JPH0516530B2 - - Google Patents
Info
- Publication number
- JPH0516530B2 JPH0516530B2 JP58171591A JP17159183A JPH0516530B2 JP H0516530 B2 JPH0516530 B2 JP H0516530B2 JP 58171591 A JP58171591 A JP 58171591A JP 17159183 A JP17159183 A JP 17159183A JP H0516530 B2 JPH0516530 B2 JP H0516530B2
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- heat
- flow rate
- rate detector
- sensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010438 heat treatment Methods 0.000 claims description 109
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 25
- 239000012530 fluid Substances 0.000 claims description 18
- 239000010949 copper Substances 0.000 claims description 13
- 239000000919 ceramic Substances 0.000 claims description 11
- 229910052710 silicon Inorganic materials 0.000 claims description 11
- 239000010703 silicon Substances 0.000 claims description 11
- 229910052697 platinum Inorganic materials 0.000 claims description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 9
- 229910052802 copper Inorganic materials 0.000 claims description 9
- 229910045601 alloy Inorganic materials 0.000 claims description 8
- 239000000956 alloy Substances 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 7
- 230000008878 coupling Effects 0.000 claims description 6
- 238000010168 coupling process Methods 0.000 claims description 6
- 238000005859 coupling reaction Methods 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 238000009792 diffusion process Methods 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims description 4
- 229910002482 Cu–Ni Inorganic materials 0.000 claims 4
- -1 Cu-Ni Chemical compound 0.000 claims 2
- 239000012212 insulator Substances 0.000 claims 2
- 238000000151 deposition Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 12
- 238000001514 detection method Methods 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 230000000694 effects Effects 0.000 description 8
- 229910052500 inorganic mineral Inorganic materials 0.000 description 8
- 239000011707 mineral Substances 0.000 description 8
- 238000000605 extraction Methods 0.000 description 7
- 235000015096 spirit Nutrition 0.000 description 7
- 238000007740 vapor deposition Methods 0.000 description 5
- 241001125929 Trisopterus luscus Species 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000009428 plumbing Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000036962 time dependent Effects 0.000 description 2
- 229910000570 Cupronickel Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- YOCUPQPZWBBYIX-UHFFFAOYSA-N copper nickel Chemical compound [Ni].[Cu] YOCUPQPZWBBYIX-UHFFFAOYSA-N 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Details Of Flowmeters (AREA)
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58171591A JPS6063421A (ja) | 1983-09-17 | 1983-09-17 | 感熱形流量検出器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58171591A JPS6063421A (ja) | 1983-09-17 | 1983-09-17 | 感熱形流量検出器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6063421A JPS6063421A (ja) | 1985-04-11 |
| JPH0516530B2 true JPH0516530B2 (enrdf_load_html_response) | 1993-03-04 |
Family
ID=15925994
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58171591A Granted JPS6063421A (ja) | 1983-09-17 | 1983-09-17 | 感熱形流量検出器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6063421A (enrdf_load_html_response) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5080020B2 (ja) * | 2006-04-13 | 2012-11-21 | 日立オートモティブシステムズ株式会社 | 熱式流量センサ |
| JP5094212B2 (ja) * | 2007-05-25 | 2012-12-12 | 日立オートモティブシステムズ株式会社 | 熱式流量計と制御方法 |
-
1983
- 1983-09-17 JP JP58171591A patent/JPS6063421A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6063421A (ja) | 1985-04-11 |
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