JPH0513497Y2 - - Google Patents
Info
- Publication number
- JPH0513497Y2 JPH0513497Y2 JP9542487U JP9542487U JPH0513497Y2 JP H0513497 Y2 JPH0513497 Y2 JP H0513497Y2 JP 9542487 U JP9542487 U JP 9542487U JP 9542487 U JP9542487 U JP 9542487U JP H0513497 Y2 JPH0513497 Y2 JP H0513497Y2
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- superabrasive grains
- abrasive
- metal plating
- grains
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007747 plating Methods 0.000 claims description 22
- 239000002184 metal Substances 0.000 claims description 17
- 229910052751 metal Inorganic materials 0.000 claims description 17
- 238000005498 polishing Methods 0.000 claims description 15
- 239000006061 abrasive grain Substances 0.000 description 18
- 239000000758 substrate Substances 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 238000005520 cutting process Methods 0.000 description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000001238 wet grinding Methods 0.000 description 1
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9542487U JPH0513497Y2 (enrdf_load_stackoverflow) | 1987-06-22 | 1987-06-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9542487U JPH0513497Y2 (enrdf_load_stackoverflow) | 1987-06-22 | 1987-06-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS641862U JPS641862U (enrdf_load_stackoverflow) | 1989-01-09 |
JPH0513497Y2 true JPH0513497Y2 (enrdf_load_stackoverflow) | 1993-04-09 |
Family
ID=30959935
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9542487U Expired - Lifetime JPH0513497Y2 (enrdf_load_stackoverflow) | 1987-06-22 | 1987-06-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0513497Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-06-22 JP JP9542487U patent/JPH0513497Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS641862U (enrdf_load_stackoverflow) | 1989-01-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN203390712U (zh) | 化学机械研磨修整器 | |
JPH0253196B2 (enrdf_load_stackoverflow) | ||
US3517464A (en) | Method of making abrasive tools by electro-deposition | |
JPH0639729A (ja) | 精研削砥石およびその製造方法 | |
JP2006130586A (ja) | Cmpコンディショナおよびその製造方法 | |
US5976001A (en) | Interrupted cut abrasive tool | |
Shanawaz et al. | Grinding of aluminium silicon carbide metal matrix composite materials by electrolytic in-process dressing grinding | |
JPH0513497Y2 (enrdf_load_stackoverflow) | ||
JP2009136926A (ja) | コンディショナおよびコンディショニング方法 | |
JPWO2002055264A1 (ja) | 砥石ペレット、砥石、これらの製造方法、砥石を用いた光学素子の製造方法、及び投影露光装置の製造方法 | |
JP3020434B2 (ja) | 電着ホイール及びその製造方法 | |
JPS58186569A (ja) | 電着砥石 | |
JP2679178B2 (ja) | 電着砥石 | |
WO2001036138A1 (en) | Combined electrolytic polishing and abrasive super-finishing process | |
JPH0985627A (ja) | 研削用砥石 | |
US2937934A (en) | Plastic film abrasive sheet | |
JPS5943894A (ja) | 粒状物のメッキ方法およびその装置 | |
JP3802884B2 (ja) | Cmpコンディショナ | |
CN104084884B (zh) | 一种cmp片状研磨修整器及其生产方法 | |
JPH0398769A (ja) | 電着研磨シート | |
JPH0771789B2 (ja) | 砥 石 | |
US20040105959A1 (en) | Edge sharpener | |
JPH04269170A (ja) | 金属被覆多孔性砥石 | |
JPH047897Y2 (enrdf_load_stackoverflow) | ||
JP2001269870A (ja) | 電着砥石とその製造装置及び製造方法 |