JPH0513903A - Metal core substrate and manufacture there0f - Google Patents

Metal core substrate and manufacture there0f

Info

Publication number
JPH0513903A
JPH0513903A JP16118291A JP16118291A JPH0513903A JP H0513903 A JPH0513903 A JP H0513903A JP 16118291 A JP16118291 A JP 16118291A JP 16118291 A JP16118291 A JP 16118291A JP H0513903 A JPH0513903 A JP H0513903A
Authority
JP
Japan
Prior art keywords
hole
layer
insulating layer
core substrate
metal plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16118291A
Other languages
Japanese (ja)
Inventor
Toshiaki Nishikawa
敏明 西川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP16118291A priority Critical patent/JPH0513903A/en
Publication of JPH0513903A publication Critical patent/JPH0513903A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/05Insulated conductive substrates, e.g. insulated metal substrate
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42Plated through-holes or plated via connections

Landscapes

  • Insulated Metal Substrates For Printed Circuits (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)

Abstract

PURPOSE:To provide a metal core substrate having high dielectric withstand voltage in its through hole part. CONSTITUTION:After an insulating layer, consisting of a crystallized glass layer 1, is additionary formed in the through hole 2 of a metal core substrate, having an insulating layer 5 formed on the circumference of a metal plate 4, and on the circumference of the through hole 2, a through hole metallized layer 6 is formed. As an insulating layer, consisting of a crystallized glass layer 1, is additionally formed in the through hole 2 and its circumference as above-mentioned, the dielectric withstand voltage between the through hole metallized layer 6 and the metal plate 4 can be improved.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はメタルコア基板及びその
製造方法に関し、特に電子部品を搭載するメタルコア基
板及びその製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a metal core substrate and a manufacturing method thereof, and more particularly to a metal core substrate on which electronic parts are mounted and a manufacturing method thereof.

【0002】[0002]

【従来の技術】従来のメタルコア基板は、貫通穴を有
し、端面及び貫通穴の縦断面が面取りした形状の金属板
に、無機絶縁物の粉末を溶媒に懸濁し粉末の粒子に帯電
させた溶液中に浸漬し電気泳動法で金属板の周囲に絶縁
体を付着させ、約900°C1時間焼成し100〜20
0μm厚さの絶縁層を形成する。次に、この絶縁層上に
スクリーン印刷法等を用い、銀パラジウム等の厚膜導体
層で配線パターン及びスルーホールメタライズ層を形成
し、その後抵抗体層,保護ガラス層等を順次形成したメ
タルコア基板であった。
2. Description of the Related Art A conventional metal core substrate has a through hole, and a metal plate having a chamfered end face and a vertical cross section of the through hole is prepared by suspending a powder of an inorganic insulating material in a solvent and charging the powder particles. Immerse in a solution, attach an insulator around the metal plate by electrophoresis, and bake at 900 ° C for 1 hour to 100-20
An insulating layer having a thickness of 0 μm is formed. Next, using a screen printing method or the like on this insulating layer, a metal core substrate in which a wiring pattern and a through-hole metallized layer are formed by a thick film conductor layer of silver palladium or the like, and then a resistor layer, a protective glass layer, etc. are sequentially formed. Met.

【0003】このような従来のメタルコア基板は、電気
泳動法の性質上スルーホールの内部等のせまい部分では
絶縁体が付着しにくいこと及び約900°C1時間の焼
成の際スルーホールの中及び周囲や基板端部の曲面に形
成した絶縁体が軟化し流動することからスルーホールの
中及び周囲で絶縁層の厚みが平面部の絶縁層の厚みの1
/2〜1/4になる。
In such a conventional metal core substrate, due to the nature of the electrophoretic method, it is difficult for the insulator to adhere to a narrow portion such as the inside of the through hole, and the inside and the periphery of the through hole during baking at about 900 ° C. for 1 hour. Since the insulator formed on the curved surface of the substrate and the edge of the substrate softens and flows, the thickness of the insulating layer in and around the through-hole is 1
It becomes / 2-1 / 4.

【0004】[0004]

【発明が解決しようとする課題】この従来のメタルコア
基板の電気泳動法で形成し、焼成した絶縁層では、スル
ーホールの中及び周囲で、平面部に比べて1/2〜1/
4と薄くなるので、スルーホールメタライズ層を形成し
表面と裏面の配線パターンの接続を行う際、金属板との
間で絶縁耐電圧が不十分であるという問題点があった。
In the insulating layer formed and baked by the conventional electrophoretic method of the metal core substrate, in the inside and around the through hole, it is 1/2 to 1/1 / third of that of the flat portion.
Therefore, when forming the through-hole metallized layer and connecting the wiring patterns on the front surface and the back surface, the dielectric strength between the metal plate and the metal plate is insufficient.

