JPH0515660Y2 - - Google Patents
Info
- Publication number
- JPH0515660Y2 JPH0515660Y2 JP1988105963U JP10596388U JPH0515660Y2 JP H0515660 Y2 JPH0515660 Y2 JP H0515660Y2 JP 1988105963 U JP1988105963 U JP 1988105963U JP 10596388 U JP10596388 U JP 10596388U JP H0515660 Y2 JPH0515660 Y2 JP H0515660Y2
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- valve
- curved surface
- valve seat
- support member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002184 metal Substances 0.000 claims description 9
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Landscapes
- Diaphragms And Bellows (AREA)
- Lift Valve (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988105963U JPH0515660Y2 (US07582779-20090901-C00044.png) | 1988-08-12 | 1988-08-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988105963U JPH0515660Y2 (US07582779-20090901-C00044.png) | 1988-08-12 | 1988-08-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0229361U JPH0229361U (US07582779-20090901-C00044.png) | 1990-02-26 |
| JPH0515660Y2 true JPH0515660Y2 (US07582779-20090901-C00044.png) | 1993-04-23 |
Family
ID=31339049
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988105963U Expired - Lifetime JPH0515660Y2 (US07582779-20090901-C00044.png) | 1988-08-12 | 1988-08-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0515660Y2 (US07582779-20090901-C00044.png) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2547590Y2 (ja) * | 1993-11-12 | 1997-09-10 | 大野ベロー工業株式会社 | ダイヤフラム弁 |
| JP3586075B2 (ja) * | 1997-08-15 | 2004-11-10 | 忠弘 大見 | 圧力式流量制御装置 |
| JP6564593B2 (ja) | 2015-03-25 | 2019-08-21 | 株式会社フジキン | ダイヤフラム弁 |
| US11402029B2 (en) * | 2018-04-06 | 2022-08-02 | Fujikin Incorporated | Valve device, fluid control system, fluid control method, semiconductor manufacturing system, and semiconductor manufacturing method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0234532Y2 (US07582779-20090901-C00044.png) * | 1985-12-04 | 1990-09-17 |
-
1988
- 1988-08-12 JP JP1988105963U patent/JPH0515660Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0229361U (US07582779-20090901-C00044.png) | 1990-02-26 |
