JPH0513433Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a synthetic resin ultrasonic diaphragm used in ultrasonic cleaners and the like.

[Conventional technology]

Ultrasonic cleaning machines are widely used for cleaning various items including semiconductors.

In conventional ultrasonic cleaning machines, an ultrasonic diaphragm with an ultrasonic vibrator fixed on the surface of a metal plate made of stainless steel or other material is attached to the body of the cleaning machine, or it is placed in an airtight box and placed inside the cleaning machine. The ultrasonic vibrations generated by the ultrasonic vibrator are transmitted to the cleaning liquid to generate strong vibrations, which can effectively clean semiconductors and various other items.

[Problem that the invention attempts to solve]

For ultrasonic diaphragms like the ones mentioned above, if the cleaning liquid is acidic or alkaline, metals such as stainless steel that come into direct contact with the cleaning liquid may be corroded by the cleaning liquid, or corrosion of the cleaning liquid that occurs on the diaphragm due to ultrasonic irradiation. In many cases, it cannot be put to practical use because it is subject to the so-called erosion phenomenon, and recently, consideration has been given to using diaphragms made of synthetic resins such as vinyl chloride, which have excellent resistance to these corrosive liquids. .

However, synthetic resins generally have weaker mechanical strength against vibrations than metals, and also have poorer heat resistance, so when a synthetic resin plate is used in an ultrasonic transducer, various problems occur.

In the conventional ultrasonic diaphragm of this kind, for example, as shown in FIGS. 6 and 7, the diaphragm 11 has the following structure.
An ultrasonic vibrator 13 is fixed to the surface of a plate 12 by appropriate means, and the diaphragm 11 is attached so as to close a hole 16 in a bottom plate 15 of an ultrasonic cleaner 14, for example. By passing a high frequency current through the ultrasonic vibrator 13, vibrations in the thickness direction are generated in the plate 12. As shown in FIG. 6, the amplitude is large near the center of the diaphragm 11 to which the ultrasonic transducer 13 is attached, and as it moves away from the transducer 13, the amplitude temporarily decreases to a node 17.
After passing node 17, the phase of the vibration reverses, and the vibration increases again to an antinode 18, which is close to the amplitude of the attachment part of the ultrasonic transducer 13, and as it moves further away, the amplitude reaches node 1.
After passing through 9, the phase is inverted again and increases again.

In such a conventional diaphragm 11, a large amount of heat is generated in the vicinity of the antinode 18 on the outside of the first node 17. When a chemically stable synthetic resin plate is used for the diaphragm body, the synthetic resin has poor heat resistance,
In addition, if heat dissipation is poor, the heat generated near the belly 18 will not be dissipated to the surroundings, causing thermal deformation of the plate 12, and in the worst case, pinholes will occur, making it unusable. Even things happen. Also, even if it is not the antinode of vibration, it will become quite hot and cause damage.

The present invention aims to provide an ultrasonic diaphragm equipped with a synthetic resin diaphragm that can prevent the above-mentioned failure from occurring in the vicinity of the violently vibrating part of the plate body. This is the purpose.

[Means and actions for solving problems]

As a result of various studies, the inventor of the present invention has found that a vibration transmission suppressing part such as a recess or a groove is placed around the attached ultrasonic transducer in the part where the vibration phase of the attached ultrasonic transducer becomes an antinode in the synthetic resin plate. It was confirmed that the above heat generation could be prevented by providing this.

The thin recess is preferably provided so as to completely or almost surround the vibrator at the center of the plate, and the cross-sectional shape of the recess may be V-shaped or U-shaped interrupted grooves, or a number of independent grooves. It can be a bore hole.

The present invention provides an ultrasonic diaphragm in which an ultrasonic vibrator is attached to the surface of a synthetic resin plate and emits ultrasonic waves from the back side of the plate, and the plate has a portion where the phase of vibration is an antinode. A synthetic resin ultrasonic diaphragm characterized by having a recess that continuously or discontinuously surrounds the mounting part of the vibrator, and suppressing vibrations from being transmitted to the outside of the recess, By providing this, it is possible to block vibrations from being transmitted to the outside from the thin recesses, reduce the amplitude of the outer portion of the diaphragm, and prevent the diaphragm from generating heat or being damaged due to vibration. We were able to prevent this from happening.

