JPH05128419A - Magnetic head and production thereof - Google Patents

Magnetic head and production thereof

Info

Publication number
JPH05128419A
JPH05128419A JP28610591A JP28610591A JPH05128419A JP H05128419 A JPH05128419 A JP H05128419A JP 28610591 A JP28610591 A JP 28610591A JP 28610591 A JP28610591 A JP 28610591A JP H05128419 A JPH05128419 A JP H05128419A
Authority
JP
Japan
Prior art keywords
magnetic
core
shaped core
magnetic head
winding window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP28610591A
Other languages
Japanese (ja)
Inventor
Seiji Okaji
成治 岡治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renesas Semiconductor Manufacturing Co Ltd
Kansai Nippon Electric Co Ltd
Original Assignee
Renesas Semiconductor Manufacturing Co Ltd
Kansai Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renesas Semiconductor Manufacturing Co Ltd, Kansai Nippon Electric Co Ltd filed Critical Renesas Semiconductor Manufacturing Co Ltd
Priority to JP28610591A priority Critical patent/JPH05128419A/en
Publication of JPH05128419A publication Critical patent/JPH05128419A/en
Pending legal-status Critical Current

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  • Magnetic Heads (AREA)

Abstract

PURPOSE:To prevent an increase in the length of a magnetic path formed of laminated layers while preventing this magnetic path from being shut off by the winding window of a C core. CONSTITUTION:This magnetic head is constituted by inserting the laminated layers 3 alternately laminated with magnetic metallic films 1 having a high saturation magnetic flux density and insulating thin films 2 with nonmagnetic material plates 4, 5 from both sides to constitute the C-shaped core 8 and joining and integrating such core and an I-shaped core 9. The laminated layers 3 alternately laminated with the above-mentioned magnetic metallic films 1 and the insulating thin films 2 are formed on the inside end face 27 of the winding window 16 formed on the joint surface 10 of the C-shaped core 8 with the I- shaped core 9.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は磁気ヘッド及びその製造
方法に関し、詳しくは、VTR装置に使用され、高飽和
磁束密度を有する金属磁性膜を積層した構造を持つTS
S型の磁気ヘッド及びその製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head and a method of manufacturing the same, and more particularly, a TS used in a VTR device and having a structure in which metal magnetic films having a high saturation magnetic flux density are laminated.
The present invention relates to an S-type magnetic head and a method for manufacturing the same.

【0002】[0002]

【従来の技術】例えば、高密度記録用のVTR装置に使
用される磁気ヘッドには、高飽和磁束密度を有する金属
磁性膜を積層した構造を持つTSS型のものがある。図
7の(a)(b)は対をなすTSS型の磁気ヘッドを一
つのヘッドベースに搭載するダブルアジマスタイプのも
ので、その一方の磁気ヘッドを示す。
2. Description of the Related Art For example, as a magnetic head used in a VTR device for high density recording, there is a TSS type magnetic head having a structure in which metal magnetic films having a high saturation magnetic flux density are laminated. 7A and 7B show a double azimuth type in which a pair of TSS type magnetic heads are mounted on one head base, and one of the magnetic heads is shown.

【0003】この磁気ヘッドは、同図に示すように高飽
和磁束密度を有するセンダスト等の金属磁性膜(1)と
SiO2やAl23等の絶縁薄膜(2)とを交互に積層
したラミネート層(3)〔図示しないが金属磁性膜
(1)と絶縁薄膜(2)との間にはCr膜が介在する〕
を有し、そのラミネート層(3)の一方の側にセラミッ
ク等の非磁性体板(4)(5)を、且つ、他方の側にガ
ラス(6)(7)を配したC字状コア(8)とI字状コ
ア(9)〔以下、Cコア、Iコアと称す〕とをその接合
面(10)(11)間にギャップスペーサとなるSiO2
の非磁性体薄膜〔図示せず〕を介して接合一体化したも
のである。尚、このCコア(8)とIコア(9)との一
体化は、上記ガラス(6)(7)(12)(13)による溶
着でもって行なわれる。
In this magnetic head, as shown in the figure, a magnetic metal film (1) such as sendust having a high saturation magnetic flux density and an insulating thin film (2) such as SiO 2 or Al 2 O 3 are alternately laminated. Laminate layer (3) [Although not shown, a Cr film is interposed between the metal magnetic film (1) and the insulating thin film (2)]
A C-shaped core having a non-magnetic plate (4) (5) such as ceramic on one side of the laminate layer (3) and glass (6) (7) on the other side. (8) and the I-shaped core (9) [hereinafter referred to as the C core and I core] between the joining surfaces (10) and (11) of the non-magnetic thin film such as SiO 2 serving as a gap spacer [not shown]. It is the one that is joined and integrated through The C core (8) and the I core (9) are integrated by welding with the glasses (6), (7), (12) and (13).

