JPH0516223Y2 - - Google Patents

Info

Publication number
JPH0516223Y2
JPH0516223Y2 JP1987108303U JP10830387U JPH0516223Y2 JP H0516223 Y2 JPH0516223 Y2 JP H0516223Y2 JP 1987108303 U JP1987108303 U JP 1987108303U JP 10830387 U JP10830387 U JP 10830387U JP H0516223 Y2 JPH0516223 Y2 JP H0516223Y2
Authority
JP
Japan
Prior art keywords
molecular beam
rotating shaft
rotation
drive device
joint component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987108303U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6414168U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987108303U priority Critical patent/JPH0516223Y2/ja
Publication of JPS6414168U publication Critical patent/JPS6414168U/ja
Application granted granted Critical
Publication of JPH0516223Y2 publication Critical patent/JPH0516223Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1987108303U 1987-07-16 1987-07-16 Expired - Lifetime JPH0516223Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987108303U JPH0516223Y2 (enExample) 1987-07-16 1987-07-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987108303U JPH0516223Y2 (enExample) 1987-07-16 1987-07-16

Publications (2)

Publication Number Publication Date
JPS6414168U JPS6414168U (enExample) 1989-01-25
JPH0516223Y2 true JPH0516223Y2 (enExample) 1993-04-28

Family

ID=31343504

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987108303U Expired - Lifetime JPH0516223Y2 (enExample) 1987-07-16 1987-07-16

Country Status (1)

Country Link
JP (1) JPH0516223Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11877628B2 (en) 2019-12-12 2024-01-23 Ykk Corporation Watertight fastener and method for manufacturing same

Also Published As

Publication number Publication date
JPS6414168U (enExample) 1989-01-25

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