〔Example〕

FIG. 1 shows an embodiment of the present invention, in which a diaphragm 1 has an ultrasonic transducer 3 attached to the surface of a resin plate 2 at approximately the center thereof, and an ultrasonic transducer 3 mounted around the diaphragm 1.
A V-shaped groove 4 is formed at a substantially constant distance from the ultrasonic transducer 3 and surrounding the ultrasonic transducer 3, and the thickness of the plate is reduced at that portion.

As can be seen from the amplitude curve shown in FIG. 1, the position of the V-shaped groove 4 is preferably approximately at the antinode 6, and by forming such a V-shaped groove 4, the antinode 6 of the vibration can be reduced. The amplitude at is significantly reduced. Further, the amplitude outside the node 7 hardly increases, and the amplitude is limited to the inside of the V-shaped groove (recess) 4 as a whole.

Therefore, the synthetic resin plate in the portion corresponding to the belly 6 generates almost no heat, and the conventional problem could be solved.

FIG. 2 shows another embodiment in which a U-shaped groove 8 is provided in place of the V-shaped groove in the embodiment of FIG. Also, instead of the U-shaped groove 8,
It can also be a counterbore hole like this.

Figure 3 shows an ultrasonic diaphragm used in a large-sized cleaning machine, and the plate 2 has a large number of ultrasonic oscillators 3 ₁ , 3 _{2 .}
...3 _o are attached, and the V-shaped groove 4 is provided so as to surround all the ultrasonic transducers.

FIG. 4 is a plan view of the embodiment corresponding to FIG.
Although the groove 9 is provided so as to surround the ultrasonic transducer 3, the groove 9 is not continuous from the viewpoint of strength, but is discontinuous at the four corners.

FIGS. 5a and 5b show an embodiment in which the counterbore holes mentioned in the explanation of FIG. It surrounds the mounting position of the ultrasonic transducer 3. Such a counterbore hole 10 can also suppress the propagation of vibration and prevent heat generation.

The groove or counterbore may be placed at any position, but it is particularly effective if it is provided at a position corresponding to the antinode of vibration.

[Effect of idea]

In the present invention, a vibration transmission suppressing portion is provided on the diaphragm so as to surround the vibrator at a position where the phase of vibration becomes an antinode, thereby suppressing transmission of vibration and preventing heat generation of the diaphragm. For this reason, it has become possible to use a synthetic resin diaphragm body, which had been considered difficult in the past, without substantially reducing its mechanical strength, and the life of the ultrasonic diaphragm has been significantly extended.

[Brief explanation of the drawing]

FIG. 1 is a side view and amplitude curve of a first embodiment of the present invention, FIGS. 2 and 3 are side views of another embodiment, and FIGS. 4 and 5a are still another embodiment. The bottom view, FIG. 5b is a sectional view taken along the - line in FIG. 5a, FIG. 6 is a side view and amplitude curve of a conventional ultrasonic diaphragm, and FIG. FIG. 3 is a longitudinal cross-sectional side view of the attached ultrasonic cleaner. DESCRIPTION OF SYMBOLS 1... Ultrasonic diaphragm, 2... Plate body, 3... Ultrasonic vibrator, 4... V-shaped groove, 5... Node, 6...
Belly, 7... Node, 8... U-shaped groove, 9... Groove, 10
...Counterbore hole, 11...Ultrasonic diaphragm, 12...
Plate body, 13... Ultrasonic vibrator, 14... Ultrasonic cleaner, 15... Bottom plate, 16... Hole, 17... Section,
18...belly, 19...section.

Claims (1)

[Scope of utility model registration request] In an ultrasonic diaphragm in which an ultrasonic vibrator is attached to a mounting part formed on the surface of a synthetic resin plate and ultrasonic waves are emitted from the back side of the plate, the vibration propagated from the vibrator to the plate is A synthetic resin ultrasonic diaphragm, characterized in that a vibration transmission suppressing part is provided that surrounds the mounting part continuously or discontinuously at a position where the phase becomes an antinode.