transparent window material 3 side and the thin film attached to the sealing metal 4 side are preferably the same metal, but they may be different metals and may be alloyed by shrink fitting and vacuum sealed. it can.
【００１４】更に、焼嵌め後に、透光性窓材３と封着用
金属４の当接部分を高温に加熱して、金属相互の融合化
または合金化を促進させるようにすることもできる。Further, after the shrink fitting, the abutting portion of the translucent window material 3 and the metal 4 for sealing may be heated to a high temperature to promote the fusion or alloying of the metals.
【００１５】実施例の真空窓２によれば、複数種のガラ
スを連ねる必要がなく、また、透光性窓材３がフランジ
１より外部に突出しないようにできるので、破壊し難い
真空窓とすることができる。また、製造上も、焼嵌め工
程だけとできるので、簡単に、かつ熟練を要することな
く製造することができる。According to the vacuum window 2 of the embodiment, it is not necessary to connect a plurality of kinds of glass, and since the translucent window material 3 can be prevented from protruding to the outside of the flange 1, it is a vacuum window which is not easily broken. can do. Moreover, since only the shrink fitting step can be performed in manufacturing, the manufacturing can be performed easily and without skill.
【００１６】[0016]
【発明の効果】以上に説明したように、この発明によれ
ば、堅牢性があり、かつ製造容易な真空窓を提供できる
効果がある。As described above, according to the present invention, it is possible to provide a vacuum window which is robust and easy to manufacture.
【図１】この発明の実施例をフランジに取付けた状態の
断面図である。FIG. 1 is a cross-sectional view of a state in which an embodiment of the present invention is attached to a flange.
【図２】同じく実施例の透光性窓材の斜視図である。FIG. 2 is a perspective view of a translucent window material of the same example.
【図３】同じく実施例の封着用金属の斜視図である。FIG. 3 is a perspective view of the same metal for sealing according to the embodiment.
【図４】同じく実施例の断面図である。FIG. 4 is a sectional view of the same embodiment.
【図５】従来の真空窓の断面概略図である。FIG. 5 is a schematic sectional view of a conventional vacuum window.
１ フランジ ２ 真空窓 ３ 透光性窓材 ４ 封着用金属 ５、６ 金薄膜 1 flange 2 vacuum window 3 translucent window material 4 metal for sealing 5, 6 gold thin film
Claims (2)
において、石英製の透光性窓材の真空封止部分に付着さ
せた金属膜と、コバール合金製の封着用金属の真空封止
部分に付着させた金属膜を介して、透光性窓材に封着用
金属が焼嵌めされていることを特徴とする真空窓。1. A vacuum window made of a translucent window material and a sealing metal, wherein a metal film attached to a vacuum-sealed portion of a quartz translucent window material and a vacuum of a Kovar alloy sealing metal. A vacuum window in which a metal for sealing is shrink-fitted to a translucent window material through a metal film attached to a sealing portion.
ミニウム、インジウム又はコバール合金膜とした請求項
１記載の真空窓。2. The vacuum window according to claim 1, wherein the metal film is a gold, silver, nickel, iron, aluminum, indium or kovar alloy film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP35512891A JP3286735B2 (en) | 1991-12-20 | 1991-12-20 | Vacuum window |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP35512891A JP3286735B2 (en) | 1991-12-20 | 1991-12-20 | Vacuum window |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05171439A true JPH05171439A (en) | 1993-07-09 |
| JP3286735B2 JP3286735B2 (en) | 2002-05-27 |
Family
ID=18442108
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP35512891A Expired - Fee Related JP3286735B2 (en) | 1991-12-20 | 1991-12-20 | Vacuum window |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3286735B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100364707C (en) * | 2006-03-24 | 2008-01-30 | 中国科学院上海技术物理研究所 | Vacuum seal welding method for window and optic window of low temperature metal Dewar |
| JP2008184691A (en) * | 2008-03-26 | 2008-08-14 | Kyocera Corp | Sight glass of vacuum vessel and vacuum vessel |
| EP2084360A1 (en) * | 2006-10-27 | 2009-08-05 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Method for armouring a window |
| CN110398168A (en) * | 2019-07-10 | 2019-11-01 | 中国科学院上海技术物理研究所 | A kind of heat exchanger with observation window for 80K low temperature |
-
1991
- 1991-12-20 JP JP35512891A patent/JP3286735B2/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100364707C (en) * | 2006-03-24 | 2008-01-30 | 中国科学院上海技术物理研究所 | Vacuum seal welding method for window and optic window of low temperature metal Dewar |
| EP2084360A1 (en) * | 2006-10-27 | 2009-08-05 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Method for armouring a window |
| EP2084360B1 (en) * | 2006-10-27 | 2017-12-06 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Method for armouring a window |
| JP2008184691A (en) * | 2008-03-26 | 2008-08-14 | Kyocera Corp | Sight glass of vacuum vessel and vacuum vessel |
| CN110398168A (en) * | 2019-07-10 | 2019-11-01 | 中国科学院上海技术物理研究所 | A kind of heat exchanger with observation window for 80K low temperature |
| CN110398168B (en) * | 2019-07-10 | 2024-03-22 | 中国科学院上海技术物理研究所 | Heat exchanger with observation window for 80K low temperature |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3286735B2 (en) | 2002-05-27 |
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