JPH05146756A - Ultrasonic diaphragm - Google Patents
Ultrasonic diaphragmInfo
- Publication number
- JPH05146756A JPH05146756A JP33953891A JP33953891A JPH05146756A JP H05146756 A JPH05146756 A JP H05146756A JP 33953891 A JP33953891 A JP 33953891A JP 33953891 A JP33953891 A JP 33953891A JP H05146756 A JPH05146756 A JP H05146756A
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- ultrasonic
- vibration
- receiver
- vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Diaphragms For Electromechanical Transducers (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は超音波洗浄機、超音波霧
化器、超音波照射機や超音波送受波器に使用して、気中
に振動を伝達し、且つ受波を行う超音波振動板に関する
ものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is used in an ultrasonic cleaner, an ultrasonic atomizer, an ultrasonic irradiator and an ultrasonic wave transmitter / receiver to transmit vibrations to the air and receive the waves. The present invention relates to a sound wave diaphragm.
【0002】[0002]
【従来の技術】前記従来の機器の動力源には超音波を送
波や受波する超音波振動板が設けられている。この種の
超音波振動板においては、タンタル、チタニウム、アル
ミニウム、ステンレス等の金属が用いられ、図3に示す
ように筺体Aの上面にパッキング3を介して超音波振動
板Cを載置し、超音波振動板Cの上面外周をパッキング
Bを介してガバーDで押え、ボルトEで締付け固定し、
超音波振動板Cの裏面に超音波振動板Fを固定してい
る。2. Description of the Related Art An ultrasonic vibration plate for transmitting and receiving ultrasonic waves is provided in the power source of the conventional equipment. In this type of ultrasonic diaphragm, a metal such as tantalum, titanium, aluminum, and stainless is used, and as shown in FIG. 3, the ultrasonic diaphragm C is placed on the upper surface of the housing A via the packing 3, Press the outer periphery of the ultrasonic diaphragm C through the packing B with the governor D, and tighten with the bolt E to fix it.
The ultrasonic diaphragm F is fixed to the back surface of the ultrasonic diaphragm C.
【0003】前記の超音波振動板Cは機械強度は強い
が、振動板全体に振動が伝達し、有力輻射電力が低下し
たり、スチフネスやコンプライアンズにより制動され
て、電気−機械−音響能率が低い。又、ダンピング時間
が長い。更に、接液構造の場合、振動や流れによって発
生するエロージョンや化学薬品に対する耐久性か弱く、
錆、金属イオンやゴミを除去しなければ製品の歩留率が
低下する精密分野や高感度で低タンダンピング性を有す
る送受波器を必要とするセンサ分野には使用できない欠
点があった。Although the ultrasonic diaphragm C has a high mechanical strength, vibration is transmitted to the entire diaphragm, the radiated electric power is reduced, and the ultrasonic vibration is damped by stiffness and compliance, so that the electric-mechanical-acoustic efficiency is increased. Low. Also, the dumping time is long. Furthermore, in the case of a liquid contact structure, the durability against erosion and chemicals generated by vibration and flow is weak,
There is a drawback that it cannot be used in the precision field where the yield rate of products decreases unless rust, metal ions and dust are removed, or in the sensor field that requires a transducer with high sensitivity and low tamping property.
【0004】そこで、ポリ塩化ビニールやポリフッ化ビ
リニデン等の合成樹脂で形成した超音波振動板が使用さ
れるようになった。Therefore, an ultrasonic vibrating plate made of a synthetic resin such as polyvinyl chloride or polyvinylidene fluoride has come to be used.
【0005】[0005]
【発明が解決しようとする課題】しかしながら、前記合
成樹脂性であっても、等価質量、支持力が大きく、負荷
として大きく、横波振動伝播、ダンピング時間かが長い
ために、音響変換能率を始めとして音響特性が悪く、当
然音響インピダンスも負荷と整合しないという問題点が
あった。However, even with the synthetic resin, since the equivalent mass and supporting force are large, the load is large, and the transverse wave vibration propagation and the damping time are long, the acoustic conversion efficiency and other factors are high. There was a problem that the acoustic characteristics were poor and the acoustic impedance did not match the load.
【0006】そこで、本発明においては、前記問題点を
大幅に軽減し、変換能率及び音響特性を改善することが
できる超音波振動板を提供するのが目的である。In view of the above, it is an object of the present invention to provide an ultrasonic diaphragm which can significantly reduce the above problems and improve the conversion efficiency and acoustic characteristics.
