JPH0515945Y2 - - Google Patents
Info
- Publication number
- JPH0515945Y2 JPH0515945Y2 JP6312889U JP6312889U JPH0515945Y2 JP H0515945 Y2 JPH0515945 Y2 JP H0515945Y2 JP 6312889 U JP6312889 U JP 6312889U JP 6312889 U JP6312889 U JP 6312889U JP H0515945 Y2 JPH0515945 Y2 JP H0515945Y2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- air
- vacuum
- clean bench
- filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000009423 ventilation Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000011045 prefiltration Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Ventilation (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6312889U JPH0515945Y2 (cs) | 1989-05-30 | 1989-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6312889U JPH0515945Y2 (cs) | 1989-05-30 | 1989-05-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH033438U JPH033438U (cs) | 1991-01-14 |
| JPH0515945Y2 true JPH0515945Y2 (cs) | 1993-04-27 |
Family
ID=31592901
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6312889U Expired - Lifetime JPH0515945Y2 (cs) | 1989-05-30 | 1989-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0515945Y2 (cs) |
-
1989
- 1989-05-30 JP JP6312889U patent/JPH0515945Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH033438U (cs) | 1991-01-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA1260212A (en) | Means for cleaning filters in wet and dry vacuum cleaners | |
| JPH0515945Y2 (cs) | ||
| JP3036873B2 (ja) | 超清浄囲繞コンテナ用吹き出しドア | |
| US20030077989A1 (en) | Polishing system with air exhaust system | |
| CN215804869U (zh) | Egr阀温度传感器 | |
| US20040211162A1 (en) | Portable air filtration tool (PAFT) | |
| JPH02278746A (ja) | ウェハー保管箱 | |
| JPS627824B2 (cs) | ||
| CN223312689U (zh) | 一种自动绕管单工位高负压净化装置 | |
| JPH0248015Y2 (cs) | ||
| CN207822719U (zh) | 除尘设备的控制系统及生产车间 | |
| CN112360724A (zh) | 一种客车用电动空压机空滤器进气装置及客车 | |
| CN222034780U (zh) | 一种负压隔离箱 | |
| JPH0532191Y2 (cs) | ||
| CN211800969U (zh) | 一种超净工作台 | |
| JPH0336840Y2 (cs) | ||
| JPH06206605A (ja) | 半導体ウエハなどの保管庫及び保管方法 | |
| CN222163752U (zh) | 一种提升阀气缸装置 | |
| JPS62236688A (ja) | 清浄作業台 | |
| CN212881476U (zh) | 一种空气净化装置及隔离系统 | |
| JPH0438702Y2 (cs) | ||
| JPH0611069Y2 (ja) | 負圧容器内の負圧維持装置 | |
| JP2534245Y2 (ja) | 真空吸着装置用バルブ | |
| JPS627827B2 (cs) | ||
| JPS588331Y2 (ja) | 空気濾過装置 |