【0004】上記Cコア(8)とIコア(9)との接合
一体化によりコアチップ(14)が得られ、そのコアチッ
プ(14)の曲面加工された頂端面が磁気テープが走行す
る媒体摺接面(15)となり、その媒体摺接面(15)に上
記ラミネート層(3)の厚みによって決まるトラック幅
を有する磁気ギャップgが形成される。この磁気ギャッ
プgはその両側から非磁性体板(4)(5)及びガラス
(6)(7)でもって保護されている。また、コアチッ
プ(14)のCコア(8)の内側に巻線窓(16)が開口形
成され、その外側に巻線溝(17)が刻設されており、図
示しないが、この巻線窓(16)と巻線溝(17)を利用し
て絶縁被覆処理された線材を巻回することによりコイル
が形成される。
A core chip (14) is obtained by joining and integrating the C core (8) and the I core (9), and the curved top end surface of the core chip (14) is in sliding contact with a medium on which a magnetic tape runs. The surface becomes the surface (15), and a magnetic gap g having a track width determined by the thickness of the laminate layer (3) is formed on the medium sliding contact surface (15). This magnetic gap g is protected from both sides by nonmagnetic plates (4) and (5) and glass (6) and (7). A winding window (16) is formed inside the C core (8) of the core chip (14), and a winding groove (17) is engraved on the outside thereof. A coil is formed by winding a wire material that has been subjected to an insulation coating using (16) and the winding groove (17).

【0005】次に、上記構造からなる磁気ヘッドの製造
方法を図8乃至図10に示して説明する。
Next, a method of manufacturing the magnetic head having the above structure will be described with reference to FIGS.

【0006】まず、Cコア(8)は以下の要領で製作さ
れる。即ち、図8の(a)に示すようにセラミック等の
非磁性体板(18)を用意する。そして、図8の(b)に
示すように非磁性体板(18)に複数のガラス溝(19)を
刻設した上でガラス溝(19)にガラス(12)を充填す
る。その上で、非磁性体板(18)にガラス溝(19)と平
行して複数のトラック溝(20)を刻設する。その後、図
9の(a)に示すように非磁性体板(18)にセンダスト
等の高飽和磁束密度を有する金属磁性材とSiO 2やA
23等の絶縁材とをスパッタリング等により交互に被
着させ、上記トラック溝(20)に金属磁性膜(1)と絶
縁薄膜(2)とを交互に積層したラミネート層(3)を
形成し、そのラミネート層(3)を形成したトラック溝
(20)にガラスモールドによりガラス(6)を充填した
上でラッピングする。尚、図示しないが、金属磁性膜
(1)と絶縁薄膜(2)との間にCr膜を介在させるこ
とにより膜相互間での密着性を向上させている。次に、
図9の(b)に示すように非磁性体板(18)にトラック
溝(20)と直交する方向に複数の巻線窓用溝(21)を刻
設すると共に、その反対側に巻線窓用溝(21)と平行し
て複数の巻線溝〔図示せず〕を刻設する。そして、図中
鎖線で示すように非磁性体板(18)を巻線窓用溝(21)
と平行な方向に沿って所定寸法で切断することによりC
コア(8)の基材となるCコアブロック(22)を得る。
First, the C core (8) is manufactured as follows.
Be done. That is, as shown in (a) of FIG.
Prepare a non-magnetic plate (18). Then, as shown in FIG.
Insert the glass grooves (19) in the non-magnetic plate (18) as shown.
Fill the glass groove (19) with glass (12) after engraving.
It Then, flatten the non-magnetic plate (18) with the glass groove (19).
Line and carve a plurality of track grooves (20). Then figure
As shown in Fig. 9 (a), sendust is attached to the non-magnetic plate (18).
And a magnetic metal material having a high saturation magnetic flux density 2Or A
l2O3Alternately covered with an insulating material such as by sputtering.
The metal magnetic film (1) in the track groove (20).
The laminated layer (3) in which the edge thin film (2) is laminated alternately
Track groove formed with the laminated layer (3)
(20) was filled with glass (6) by glass mold
Wrap on top. Although not shown, a metal magnetic film
A Cr film should be interposed between (1) and the insulating thin film (2).
Adhesion between the films is improved by and. next,
As shown in FIG. 9 (b), tracks are placed on the non-magnetic plate (18).
Engraving a plurality of winding window grooves (21) in a direction orthogonal to the grooves (20).
Installed on the opposite side and parallel to the winding window groove (21).
To form a plurality of winding grooves (not shown). And in the figure
The non-magnetic plate (18) is attached to the winding window groove (21) as shown by the chain line.
C by cutting to a specified dimension along the direction parallel to
A C core block (22) which is a base material of the core (8) is obtained.

