JPH05168900A - Material handling device - Google Patents
Material handling deviceInfo
- Publication number
- JPH05168900A JPH05168900A JP33348791A JP33348791A JPH05168900A JP H05168900 A JPH05168900 A JP H05168900A JP 33348791 A JP33348791 A JP 33348791A JP 33348791 A JP33348791 A JP 33348791A JP H05168900 A JPH05168900 A JP H05168900A
- Authority
- JP
- Japan
- Prior art keywords
- work
- shaft
- vacuum chamber
- vacuum
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、真空雰囲気、或いは減
圧された不活性ガスの雰囲気における熱処理、表面処
理、溶解、鋳造等ワークの加工、処理に適用されるマテ
リアルハンド装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a material hand device which is applied to a work such as heat treatment, surface treatment, melting and casting in a vacuum atmosphere or an atmosphere of a reduced pressure inert gas.
【０００２】[0002]
【従来の技術】従来、真空雰囲気における熱処理、表面
処理、溶解、鋳造等ワークの加工、処理はバッチ方式で
行われており、真空室内に１回処理分のワークを入れて
真空引きを行い、ワークの加工完了後に真空室内の真空
を破壊してワークを取出す。2. Description of the Related Art Conventionally, heat treatment, surface treatment, melting, casting, and the like in a vacuum atmosphere have been performed in a batch system, and a work for one treatment is placed in a vacuum chamber to perform vacuuming. After the work is finished, the vacuum in the vacuum chamber is broken and the work is taken out.
【０００３】[0003]
【発明が解決しようとする課題】上記のように真空雰囲
気におけるワークの加工、処理はバッチ方式で行われて
おり、１回の処理毎に真空引きを行ったり真空を破壊し
たりするために時間を要し、単位時間当たりの生産量が
低く、ランニングコストが高い。As described above, the processing and processing of the work in the vacuum atmosphere are performed in a batch system, and it takes time to perform vacuuming or break the vacuum for each processing. Required, the production amount per unit time is low, and the running cost is high.
【０００４】[0004]
【課題を解決するための手段】本発明に係るマテリアル
ハンド装置は上記課題の解決を目的にしており、真空ま
たは減圧された不活性ガスの雰囲気に保たれる内部にワ
ークの加工または処理を行う加工ヘッドが設けられた真
空室と、該真空室内へ搬出入される上記ワークが通ると
ともに内部が上記真空室の内部の状態と同一雰囲気に形
成される補助室と、上記真空室内に搬入された上記ワー
クを順次上記加工ヘッドにセットする手段とを備えた構
成を特徴とする。The material hand device according to the present invention is intended to solve the above problems, and processes or processes a work inside an atmosphere of an inert gas that is vacuumed or depressurized. A vacuum chamber provided with a processing head, an auxiliary chamber through which the work carried in and out of the vacuum chamber passes, and the inside of which is formed into the same atmosphere as the inside of the vacuum chamber, and the auxiliary chamber were carried into the vacuum chamber. And a means for sequentially setting the work on the processing head.
【０００５】[0005]
【作用】即ち、本発明に係るマテリアルハンド装置にお
いては、真空または減圧された不活性ガスの雰囲気に保
たれる真空室の内部にワークの加工または処理を行う加
工ヘッドが設けられ内部が真空室の内部の状態と同一雰
囲気に形成される補助室をワークが通って真空室内へ搬
出入されるとともに真空室内に搬入されたワークが順次
加工ヘッドにセットされるようになっており、ワークを
内部が真空室の内部の状態と同一雰囲気に形成される補
助室を通すことにより真空室の内部が常時真空または減
圧された不活性ガスの雰囲気に保たれてワークが加工ヘ
ッドにより連続的に加工または処理される。That is, in the material hand device according to the present invention, a processing head for processing or processing a workpiece is provided inside a vacuum chamber which is kept in an atmosphere of vacuum or reduced pressure inert gas, and the inside is a vacuum chamber. The work is carried in and out of the vacuum chamber through the auxiliary chamber that is formed in the same atmosphere as the internal state of the machine, and the work that is carried into the vacuum chamber is set sequentially on the machining head. Through the auxiliary chamber formed in the same atmosphere as the inside of the vacuum chamber, the inside of the vacuum chamber is always kept in a vacuum or depressurized atmosphere of inert gas, and the workpiece is continuously processed by the processing head. It is processed.
