JPH05167377A - Package for accommodating electronic component - Google Patents
Package for accommodating electronic componentInfo
- Publication number
- JPH05167377A JPH05167377A JP3334943A JP33494391A JPH05167377A JP H05167377 A JPH05167377 A JP H05167377A JP 3334943 A JP3334943 A JP 3334943A JP 33494391 A JP33494391 A JP 33494391A JP H05167377 A JPH05167377 A JP H05167377A
- Authority
- JP
- Japan
- Prior art keywords
- metal layer
- lid
- solder
- package
- electronic component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/161—Cap
- H01L2924/1615—Shape
- H01L2924/16152—Cap comprising a cavity for hosting the device, e.g. U-shaped cap
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は圧電振動子や弾性表面波
フィルタ等の電子部品を収容するための電子部品収納用
パッケージの改良に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improved electronic component storage package for storing electronic components such as piezoelectric vibrators and surface acoustic wave filters.
【0002】[0002]
【従来の技術】従来、電子部品、例えば所定の振動周波
数を得る圧電振動子を収容するための電子部品収納用パ
ッケージは、一般に図3に示すように、アルミナセラミ
ックス等の電気絶縁材料から成り、上面から底面にかけ
て導出するタングステン、モリブデン、マンガン等の高
融点金属粉末から成るメタライズ配線層22を有する絶縁
基体21と、前記メタライズ配線層22の一部に導電性接着
材を介して取着され、圧電振動子25を保持するとともに
該圧電振動子25の電極を外部電気回路と接続する保持金
具23と、同じく電気絶縁材料から成る椀状の蓋体24とか
ら構成されており、保持金具23上に圧電振動子25をポリ
イミド導電性樹脂から成る導電性接着材を介して接着保
持させるとともに圧電振動子25の各電極を保持金具23に
電気的に接続させ、しかる後、前記絶縁基体21の上面に
蓋体24を半田から成る枠状の封止材26により接合させ、
絶縁基体21と蓋体24とから成る容器内部に圧電振動子25
を気密に収容することによって最終製品としての圧電振
動素子となる。2. Description of the Related Art Conventionally, an electronic component housing package for housing an electronic component, for example, a piezoelectric vibrator for obtaining a predetermined vibration frequency, is generally made of an electrically insulating material such as alumina ceramics as shown in FIG. Insulating substrate 21 having a metallized wiring layer 22 made of high melting point metal powder such as tungsten, molybdenum, and manganese derived from the top surface to the bottom surface, and attached to a part of the metallized wiring layer 22 via a conductive adhesive, A holding metal fitting 23 for holding the piezoelectric vibrator 25 and connecting an electrode of the piezoelectric vibrator 25 to an external electric circuit, and a bowl-shaped lid body 24 also made of an electrically insulating material are provided on the holding metal fitting 23. The piezoelectric vibrator 25 is bonded and held via a conductive adhesive made of polyimide conductive resin, and each electrode of the piezoelectric vibrator 25 is electrically connected to the holding metal fitting 23. After that, the lid 24 is joined to the upper surface of the insulating substrate 21 by the frame-shaped sealing material 26 made of solder,
A piezoelectric vibrator 25 is provided inside a container composed of an insulating base 21 and a lid 24.
Is hermetically accommodated to form a piezoelectric vibrating element as a final product.
【0003】尚、前記電子部品収納用パッケージは絶縁
基体21の上面外周部及び蓋体24の下面外周部に予めタン
グステン、モリブデン等の高融点金属粉末から成る枠状
のメタライズ金属層27、28が各々、被着されており、両
メタライズ金属層27、28を半田から成る封止材26で接合
させることによって蓋体24は絶縁基体21に接合されるこ
ととなる。In the package for housing electronic parts, frame-shaped metallized metal layers 27 and 28 made of refractory metal powder such as tungsten and molybdenum are preliminarily formed on the outer periphery of the upper surface of the insulating substrate 21 and the outer periphery of the lower surface of the lid 24. The lid 24 is bonded to the insulating substrate 21 by bonding the metallized metal layers 27 and 28, which are respectively deposited, with the sealing material 26 made of solder.
