JPH0515857A - Washing device - Google Patents

Abstract

PURPOSE:To provide the washing device which can improve the washing capacity to a work and prevents the state of contamination of washing members for washing the work. CONSTITUTION:A washing liquid is supplied from a washing liquid supplying device 32 into a liquid pooling groove 23 of a rotating body 19 coated with a cover 14 via tubes 31a to 31d. A part of the washing liquid flows over an outside wall 22 and flows downward between this wall and the cover 14. The remaining washing liquid in the liquid pooling groove 23 falls via through holes 25a to 25d onto the work 12 and diffuses radically outward through the inside of a brush 15.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to dust and dirt on a plate-like body such as a glass substrate, a silicon wafer or a printed wiring board in a semiconductor manufacturing process, a liquid crystal display device manufacturing process or a manufacturing process of various electronic parts. The present invention relates to a cleaning device used for cleaning and removing a material.

[0002]

2. Description of the Related Art In a manufacturing process of a liquid crystal display device, a manufacturing process of a printed wiring board, etc., for example, a cleaning process is indispensable when patterning circuit wiring on a substrate by a well-known photo process. FIG. 10 shows a typical conventional cleaning device 1.
FIG. As an example, a work 2 to be cleaned, which is a glass substrate at a stage where an ITO (indium tin oxide) thin film is formed on the surface and is etched into a desired circuit wiring shape, is vacuum-adsorbed on the rotation holding member 3. It is fixed by, for example, and is rotationally driven in the direction of arrow A1 with high precision. The work 2 and the rotation holding member 3 as described above are
A rotating member 5 housed in the scattering prevention frame 4 and driven to rotate in the arrow A2 direction is inserted from above, and a pair of nozzles 7 and 8 for injecting a cleaning liquid are provided near the brush 6 of the rotating member 5.

In this conventional example, a cleaning liquid is ejected from the nozzles 7 and 8 onto the work 2, and the cleaning liquid and the rotating member 5 which is rotationally driven in the arrow A2 direction and travels in the arrow A3 direction achieve the cleaning action. I am trying.

[0004]

In the conventional cleaning device 1, when the work 2 is cleaned of dirt and dust, the brush 6 of the rotating member 5 is soiled by the dirt and dust, and It is generally difficult to remove such dirt and dust, so that the dirt and dust remaining on the brush 6 will reattach to the glass substrate to be cleaned next. As a result, the ability of the brush 6 to remove dust and the like decreases. Further, since the nozzles 7 and 8 discharge the cleaning liquid from the outside to the brush 6, it is difficult to spread the cleaning liquid over the entire range in which the brush 6 contacts the work 2, and the efficiency of removing dust and the like decreases. There is a problem of doing.

An object of the present invention is to solve the above technical problems and to provide a cleaning device capable of improving the cleaning ability for an object and preventing the cleaning member for cleaning the object from being contaminated. ..

[0006]

According to the present invention, a cleaning member is driven to rotate about a rotation axis, and a cleaning member is mounted in a range other than the vicinity of a rotation center position at one end in the axial direction, and the one end from the other end. A rotating member having a through-hole that is open to the inside of the vicinity of the rotation center position over the end portion, and a rotating member that surrounds and rotatably holds the rotating member, and the cleaning member side is open, and And a cover member provided with a cleaning liquid supply member that supplies the cleaning liquid toward the other end.

[0007]

When the object to be cleaned is to be cleaned by the cleaning apparatus of the present invention, the cleaning member mounted on one end of the rotating member slides on the object to perform the cleaning operation. At this time, the cleaning liquid for cleaning is supplied to the other side end of the rotating member through the cover member, passes through the through hole formed from the other side end to the one side end, and passes through the rotating member. It flows out near the rotation center position at one end. Therefore, the cleaning liquid on the object diffuses outward through the cleaning member. As a result, the cleaning operation is performed on the cleaning member using the cleaning liquid.

Further, since the cleaning liquid spreads outward from the vicinity of the rotation center position of the rotating member, the cleaning liquid can be spread over the front surface where the cleaning member comes into contact with the object, and the cleaning performance is remarkably improved. can do. Further, since the cleaning member is self-cleaning by the cleaning liquid flowing from the inside to the outside, it is possible to prevent the removed substance removed from the target object from adhering to the cleaning member, and the new target member is contaminated by the cleaning member. It is possible to prevent a situation that would occur.

