JPH0513241B2 - - Google Patents
Info
- Publication number
- JPH0513241B2 JPH0513241B2 JP59233225A JP23322584A JPH0513241B2 JP H0513241 B2 JPH0513241 B2 JP H0513241B2 JP 59233225 A JP59233225 A JP 59233225A JP 23322584 A JP23322584 A JP 23322584A JP H0513241 B2 JPH0513241 B2 JP H0513241B2
- Authority
- JP
- Japan
- Prior art keywords
- measured
- photodiode
- output
- signal
- comparator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 claims description 45
- 230000003287 optical effect Effects 0.000 description 8
- 238000006073 displacement reaction Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 239000000523 sample Substances 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- 241001422033 Thestylus Species 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000005856 abnormality Effects 0.000 description 2
- 201000009310 astigmatism Diseases 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000004439 roughness measurement Methods 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23322584A JPS61112907A (ja) | 1984-11-07 | 1984-11-07 | 微細形状測定器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23322584A JPS61112907A (ja) | 1984-11-07 | 1984-11-07 | 微細形状測定器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61112907A JPS61112907A (ja) | 1986-05-30 |
| JPH0513241B2 true JPH0513241B2 (cs) | 1993-02-22 |
Family
ID=16951711
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23322584A Granted JPS61112907A (ja) | 1984-11-07 | 1984-11-07 | 微細形状測定器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61112907A (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0743853U (ja) * | 1992-08-04 | 1995-09-26 | オカモト株式会社 | ゴムボート |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5716806B2 (cs) * | 1979-07-30 | 1982-04-07 | ||
| JPS57139607A (en) * | 1981-02-23 | 1982-08-28 | Hitachi Ltd | Position measuring equipment |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5716806U (cs) * | 1980-06-21 | 1982-01-28 |
-
1984
- 1984-11-07 JP JP23322584A patent/JPS61112907A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5716806B2 (cs) * | 1979-07-30 | 1982-04-07 | ||
| JPS57139607A (en) * | 1981-02-23 | 1982-08-28 | Hitachi Ltd | Position measuring equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61112907A (ja) | 1986-05-30 |
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