【0005】本発明の目的は、スルーホールメタライズ
層と金属板との間の絶縁耐電圧の優れたメタルコア基板
及びその製造方法を提供することにある。
An object of the present invention is to provide a metal core substrate having an excellent dielectric strength between a through-hole metallized layer and a metal plate, and a method for manufacturing the same.

【0006】[0006]

【課題を解決するための手段】(1)本発明は、金属板
と、該金属板の表面と貫通穴内面に形成された絶縁層
と、該絶縁層上に形成された導体層と、スルーホールメ
タライズ層と、抵抗体層と、保護ガラス層とを有するメ
タルコア基板において、前記貫通穴とその周囲の前記絶
縁層と前記スルーホールメタライズ層との間に絶縁層を
形成したことを特徴とする。
(1) The present invention provides a metal plate, an insulating layer formed on the surface of the metal plate and the inner surface of the through hole, a conductor layer formed on the insulating layer, and a through hole. In a metal core substrate having a hole metallized layer, a resistor layer, and a protective glass layer, an insulating layer is formed between the through hole and the insulating layer around the through hole and the through hole metallized layer. .

【0007】(2)本発明のメタルコア基板の製造方法
は、金属板に貫通穴を穿設する工程と、前記金属板の表
面と前記貫通穴内面に電気泳動法にて絶縁層を形成し焼
成する工程と、該絶縁層上の前記貫通穴の内面と周囲に
スクリーン印刷法にて選択的に絶縁層を追加形成し焼成
する工程と、該絶縁層上にスルーホールメタライズ層を
形成する工程とを含む。
(2) In the method of manufacturing a metal core substrate of the present invention, a step of forming a through hole in a metal plate, and forming an insulating layer on the surface of the metal plate and the inner surface of the through hole by an electrophoretic method and baking. A step of forming an additional insulating layer on the inner surface and the periphery of the through hole on the insulating layer by screen printing and firing, and a step of forming a through-hole metallized layer on the insulating layer. including.

【0008】[0008]

【実施例】次に、本発明の実施例について図面を参照し
て説明する。
Embodiments of the present invention will now be described with reference to the drawings.

【0009】図1(a),(b)は本発明の一実施例の
構成図であり、(a)は平面図,(b)はそのA−A′
線断面図である。
1 (a) and 1 (b) are configuration diagrams of an embodiment of the present invention, in which (a) is a plan view and (b) is its AA 'line.
It is a line sectional view.

【0010】図1(a),(b)に示すように、金属板
4の周囲に絶縁層5が形成されたメタルコア基板は、ス
ルーホール2内部で部分的に絶縁層5の薄い部分ができ
ている。その薄い部分の絶縁層5の厚さを補ぎなう様
に、スルーホール2の中及びその周囲に結晶化ガラスを
印刷面の裏側からスルーホール2部を吸引しながらスク
リーン印刷し、両面について形成し、850°Cで焼成
を行い結晶化ガラス層1を形成する。この時、結晶化ガ
ラス層1の厚さは、約40μmになる様に形成を行う。
その後、導体層3でスルーホールメタライズ層6と配線
パターンを形成する。
As shown in FIGS. 1 (a) and 1 (b), in the metal core substrate in which the insulating layer 5 is formed around the metal plate 4, a thin portion of the insulating layer 5 is partially formed inside the through hole 2. ing. Crystallized glass is screen-printed in and around the through-hole 2 so as not to compensate for the thin portion of the insulating layer 5 while sucking the through-hole 2 from the back side of the printing surface to form on both sides. Then, firing is performed at 850 ° C. to form the crystallized glass layer 1. At this time, the crystallized glass layer 1 is formed to have a thickness of about 40 μm.
Then, the through hole metallization layer 6 and the wiring pattern are formed on the conductor layer 3.

【0011】スルーホール2の中及びその周囲に結晶化
ガラス層1を形成することにより、導体層3と金属板4
の絶縁耐電圧を向上することができた。
By forming the crystallized glass layer 1 in and around the through hole 2, the conductor layer 3 and the metal plate 4 are formed.
It was possible to improve the insulation withstand voltage.