【0004】また前記半田から成る封止材26は絶縁基体
21に蓋体24を接合させ、容器内部に圧電振動子25を気密
に収容させる際、その接合の作業性を向上させるために
通常、蓋体24の下面外周部に被着させたメタライズ金属
層28に予め接合されており、該蓋体24のメタライズ金属
層28への封止材26の接合は、半田粉末にフラックスを含
有させた半田ペーストをメタライズ金属層28の表面に従
来周知のスクリーン印刷法等により印刷塗布するととも
にこれを約350 ℃の温度に加熱し、半田を加熱溶融させ
ることによって行われる。Further, the sealing material 26 made of the solder is an insulating substrate.
When the lid 24 is joined to the lid 21 and the piezoelectric vibrator 25 is housed in the container in an airtight manner, in order to improve the workability of the joining, a metallized metal layer usually attached to the outer periphery of the lower surface of the lid 24. The sealing material 26 is bonded to the metallized metal layer 28 of the lid 24 in advance, and the solder paste containing flux in the solder powder is bonded to the surface of the metallized metal layer 28 by the conventional screen printing method. It is carried out by printing and coating by a method or the like and heating this to a temperature of about 350 ° C. to heat and melt the solder.
【0005】[0005]
【発明が解決しようとする課題】しかしながら、この従
来の電子部品収納用パッケージにおいては、半田ペース
トを加熱溶融させ、蓋体24のメタライズ金属層28表面に
予め半田から成る封止材26を接合させる際、半田ペース
ト中のフラックスの蒸発に伴って半田の一部が蓋体24の
中央部表面に飛散付着してしまい、これが絶縁基体21と
蓋体24とから成る容器内部に圧電振動子25を収容させた
後、外部振動が印加されると蓋体24の表面より脱落して
圧電振動子25に付着し、圧電振動子25の振動周波数にバ
ラツキを発生させたり、電極が短絡して圧電振動子25と
しての機能を喪失させたりするという欠点を有してい
た。However, in this conventional package for storing electronic components, the solder paste is heated and melted, and the sealing material 26 made of solder is previously bonded to the surface of the metallized metal layer 28 of the lid 24. At this time, a part of the solder scatters and adheres to the surface of the central portion of the lid body 24 due to the evaporation of the flux in the solder paste, which causes the piezoelectric vibrator 25 to be placed inside the container including the insulating base 21 and the lid body 24. After being housed, when external vibration is applied, it falls off from the surface of the lid body 24 and adheres to the piezoelectric vibrator 25, causing variations in the vibration frequency of the piezoelectric vibrator 25, or short-circuiting of the electrodes to cause piezoelectric vibration. It had the drawback of losing the function of the child 25.
【0006】[0006]
【発明の目的】本発明は上記欠点に鑑み案出されたもの
で、その目的は内部に収容する電子部品に封止材の半田
が付着するのを皆無として電子部品を長期間にわたり正
常、且つ安定に作動させることができる電子部品収納用
パッケージを提供することにある。SUMMARY OF THE INVENTION The present invention has been devised in view of the above-mentioned drawbacks, and an object of the present invention is to keep an electronic component in a normal condition for a long period of time without the solder of an encapsulating material being attached to the electronic component housed inside. An object of the present invention is to provide a package for storing electronic components that can be stably operated.
【0007】[0007]
【課題を解決するための手段】本発明は上面に枠状のメ
タライズ金属層を有する絶縁基体と下面に枠状のメタラ
イズ金属層を有する蓋体とから成り、絶縁基体と蓋体の
各々のメタライズ金属層を半田から成る封止材で接合さ
せることによって絶縁基体と蓋体とで構成される容器の
内部に電子部品を気密に収容するようになした電子部品
収納用パッケージであって、前記蓋体は枠状メタライズ
金属層の内側表面で、該枠状メタライズ金属層より所定
間隔を隔てた位置に半田接合性の良い金属層が被着され
ていることを特徴とするものである。The present invention comprises an insulating base having a frame-shaped metallized metal layer on the upper surface and a lid having a frame-shaped metallized metal layer on the lower surface, and the metallization of each of the insulating base and the lid. What is claimed is: 1. A package for storing electronic parts, wherein an electronic part is hermetically housed inside a container composed of an insulating base and a lid by joining a metal layer with a sealing material made of solder. The body is characterized in that, on the inner surface of the frame-shaped metallized metal layer, a metal layer having a good solder joint property is applied at a position separated from the frame-shaped metallized metal layer by a predetermined distance.