【0007】[0007]
【課題を解決するための手段】本発明は前記課題を解決
するために、ポリエステルフイルムで超音波振動板を構
成したものであり。又、ポリエステルフイルムを複数枚
貼合せる。そして、ポリエステルフイルムは100μm
以下のものを使用する。In order to solve the above-mentioned problems, the present invention comprises an ultrasonic diaphragm made of polyester film. Also, a plurality of polyester films are stuck together. And the polyester film is 100 μm
Use the following:
【0008】[0008]
【作用】本発明は前記のように構成したもので、超音波
振動子を一方に取付け、超音波振動子に電気信号を供給
することにより、電気−機械振動に変換されて超音波振
動板に伝達される。そして、超音波振動板による機械振
動は、気中や液中に放射される。又、逆に気中や液中の
振動波を受波して超音波振動子に伝達する。The present invention is constructed as described above, and by attaching an ultrasonic vibrator to one side and supplying an electric signal to the ultrasonic vibrator, it is converted into electro-mechanical vibration to form an ultrasonic vibration plate. Transmitted. The mechanical vibration generated by the ultrasonic diaphragm is radiated into the air or liquid. On the contrary, the vibration wave in the air or the liquid is received and transmitted to the ultrasonic transducer.
【0009】[0009]
【実施例】本発明の第1実施例を図1に基いて詳細に説
明すると、本実施例は送受波器に用いた例でポリエステ
ルフイルムで形成した超音波振動板1を筺体2の上面に
載置し、超音波振動板1の外周上面をパッキング3を介
してガバー4で押え、複数個のボルト5で固定する。
尚、図中6は超音波振動子で超音波振動板1の下面に固
定している。超音波振動板1の厚みは100μm以下で
あれば、変換能率及び音響特性が特に改善される。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described in detail with reference to FIG. 1. In this embodiment, an ultrasonic vibration plate 1 made of polyester film is used as a wave transmitter / receiver on the upper surface of a housing 2. The ultrasonic vibration plate 1 is placed, and the outer peripheral upper surface of the ultrasonic vibration plate 1 is pressed by the governor 4 through the packing 3 and fixed by a plurality of bolts 5.
In addition, reference numeral 6 in the drawing denotes an ultrasonic vibrator fixed to the lower surface of the ultrasonic diaphragm 1. If the thickness of the ultrasonic diaphragm 1 is 100 μm or less, the conversion efficiency and acoustic characteristics are particularly improved.
【0010】第1実施例は前記のように構成したもの
で、超音波振動子6に電気信号を供給すると、電気−機
械振動に変換されて、超音波振動板1に伝達される。こ
の機械振動は超音波振動板1が薄いポリエステルフイル
ムであるため、金属に比較して等価質量が1/10以下
であることから、支持保持力が小さく、スチフネスも小
さく、送受感度が高い。しかも横波振動も存在せず超音
波振動子の有効輻射以外は輻射せず、筺体、ボルト、パ
ッキング等の支持部材に振動伝達して損失することな
く、有効に送波及び受波が可能である。The first embodiment is constructed as described above, and when an electric signal is supplied to the ultrasonic vibrator 6, it is converted into electro-mechanical vibration and transmitted to the ultrasonic diaphragm 1. Since the ultrasonic vibration plate 1 is a thin polyester film and has an equivalent mass of 1/10 or less as compared with metal, this mechanical vibration has a small supporting and holding force, a small stiffness, and a high transmission / reception sensitivity. Moreover, there is no transverse wave vibration and no radiation other than the effective radiation of the ultrasonic oscillator is transmitted, and it is possible to effectively transmit and receive waves without transmitting vibrations to the supporting members such as the housing, bolts, packing, etc. ..
【0011】次に、第2実施例を図2に基いて説明する
と、本実施例はポリエステルフイルムを2枚接着剤で貼
合わせたものである。尚、強度に応じて音響特性を低下
させない範囲であれば何枚でも重合させることができる
ものである。図中第1実施例と同一物は同一符号を付
し、説明を省略する。Next, a second embodiment will be described with reference to FIG. 2. In this embodiment, two polyester films are attached with an adhesive. It should be noted that any number of sheets can be polymerized as long as the acoustic characteristics are not deteriorated depending on the strength. In the figure, the same parts as those in the first embodiment are designated by the same reference numerals, and the description thereof will be omitted.
