JPH051411B2 - - Google Patents
Info
- Publication number
- JPH051411B2 JPH051411B2 JP4759184A JP4759184A JPH051411B2 JP H051411 B2 JPH051411 B2 JP H051411B2 JP 4759184 A JP4759184 A JP 4759184A JP 4759184 A JP4759184 A JP 4759184A JP H051411 B2 JPH051411 B2 JP H051411B2
- Authority
- JP
- Japan
- Prior art keywords
- test
- tank
- liquid
- test liquid
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000012360 testing method Methods 0.000 claims description 118
- 239000007788 liquid Substances 0.000 claims description 76
- 239000000428 dust Substances 0.000 description 16
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 8
- 238000009835 boiling Methods 0.000 description 5
- 230000002950 deficient Effects 0.000 description 4
- 238000007654 immersion Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- NEHMKBQYUWJMIP-UHFFFAOYSA-N chloromethane Chemical compound ClC NEHMKBQYUWJMIP-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/06—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point by observing bubbles in a liquid pool
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4759184A JPS60190830A (ja) | 1984-03-12 | 1984-03-12 | リ−クテスト装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4759184A JPS60190830A (ja) | 1984-03-12 | 1984-03-12 | リ−クテスト装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60190830A JPS60190830A (ja) | 1985-09-28 |
| JPH051411B2 true JPH051411B2 (enExample) | 1993-01-08 |
Family
ID=12779492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4759184A Granted JPS60190830A (ja) | 1984-03-12 | 1984-03-12 | リ−クテスト装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60190830A (enExample) |
-
1984
- 1984-03-12 JP JP4759184A patent/JPS60190830A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60190830A (ja) | 1985-09-28 |
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