【0008】[0008]
【実施例】次に本発明を添付図面に基づき詳細に説明す
る。図1 は本発明の電子部品収納用パッケージを圧電振
動子を収容するパッケージに適用した場合の一実施例を
示し、1 は絶縁基体、2 は蓋体である。この絶縁基体1
と蓋体2 とで圧電振動子3 を収容するための容器4を構
成する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will now be described in detail with reference to the accompanying drawings. FIG. 1 shows an embodiment in which the electronic component housing package of the present invention is applied to a package housing a piezoelectric vibrator, wherein 1 is an insulating substrate and 2 is a lid. This insulating substrate 1
The lid 4 and the lid 2 constitute a container 4 for housing the piezoelectric vibrator 3.
【0009】前記絶縁基体1 は酸化アルミニウム質焼結
体、ムライト質焼結体、窒化アルミニウム質焼結体、炭
化珪素質焼結体等の電気絶縁材料から成り、例えば酸化
アルミニウム質焼結体から成る場合はアルミナ(Al 2O
3 ) 、シリカ(SiO2 ) 、カルシア(CaO) 、マグネシア(M
gO) 等の原料粉末に適当な有機溶剤、溶媒を添加混合し
て泥漿状となすとともにこれを従来周知のドクターブレ
ード法やカンダーロール法を採用することによってセラ
ミックグリーンシート( セラミック生シート)を得、し
かる後、前記セラミックグリーンシートに適当な打ち抜
き加工を施すとともに複数枚積層し、高温(約1600℃)
の温度で焼成することによって製作される。The insulating substrate 1 is made of an electrically insulating material such as an aluminum oxide sintered body, a mullite sintered body, an aluminum nitride sintered body, and a silicon carbide sintered body. Alumina (Al 2 O
3 ), silica (SiO 2 ), calcia (CaO), magnesia (M
gO) and other raw material powders are mixed with an appropriate organic solvent and solvent to form a slurry, and a ceramic green sheet (ceramic green sheet) is obtained by applying the well-known doctor blade method and kander roll method. After that, appropriate punching process is applied to the ceramic green sheets and multiple sheets are laminated at high temperature (about 1600 ℃)
It is manufactured by firing at a temperature of.
【0010】また前記絶縁基板1 にはその上面からスル
ーホール5を介して下面に導出するメタライズ配線層6
が被着形成されており、該メタライズ配線層6 の絶縁基
体1上面部には圧電振動子3 を保持する保持部材7 が
導電性接着材を介して取着され、また絶縁基体1 の下面
部は外部電気回路に半田等のロウ材を介し接続される。Further, the insulating substrate 1 has a metallized wiring layer 6 extending from the upper surface thereof to the lower surface thereof through through holes 5.
The holding member 7 for holding the piezoelectric vibrator 3 is attached to the upper surface of the insulating base 1 of the metallized wiring layer 6 via a conductive adhesive, and the lower surface of the insulating base 1 is adhered. Is connected to an external electric circuit via a brazing material such as solder.
【0011】前記メタライズ配線層6 はタングステン
(W) 、モリブデン(Mo)、マンガン(Mn)等の高融点金属粉
末から成り、該タングステン等の高融点金属粉末に適当
な有機溶剤、溶媒を添加混合して得た金属ペーストを絶
縁基体1 となるセラミックグリーンシートに従来周知の
スクリーン印刷法等の厚膜手法により予め印刷塗布して
おくことによって絶縁基体1 の上面からスルーホール5
を介して下面に導出するように被着形成される。The metallized wiring layer 6 is made of tungsten.
(W), molybdenum (Mo), manganese (Mn) and other refractory metal powders, such as a refractory metal powder such as tungsten, a suitable organic solvent, a metal paste obtained by adding and mixing a solvent insulating substrate 1 The ceramic green sheet to be the above is printed and applied in advance by a thick film method such as a well-known screen printing method, so that the through hole 5 is formed from the upper surface of the insulating substrate 1.
It is formed so as to be led out to the lower surface via.