[0009]

1 is an enlarged sectional view of a cleaning apparatus 11 according to an embodiment of the present invention, and FIG. 2 is a sectional view of the cleaning apparatus 11.
This embodiment describes an example of cleaning the surface of a glass substrate used in manufacturing a liquid crystal display device, for example, but the present invention is not limited to such an embodiment. A workpiece 12 such as a glass substrate to be cleaned is fixed to a rotation holding member 13 by vacuum suction or the like, and the rotation holding member 13 is rotationally driven with high precision in the arrow B1 direction.
A brush 15 as a cleaning member, which is covered with a cover 14 as a cover member, is slidably contacted on the work 12, and the brush 15 made of nylon resin or the like is indicated by an arrow B2 by a rotary shaft 16 connected by a structure described later. While being rotationally driven in the direction, the camera moves in parallel in the left-right direction of FIG. A cleaning liquid such as pure water is supplied into the cover 14 as described later. Such a work 12, the rotation holding member 13, and the cover 1
4 and the like are stored in a scattering prevention frame 17 for preventing cleaning liquid and the like from scattering around.

The rotating shaft 16 of the cleaning device 11 is rotationally driven by a motor 18 in the direction of arrow B2, and its tip is coaxially fixed to the shaft portion 20 of the rotating body 19. An end portion of the shaft portion 20 on the side opposite to the rotation shaft 16 is coaxially and integrally fixed to a disk portion 21 as a rotating member having a plate thickness t1. An outer wall 22 having a height h1 is formed over the entire circumference at the peripheral edge of the disc portion 21 to form an annular liquid storage groove 23. This disk part 21
Is formed at a plurality of locations in the circumferential direction, as will be described later, and becomes closer to the rotation center position 24 of the rotating body 19 as it goes from the liquid reservoir groove 23 side to the side opposite to the shaft portion 20 of the disc portion 21. A plurality of through holes 25a, 25 formed in an inclined state
b, 25c and 25d are formed.

A lower end portion 2 of the disc portion 21 opposite to the shaft portion 20.
In 1a, the brush 15 is planted in a planting region 26 radially outward of the formation range of the openings of the through holes 25a and 25d on the lower end 21a side.

The cover 14 which surrounds the rotating body 19 and the brush 15 has a large diameter portion 2 which surrounds the disc portion 21.
7, a medium diameter portion 28 that surrounds the shaft portion 20, and a small diameter portion 29 that surrounds the rotary shaft 16 are coaxially and integrally formed.
A bearing 30 having a sealing property against the cleaning liquid, such as a magnetically sealed bearing, is interposed between the shaft portion 20 and the medium diameter portion 28, and the cover 14 rotatably supports the rotating body 19. The connecting portion 33 that connects the large-diameter portion 27 and the medium-diameter portion 28 of the cover 14 and the upper end portion of the outer wall 22 of the disc portion 21 are configured to be separated by a minute distance d. The lower end of the large diameter portion 27 of the cover 14 is configured to be higher than the tip of the brush 15 by a height h2.

Along the cover 14, for example, four tubes 31a, 31b, 31 which are cleaning liquid supply members.
c and 31d are fixed, and the tip end thereof is inserted into the cover 14 to face the liquid storage groove 23 of the disk portion 21, and more preferably, to a position facing the opening of the through holes 25a to 25d on the liquid storage groove 23 side. Will be placed. Each of the tubes 31a to 31d is connected to the cleaning liquid supply device 32 and supplied with the cleaning liquid.

3 is a sectional view taken along the section line X3-X3 in FIG. 1, FIG. 4 is a bottom view of the lower end 21a of the rotating body 19, and FIG. 5 is a cleaning liquid on the bottom surface of the rotating body 19. It is a figure which shows the flowing direction of. As described above, for example, four through holes 25a to 25d are formed at equal intervals in the liquid reservoir groove 23, and the opening of the disc portion 21 on the lower end portion 21a side is closer to the rotation center position 24. It is formed.

The operation of the cleaning device 11 will be described below. As shown in FIG. 2, when the cleaning device 11 is in sliding contact with the workpiece 12, the cleaning liquid is supplied from the cleaning liquid supply device 32 into the liquid reservoir groove 23 via the tubes 31a to 31d. At the same time, the rotation holding member 13 is rotationally driven in the arrow B1 direction, and the rotary shaft 16 is rotationally driven in the arrow B2 direction. As a result, a part of the cleaning liquid supplied into the liquid reservoir groove 23 crosses over the outer wall 22 and the cover 14 and the disc portion 2
1 to move radially outward on the work 12 and preliminarily clean the area on the work 12 to be cleaned by the brush 15 in advance. On the other hand, the liquid reservoir groove 2
The remaining portion of the cleaning liquid in 3 drops downward through each of the through holes 25a to 25d and diffuses outward on the work 12 in the radial direction as shown by arrow B4 in FIG. The work 12 is cleaned together with the brush 15 which is rotated and driven to rotate.

As a result, the cleaning liquid can be spread over the entire area of the work 12 covered with the rotating body 19, and the cleaning action can be performed efficiently. Further, since the cleaning liquid from the through holes 25a to 25d passes through the brush 15 while moving outward on the work 12 in the radial direction, the effect of cleaning the brush 15 is also realized. Therefore, work 1
It is possible to prevent a situation in which the removed substance removed from 2 again adheres to the brush 15 and stains the work 12 again, or the work 12 newly set for cleaning is polluted. Also in this respect, the cleaning ability can be improved.

