JPH0513441B2 - - Google Patents
Info
- Publication number
- JPH0513441B2 JPH0513441B2 JP18446485A JP18446485A JPH0513441B2 JP H0513441 B2 JPH0513441 B2 JP H0513441B2 JP 18446485 A JP18446485 A JP 18446485A JP 18446485 A JP18446485 A JP 18446485A JP H0513441 B2 JPH0513441 B2 JP H0513441B2
- Authority
- JP
- Japan
- Prior art keywords
- hologram
- hologram prototype
- lens
- prototype
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 claims description 115
- 238000005259 measurement Methods 0.000 claims description 54
- 238000000034 method Methods 0.000 claims description 17
- 230000007246 mechanism Effects 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 1
- 238000012360 testing method Methods 0.000 description 28
- 238000010586 diagram Methods 0.000 description 18
- 238000003384 imaging method Methods 0.000 description 13
- 230000033001 locomotion Effects 0.000 description 7
- 238000004364 calculation method Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 230000026058 directional locomotion Effects 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 210000001747 pupil Anatomy 0.000 description 2
- 238000005773 Enders reaction Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 238000001093 holography Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Holo Graphy (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18446485A JPS6244608A (ja) | 1985-08-22 | 1985-08-22 | 測定用ホログラム原器のセッティング方法及びそのための装置 |
| US06/898,323 US4758089A (en) | 1985-08-22 | 1986-08-20 | Holographic interferometer |
| US07/096,609 US4812042A (en) | 1985-08-22 | 1987-09-11 | Holographic interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18446485A JPS6244608A (ja) | 1985-08-22 | 1985-08-22 | 測定用ホログラム原器のセッティング方法及びそのための装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6244608A JPS6244608A (ja) | 1987-02-26 |
| JPH0513441B2 true JPH0513441B2 (enrdf_load_stackoverflow) | 1993-02-22 |
Family
ID=16153609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18446485A Granted JPS6244608A (ja) | 1985-08-22 | 1985-08-22 | 測定用ホログラム原器のセッティング方法及びそのための装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6244608A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2723502B2 (ja) * | 1986-01-08 | 1998-03-09 | 日本電気株式会社 | 位置決め方法 |
| JPS62226628A (ja) * | 1986-03-27 | 1987-10-05 | Nec Corp | 位置決め方法 |
| JP6955911B2 (ja) * | 2017-06-16 | 2021-10-27 | 株式会社共和電業 | ひび割れ幅計測方法、ひび割れ幅計測装置およびひび割れ幅計測プログラム |
-
1985
- 1985-08-22 JP JP18446485A patent/JPS6244608A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6244608A (ja) | 1987-02-26 |
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