【0012】本発明は前記実施例に限定されるものでは
なく、各種の超音波洗浄器、超音波霧化器、超音波照射
器や超音波送受波器に用いることができる。The present invention is not limited to the above embodiment, but can be used in various ultrasonic cleaners, ultrasonic atomizers, ultrasonic irradiators and ultrasonic transmitters / receivers.
【0013】[0013]
【発明の効果】本実施例は前記のような構成、作用を有
するもので、超音波振動板をポリエステルフイルムで形
成しているので、熱や化学薬品に対して耐久力が極めて
強く、エロージョン発生がほとんど無視でき、しかも電
気的絶縁性にも優れ安定である。又、電蝕、錆、ゴミの
発生はなく、薄い膜であるから音響的損失がほとんどな
い有利な特性を有している。又、金属に比較して等価質
量が1/10以下であることから、支持保持力も小さ
く、送受感度も高い。更に、横波振動も存在せず、超音
波振動子の有効輻射以外は輻射しないので、各種支持部
材に振動伝達して損失しないようなことがなく、有効に
送波及び受波を行うことができる。The present embodiment has the above-described structure and action, and since the ultrasonic vibration plate is made of polyester film, it has extremely strong durability against heat and chemicals and causes erosion. Is almost negligible, and the electrical insulation is excellent and stable. Further, since it is a thin film with no electrolytic corrosion, rust and dust, it has advantageous characteristics with almost no acoustic loss. Further, since the equivalent mass is 1/10 or less as compared with metal, the supporting and holding force is small and the transmission / reception sensitivity is high. Further, since there is no transverse wave vibration and no radiation other than the effective radiation of the ultrasonic transducer is performed, it is possible to effectively transmit and receive waves without transmitting vibrations to various supporting members and causing no loss. ..
【0014】特に、厚みを100μm以下にすると、等
価質量及び支持力が大幅に軽減し、変換能率及び音響特
性を向上させることができる。又、強度の関係で複数枚
重合しても極端には結果が低下しないものである。In particular, if the thickness is 100 μm or less, the equivalent mass and supporting force are significantly reduced, and the conversion efficiency and acoustic characteristics can be improved. Also, due to the strength, even if a plurality of sheets are polymerized, the result is not extremely lowered.
【0015】[0015]
【図1】本発明に係る超音波振動板を用いた送受波器の
第1実施例の断面図。FIG. 1 is a sectional view of a first embodiment of a wave transmitter / receiver using an ultrasonic vibration plate according to the present invention.
【図2】第2実施例の断面図。FIG. 2 is a sectional view of a second embodiment.
【図3】従来例の断面図。FIG. 3 is a sectional view of a conventional example.
1 超音波振動板 2 筺体 3 パッキング 4 カバー 5 ボルト 6 超音波振動子 1 Ultrasonic Vibration Plate 2 Housing 3 Packing 4 Cover 5 Bolt 6 Ultrasonic Transducer
Claims (3)
振動板。1. An ultrasonic diaphragm made of a polyester film.
構成した超音波振動板。2. An ultrasonic vibrating plate constituted by laminating a plurality of polyester films.
であることを特徴とする請求項1及び2記載の超音波振
動板。3. The ultrasonic diaphragm according to claim 1, wherein the polyester film has a thickness of 100 μm or less.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP33953891A JPH05146756A (en) | 1991-11-29 | 1991-11-29 | Ultrasonic diaphragm |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP33953891A JPH05146756A (en) | 1991-11-29 | 1991-11-29 | Ultrasonic diaphragm |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH05146756A true JPH05146756A (en) | 1993-06-15 |
Family
ID=18328422
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP33953891A Pending JPH05146756A (en) | 1991-11-29 | 1991-11-29 | Ultrasonic diaphragm |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH05146756A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007251516A (en) * | 2006-03-15 | 2007-09-27 | Minebea Co Ltd | Speaker |
JP2012029111A (en) * | 2010-07-23 | 2012-02-09 | Nec Corp | Oscillation device |
US11486758B2 (en) | 2017-11-02 | 2022-11-01 | Murata Manufacturing Co., Ltd. | Ultrasonic sensor |
-
1991
- 1991-11-29 JP JP33953891A patent/JPH05146756A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007251516A (en) * | 2006-03-15 | 2007-09-27 | Minebea Co Ltd | Speaker |
JP2012029111A (en) * | 2010-07-23 | 2012-02-09 | Nec Corp | Oscillation device |
US11486758B2 (en) | 2017-11-02 | 2022-11-01 | Murata Manufacturing Co., Ltd. | Ultrasonic sensor |
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