JPH0515787B2 - - Google Patents

Info

Publication number
JPH0515787B2
JPH0515787B2 JP59034104A JP3410484A JPH0515787B2 JP H0515787 B2 JPH0515787 B2 JP H0515787B2 JP 59034104 A JP59034104 A JP 59034104A JP 3410484 A JP3410484 A JP 3410484A JP H0515787 B2 JPH0515787 B2 JP H0515787B2
Authority
JP
Japan
Prior art keywords
metal
chamber
coating
hydrogen
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59034104A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60149777A (ja
Inventor
Jabitsudo Hakimu Mohametsudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIBAADEI ENG Ltd
Original Assignee
RIBAADEI ENG Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIBAADEI ENG Ltd filed Critical RIBAADEI ENG Ltd
Publication of JPS60149777A publication Critical patent/JPS60149777A/ja
Publication of JPH0515787B2 publication Critical patent/JPH0515787B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP3410484A 1983-02-25 1984-02-24 金属化合物被覆形成法 Granted JPS60149777A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US46985783A 1983-02-25 1983-02-25
US469857 1983-02-25
US577225 1984-02-06

Publications (2)

Publication Number Publication Date
JPS60149777A JPS60149777A (ja) 1985-08-07
JPH0515787B2 true JPH0515787B2 (enrdf_load_stackoverflow) 1993-03-02

Family

ID=23865309

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3410484A Granted JPS60149777A (ja) 1983-02-25 1984-02-24 金属化合物被覆形成法

Country Status (2)

Country Link
JP (1) JPS60149777A (enrdf_load_stackoverflow)
CA (1) CA1224091A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007254868A (ja) * 2006-03-24 2007-10-04 Jfe Steel Kk チタン化合物の成膜方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2775955B2 (ja) * 1990-01-31 1998-07-16 三菱マテリアル株式会社 耐摩耗性に優れたコーティングサーメットの製造法
US5192589A (en) * 1991-09-05 1993-03-09 Micron Technology, Inc. Low-pressure chemical vapor deposition process for depositing thin titanium nitride films having low and stable resistivity
JP4983038B2 (ja) * 2006-02-16 2012-07-25 Ｊｆｅスチール株式会社 ＴｉＮの成膜方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5328575A (en) * 1976-08-31 1978-03-16 Fujikoshi Kk Process for coating with titanium carbide
JPS5428240A (en) * 1977-08-05 1979-03-02 Seikosha Kk Small size precision steel bearing and method of making same
JPS54109098A (en) * 1978-02-15 1979-08-27 Hitachi Metals Ltd Method of manufacturing hafnium compound

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007254868A (ja) * 2006-03-24 2007-10-04 Jfe Steel Kk チタン化合物の成膜方法

Also Published As

Publication number Publication date
JPS60149777A (ja) 1985-08-07
CA1224091A (en) 1987-07-14

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