JPH05170551A - Part for sintering and production of sintered aluminum nitride - Google Patents
Part for sintering and production of sintered aluminum nitrideInfo
- Publication number
- JPH05170551A JPH05170551A JP3343243A JP34324391A JPH05170551A JP H05170551 A JPH05170551 A JP H05170551A JP 3343243 A JP3343243 A JP 3343243A JP 34324391 A JP34324391 A JP 34324391A JP H05170551 A JPH05170551 A JP H05170551A
- Authority
- JP
- Japan
- Prior art keywords
- sintering
- aln
- aluminum nitride
- compact
- sintered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Ceramic Products (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、窒化アルミニウム（Ａ
ｌＮ）焼結体製造に際して用いられる焼結用部材に関す
るものである。The present invention relates to aluminum nitride (A
1N) The present invention relates to a sintering member used for producing a sintered body.
【０００２】[0002]
【従来の技術】一般に、ＡｌＮ焼結体は、ＡｌＮ成形体
を焼結用部材に搭載し、高温（例えば、１７００〜２０
００℃）雰囲気中で焼結して製造される。ＡｌＮ成形体
を搭載する焼結用部材としては、ＡｌＮ成形体と反応
しない。ＡｌＮ成形体の焼結反応を阻害しない。高
温雰囲気中での強度を有する。再生使用が可能であ
る。比較的安価である。等の条件が要求される。2. Description of the Related Art Generally, an AlN sintered body is prepared by mounting an AlN molded body on a sintering member and heating it at a high temperature (eg, 1700 to 20).
It is manufactured by sintering in an atmosphere of 00 ° C. The sintering member on which the AlN compact is mounted does not react with the AlN compact. It does not hinder the sintering reaction of the AlN compact. Has strength in a high temperature atmosphere. It can be recycled. It is relatively cheap. And other conditions are required.
【０００３】従来、条件〜をほぼ満足する焼結用部
材として、窒化ホウ素（ＢＮ）、あるいは、タングステ
ン（Ｗ）を用いたものが知られている。Conventionally, as a sintering member that substantially satisfies the conditions (1), a member using boron nitride (BN) or tungsten (W) is known.
【０００４】図３は、従来のＢＮ（Ｗであってもよい）
から成る焼結用部材４を用いた焼結用筐体を示す断面図
である。図２において、焼結用筐体は、図中、上下方向
に並列配設された３枚の円盤状焼結用部材と円盤状焼結
用部材間に配設された２つの円柱状焼結用部材とを備え
ている。また、焼結用筐体は、円盤状焼結用部材と円柱
状焼結用部材の内壁面とで規定される２つの空間部を有
する。この２つの空間部に、それぞれ、ＡｌＮ成形体３
が配設され、Ｎ2 雰囲気中にて加熱されてＡｌＮ焼結体
が製造される。FIG. 3 shows a conventional BN (may be W).
FIG. 6 is a cross-sectional view showing a sintering case using a sintering member 4 made of. In FIG. 2, the sintering case is composed of three disk-shaped sintering members arranged in parallel in the vertical direction in the figure, and two cylindrical sintering members arranged between the disk-shaped sintering members. And a member for use. Further, the sintering housing has two space portions defined by the disk-shaped sintering member and the inner wall surface of the cylindrical sintering member. The AlN compacts 3 are respectively provided in these two spaces.
And is heated in an N 2 atmosphere to produce an AlN sintered body.
【０００５】[0005]
【発明が解決しようとする課題】しかし、従来の焼結用
部材は条件〜をほぼ満足するものの、比較的高価で
ある。このため、条件〜を満足する焼結用部材が所
望されている。However, although the conventional sintering member substantially satisfies the conditions (1) to (4), it is relatively expensive. Therefore, a sintering member that satisfies the conditions 1 to 3 is desired.
【０００６】また、この焼結用部材を用いたＡｌＮ焼結
体製造方法は、工業的量産性に劣る。Further, the method for producing an AlN sintered body using this sintering member is inferior in industrial mass productivity.
【０００７】本発明の課題は、ＡｌＮ成形体と反応せ
ず、ＡｌＮ成形体の焼結反応を阻害せず、高温雰囲気中
での強度を有し、再生使用が可能であり、比較的安価で
ある焼結用部材を提供することである。The object of the present invention is that it does not react with the AlN compact, does not hinder the sintering reaction of the AlN compact, has strength in a high temperature atmosphere, can be reused, and is relatively inexpensive. An object is to provide a sintering member.