【０００６】[0006]
【実施例】図１乃至図４は本発明の一実施例に係るマテ
ハン装置の説明図である。図において、本実施例に係る
マテハン装置は真空雰囲気、或いは減圧された不活性ガ
スの雰囲気における熱処理、表面処理、溶解、鋳造等ワ
ークの加工、処理に使用されるもので、１はワークＷの
加工、処理を行う真空室である。この真空室１に隣接し
てワークＷの搬出入用の補助室２が設けられ、真空室１
と補助室２との間に真空扉３が、また補助室２の入口に
は真空扉４がそれぞれ設けられている。補助室２内は真
空室１内と同一の真空雰囲気、或いは減圧された不活性
ガスの雰囲気にすることができるようになっている。補
助室２の真空扉４が取付けられている側壁を一対のアー
ム軸５が気密に貫通して設けられ、補助室２内部におけ
るアーム軸５の先端部にワークＷの取付け治具板６の底
部下面を支持するブラケット７が取付けられている。取
付け治具板６の底部下面には支持用のインロー部６ａが
設けられている。ブラケット７にはインロー部６ａの嵌
め込み穴７ａと第１昇降軸８を避けるための切欠き溝７
ｂとが設けられている。取付け治具板６の底部下面には
第１昇降軸８の軸先端部の面で支持されるためのインロ
ー部６ｂが設けられている。ブラケット７は外部に設け
られている図示しないアクチュエータにより真空室１内
における第１昇降軸８の軸心Ｃまで移動することができ
る。真空室１の底部下面には３本のガイド軸９が軸受金
具１０で固定され、ガイド軸９の下端部は軸支持板１１
で支持されている。第１昇降ブラケット１２はその両端
に設けられている軸受部１２ａで上下方向に移動可能に
ガイド９によりガイドされている。真空室１の下部に設
けられている第１昇降軸８の軸受用ボス１ａと軸支持板
１１との間に第１ねじ軸１３が回転可能に取付けられ、
第１ねじ軸１３のナット１４は第１昇降ブラケット１２
に固定されている。ねじ軸１３の下端部にはタイミング
プーリ１５が取付けられ、軸支持板１１に固定されてい
る第１モータ１６の出力軸に取付けられているタイミン
グプーリ１７との間にタイミングベルト１８が掛けられ
ている。第１昇降軸８は軸受用ボス１ａを貫通し、その
下端部は第１昇降ブラケット１２に固定されている。第
１昇降軸８は軸受用ボス１ａで軸方向に移動可能に支持
され、軸受押え１９の真空シール２０，２１で気密に保
持されている。軸受押え１９は軸受用ボス１ａの上下端
面にそれぞれ固定されている。５５はベアリングであ
る。第１モータ１６を回転させることにより第１昇降軸
８を上下方向に移動させることができ、上端のストロー
ク下限は旋回アーム２３の下面から抜け出した位置、ス
トローク上限は取付け治具板６をブラケット７の支持部
から持上げた位置である。真空室１の下方にはワークＷ
の加工ステーションが第１昇降軸８の軸心Ｃを中心とす
る円の円周６等分点の６ヶ所に設けられており、それぞ
れの加工ステーションに第２昇降軸２２、旋回アーム２
３、一対のガイド軸２４、第２ねじ軸２５、第２昇降ブ
ラケット２６、第２昇降軸２２の回転用モータ２７、第
２昇降軸２２の昇降用モータ２８、軸受用ボス１ｂなど
が設けられ、それぞれの加工ステーション上方に加工ヘ
ッド５４が設けられている。1 to 4 are explanatory views of a material handling apparatus according to an embodiment of the present invention. In the figure, the material handling apparatus according to the present embodiment is used for heat treatment, surface treatment, melting, casting and other work processing and treatment in a vacuum atmosphere or a reduced pressure inert gas atmosphere. A vacuum chamber for processing and processing. An auxiliary chamber 2 for loading and unloading the work W is provided adjacent to the vacuum chamber 1.
A vacuum door 3 is provided between the auxiliary chamber 2 and the auxiliary chamber 2, and a vacuum door 4 is provided at the entrance of the auxiliary chamber 2. The inside of the auxiliary chamber 2 can be made to have the same vacuum atmosphere as the inside of the vacuum chamber 1 or an atmosphere of a reduced pressure inert gas. A pair of arm shafts 5 are provided airtightly through the side wall of the auxiliary chamber 2 to which the vacuum door 4 is attached, and the bottom of the attachment jig plate 6 for the work W is provided at the tip of the arm shafts 5 inside the auxiliary chamber 2. A bracket 7 supporting the lower surface is attached. A support spigot 6 a is provided on the bottom surface of the bottom of the mounting jig plate 6. The bracket 7 has a fitting hole 7a for the spigot portion 6a and a notch groove 7 for avoiding the first lifting shaft 8.