【0012】尚、前記メタライズ配線層6 はその表面に
ニッケル(Ni)、金(Au)等の良導電性で、且つ耐蝕性に優
れた金属をメッキ法等により1.0 乃至20.0μm の厚みに
層着させておくとメタライズ配線層6 が酸化腐食するの
を有効に防止することができる。従って、前記メタライ
ズ配線層6 の表面には該メタライズ配線層6 が酸化腐食
するのを有効に防止するためにニッケル、金等を1.0 乃
至20.0μm の厚みに層着させておくことが好ましい。On the surface of the metallized wiring layer 6, a metal of good conductivity such as nickel (Ni), gold (Au) and excellent in corrosion resistance is formed by plating or the like to a thickness of 1.0 to 20.0 μm. If it is attached, the metallized wiring layer 6 can be effectively prevented from being oxidized and corroded. Therefore, in order to effectively prevent the metallized wiring layer 6 from being oxidized and corroded, it is preferable to deposit nickel, gold or the like in a thickness of 1.0 to 20.0 μm on the surface of the metallized wiring layer 6.
【0013】また前記絶縁基体1 上面のメタライズ配線
層6 には保持部材7 が導電性ポリイミド等の導電性接着
剤を介して取着されており、該保持部材7 の上部には同
じく導電性ポリイミド等の導電性接着剤を介して圧電振
動子3 がその電極を保持部材7 と電気的に接続するよう
にして接着保持される。A holding member 7 is attached to the metallized wiring layer 6 on the upper surface of the insulating substrate 1 through a conductive adhesive such as conductive polyimide, and the upper portion of the holding member 7 is also made of the conductive polyimide. The piezoelectric vibrator 3 is adhesively held by electrically connecting its electrodes to the holding member 7 via a conductive adhesive such as.
【0014】前記保持部材7 は圧電振動子3 を保持する
とともに圧電振動子3 の電極をメタライズ配線層6 に電
気的に接続する作用を為し、例えば洋白(Cu-Zn-Ni 合
金) やコバール金属(Fe-Ni-Co 合金) 、42アロイ(Fe-Ni
合金) 等の弾性を有する金属材料で形成される。The holding member 7 holds the piezoelectric vibrator 3 and electrically connects the electrodes of the piezoelectric vibrator 3 to the metallized wiring layer 6, for example, nickel silver (Cu-Zn-Ni alloy) or Kovar metal (Fe-Ni-Co alloy), 42 alloy (Fe-Ni
It is formed of a metal material having elasticity such as an alloy).
【0015】尚、前記保持部材7 は洋白等の金属材料か
ら成るインゴット( 塊) を圧延加工法、打ち抜き加工
法、折り曲げ加工法等、従来周知の金属加工法を採用す
ることによって所定形状に成形される。The holding member 7 is formed into a predetermined shape by adopting a conventionally known metal working method such as a rolling working method, a punching working method and a bending working method for an ingot (lump) made of a metallic material such as nickel silver. Molded.
【0016】前記保持部材7 が取着された絶縁基体1 は
またその上面外周部に枠状のメタライズ金属層8 が被着
されており、該メタライズ金属層8 には椀状の蓋体2 が
半田から成る封止材10を介して接合され、これによって
絶縁基体1 と蓋体2 とから成る容器4の内部が気密に封
止される。The insulating substrate 1 to which the holding member 7 is attached also has a frame-shaped metallized metal layer 8 adhered to the outer peripheral surface of the upper surface thereof, and the metallized metal layer 8 has a bowl-shaped lid 2. They are joined together via a sealing material 10 made of solder, whereby the inside of the container 4 made of the insulating base 1 and the lid 2 is hermetically sealed.
【0017】前記絶縁基体1 の上面外周部に被着させた
メタライズ金属層8 はタングステン、モリブデン等の高
融点金属粉末から成り、該タングステン等の高融点金属
粉末に適当な有機溶剤、溶媒を添加混合して得た金属ペ
ーストを絶縁基体1 となるセラミックグリーンシートに
従来周知のスクリーン印刷法等の厚膜手法により予め印
刷塗布しておくことによって絶縁基体1の上面外周部に
枠状に被着形成される。The metallized metal layer 8 deposited on the outer peripheral portion of the upper surface of the insulating substrate 1 is made of a refractory metal powder such as tungsten or molybdenum, and a suitable organic solvent or solvent is added to the refractory metal powder such as tungsten. The metal paste obtained by mixing is pre-printed on the ceramic green sheet to be the insulating substrate 1 by a thick film method such as the well-known screen printing method, so that it is adhered in a frame shape to the outer peripheral portion of the upper surface of the insulating substrate 1. It is formed.
