JPH05159224A - Thin film magnetic head - Google Patents

Abstract

PURPOSE:To unnecessitate the impression of a magnetic field for applying uniaxial anisotropy to a magnetic pole part in the case of forming a magnetic substance core concerning the thin film magnetic head for recording and reproducing to be loaded on a hard disk device. CONSTITUTION:Since a magnetic substance core 1 is provided in a certain shape having a magnetic pole part 3 spreading on the extension of a magnetic pole part 2 and on the opposite side of a back core part 16, the uniaxial anisotropy caused by shape anisotropy can be applied to the magnetic pole part 2 of the magnetic substance core 1.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a recording / reproducing thin film magnetic head mounted on a hard disk drive.

[0002]

2. Description of the Related Art A conventional thin film magnetic head will be described below.

As shown in FIGS. 4 and 5, Al ₂ O ₃
A base insulating layer 11 of Al ₂ O ₃ is formed on a ceramic substrate 14 such as TiC by a sputtering method, and a base permalloy layer is formed by a vapor deposition method or a sputtering method. Next, a photoresist is applied on the underlying permalloy layer, and exposed using a mask having the shape of the magnetic core 1.
Further development is performed to form a resist having the shape of the magnetic core 1.

Thereafter, the lower magnetic films 4 and 5 are formed by plating on the resist-free base permalloy layer formed by the above-mentioned method.

Next, exposure and development are performed to remove the resist, and the underlying permalloy layer other than the shape of the magnetic core 1 is removed by ion milling.

A resist 12 serving as an insulator is formed thereon, and layers of the first conductor coil 6, the resist 12, the second conductor coil 7 and the resist 12 are formed.

After the formation of the first and second conductor coils 6 and 7 and the formation of the insulator by the resist 12, a base permalloy layer is formed by a sputtering method. Next, a core-shaped resist for the upper magnetic films 8 and 9 is formed in the same manner as when forming the lower magnetic films 4 and 5. Further, the upper magnetic film 8 is formed by plating on the underlying permalloy layer having no resist,
9 is formed.

Finally, after forming a protective film 15 of Al ₂ O ₃ by the sputtering method, lapping is performed so that the surface becomes flat. In the figure, 10 is a gap, 13 is a magnetic pole portion,
16 is a back core part.

Upper magnetic films 8 and 9 and lower magnetic films 4,5
When the magnetostriction is positive (> 0) during formation of
It exhibits a magnetic domain structure like. When the magnetostriction is negative (<0), the magnetic domain structure shown in FIG.

Further, the shape having the extended magnetic pole portion 13 of the magnetic core 1 as shown in FIG. 4 has a magnetic domain structure having domain walls in the vertical direction as shown in FIG. 6 due to shape anisotropy. .. By applying a magnetic field to this in the X-axis direction as shown in FIG. 6, a magnetic domain structure having a shape anisotropy is overcome and a magnetic domain structure as shown in FIG. 7B is obtained. That is, it is necessary to apply a magnetic field when forming the magnetic core 1.

[0011]

As described above, the conventional shape of the magnetic pole body core 1 requires the application of a magnetic field that overcomes the shape anisotropy when the magnetic body core 1 is formed. I had.

The present invention solves the above-mentioned conventional problems, and an object of the present invention is to provide a thin film magnetic head which does not require the application of a magnetic field for imparting uniaxial anisotropy to a magnetic pole portion when forming a magnetic core. And

[0013]

In order to achieve this object, a thin film magnetic head of the present invention has a magnetic pole portion extended and
A magnetic core having a shape having a magnetic pole portion extending to the opposite side of the back core portion is provided.

[0014]

With this structure, uniaxial anisotropy due to shape anisotropy is given to the magnetic pole portion of the magnetic core.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

In FIGS. 1 and 2 showing an embodiment of the present invention, the same parts as those of the conventional example are designated by the same reference numerals and the description thereof will be omitted.