b and are provided. On the bottom surface of the bottom of the mounting jig plate 6, there is provided a spigot portion 6b for being supported by the surface of the shaft tip portion of the first elevating shaft 8. The bracket 7 can be moved to the axis C of the first elevating shaft 8 in the vacuum chamber 1 by an actuator (not shown) provided outside. Three guide shafts 9 are fixed to the lower surface of the bottom of the vacuum chamber 1 by bearing fittings 10, and the lower end of the guide shaft 9 has a shaft support plate 11
Supported by. The first elevating bracket 12 is guided by guides 9 so as to be vertically movable by bearings 12a provided at both ends thereof. The first screw shaft 13 is rotatably mounted between the shaft support plate 11 and the bearing boss 1a of the first lifting shaft 8 provided in the lower portion of the vacuum chamber 1,
The nut 14 of the first screw shaft 13 is the first lifting bracket 12
It is fixed to. A timing pulley 15 is attached to the lower end of the screw shaft 13, and a timing belt 18 is hung between the timing pulley 17 and the timing pulley 17 attached to the output shaft of the first motor 16 fixed to the shaft support plate 11. There is. The first elevating shaft 8 penetrates the bearing boss 1 a, and the lower end portion thereof is fixed to the first elevating bracket 12. The first lifting shaft 8 is supported by the bearing boss 1a so as to be movable in the axial direction, and is hermetically held by the vacuum seals 20 and 21 of the bearing retainer 19. The bearing retainer 19 is fixed to the upper and lower end surfaces of the bearing boss 1a, respectively. 55 is a bearing. By rotating the first motor 16, the first elevating shaft 8 can be moved in the vertical direction, the lower limit of the stroke at the upper end is the position where the lower end of the swivel arm 23 is pulled out, and the upper limit of the stroke is the mounting jig plate 6 on the bracket 7. It is the position lifted from the support part. A work W is provided below the vacuum chamber 1.
Processing stations are provided at six points on the circumference of a circle centered on the axis C of the first elevating shaft 8, and each machining station has a second elevating shaft 22 and a swivel arm 2.
3, a pair of guide shafts 24, a second screw shaft 25, a second lifting bracket 26, a rotation motor 27 of the second lifting shaft 22, a lifting motor 28 of the second lifting shaft 22, a bearing boss 1b, and the like. A processing head 54 is provided above each processing station.
【０００７】旋回アーム２３は軸２９に固定され、軸２
９はベアリング３０で外周を支持され、軸受用ボス１ｂ
に回転可能に取付けられている。ベアリング押え３１は
軸受用ボス１ｂの上面に、ベアリング押え３３は軸受用
ボス１ｂの下面にそれぞれ固定されている。３２はスラ
ストベアリング、３４，３５，３７，３９は真空シール
で軸２９および第２昇降軸２２の真空室１貫通部の気密
を保っている。蓋３６は軸２９の下面に固定されてい
る。蓋３６のアーム部３６ａはシリンダ４０のロッド先
端金具４１に連結され、シリンダ４０は軸受用ボス１ｂ
に取付けられているブラケット４２に連結されている。
シリンダ４０の作動で旋回アーム２３の治具板６の保持
部２３ａは第１昇降軸８の軸心Ｃと隣接する各加工ステ
ーションにおける第２昇降軸２２の軸心Ｐ1 ，Ｐ2 ，Ｐ
3 ，Ｐ4 ，Ｐ5 ，Ｐ6 との間をそれぞれ旋回する。第２
昇降軸２２は軸２９と同心で、軸２９に回転可能に、ま
た軸方向に移動可能に支持され、旋回アーム２３、軸２
９、蓋３６を貫通している。軸受４３は第２昇降軸２２
の回転および軸方向にスライド用の軸受である。真空室
１の底部下面にはガイド軸２４が軸受金具４４により固
定され、ガイド軸２４の下端部は支持板４５により支持
されている。軸支持板１１はタイロッド４６で支持板４
５と結合されている。軸受用ボス１ｂと支持板４５との
間にねじ軸２５が回転可能に取付けられ、ねじ軸２５の
下端部に取付けられているタイミングプーリ４６と、支
持板４５に取付けられている第２昇降軸２２の昇降用モ
ータ２８の出力軸に取付けられているタイミングプーリ
４７との間はタイミングベルト４８で連結されている。
第２昇降ブラケット２６はその軸受部２６ａで上下方向
に移動可能にガイド軸２４によりガイドされている。第
２昇降軸２２の下端部は第２昇降ブラケット２６により
回転可能に支持されている。また、第２昇降軸２２の下
端部にはタイミングプーリ４９が取付けられ、タイミン
グプーリ４９と第２昇降ブラケット２６に取付けられて
いる第２昇降軸２２の回転用モータ２７の出力軸に取付
けられているタイミングプーリ５０との間にはタイミン
グベルト５１が掛けられている。ベアリング５３は第２
昇降軸２２の下端部を支持している。ねじ軸２５のナッ
ト５２は第２昇降ブラケット２６に固定されており、第
２昇降軸２２の昇降用モータ２８の作動により第２昇降
軸２２は上下軸方向に移動し、移動の下限は第２昇降軸
２２の上端面が旋回アーム２３の下面から抜け出した位
置である。The swing arm 23 is fixed to the shaft 29, and
9 is an outer periphery supported by a bearing 30, and a bearing boss 1b
Is rotatably mounted on. The bearing retainer 31 is fixed to the upper surface of the bearing boss 1b, and the bearing retainer 33 is fixed to the lower surface of the bearing boss 1b. Reference numeral 32 is a thrust bearing, and 34, 35, 37 and 39 are vacuum seals to keep the shaft 29 and the second elevating shaft 22 through the vacuum chamber 1 airtight. The lid 36 is fixed to the lower surface of the shaft 29. The arm portion 36a of the lid 36 is connected to the rod end fitting 41 of the cylinder 40, and the cylinder 40 has the bearing boss 1b.