【0007】一方、Iコア(9)についてはCコア
(8)の場合とほぼ同様で、図10の(a)に示すように
非磁性体板(23)にガラス溝(24)を刻設した上でガラ
ス溝(24)にガラス(13)を充填し、その後、ガラス溝
(24)と平行してトラック溝(25)を刻設する。そし
て、図10の(b)に示すようにトラック溝(25)に金属
磁性膜(1)と絶縁薄膜(2)とを積層したラミネート
層(3)を形成し、更に、トラック溝(25)にガラス
(7)を充填した上で、図中鎖線で示すように非磁性体
板(23)をトラック溝(25)と直交する方向に沿って所
定寸法で切断することによりIコア(9)の基材となる
Iコアブロック(26)を得る。
On the other hand, the I core (9) is almost the same as the C core (8), and a glass groove (24) is formed in the non-magnetic plate (23) as shown in FIG. 10 (a). Then, the glass groove (24) is filled with the glass (13), and then the track groove (25) is formed in parallel with the glass groove (24). Then, as shown in FIG. 10 (b), a laminate layer (3) in which the metal magnetic film (1) and the insulating thin film (2) are laminated is formed in the track groove (25), and the track groove (25) is further formed. After filling the glass with the glass (7), the non-magnetic plate (23) is cut into a predetermined size along the direction orthogonal to the track groove (25) as shown by the chain line in the figure, so that the I core (9) is cut. The I core block (26) which becomes the base material of (1) is obtained.

【0008】以上のようにして得られたCコアブロック
(22)又はIコアブロック(26)のいずれか一方の接合
面にギャップスペーサとなるSiO2等の非磁性体薄膜
〔図示せず〕を被着形成した上で、Cコアブロック(2
2)とIコアブロック(26)とをその接合面を突き合わ
せ、ガラス(6)(7)(12)(13)による溶着でもっ
て接合一体化する。その後、接合一体化されたCコアブ
ロック(22)とIコアブロック(26)とを所定寸法でス
ライスすることにより図7の(a)(b)に示すコアチ
ップ(14)を得る。
A nonmagnetic thin film of SiO 2 or the like (not shown) serving as a gap spacer is formed on the joint surface of either the C core block (22) or the I core block (26) obtained as described above. After depositing and forming, C core block (2
The joint surface of 2) and the I core block (26) are abutted against each other, and they are joined and integrated by welding with glass (6), (7), (12) and (13). After that, the C core block (22) and the I core block (26) that are joined and integrated are sliced into a predetermined size to obtain a core chip (14) shown in FIGS.

【0009】[0009]

【発明が解決しようとする課題】ところで、上記磁気ヘ
ッドでは、金属磁性膜(1)と絶縁薄膜(2)とを積層
したラミネート層(3)によって磁路が形成されてい
る。上述した製法による磁気ヘッドの場合、図7の
(b)に示すようにラミネート層(3)の磁気ギャップ
gに対する傾斜角度θが大きいと、ラミネート層(3)
で形成された磁路がCコア(8)の巻線窓(16)によっ
て遮断されるという問題が生じる。
By the way, in the above magnetic head, the magnetic path is formed by the laminate layer (3) in which the metal magnetic film (1) and the insulating thin film (2) are laminated. In the case of the magnetic head manufactured by the above-described manufacturing method, if the inclination angle θ of the laminate layer (3) with respect to the magnetic gap g is large as shown in FIG. 7B, the laminate layer (3)
There is a problem in that the magnetic path formed in (3) is blocked by the winding window (16) of the C core (8).

【0010】この問題を解決するため、ラミネート層
(3)の磁気ギャップgに対する傾斜角度θを小さくす
ると、ラミネート層(3)で形成された磁路がCコア
(8)の巻線窓(16)によって遮断されることはない
が、磁路が長くなってラミネート層(3)の金属磁性膜
(1)を構成する金属磁性材が多く必要となる。一般
に、その金属磁性材としては、前述したようにセンダス
ト等の高価な材料が使用されているため、金属磁性材の
使用量が増加することは磁気ヘッドの製品コストを上げ
るという問題につながり好ましいことではない。
In order to solve this problem, if the inclination angle θ of the laminate layer (3) with respect to the magnetic gap g is made small, the magnetic path formed by the laminate layer (3) has a winding window (16) of the C core (8). However, the magnetic path becomes long and a large amount of metal magnetic material that constitutes the metal magnetic film (1) of the laminate layer (3) is required. Generally, as the metal magnetic material, since an expensive material such as sendust is used as described above, it is preferable that an increase in the usage amount of the metal magnetic material leads to a problem of increasing the product cost of the magnetic head. is not.