【0018】尚、前記メタライズ金属層8 はその表面に
封止材10を構成する半田が強固に接合するように半田に
対し濡れ性の良いニッケル(Ni)がメッキ法等により1.0
乃至20.0μm の厚みに層着させてある。It should be noted that the metallized metal layer 8 is made of nickel (Ni) having a good wettability with respect to the solder by a plating method or the like so that the solder constituting the sealing material 10 is firmly bonded to the surface thereof.
Layered to a thickness of 20.0 μm.
【0019】また前記絶縁基体1 のメタライズ金属層8
に接合される椀状の蓋体2 は酸化アルミニウム質焼結
体、ムライト質焼結体、窒化アルミニウム質焼結体、炭
化珪素質焼結体等の電気絶縁材料から成り、該蓋体2 は
その下面外周部に被着させた枠状のメタライズ金属層9
を絶縁基体1 上面のメタライズ金属層8 に封止材10を介
し接合させることによって絶縁基体1 の上面に接合され
る。Further, the metallized metal layer 8 of the insulating substrate 1
The bowl-shaped lid 2 to be joined to is made of an electrically insulating material such as an aluminum oxide sintered body, a mullite sintered body, an aluminum nitride sintered body, and a silicon carbide sintered body. A frame-shaped metallized metal layer 9 applied to the outer periphery of the lower surface.
Is bonded to the metallized metal layer 8 on the upper surface of the insulating substrate 1 via the sealing material 10 to bond to the upper surface of the insulating substrate 1.
【0020】前記蓋体2 は、例えば酸化アルミニウム質
焼結体からなる場合、アルミナ(Al2 O 3 ) 、シリカ(Si
O2 ) 、カルシア(CaO) 、マグネシア(MgO) 等の原料粉
末に適当な有機溶剤、溶媒を添加混合したものを所定形
状を有するプレス金型内に充填するとともに一定圧力を
印加して成形し、しかる後、該成形品を約1600℃の温度
で焼成することによって製作される。When the lid 2 is made of, for example, an aluminum oxide sintered body, alumina (Al 2 O 3 ) and silica (Si
O 2), calcia (CaO), and molded by applying a constant pressure to fill in the press mold having a magnesia (MgO) material powder in a suitable organic solvent, a predetermined shape which solvent was added and mixed, such as Then, the molded product is manufactured by firing at a temperature of about 1600 ° C.
【0021】また前記蓋体2 の下面外周部に被着されて
いるメタライズ金属層9 は銀 パラジウム等の金属から
成り、銀、パラジウムの粉末にガラスフリット及び有機
溶剤、溶媒を添加混合して得た金属ペーストを蓋体2 の
下面外周部に従来周知のスクリーン印刷法等の厚膜手法
により印刷塗布するとともにこれを約1000℃の温度で焼
き付けることによって蓋体2 の下面外周部に枠状に被着
される。The metallized metal layer 9 deposited on the outer peripheral portion of the lower surface of the lid 2 is made of a metal such as silver and palladium, and is obtained by adding glass frit, an organic solvent, and a solvent to powder of silver and palladium and mixing them. The metal paste is applied to the outer peripheral surface of the lower surface of the lid body 2 by a thick film method such as a well-known screen printing method and is baked at a temperature of about 1000 ° C. to form a frame shape on the outer peripheral surface of the lower surface of the lid body 2. Be applied.
【0022】更に前記メタライズ金属層9 の表面には蓋
体2 を絶縁基体1 に接合させる際の作業性を向上させる
ために半田から成る封止材10が予め被着接合されてお
り、該半田から成る封止材10は半田にフラックス等を含
有させた半田ペーストをメタライズ金属層9 上に従来周
知のスクリーン印刷法等により印刷塗布するとともにこ
れを約350 ℃の温度で加熱溶融させることによってメタ
ライズ金属層9 の表面に被着接合される。Further, a sealing material 10 made of solder is pre-deposited on the surface of the metallized metal layer 9 in order to improve workability when the lid 2 is joined to the insulating substrate 1. The encapsulant 10 is made of a solder paste containing a flux and the like printed on the metallized metal layer 9 by a well-known screen printing method or the like, and is heated and melted at a temperature of about 350 ° C. to be metallized. It is adhered and bonded to the surface of the metal layer 9.
【0023】前記蓋体2 はまたその下面で前記メタライ
ズ金属層9より距離L が0.1mm 以上の離れた位置に半田
と接合性の良い金属材料から成る金属層11が被着されて
いる。On the lower surface of the lid body 2, a metal layer 11 made of a metal material having a good bonding property with solder is applied at a position separated from the metallized metal layer 9 by a distance L of 0.1 mm or more.