Is connected to a bracket 42 attached to the.
By the operation of the cylinder 40, the holding portion 23a of the jig plate 6 of the revolving arm 23 is aligned with the axis C of the first lifting shaft 8 and the axes P 1 , P 2 , P of the second lifting shaft 22 adjacent to each machining station.
It turns between 3 , P 4 , P 5 , and P 6 , respectively. Second
The elevating shaft 22 is concentric with the shaft 29, and is supported by the shaft 29 so as to be rotatable and movable in the axial direction.
9 and penetrates the lid 36. The bearing 43 is the second lifting shaft 22.
Is a bearing for rotation and sliding in the axial direction. The guide shaft 24 is fixed to the lower surface of the bottom of the vacuum chamber 1 by bearing fittings 44, and the lower end of the guide shaft 24 is supported by a support plate 45. The shaft support plate 11 is a tie rod 46 that supports the support plate 4.
Combined with 5. A screw shaft 25 is rotatably attached between the bearing boss 1b and the support plate 45, a timing pulley 46 attached to the lower end of the screw shaft 25, and a second lifting shaft attached to the support plate 45. A timing belt 48 is connected to the timing pulley 47 attached to the output shaft of the lifting motor 28.
The second elevating bracket 26 is guided by the guide shaft 24 so as to be movable in the vertical direction by the bearing portion 26a thereof. The lower end of the second lifting shaft 22 is rotatably supported by the second lifting bracket 26. A timing pulley 49 is attached to the lower end of the second lifting shaft 22, and is attached to the output shaft of the rotation motor 27 of the second lifting shaft 22 mounted on the timing pulley 49 and the second lifting bracket 26. A timing belt 51 is hung between the timing belt 50 and the timing pulley 50. The bearing 53 is the second
The lower end of the lifting shaft 22 is supported. The nut 52 of the screw shaft 25 is fixed to the second elevating bracket 26, and the second elevating shaft 22 moves in the vertical axis direction by the operation of the elevating motor 28 of the second elevating shaft 22, and the lower limit of the movement is the second. The upper end surface of the elevating shaft 22 is a position where it is pulled out from the lower surface of the revolving arm 23.
【０００８】ワークＷを真空室１内に入れる場合には、
先ず真空扉３を閉じて真空扉４を開き、治具板６に取付
けたワークＷを図示しない把持装置によりブラケット７
の上に置き、真空扉４を閉じて補助室２内を例えば図示
しない真空排気装置により真空室１内と同一の真空雰囲
気に、或いは真空室１内と同一の減圧された不活性ガス
の雰囲気にする。次に、真空扉３を開いてアーム軸５を
押し込み、ワークＷを第１昇降軸８への受渡し位置へ搬
入する。そして、シリンダ４０を作動させて旋回アーム
２３における治具板６の保持部２３ａをワークＷの受渡
し位置である第１昇降軸８の軸心Ｃにセットする。次い
で、第１モータ１６の回転によりタイミングプーリ１
７、タイミングベルト１８、タイミングプーリ１５を介
してねじ軸１３を回転させ、第１昇降軸８を旋回アーム
２３の保持部２３ａを貫通して上昇させ、治具板６のイ
ンロー部６ｂに第１昇降軸８の上端部を嵌め込み、治具
板６をブラケット７の支持部から持上げる。そして、ア
ーム軸５を引き出してブラケット７を補助室２内へ移動
させる。それから、第１昇降軸８を下降させてワークＷ
を載せたまま治具板６を旋回アーム２３の保持部２３ａ
上に置き、第１昇降軸８をストローク下限まで下降させ
る。When the work W is placed in the vacuum chamber 1,
First, the vacuum door 3 is closed and the vacuum door 4 is opened, and the workpiece W attached to the jig plate 6 is attached to the bracket 7 by a gripping device (not shown).
Placed in the vacuum chamber 1 and the vacuum door 4 is closed to make the inside of the auxiliary chamber 2 the same vacuum atmosphere as the inside of the vacuum chamber 1 by, for example, a vacuum exhaust device (not shown), or the atmosphere of the reduced pressure inert gas same as the inside of the vacuum chamber 1. To Next, the vacuum door 3 is opened, the arm shaft 5 is pushed in, and the work W is carried into the delivery position to the first elevating shaft 8. Then, the cylinder 40 is operated to set the holding portion 23a of the jig plate 6 in the turning arm 23 at the axis C of the first lifting shaft 8 which is the delivery position of the work W. Then, the timing pulley 1 is rotated by the rotation of the first motor 16.
7, the screw shaft 13 is rotated through the timing belt 18 and the timing pulley 15, the first elevating shaft 8 is moved up through the holding portion 23a of the turning arm 23, and is raised to the inlay portion 6b of the jig plate 6. The upper end of the elevating shaft 8 is fitted and the jig plate 6 is lifted from the support portion of the bracket 7. Then, the arm shaft 5 is pulled out to move the bracket 7 into the auxiliary chamber 2. Then, the first lifting shaft 8 is lowered and the work W
With the jig plate 6 held, the holding portion 23a of the turning arm 23 is held.