【０００８】本発明の他の課題は、工業的量産性に優れ
たＡｌＮ焼結体製造方法を提供することである。Another object of the present invention is to provide a method for producing an AlN sintered body which is excellent in industrial mass productivity.
【０００９】[0009]
【課題を解決するための手段】本発明によれば、黒鉛か
ら成り、表面にタングステンおよび窒化アルミニウムを
含むペーストの塗布された板体が焼結されて成ることを
特徴とする焼結用部材が得られる。According to the present invention, there is provided a sintering member characterized in that a plate body made of graphite and having a surface coated with a paste containing tungsten and aluminum nitride is sintered. can get.
【００１０】また、本発明によれば、前記ペーストは、
直径１０μｍ以下のタングステン粉末１００〜３０ｗｔ
％および直径１００μｍ以下の窒化アルミニウム粉末０
〜７０ｗｔ％から成るものである前記焼結用部材が得ら
れる。According to the present invention, the paste is
Tungsten powder with a diameter of 10 μm or less 100 to 30 wt
% And aluminum nitride powder having a diameter of 100 μm or less 0
The said sintering component which consists of-70 wt% is obtained.
【００１１】さらに、本発明によれば、前記焼結用部材
を用いて、窒化アルミニウム成形体を焼結する窒化アル
ミニウム焼結体製造方法が得られる。Furthermore, according to the present invention, a method for producing an aluminum nitride sintered body is obtained, in which an aluminum nitride molded body is sintered using the sintering member.
【００１２】[0012]
【実施例】以下、本発明の一実施例を図面を参照して説
明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.
【００１３】図１は、本実施例による焼結用部材の断面
図である。図１において、焼結用部材は、黒鉛から成る
黒鉛板１と、黒鉛板１の表裏両面に形成されたＷとＡｌ
Ｎとの混合層であるＷ＋ＡｌＮ層２とを有する。FIG. 1 is a sectional view of a sintering member according to this embodiment. In FIG. 1, a sintering member is a graphite plate 1 made of graphite, and W and Al formed on both front and back surfaces of the graphite plate 1.
It has a W + AlN layer 2 which is a mixed layer with N.
【００１４】Ｗ＋ＡｌＮ層２は、ＷおよびＡｌＮから成
るペーストを作成し、これを黒鉛板１の表面に、印刷又
ははけ塗り等の手段により１０μｍ以上の厚さに塗布
し、１８００〜２０５０℃の窒素ガス又はアルゴンガス
雰囲気中にて焼結して成る。For the W + AlN layer 2, a paste composed of W and AlN is prepared, and this is applied to the surface of the graphite plate 1 by a means such as printing or brushing so as to have a thickness of 10 μm or more. It is formed by sintering in a nitrogen gas or argon gas atmosphere.
【００１５】尚、前記ペーストは、直径１０μｍ以下の
Ｗ粉末を１００〜３０ｗｔ％に対し、ＡｌＮ焼結体を直
径１００μｍ以下に粉砕したＡｌＮ焼結体粉末を０〜７
０ｗｔ％の割合で混合し、バインダ等の有機成分を加
え、三本ロールにより混練することで得られる。ここ
で、Ｗ粉末は、１８００〜２０５０℃の温度範囲で黒鉛
板１の黒鉛と一部反応してタングステンカーバイド（Ｗ
Ｃ）を形成し、黒鉛板１と表面処理層との安定な接合に
寄与する。他方、ＡｌＮ焼結体粉末は、ＡｌＮ成形体の
焼結に際し、焼結反応の収縮時に生じる反り等の変形の
防止に効果がある。また、Ｗ粉末に対するＡｌＮ焼結体
粉末の比率を上げることで、焼結用部材の軽量化を実現
できる。The paste contains 100 to 30 wt% of W powder having a diameter of 10 μm or less, and 0 to 7 of AlN sintered powder obtained by crushing an AlN sintered body to a diameter of 100 μm or less.
It is obtained by mixing at a ratio of 0 wt%, adding an organic component such as a binder, and kneading with a triple roll. Here, the W powder partially reacts with the graphite of the graphite plate 1 in the temperature range of 1800 to 2050 ° C. to obtain tungsten carbide (W
C) is formed to contribute to stable bonding between the graphite plate 1 and the surface treatment layer. On the other hand, the AlN sintered body powder is effective in preventing deformation such as warpage that occurs when the sintering reaction contracts during the sintering of the AlN molded body. Further, the weight of the sintering member can be reduced by increasing the ratio of the AlN sintered body powder to the W powder.
