JPH05134246A - Production of liquid crystal display element - Google Patents

Abstract

PURPOSE:To enable the formation of the surface of an insulating film to a rugged shape in a process for drying the film. CONSTITUTION:The insulating film 3 for preventing shorting with a counter electrode is tentatively dried by a hot plate 4 provided with many projections 41 on the surface to nonuniformly heat a glass substrate 1 with transparent electrodes 2 at the time of tentatively drying the insulating film 3 after the application thereof in the process of forming the insulating film 3. The surface of the insulating film 3 is thereby formed to the rugged shape.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a liquid crystal display element used for a liquid crystal display element.

[0002]

2. Description of the Related Art In a conventional liquid crystal display device, as shown in FIG. 3, the surface of a glass substrate 1 itself is roughened by sandblasting or etching to form an uneven surface.

After that, a transparent electrode 2, an insulating film 3 of an organometallic compound for preventing a short circuit with a counter electrode, and an alignment film 5 are sequentially formed, and the surface of the alignment film 5 in contact with the liquid crystal layer is roughened on the surface of the glass substrate 1. Is formed on the uneven surface (see, for example, JP-A-63-71830).

A glass substrate 1 having a transparent electrode 2 is also provided.
As shown in FIG. 4, the insulating film 3 made of an organometallic compound is applied to the substrate, and the hot plate 4 is used for temporary drying.

[0005]

However, in the case of the former technique, in the former case, since there is a step of roughening the surface of the glass substrate 1, a dedicated processing device is required, and further processing time and man-hours are required. Therefore, there is a problem that the cost becomes high.

Further, in the latter case, since the surface of the hot plate is uniform during the temporary drying of the insulating film by the organic metal compound on the hot plate, the temperature distribution becomes uniform and the temporary drying becomes uniform, so that the uniform insulating film is formed. However, there is a problem in that it is not formed in an uneven shape.

Therefore, the present invention has been devised in view of the above-mentioned problems of the prior art, and an object thereof is to provide a method of manufacturing a liquid crystal display device capable of forming a concave-convex shape on the surface of an insulating film during the drying process. I am trying.

[0008]

In order to achieve the above object, in the method of manufacturing a liquid crystal display device according to the present invention, an insulating film for preventing a short circuit with a counter electrode is formed on a glass substrate with a transparent electrode. During the temporary drying after coating the insulating film, the glass substrate is unevenly heated by performing temporary drying with a hot plate provided with a large number of protrusions on the surface, and the insulating film surface is formed in an uneven shape. I am trying.

[0009]

[Function] The high temperature portion of the contact portion with the hot plate is sufficiently heated to reduce the film thickness, and the low temperature portion of the hot plate and the non-contact portion is not heated sufficiently, so that the film thickness is reduced. Is dried while being thick, and the surface shape of the film becomes uneven. By applying and drying an alignment film on this, the surface of the alignment film can also be formed in an uneven shape.

Further, when a liquid crystal display element is manufactured by using a glass substrate having an uneven surface, the space (space or gap) between the substrates facing each other becomes non-uniform, and the concave portion is wide and the convex portion is narrow. ..

[0011]

EXAMPLES Examples will be described with reference to FIGS. 1 and 2. Some of the codes are the same as those in the conventional example.

First, the present invention relates to provisional drying after coating of the insulating film 3 when the insulating film 3 for preventing a short circuit with the counter electrode is formed on the glass substrate 1 with the transparent electrode 2. ..

At the time of temporary drying after coating the insulating film 3,
Temporary drying is performed by the hot plate 4 having a large number of protrusions 41 on the surface to heat the glass substrate 1 unevenly, thereby forming the surface of the insulating film 3 in an uneven shape.

Although the insulating film 3 is made of an organometallic compound, the insulating film 3 may be another compound which is dried by heat, and the material of the insulating film 3 is used in a process such as firing after temporary drying. Decrease of film thickness For example, it is desirable that the film thickness of 3000 A by calcination is decreased to about 800 to 1000 by main calcination.

The above-mentioned organometallic compound means an organic compound having a carbon-metal bond, for example, CH3 --CO--CH.
2-CO-CH2-Me, where Me is a metal Zr, T
i, Si, etc. For example, in the above chemical formula structure, Me is Z
In the case of r, zirconium acetylacetonate is obtained.

The step of preparing the organometallic compound is usually coating of the organometallic compound on the substrate → preliminary calcination at 70 ° C. or lower → UV irradiation for reaction promotion and decomposition → main calcination at 300 ° C. or higher. ..

The UV light is used for decomposing / removing the organic compound contained in the organic metal compound film, has a strong peak on the short wavelength side such as 254 nm and 185 nm, and has a strong energy. Is desirable.

The mask for blocking the UV light is used to prevent the UV light from hitting the V portion, and the installation position may be on the light source side or the glass substrate 1 side (including the glass substrate). A material that does not cause a problem when placed on the glass substrate 1, for example, SUS may be used.

Further, although the mask for completely blocking the UV light is used, the mask may be a UV filter for attenuating the transmission amount of the UV light. In that case, the transmittance of the UV filter may be appropriately changed depending on the UV irradiation light amount, the film thickness, etc. so that the film after baking becomes smooth.

In the step of irradiating with the UV light, the organic part contained in the organometallic compound film is almost decomposed / removed, but there are some which are not decomposed only by the energy of the UV light. Thus, the organometallic compound film is used as a metal oxide film.

[0021]

Since the present invention is constructed as described above, it has the following effects. A. After applying an insulating film of an organometallic compound, the glass substrate is heated and dried on a hot plate provided with protrusions,
The temperature distribution of the glass substrate becomes non-uniform. That is, the high temperature portion of the contact portion with the hot plate is sufficiently heated to reduce the film thickness, and the low temperature portion of the hot plate and the non-contact portion is not heated sufficiently, and thus the film thickness is reduced. The film is dried while being thick, and the surface shape of the film becomes uneven. By applying and drying an alignment film on this, the surface of the alignment film can also be formed in an uneven shape.

B. When a liquid crystal display element is manufactured using a glass substrate having an uneven surface, the gap (space or gap) with the opposing substrate becomes non-uniform, and the concave portion is wide and the convex portion is narrow. Therefore, a liquid crystal display device having a partially different gap in the same plane can be manufactured, and further, in a TN mode liquid crystal display device or the like, display contrast and the like can be improved.

[Brief description of drawings]

FIG. 1 is a front view of a liquid crystal display element of the present invention during temporary drying.

FIG. 2 is a perspective view of a hot plate according to the present invention.

FIG. 3 is a structural diagram of a conventional liquid crystal display device.

FIG. 4 is a front view of conventional temporary drying.

[Explanation of symbols]

 1 glass substrate 2 transparent electrode 3 insulating film 4 hot plate 41 protrusion

Claims (1)

[Claims] 1. A hot plate having a large number of protrusions on its surface during provisional drying after coating an insulating film when forming an insulating film for preventing a short circuit with a counter electrode on a glass substrate with a transparent electrode. A method for manufacturing a liquid crystal display element, which comprises tentatively drying to heat a glass substrate non-uniformly to form an uneven surface of an insulating film.