Place it on top and lower the first lifting shaft 8 to the lower stroke limit.
【０００９】ワークＷを加工ステーションへ搬送する場
合には、先ず第１昇降軸８の軸心Ｃまで降ろされたワー
クＷを、シリンダ４０の作動により旋回アーム２３を旋
回させて旋回アーム２３の旋回中心に隣接する加工ステ
ーションへ搬送する。即ち、第２昇降軸２２の軸心Ｐ1
を中心とする旋回アーム２３は軸心Ｐ2 の加工ステーシ
ョンと、軸心Ｐ2 を中心とする旋回アーム２３は軸心Ｐ
3 の加工ステーションと、以下同様に軸心Ｐ6 を中心と
する旋回アーム２３は軸心Ｐ1 の加工ステーションと、
それぞれ第１昇降軸の軸心Ｃとの間でワークＷを搬送す
る。When the work W is conveyed to the processing station, first, the work W lowered to the axis C of the first lifting shaft 8 is swung by the operation of the cylinder 40 to swivel the swivel arm 23. Transport to a processing station adjacent to the center. That is, the axis P 1 of the second lifting shaft 22
Swivel arm 23 around pivot arm 23 around the the working station of the axis P 2, the axis P 2 of the axis P
3 machining station, and similarly, the revolving arm 23 centered on the axis P 6 is the machining station of the axis P 1 ,
The work W is conveyed between each of them and the axis C of the first lifting shaft.
【００１０】ワークＷの加工を行う場合には、先ず第２
昇降軸２２で治具板６のインロー部６ｂを支持し、ワー
クＷを加工ヘッド５４の加工ポイント位置へ上昇させ
る。次に、第２昇降軸２２の昇降用モータ２８を回転さ
せてタイミングプーリ４７、タイミングベルト４８、タ
イミングプーリ４６、ねじ軸２５、ナット５２を介して
第２昇降軸２２を上下軸方向へ移動させるとともに、第
２昇降軸２２の回転用モータ２７を回転させてねじ軸５
０、タイミングベルト５１、タイミングプーリ４９を介
して第２昇降軸２２を回転動させることにより、ワーク
Ｗを加工ヘッド５４に対して位置を制御しながらレー
ザ、プラズマ等により加工、処理を行う。加工、処理の
終了後は、第２昇降軸２２をストローク下限まで下降さ
せて治具板６を旋回アーム２３の保持部２３ａ上に置
き、旋回アーム２３を旋回させてワークＷを第１昇降軸
８の軸心Ｃに搬送し、第１昇降軸８をストローク上限ま
で上昇させてブラケット７を移動させ嵌め込み穴７ａを
第１昇降軸８の軸心Ｃの位置へセットし、第１昇降軸８
をストローク下限まで下降させて治具板６を嵌め込み穴
７ａに置き、ブラケット７を補助室２内に移動させて真
空扉３を閉じ真空扉４を開いてワークＷを取出す。この
ようにして真空室１内の真空雰囲気を破壊することな
く、ワークＷの搬出入および加工、処理が連続して行わ
れる。When processing the work W, first, the second
The lifting shaft 22 supports the spigot portion 6b of the jig plate 6 to raise the work W to the processing point position of the processing head 54. Next, the lifting motor 28 of the second lifting shaft 22 is rotated to move the second lifting shaft 22 in the vertical axis direction via the timing pulley 47, the timing belt 48, the timing pulley 46, the screw shaft 25, and the nut 52. At the same time, the rotation motor 27 of the second lifting shaft 22 is rotated to rotate the screw shaft 5
By rotating the second elevating shaft 22 via 0, the timing belt 51, and the timing pulley 49, the work W is processed and processed by laser, plasma or the like while controlling the position with respect to the processing head 54. After the processing and processing are finished, the second lifting shaft 22 is lowered to the stroke lower limit, the jig plate 6 is placed on the holding portion 23a of the turning arm 23, and the turning arm 23 is turned to move the work W to the first lifting shaft. 8, the first lifting shaft 8 is raised to the upper stroke limit, the bracket 7 is moved, and the fitting hole 7a is set at the position of the shaft center C of the first lifting shaft 8.
Is lowered to the stroke lower limit, the jig plate 6 is fitted into the fitting hole 7a, the bracket 7 is moved into the auxiliary chamber 2, the vacuum door 3 is closed, the vacuum door 4 is opened, and the work W is taken out. In this way, the loading and unloading, processing, and processing of the work W are continuously performed without breaking the vacuum atmosphere in the vacuum chamber 1.