【００１６】尚、Ｗ＋ＡｌＮ層２は、黒鉛板１の後述す
るＡｌＮ成形体を臨む側に形成されれば十分である。It is sufficient that the W + AlN layer 2 is formed on the side of the graphite plate 1 facing the later-described AlN compact.
【００１７】図２は、本実施例による焼結用部材を用い
た焼結用筐体を示す断面図である。図２において、焼結
用筐体は、図中、上下方向に並列配設された黒鉛板１を
有する３枚の円盤状焼結用部材と円盤状焼結用部材間に
配設された黒鉛板１を有する２つの円柱状焼結用部材と
を備えている。また、焼結用筐体は、円盤状焼結用部材
と円柱状焼結用部材の内壁面とで規定される２つの空間
部を有する。各焼結用部材の空間部を規定する面には、
Ｗ＋ＡｌＮ層２が形成されている。FIG. 2 is a sectional view showing a sintering case using the sintering member according to this embodiment. In FIG. 2, the casing for sintering is composed of three disc-shaped sintering members having graphite plates 1 arranged in parallel in the vertical direction in the figure, and graphite disposed between the disc-shaped sintering members. Two cylindrical sintering members having a plate 1 are provided. Further, the sintering housing has two space portions defined by the disk-shaped sintering member and the inner wall surface of the cylindrical sintering member. On the surface that defines the space of each sintering member,
The W + AlN layer 2 is formed.
【００１８】次に、本発明によるＡｌＮ焼結体の製造方
法を図２を参照して説明する。Next, a method for manufacturing an AlN sintered body according to the present invention will be described with reference to FIG.
【００１９】焼結用筐体の２つの空間部に、それぞ
れ、ＡｌＮ成形体３を配設する。An AlN compact 3 is provided in each of the two space portions of the sintering case.
【００２０】この焼結用筐体をＮ2 雰囲気（１９００
℃、１．１ａｔｍ）中にて５時間加熱する。This sintering case was placed in an N 2 atmosphere (1900
Heat at 0 ° C., 1.1 atm) for 5 hours.
【００２１】以上のようにして、ＡｌＮ焼結体が製造で
きた。製造されたＡｌＮ焼結体の密度および反りを表１
に示す。As described above, an AlN sintered body could be manufactured. Table 1 shows the density and warpage of the manufactured AlN sintered body.
Shown in.
【００２２】[0022]
【表１】 [Table 1]
【００２３】表１において、本実施例によるＡｌＮ焼結
体は、従来例に比して同様の結果がえられた。In Table 1, the AlN sintered body according to the present example has similar results as compared with the conventional example.
【００２４】[0024]
【発明の効果】本発明による焼結用部材は、比較的安価
な黒鉛から成り、表面にタングステンおよび窒化アルミ
ニウムを含むペーストの塗布された板体が焼結されて成
るため、ＡｌＮ成形体と反応せず、ＡｌＮ成形体の焼結
反応を阻害せず、高温雰囲気中での強度を有し、再生使
用が可能であることは勿論、比較的安価である。EFFECT OF THE INVENTION The sintering member according to the present invention is made of relatively inexpensive graphite, and is formed by sintering a plate body to which a paste containing tungsten and aluminum nitride is applied. No, it does not hinder the sintering reaction of the AlN compact, has strength in a high temperature atmosphere, and can be reused, of course, and is relatively inexpensive.
【００２５】また本発明によるＡｌＮ焼結体製造方法
は、この焼結用部材を用いて、窒化アルミニウム成形体
を焼結するため、工業的量産性に優れている。Further, the AlN sintered body manufacturing method according to the present invention is excellent in industrial mass productivity because the aluminum nitride molded body is sintered using this sintering member.
【図１】本発明による焼結用部材を示す断面図である。FIG. 1 is a sectional view showing a sintering member according to the present invention.
【図２】図１に示す焼結用部材を用いた焼結用筐体を示
す断面図である。FIG. 2 is a cross-sectional view showing a sintering housing using the sintering member shown in FIG.
【図３】従来の焼結用部材を用いた焼結用筐体を示す断
面図である。FIG. 3 is a cross-sectional view showing a sintering case using a conventional sintering member.