FIG. 6 shows a rotating body 19a according to another embodiment of the present invention.
7 is a sectional view corresponding to FIG. 3 of FIG.
It is a bottom view of a. This embodiment is similar to the previous embodiment,
Corresponding parts are designated by the same reference numerals. The remarkable point of this embodiment is that the through holes 25a to 25d penetrating the disc portion 21 in the plate thickness direction are rotated from the liquid reservoir groove 23 side opening portion to the lower end portion 21a side opening portion. It is configured to be inclined toward the center position 24 and also to be inclined toward the arrow B2 direction along the circumferential direction.

As a result, the cleaning liquid from the through holes 21a to 25b has a momentum component in the circumferential direction as shown by the arrow B5 in FIG. 7 and falls on the work 12 to form a vortex. Such a cleaning liquid is swirled on the work 12 as shown by an arrow B5 in FIG. 8 and diffuses outward in the radial direction. Therefore, the time for the cleaning liquid to pass through the brush 15 increases, and the cleaning liquid overflow further improves the cleaning efficiency of the workpiece 12 and the brush 15.

FIG. 9 is a sectional view of a rotating body 19b according to still another embodiment of the present invention. This embodiment is similar to the above-mentioned embodiment, and corresponding parts are designated by the same reference numerals. The point to be noted in this embodiment is that the through hole 25a opening to the liquid reservoir groove 23 is formed.
˜25d are formed by bending inward in the radial direction inside the disk portion 21, and communicate with the common hole 35 at the center of rotation.

That is, in this embodiment, it is not necessary to form the four openings corresponding to the respective through holes 25a to 25d in the lower end portion 21a of the disk portion 21, and the single common hole 35 is provided near the center of rotation. Can be formed, and the planting region 26 in which the brush 15 is planted can be enlarged. That is, according to this embodiment as well, the same effects as the effects described in the above-described embodiments can be achieved, the installation area of the brush 15 can be increased, and the cleaning efficiency can be increased in this respect as well.

[0021]

As described above, according to the present invention, when an object is to be washed by the washing apparatus, the washing member mounted on one end of the rotary member slides on the object. To act. At this time, the cleaning liquid for cleaning is supplied to the other side end of the rotating member through the cover member, and passes through the through hole formed from the other side end to the one side end,
It flows out near the rotation center position at one end of the rotating member. Therefore, the cleaning liquid on the object diffuses outward through the cleaning member. As a result, the cleaning operation is performed on the cleaning member using the cleaning liquid.

Further, since the cleaning liquid spreads outward from the vicinity of the rotation center position of the rotating member, the cleaning liquid can be spread over the front surface where the cleaning member comes into contact with the object, and the cleaning ability is remarkably improved. can do. Further, since the cleaning member is self-cleaning by the cleaning liquid flowing from the inside to the outside, it is possible to prevent the removed substance removed from the target object from adhering to the cleaning member, and the new target member is contaminated by the cleaning member. It is possible to prevent a situation that would occur.

[Brief description of drawings]

FIG. 1 is an enlarged sectional view of a cleaning device 11 according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view of a cleaning device 11.

FIG. 3 is a cross-sectional view of a rotating body 19.

FIG. 4 is a bottom view of a rotating body 19.

FIG. 5 is a diagram showing a flowing direction of a cleaning liquid on a bottom surface of a rotating body 19.

FIG. 6 is a sectional view of a rotating body 19a according to a second embodiment of the present invention.

FIG. 7 is a bottom view of a rotating body 19a.

FIG. 8 is a diagram showing the flow direction of the cleaning liquid of the present embodiment.

FIG. 9 is a sectional view of a rotating body 19b according to a second embodiment of the present invention.

FIG. 10 is a cross-sectional view of a conventional cleaning device 1.

[Explanation of symbols]

 11 Cleaning Device 12 Work 14 Cover 19, 19a, 19b Rotating Body 21 Disc Part 21a Lower End 23 Liquid Reservoir Groove 24 Rotation Center Position 25a-25d Through Hole 31a-31d Tube

Claims (1)

Claim: What is claimed is: 1. A cleaning member is driven to rotate about a rotation axis, and a cleaning member is mounted in a range other than the vicinity of a rotation center position at one end in the axial direction, and the other end to the one end. A rotating member formed with a through hole that opens inside the area near the rotation center position, and the rotating member is surrounded and rotatably held, and the cleaning member side is open, and the other of the rotating members. A cleaning device, comprising: a cover member provided with a cleaning liquid supply member for supplying a cleaning liquid toward an end portion.