【００１１】このように、真空室１内は上部がワークＷ
の搬出入、中間部がワークＷの加工、処理、下部がワー
クＷの水平方向への搬送など各工程を行うエリアとして
それぞれ区分されており、ワークＷの加工ステーション
を真空室１内の円周６等分点に６ヶ所設け、その円の中
心にワークＷの搬出入を行う第１昇降軸８を垂直方向に
設けている。この第１昇降軸８は真空室１底部から真空
室１内に貫通し、その駆動装置は真空室１底部外側に設
けられている。また、上記の円周６等分点をそれぞれ旋
回の中心とし、上記の円の半径長さの旋回アーム２３が
６本設けられている。旋回アーム２３の旋回の中心から
治具板６の保持部２３ａの中心までの距離は、上記の円
の半径に等しくなっている。また、上記の円周６等分点
それぞれにワークＷを昇降、回転させる第２昇降軸２２
を垂直に設け、真空室１底部外側にその駆動装置を設け
ている。この第２昇降軸２２は旋回アーム２３の軸２９
と軸２９に固定されている旋回アーム２３とを貫通して
二重軸構造となっている。これらワークＷの搬送、位置
決め等は、真空室１底部の外側に設けられた駆動装置、
アクチュエータの動作を外部から真空室１内に貫通させ
た丸シャフトの軸を介して行っており、この軸の運動は
軸方向と回転方向のみとしている。このようにして各工
程を行う高さ方向のレベルを変えることにより、真空室
１内の半径方向におけるワークＷ相互の干渉を避けるこ
とができる。このため、ワークＷの搬送は真空室１内へ
の搬出入および搬出入下降点と加工ステーションとの間
の水平方向への搬送、真空室１内における搬出入の受渡
し点と搬出入の下降点（旋回アーム２３上への受渡し
点）との間の搬送、水平搬送レベルの加工ステーション
（ワークＷが旋回アーム２３上に載せられて搬送されて
来た点）とワークＷの加工位置との間の垂直方向への搬
送の二方向の搬送の組合わせで行われる。即ち、ワーク
Ｗの搬入はブラケット７により搬入されるワークＷを、
下方から旋回アーム２３を貫通して上昇する第１昇降軸
８で持上げ、ブラケット７を補助室２へ退避させる。そ
して、第１昇降軸８を旋回アーム２３の下面から抜出す
位置まで下降させることにより下降途中でワークＷは旋
回アーム２３上に載せられる。また、ワークＷの搬出は
この逆順で行われ、旋回アーム２３上のワークＷを下方
から第１昇降軸８により持ち上げて第１昇降軸８の上昇
限まで搬送する。そして、ブラケット７を前進させて第
１昇降軸８を下降させることによりワークＷはブラケッ
ト７上に載せられるので、ブラケット７を補助室２に搬
入してワークＷを取出す。また、ワークＷの搬出入下降
点から加工ステーションまで水平方向への旋回搬送は、
旋回アーム２３上に第１昇降軸８により載せられたワー
クＷを旋回アーム２３の旋回中心隣りの加工ステーショ
ンへ６０°水平方向に旋回させて搬送する。また、旋回
アーム２３上のワークＷの加工ヘッド５４までの搬送、
位置決めは、旋回アーム２３下面に退避させている第２
昇降軸２２を上昇させてワークＷを下方から持上げ、加
工ステーションの上部に位置する加工ヘッド５４の加工
点へ搬送および回転させて位置決めを行う。また、ワー
クＷの加工ステーションから搬出入下降点までの水平方
向への旋回および搬送は上記の逆順で行われ、第２昇降
軸２２の先端部に支持されているワークＷを、第２昇降
軸２２を旋回アーム２３の下面から抜出す位置まで下降
させ、下降途中で旋回アーム２３上にワークＷを載せ、
旋回アーム２３を６０°戻すように水平に旋回させて行
う。また、上記の円の中心でワークＷの受渡しを行い、
上記の円周６等分点を加工ステーションとすることによ
り、各加工ステーション間の距離および各加工ステーシ
ョンと円の中心までの距離が円の半径として総て等し
く、ワークＷの受渡し点と加工ステーションとの間の搬
送は、円周６等分点を中心として円の半径長さの旋回ア
ーム２３上にワークＷを載せて水平に旋回させる単純な
動作で行うことができる。また、旋回アーム２３の軸２
９は回転運動を行い、その内部に第２昇降軸２２を軸方
向に移動および回転可能に貫通させて支持することがで
き、二重軸の機構を採用することなどにより駆動系を含
め機構がシンプルとなっている。また、真空室１内にお
けるワークＷの搬送、位置決め、回転等は総て真空室１
の外部から真空室１内へ貫通した丸シャフトの軸の軸方
向への移動と回転運動とで行われるので、気密シール、
駆動系がシンプルとなっている。また、真空室１内に設
けられている６つの加工ステーションにより連続的にワ
ークＷの加工、処理が可能となる。また、ワークＷの搬
出入、水平方向への搬送、加工、処理の各工程を高さ方
向にレベルを変えて行うこと、および円の中心でワーク
Ｗの搬出入および受渡しを、また円周６等分点を加工ス
テーションとすることにより、真空室１の容積及び設置
面積を最小にすることができ、単純な機構にすることが
できる。また、複数の加工ステーションで他のワークＷ
と互いに干渉することなく連続的にワークＷの加工、処
理が可能であり、生産量が増大するとともに真空にする
排気動力、不活性ガス使用量の減少などランニングコス
トの低減が図られる。As described above, in the vacuum chamber 1, the upper part is the work W.