The feature of this embodiment lies in that the above-mentioned conventional magnetic core 1 is formed with a magnetic pole portion 3 having a spread on the side opposite to the back core portion 16 as shown in FIGS. This is the point where core 1 is set.

With this structure, the magnetic pole portion 2 can have a magnetic domain structure having domain walls in the X direction as shown in FIG. 3 due to the shape anisotropy without applying a magnetic field in the X direction.

The magnetic pole portion 3 having a side opposite to the back core portion 16 is removed by lapping after the thin film process is completed. That is, the magnetic pole portion 3 is necessary only for imparting uniaxial anisotropy due to the shape anisotropy to the magnetic pole portion 2, becomes unnecessary after imparting the uniaxial anisotropy, and is finally removed.

Here, uniaxial anisotropy can be imparted only by the magnetic pole portion 2 without the magnetic pole portion 3, but since the magnetic pole portion 3 is formed, the film thickness at the edge portion of the magnetic core 1 becomes thicker.
By cutting off by lapping, the magnetic pole portion 2 having a good film thickness distribution can be obtained.

It is desirable that the magnetic pole portion 2 of the magnetic core 1 has an aspect ratio of 0.6 or less. As described above, according to the present embodiment, the extension of the magnetic pole portion 2 and the back core portion 1 are performed.
By providing the magnetic core 1 having a shape having the magnetic pole portion 3 which spreads to the side opposite to 6, the magnetic core 1 of the thin film magnetic head
A magnetic field for giving uniaxial anisotropy to the magnetic pole portion 2 is not required at the time of forming the magnetic pole, and the magnetic pole portion 2 of the magnetic core 1 is formed only by the shape anisotropy.
Can be given uniaxial anisotropy. As a result, the magnet for applying the magnetic field can be made smaller or unnecessary, so that the magnetic material forming apparatus can be simplified and the cost can be reduced.

[0022]

As is apparent from the above description of the embodiments, the present invention is provided with a magnetic core having a shape having a magnetic pole portion extending on the extension of the magnetic pole portion and on the side opposite to the back core portion. As a result, an excellent thin film magnetic head that does not require application of a magnetic field can be realized because uniaxial anisotropy is given to the magnetic pole portion when the magnetic core is formed.

[Brief description of drawings]

FIG. 1 is a schematic plan view showing a concept of a main part of a thin film magnetic head according to an embodiment of the present invention with a protective film omitted.

FIG. 2 is a cross-sectional view of a main part of the thin film magnetic head taken along the line AA ′ in FIG.

FIG. 3 is a diagram showing a magnetic domain structure of a magnetic core of a thin film magnetic head according to an embodiment of the present invention.

FIG. 4 is a schematic plan view showing a concept of a main part of a conventional thin film magnetic head without a protective film.

5 is a cross-sectional view of the main part of the thin-film magnetic head taken along the line BB ′ in FIG.

FIG. 6 is a diagram showing a magnetic domain configuration of a magnetic core of a conventional thin film magnetic head.

FIG. 7A is a diagram showing a magnetic domain structure when the magnetostriction of a magnetic core of the thin film magnetic head is positive; FIG. 7B is a diagram showing a magnetic domain structure when the magnetostriction of the magnetic core of the thin film magnetic head is negative.

[Explanation of symbols]

 1 magnetic core 2 magnetic pole part 3 magnetic pole part 16 back core part

Claims (2)

[Claims] 1. A magnetic body formed in a plane by a one-layer or multi-layer conductor coil wound in a plane, an insulator for insulating the conductor coil, and two or more magnetic films sandwiching the conductor coil. A thin film magnetic head having a core, wherein the magnetic core is provided in a shape having a magnetic pole part extending on the side opposite to the back core part on extension of the magnetic pole part. 2. The thin film magnetic head according to claim 1, wherein the magnetic core is formed by uniaxial anisotropy of its magnetic pole portion by shape anisotropy.