【0012】[0012]

【発明の効果】以上説明したように本発明は、スルーホ
ールの中と周囲に選択的に絶縁層を追加形成したので、
スルーホールメタライズ層と金属板との絶縁耐電圧を向
上できる効果がある。
As described above, according to the present invention, since the insulating layer is selectively formed in and around the through hole,
This has the effect of improving the dielectric strength voltage between the through-hole metallization layer and the metal plate.

【0013】一例として、金属板の周囲の絶縁層の厚さ
が約120μmの時、スルーホール部の絶縁層の厚さが
約50μmであり、この時の絶縁耐電圧はDC約500
Vであった。スルーホールの中と周囲に選択的に絶縁体
を追加形成した時、絶縁耐電圧はDC約1000Vにな
った。
As an example, when the thickness of the insulating layer around the metal plate is about 120 μm, the thickness of the insulating layer in the through hole portion is about 50 μm, and the withstand voltage at this time is about 500 DC.
It was V. When an additional insulator was selectively formed in and around the through hole, the dielectric strength was about 1000V DC.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例の構成図である。FIG. 1 is a configuration diagram of an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 結晶化ガラス層 2 スルーホール 3 導体層 4 金属板 5 絶縁層 6 スルーホールメタライズ層 1 Crystallized glass layer 2 through holes 3 conductor layers 4 metal plate 5 insulating layers 6 Through hole metallization layer

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 金属板と、該金属板の表面と貫通穴内面
に形成された絶縁層と、該絶縁層上に形成された導体層
と、スルーホールメタライズ層と、抵抗体層と、保護ガ
ラス層とを有するメタルコア基板において、前記貫通穴
とその周囲の前記絶縁層と前記スルーホールメタライズ
層との間に絶縁層を形成したことを特徴とするメタルコ
ア基板。
1. A metal plate, an insulating layer formed on a surface of the metal plate and an inner surface of a through hole, a conductor layer formed on the insulating layer, a through-hole metallized layer, a resistor layer, and a protective layer. A metal core substrate having a glass layer, wherein an insulating layer is formed between the through hole and the surrounding insulating layer and the through hole metallized layer.
【請求項2】 金属板に貫通穴を穿設する工程と、前記
金属板の表面と前記貫通穴内面に電気泳動法にて絶縁層
を形成し焼成する工程と、該絶縁層上の前記貫通穴の内
面と周囲にスクリーン印刷法にて選択的に絶縁層を追加
形成し焼成する工程と、該絶縁層上にスルーホールメタ
ライズ層を形成する工程とを含むことを特徴とするメタ
ルコア基板の製造方法。
2. A step of forming a through hole in a metal plate; a step of forming an insulating layer on the surface of the metal plate and an inner surface of the through hole by an electrophoretic method and baking; and a step of forming the through hole on the insulating layer. Manufacture of a metal core substrate characterized by including a step of selectively forming an additional insulating layer on the inner surface and the periphery of the hole by a screen printing method and firing, and a step of forming a through-hole metallized layer on the insulating layer. Method.
JP16118291A 1991-07-02 1991-07-02 Metal core substrate and manufacture there0f Pending JPH0513903A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16118291A JPH0513903A (en) 1991-07-02 1991-07-02 Metal core substrate and manufacture there0f

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16118291A JPH0513903A (en) 1991-07-02 1991-07-02 Metal core substrate and manufacture there0f

Publications (1)

Publication Number Publication Date
JPH0513903A true JPH0513903A (en) 1993-01-22

Family

ID=15730148

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16118291A Pending JPH0513903A (en) 1991-07-02 1991-07-02 Metal core substrate and manufacture there0f

Country Status (1)

Country Link
JP (1) JPH0513903A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0812258A1 (en) * 1995-01-27 1997-12-17 Sarnoff Corporation Electrical feedthroughs for ceramic circuit board support substrates
CN102309928A (en) * 2010-07-06 2012-01-11 韩国energy技术研究院 Thermal cracking resistant zeolite membrane and method of fabricating the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0812258A1 (en) * 1995-01-27 1997-12-17 Sarnoff Corporation Electrical feedthroughs for ceramic circuit board support substrates
EP0812258A4 (en) * 1995-01-27 1999-03-10 Sarnoff Corp Electrical feedthroughs for ceramic circuit board support substrates
CN102309928A (en) * 2010-07-06 2012-01-11 韩国energy技术研究院 Thermal cracking resistant zeolite membrane and method of fabricating the same

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