Is divided into areas for carrying in and out, processing and processing of the work W in the middle part, and lowering the work W in the horizontal direction at the lower part. Six locations are provided at six equal points, and a first elevating shaft 8 for loading and unloading the work W is vertically provided at the center of the circle. The first elevating shaft 8 penetrates from the bottom of the vacuum chamber 1 into the vacuum chamber 1, and its driving device is provided outside the bottom of the vacuum chamber 1. Further, six turning arms 23 each having the radius length of the circle are provided with each of the above-described six equally divided points on the circumference as the center of turning. The distance from the center of turning of the turning arm 23 to the center of the holding portion 23a of the jig plate 6 is equal to the radius of the circle. In addition, the second lifting shaft 22 that lifts and rotates the work W at each of the six equally divided points on the circumference described above.
Is provided vertically, and its drive device is provided outside the bottom of the vacuum chamber 1. The second lifting shaft 22 is a shaft 29 of the swing arm 23.
And a revolving arm 23 fixed to the shaft 29 penetrates to form a double shaft structure. The transfer and positioning of the work W is performed by a drive device provided outside the bottom of the vacuum chamber 1,
The operation of the actuator is performed from the outside through a shaft of a round shaft that penetrates into the vacuum chamber 1, and the motion of this shaft is limited to the axial direction and the rotational direction. By thus changing the level in the height direction in which each process is performed, it is possible to avoid mutual interference of the works W in the radial direction within the vacuum chamber 1. Therefore, the work W is transferred into and out of the vacuum chamber 1 and in the horizontal direction between the carry-in / out descending point and the processing station, and the transfer point of the carry-in / out and the carry-in / out descending point in the vacuum chamber 1. (Transfer point to and from the swivel arm 23), between horizontal machining level processing station (the point at which the workpiece W has been transferred on the swivel arm 23) and the machining position of the workpiece W. It is carried out by a combination of two-direction conveyance of vertical conveyance. That is, the work W carried in is carried by the bracket 7.
The bracket 7 is retracted to the auxiliary chamber 2 by lifting it from the lower side by the first elevating shaft 8 that passes through the revolving arm 23 and ascends. Then, by lowering the first lifting shaft 8 to a position where it is pulled out from the lower surface of the revolving arm 23, the work W is placed on the revolving arm 23 during the lowering. The work W is unloaded in the reverse order, and the work W on the revolving arm 23 is lifted from below by the first lifting shaft 8 and carried to the upper limit of the first lifting shaft 8. Then, the work W is placed on the bracket 7 by advancing the bracket 7 and lowering the first elevating shaft 8, so that the bracket 7 is carried into the auxiliary chamber 2 and the work W is taken out. In addition, the swivel transfer of the work W in the horizontal direction from the loading / unloading lowering point to the processing station is
The workpiece W placed on the swivel arm 23 by the first elevating shaft 8 is swung horizontally by 60 ° and conveyed to the processing station adjacent to the swivel center of the swivel arm 23. Further, the transfer of the work W on the revolving arm 23 to the processing head 54,
The positioning is performed by the second arm retracted to the lower surface of the revolving arm 23.
The elevating shaft 22 is raised to lift the work W from below, and the work W is conveyed and rotated to the processing point of the processing head 54 located at the upper part of the processing station for positioning. Further, the turning and conveying of the work W in the horizontal direction from the processing station to the loading / unloading lowering point are performed in the reverse order described above, and the work W supported by the tip of the second lifting shaft 22 is moved to the second lifting shaft. 22 is lowered to a position where it is pulled out from the lower surface of the revolving arm 23, and the work W is placed on the revolving arm 23 during the lowering.
The revolving arm 23 is pivoted horizontally so as to be returned by 60 °. Also, the work W is delivered at the center of the above circle,
By setting the above-mentioned six equally divided points on the circumference as the processing stations, the distance between the processing stations and the distance between each processing station and the center of the circle are all equal as the radius of the circle, and the delivery point of the work W and the processing station are the same. The conveyance between and can be performed by a simple operation in which the work W is placed on a revolving arm 23 having a radius of a circle centering on a point that divides the circumference into six and horizontally revolves. In addition, the axis 2 of the swing arm 23
Reference numeral 9 denotes a rotary motion, inside which the second lifting shaft 22 can be axially moved and rotatably pierced so as to be supported. By adopting a double shaft mechanism, a mechanism including a drive system can be provided. It's simple. Further, the transfer, positioning, rotation, etc. of the work W in the vacuum chamber 1 are all performed in the vacuum chamber 1.