【0024】前記金属層11は蓋体2 の中央部分に飛散し
てきた半田を蓋体2 に強固に接合させる作用を為し、蓋
体2 のメタライズ金属層9 に半田から成る封止材10を被
着接合させる際、半田の一部が蓋体2 の中央部側に飛散
したとしても該飛散した半田は金属層11によって蓋体2
に強固に接合し、その結果、絶縁基体1 と蓋体2とから
成る容器4 の内部に圧電振動子3を収容させた後、容器
4 に外部振動が印加されたとしても飛散した半田は蓋体
2 より脱落して圧電振動子3に付着することは一切な
く、圧電振動子3を長期間にわたり正常、且つ安定に作
動させることが可能となる。The metal layer 11 has a function of firmly bonding the solder scattered on the central portion of the lid body 2 to the lid body 2, and the metallized metal layer 9 of the lid body 2 is covered with the sealing material 10 made of solder. At the time of adhering and joining, even if a part of the solder is scattered to the central portion side of the lid body 2, the scattered solder is covered by the metal layer 11
After the piezoelectric vibrator 3 is housed inside the container 4 consisting of the insulating substrate 1 and the lid 2,
Even if external vibration is applied to 4, the scattered solder is a lid
It is possible to operate the piezoelectric vibrator 3 normally and stably for a long period of time without dropping off from 2 and adhering to the piezoelectric vibrator 3.
【0025】尚、前記蓋体2 に被着させた金属層11はメ
タライズ金属層9 からの距離L が0.1mm 未満であるとメ
タライズ金属層9 に半田から成る封止材10を被着接合さ
せる際、半田の一部が金属層11上に流出してメタライズ
金属層9 における封止材10の量が少なくなり、その結
果、蓋体2 を絶縁基体1 に強固に接合させるのが困難と
なる。従って金属層11はメタライズ金属層9 からの距離
L を0.1mm 以上とした位置に形成される。When the distance L from the metallized metal layer 9 of the metal layer 11 adhered to the lid 2 is less than 0.1 mm, the sealing material 10 made of solder is adhered and bonded to the metallized metal layer 9. At this time, a part of the solder flows out onto the metal layer 11 to reduce the amount of the sealing material 10 in the metallized metal layer 9, and as a result, it becomes difficult to firmly bond the lid body 2 to the insulating base body 1. .. Therefore, the metal layer 11 is located at a distance from the metallized metal layer 9
It is formed at a position where L is 0.1 mm or more.
【0026】また前記金属層11は銀(Ag)、金(Au)、ニッ
ケル(Ni)等の半田と接合性の良い金属から成り、例えば
銀からなる場合、銀の粉末80.0乃至95.0重量%に5.0 乃
至20.0重量%のPbO-B 2 O 3 -ZnO系やPbO-B 2 O 3 -ZnO
-SiO2 系等のガラス粉末と適当な有機結合剤、溶剤とを
添加混合して金属ペーストを得、次に前記金属ペースト
を蓋体2 の下面に従来周知のスクリーン印刷法や滴下法
を採用することによって塗布し、最後にこれを約800 ℃
の温度で焼き付けることによって蓋体2 の下面に被着さ
れる。The metal layer 11 is made of a metal such as silver (Ag), gold (Au), and nickel (Ni) that has good bonding properties with solder. For example, when the metal layer 11 is made of silver, the silver powder is 80.0 to 95.0% by weight. 5.0 to 20.0 wt% PbO-B 2 O 3 -ZnO system or PbO-B 2 O 3 -ZnO
-Metallic paste is obtained by adding and mixing glass powder such as SiO 2 system and an appropriate organic binder and solvent, and then the metallic paste is applied to the lower surface of the lid 2 by the conventional screen printing method or dropping method. By applying and finally this at about 800 ° C
It is attached to the lower surface of the lid body 2 by baking at the temperature of.