１ 黒鉛板 ２ タングステンと窒化アルミニウムとの混合（Ｗ＋
ＡｌＮ）層 ３ ＡｌＮ成形体 ４ 窒化ホウ素（ＢＮ）又はタングステン（Ｗ）板1 Graphite plate 2 Mixture of tungsten and aluminum nitride (W +
AlN) layer 3 AlN compact 4 Boron nitride (BN) or tungsten (W) plate
Claims (3)
び窒化アルミニウムを含むペーストの塗布された板体が
焼結されて成ることを特徴とする焼結用部材。1. A member for sintering, characterized in that a plate body made of graphite and having a surface coated with a paste containing tungsten and aluminum nitride is sintered.
ングステン粉末１００〜３０ｗｔ％および直径１００μ
ｍ以下の窒化アルミニウム粉末０〜７０ｗｔ％から成る
ものである請求項１記載の焼結用部材。2. The paste comprises 100 to 30 wt% tungsten powder having a diameter of 10 μm or less and a diameter of 100 μm.
The sintering member according to claim 1, which comprises 0 to 70 wt% of aluminum nitride powder having a particle size of m or less.
いて、窒化アルミニウム成形体を焼結する窒化アルミニ
ウム焼結体製造方法。3. A method for producing an aluminum nitride sintered body, which comprises sintering an aluminum nitride molded body using the sintering member according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34324391A JP3398872B2 (en) | 1991-12-25 | 1991-12-25 | Sintering member and method for manufacturing aluminum nitride sintered body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34324391A JP3398872B2 (en) | 1991-12-25 | 1991-12-25 | Sintering member and method for manufacturing aluminum nitride sintered body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05170551A true JPH05170551A (en) | 1993-07-09 |
| JP3398872B2 JP3398872B2 (en) | 2003-04-21 |
Family
ID=18360029
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP34324391A Expired - Fee Related JP3398872B2 (en) | 1991-12-25 | 1991-12-25 | Sintering member and method for manufacturing aluminum nitride sintered body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3398872B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011236102A (en) * | 2010-05-13 | 2011-11-24 | Tokuyama Corp | Jig for burning aluminum nitride |
-
1991
- 1991-12-25 JP JP34324391A patent/JP3398872B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011236102A (en) * | 2010-05-13 | 2011-11-24 | Tokuyama Corp | Jig for burning aluminum nitride |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3398872B2 (en) | 2003-04-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4997798A (en) | Process for producing aluminum nitride sintered body with high thermal conductivity | |
| JPS61197464A (en) | Manufacture of sintered formed body | |
| GB1573299A (en) | Method of forming a ceramic product | |
| JPS59207882A (en) | Manufacture of aluminum nitride sintered body | |
| JPH05170551A (en) | Part for sintering and production of sintered aluminum nitride | |
| JP2539018B2 (en) | Al Lower 2 O Lower 3 Base ceramics | |
| JPS59207873A (en) | Manufacture of high density silicon carbide sintered body | |
| JPS643829B2 (en) | ||
| JPH0251868B2 (en) | ||
| JPH09153666A (en) | Board for chip mounting and manufacture thereof | |
| JP2890543B2 (en) | Aluminum nitride substrate composition | |
| JPS61247662A (en) | Electroconductive ceramics and manufacture | |
| JPH046163A (en) | Production of carrier consisting of aluminium nitride | |
| JPS59207874A (en) | Silicon nitride hollow body and manufacture | |
| JPS63290272A (en) | Production of rare earth element-transition metal target material | |
| JPH0687664A (en) | Production of silicon nitride sintered compact | |
| JPS59207883A (en) | Manufacture of aluminum nitride sintered body | |
| JP3461644B2 (en) | Aluminum nitride sintered body, its manufacturing method and circuit board | |
| JP2006327872A (en) | Burning tool for aluminum nitride substrate, and its manufacturing method | |
| JP2003246675A (en) | Setter material for firing aluminum nitride, production method thereof and setter | |
| JPH10321776A (en) | Radiator member for semiconductor element | |
| JPS63117966A (en) | Manufacture of boron nitride base sintered body | |
| JPH0711096U (en) | Acoustic radiation plate | |
| JPH03112846A (en) | Production of sintered ceramic | |
| JPH06212340A (en) | Cu-mo sintered compact, member for heat radiation using the same, and semiconductor device having member for heat radiation |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20001206 |
|
| LAPS | Cancellation because of no payment of annual fees |