Of the round shaft penetrating into the vacuum chamber 1 from the outside by axial movement and rotational movement of the shaft, so that an airtight seal,
The drive system is simple. Further, the work W can be continuously processed and processed by the six processing stations provided in the vacuum chamber 1. Further, carrying in and out of the work W, carrying in the horizontal direction, processing, and performing each step of the process by changing the level in the height direction, carrying in and out and passing of the work W at the center of the circle, and the circumference 6 By using the equally dividing points as processing stations, the volume and installation area of the vacuum chamber 1 can be minimized, and a simple mechanism can be achieved. In addition, other work W at multiple processing stations
It is possible to continuously process and process the work W without interfering with each other, and the production cost is increased and the running cost is reduced, such as the exhaust power for vacuuming and the use amount of the inert gas.
【００１２】[0012]
【発明の効果】本発明に係るマテリアルハンド装置は前
記のように構成されており、真空室の内部が常時真空ま
たは減圧された不活性ガスの雰囲気に保たれてワークが
連続的に加工または処理されるので時間を要さず、単位
時間当たりの生産量が高く、ランニングコストが低減さ
れる。The material hand device according to the present invention is configured as described above, and the inside of the vacuum chamber is always kept in a vacuum or depressurized atmosphere of inert gas to continuously process or process the work. Therefore, it does not take time, the production amount per unit time is high, and the running cost is reduced.
【図１】図１は本発明の一実施例に係るマテハン装置の
平面図である。FIG. 1 is a plan view of a material handling device according to an embodiment of the present invention.
【図２】図２は図１におけるII−II断面図である。FIG. 2 is a sectional view taken along line II-II in FIG.
【図３】図３（ａ）は図２におけるａ−ａ断面図、図３
（ｂ）はｂ−ｂ断面図である。3 (a) is a sectional view taken along the line aa in FIG.
(B) is a bb sectional view.
【図４】図４は図３（ａ）におけるIV−IV断面図であ
る。FIG. 4 is a sectional view taken along the line IV-IV in FIG.
１ 真空室 ２ 補助室 ３ 真空扉 ４ 真空扉 ５ アーム軸 ６ 治具板 ７ ブラケット ８ 第１昇降軸 ９ ガイド軸 １２ 第１昇降ブラケット １３ 第１ねじ軸 １６ 第１モータ ２２ 第２昇降軸 ２３ 旋回アーム ２４ ガイド軸 ２５ ねじ軸 ２６ 第２昇降ブラケット ２７ 第２昇降軸の回転用モータ ２８ 第２昇降軸の昇降用モータ ２９ 軸 ４０ シリンダ ５４ 加工ヘッド Ｗ ワーク Ｃ 第１昇降軸の軸心 Ｐ 第２昇降軸の軸心 1 vacuum chamber 2 auxiliary chamber 3 vacuum door 4 vacuum door 5 arm shaft 6 jig plate 7 bracket 8 first elevating shaft 9 guide shaft 12 first elevating bracket 13 first screw shaft 16 first motor 22 second elevating shaft 23 swivel Arm 24 Guide shaft 25 Screw shaft 26 Second lifting bracket 27 Second lifting shaft rotation motor 28 Second lifting shaft lifting motor 29 Shaft 40 Cylinder 54 Processing head W Workpiece C 1st lifting shaft axis P 2nd Vertical axis of the lifting shaft
Claims (1)
気に保たれる内部にワークの加工または処理を行う加工
ヘッドが設けられた真空室と、該真空室内へ搬入される
上記ワークが通るとともに内部が上記真空室の内部の状
態と同一雰囲気に形成される補助室と、上記真空室内に
搬入された上記ワークを順次上記加工ヘッドにセットす
る手段とを備えたことを特徴とするマテリアルハンド装
置。1. A vacuum chamber provided with a processing head for processing or processing a work inside which is kept in a vacuum or reduced pressure atmosphere of an inert gas, and the work carried into the vacuum chamber passes through the vacuum chamber. A material hand device comprising an auxiliary chamber whose inside is formed in the same atmosphere as the inside of the vacuum chamber, and means for sequentially setting the work carried into the vacuum chamber to the processing head. ..
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33348791A JPH05168900A (en) | 1991-12-17 | 1991-12-17 | Material handling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33348791A JPH05168900A (en) | 1991-12-17 | 1991-12-17 | Material handling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05168900A true JPH05168900A (en) | 1993-07-02 |
Family
ID=18266614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33348791A Withdrawn JPH05168900A (en) | 1991-12-17 | 1991-12-17 | Material handling device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05168900A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100530335B1 (en) * | 2003-12-24 | 2005-11-22 | 재단법인 포항산업과학연구원 | Appratus for poltshing electrode in plasma melt spinner |
-
1991
- 1991-12-17 JP JP33348791A patent/JPH05168900A/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100530335B1 (en) * | 2003-12-24 | 2005-11-22 | 재단법인 포항산업과학연구원 | Appratus for poltshing electrode in plasma melt spinner |
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| A300 | Withdrawal of application because of no request for examination |
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