【0027】かくして本発明の電子部品収納用パッケー
ジによれば絶縁基体1 に取着した保持部材7 に圧電振動
子3 を導電性接着材により接着固定するとともに絶縁基
体1の上面に被着させたメタライズ金属層8 に蓋体2 の
下面に被着させたメタライズ金属層9 を蓋体2に予め被
着接合させておいた半田から成る封止材10を介して接合
させ、絶縁基体1 と蓋体2 とから成る容器4 の内部に圧
電振動子3 を気密に収容することによって製品としての
圧電振動素子となる。Thus, according to the package for storing electronic components of the present invention, the piezoelectric vibrator 3 is adhered and fixed to the holding member 7 attached to the insulating base 1 with a conductive adhesive and is attached to the upper surface of the insulating base 1. The metallized metal layer 8 is attached to the metallized metal layer 8 on the lower surface of the lid 2, and the metallized metal layer 9 is attached to the lid 2 via an encapsulant 10 made of solder which is previously attached and joined to the insulating base 1 and the lid. The piezoelectric vibrator 3 is hermetically housed in the container 4 including the body 2 to form a piezoelectric vibrator as a product.
【0028】尚、本発明は上述の実施例に限定されるも
のではなく、本発明の要旨を逸脱しない範囲であれば種
々の変更は可能であり、例えば実施例では絶縁基体1 を
平板状となし、蓋体2 を椀状となしたが図2に示す如
く、絶縁基体1 に電子部品を収容する凹部1aを設け、蓋
体2 を平板状となしてもよい。この場合、平板状の蓋体
2 に被着する半田と接合性の良い金属層11は外周部に被
着形成する枠状のメタライズ金属層9 と0.1mm 以上の距
離L を隔てて形成される。The present invention is not limited to the above-mentioned embodiments, and various modifications can be made without departing from the gist of the present invention. For example, in the embodiment, the insulating substrate 1 is formed into a flat plate shape. None, the lid 2 has a bowl shape, but as shown in FIG. 2, the insulating base 1 may be provided with a concave portion 1a for accommodating an electronic component, and the lid 2 may have a flat plate shape. In this case, a flat lid
The metal layer 11 having a good bondability with the solder deposited on the second layer 2 is formed at a distance L of 0.1 mm or more from the frame-shaped metallized metal layer 9 deposited on the outer peripheral portion.
【0029】また上述の実施例では圧電振動子を収容す
るパッケージを例にとって説明したが、他の電子部品、
例えば弾性表面波フィルタ等を収容するパッケージにも
適用可能である。Further, in the above-mentioned embodiments, the package for accommodating the piezoelectric vibrator is explained as an example, but other electronic parts,
For example, it can be applied to a package containing a surface acoustic wave filter or the like.
【0030】[0030]
【発明の効果】本発明の電子部品収納用パッケージによ
れば蓋体に被着させた接合のための枠状メタライズ金属
層の内側表面で該メタライズ金属層より所定間隔隔てた
位置に半田接合性の良い金属層を被着させたことからメ
タライズ金属層に半田から成る封止材を予め被着接合さ
せる際、半田の一部が蓋体の中央部側に飛散したとして
も該飛散した半田は金属層によって蓋体に強固に接合さ
れ、その結果、絶縁基体と蓋体とから成る容器の内部に
電子部品を収容させた後、容器に外部振動が印加された
としても飛散した半田は蓋体より脱落して電子部品に付
着することは一切なく、電子部品を長期間にわたり常に
安定に作動させることが可能となる。According to the electronic component storing package of the present invention, the solder bondability is provided on the inner surface of the frame-shaped metallized metal layer for bonding, which is attached to the lid, at a position separated from the metallized metal layer by a predetermined distance. When a sealing material made of solder is previously attached and bonded to the metallized metal layer because a good metal layer is deposited, even if a part of the solder scatters on the central portion side of the lid, the scattered solder is It is firmly bonded to the lid by the metal layer, and as a result, after the electronic components are housed inside the container consisting of the insulating substrate and the lid, the solder that has scattered even if external vibration is applied to the container is the lid. It will not fall off and adhere to the electronic components at all, and the electronic components can always be stably operated for a long period of time.
【図1】本発明の電子部品収納用パッケージの一実施例
を示す断面図である。FIG. 1 is a cross-sectional view showing an embodiment of a package for storing electronic components of the present invention.
【図2】本発明の他の実施例を示す断面図である。FIG. 2 is a sectional view showing another embodiment of the present invention.
【図3】従来の電子部品収納用パッケージの断面図であ
る。FIG. 3 is a cross-sectional view of a conventional electronic component storage package.
1・・・・・絶縁基体 2・・・・・蓋体 3・・・・・電子部品としての圧電振動子 4・・・・・容器 6・・・・・メタライズ配線層 7・・・・・保持部材 8・・・・・絶縁基体に設けたメタライズ金属層 9・・・・・蓋体に設けたメタライズ金属層 10・・・・・半田から成る封止材 11・・・・・半田と接合性の良い金属層 1 ... Insulating substrate 2 ... Lid body 3 ... Piezoelectric vibrator as an electronic component 4 ... Container 6 ... Metallized wiring layer 7 ... -Holding member 8 ... Metallized metal layer provided on the insulating substrate 9 ... Metallized metal layer provided on the lid 10 ... Sealing material made of solder 11 ... Solder A metal layer with good bonding properties
Claims (1)
縁基体と下面に枠状のメタライズ金属層を有する蓋体と
から成り、絶縁基体と蓋体の各々のメタライズ金属層を
半田から成る封止材で接合させることによって絶縁基体
と蓋体とで構成される容器の内部に電子部品を気密に収
容するようになした電子部品収納用パッケージであっ
て、前記蓋体は枠状メタライズ金属層の内側表面で、該
枠状メタライズ金属層より所定間隔を隔てた位置に半田
接合性の良い金属層が被着されていることを特徴とする
電子部品収納用パッケージ。1. A seal comprising an insulating base having a frame-shaped metallized metal layer on an upper surface and a lid having a frame-shaped metallized metal layer on a lower surface, each metallized metal layer of the insulating base and the lid being made of solder. A package for storing electronic parts, wherein electronic parts are hermetically housed in a container composed of an insulating base and a cover by joining with a stopper, the cover being a frame-shaped metallized metal layer. A package for storing electronic parts, characterized in that a metal layer having a good solder joint property is deposited on the inner surface of the substrate at a position spaced a predetermined distance from the frame-shaped metallized metal layer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3334943A JPH05167377A (en) | 1991-12-18 | 1991-12-18 | Package for accommodating electronic component |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3334943A JPH05167377A (en) | 1991-12-18 | 1991-12-18 | Package for accommodating electronic component |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH05167377A true JPH05167377A (en) | 1993-07-02 |
Family
ID=18282972
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3334943A Pending JPH05167377A (en) | 1991-12-18 | 1991-12-18 | Package for accommodating electronic component |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH05167377A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007094284A1 (en) * | 2006-02-15 | 2007-08-23 | Neomax Materials Co., Ltd. | Cap for airtight sealing, package for housing electronic part, and process for producing airtightly sealing cap |
US7842891B2 (en) | 2005-01-21 | 2010-11-30 | Citizen Holdings Co. Ltd. | Sealing board and method for producing the same |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5125092A (en) * | 1974-08-27 | 1976-03-01 | Citizen Watch Co Ltd | SUISHOSHINDOSHIKI MITSUGAIIKI NO FUSHIHO |
JPH03243010A (en) * | 1990-02-21 | 1991-10-30 | Seiko Electronic Components Ltd | Small crystal resonator |
-
1991
- 1991-12-18 JP JP3334943A patent/JPH05167377A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5125092A (en) * | 1974-08-27 | 1976-03-01 | Citizen Watch Co Ltd | SUISHOSHINDOSHIKI MITSUGAIIKI NO FUSHIHO |
JPH03243010A (en) * | 1990-02-21 | 1991-10-30 | Seiko Electronic Components Ltd | Small crystal resonator |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7842891B2 (en) | 2005-01-21 | 2010-11-30 | Citizen Holdings Co. Ltd. | Sealing board and method for producing the same |
WO2007094284A1 (en) * | 2006-02-15 | 2007-08-23 | Neomax Materials Co., Ltd. | Cap for airtight sealing, package for housing electronic part, and process for producing airtightly sealing cap |
JPWO2007094284A1 (en) * | 2006-02-15 | 2009-07-09 | 株式会社Neomaxマテリアル | Hermetic sealing cap, electronic component storage package, and manufacturing method of hermetic sealing cap |
US7790988B2 (en) | 2006-02-15 | 2010-09-07 | Neomax Materials Co., Ltd. | Hermetic sealing cap, electronic component accommodation package, and method for producing hermetic sealing cap |
JP4630338B2 (en) * | 2006-02-15 | 2011-02-09 | 株式会社Neomaxマテリアル | HERMETIC SEALING CAP, ELECTRONIC COMPONENT STORAGE PACKAGE, AND HERMETIC SEALING CAP MANUFACTURING METHOD |
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