【0011】そこで、本発明は上記問題点に鑑みて提案
されたもので、その目的とするところは、ラミネート層
で形成された磁路がCコアの巻線窓によって遮断される
ことなく、且つ、その磁路が長くなることもないように
した磁気ヘッド及びその製造方法を提供することにあ
る。
Therefore, the present invention has been proposed in view of the above problems, and an object of the present invention is to prevent a magnetic path formed by a laminate layer from being blocked by a winding window of a C core, and SUMMARY OF THE INVENTION It is an object of the present invention to provide a magnetic head in which the magnetic path does not become long and a method for manufacturing the magnetic head.

【0012】[0012]

【課題を解決するための手段】上記目的を達成するため
の技術的手段として、本発明は、高飽和磁束密度を有す
る金属磁性膜と絶縁薄膜とを交互に積層したラミネート
層を非磁性体板で両側から挟み込んだCコアとIコアと
を接合一体化した磁気ヘッドの上記Cコアを製作するに
際し、非磁性体板に所定の角度を有する傾斜面を持つト
ラック溝を刻設し、上記非磁性体板にトラック溝が延び
る方向と直交する方向で巻線窓用溝を刻設した後に、金
属磁性膜と絶縁薄膜とを交互に積層してラミネート層を
形成するようにしたことを特徴とする。
As a technical means for achieving the above object, the present invention provides a non-magnetic material plate with a laminated layer in which a metal magnetic film having a high saturation magnetic flux density and an insulating thin film are alternately laminated. When manufacturing the above C core of the magnetic head in which the C core and the I core sandwiched from both sides are joined and integrated, a non-magnetic plate is engraved with a track groove having an inclined surface with a predetermined angle, A winding window groove is formed in the magnetic material plate in a direction orthogonal to the direction in which the track groove extends, and then a metal magnetic film and an insulating thin film are alternately laminated to form a laminate layer. To do.

【0013】また、本発明は、高飽和磁束密度を有する
金属磁性膜と絶縁薄膜とを交互に積層したラミネート層
を非磁性体板で両側から挟み込んだCコアとIコアとを
接合一体化した磁気ヘッドにおいて、上記CコアのIコ
アとの接合面に形成された巻線窓の内端面に上記金属磁
性膜と絶縁薄膜とを交互に積層したラミネート層を形成
したことを特徴とする。
Further, according to the present invention, a C core and an I core, in which a laminate layer in which a metal magnetic film having a high saturation magnetic flux density and an insulating thin film are alternately laminated, are sandwiched by nonmagnetic plates from both sides, are joined and integrated. In the magnetic head, a laminate layer in which the metal magnetic film and the insulating thin film are alternately laminated is formed on the inner end surface of the winding window formed on the joint surface of the C core with the I core.

【0014】更に、上記Cコアの巻線窓を台形状とし、
その巻線窓において、CコアのIコアとの接合面に隣接
する内端面がその接合面となす角度を30〜45°とするこ
とが望ましい。
Further, the winding window of the C core is trapezoidal,
In the winding window, it is desirable that the angle formed by the inner end surface of the C core adjacent to the joint surface with the I core and the joint surface is 30 to 45 °.

【0015】[0015]

【作用】本発明では、非磁性体板にトラック溝が延びる
方向と直交する方向で巻線窓用溝を刻設した後に、金属
磁性膜と絶縁薄膜とを交互に積層してラミネート層を形
成するようにしたから、Cコアの巻線窓の内端面にラミ
ネート層が形成され、Iコアのラミネート層とで磁路が
形成される。その結果、ラミネート層で形成された磁路
がCコアの巻線窓によって遮断されることはなくなると
共に、ラミネート層の磁気ギャップに対する傾斜角度を
所定値に維持できて上記磁路が長くなることもない。
In the present invention, the winding window groove is formed in the non-magnetic plate in the direction orthogonal to the direction in which the track groove extends, and then the metal magnetic film and the insulating thin film are alternately laminated to form a laminate layer. Therefore, the laminate layer is formed on the inner end surface of the winding window of the C core, and the magnetic path is formed with the laminate layer of the I core. As a result, the magnetic path formed by the laminate layer is not blocked by the winding window of the C core, and the inclination angle with respect to the magnetic gap of the laminate layer can be maintained at a predetermined value, and the magnetic path can be lengthened. Absent.

【0016】[0016]

【実施例】本発明に係る磁気ヘッド及びその製造方法の
実施例を図1乃至図6を参照しながら説明する。尚、図
7乃至図10と同一又は相当部分には同一参照符号を付し
て重複説明は省略する。
Embodiments of a magnetic head and a method of manufacturing the same according to the present invention will be described with reference to FIGS. The same or corresponding parts as those in FIGS. 7 to 10 are designated by the same reference numerals, and a duplicate description will be omitted.

【0017】本発明に係る磁気ヘッドの特徴は、図1の
(a)(b)に示すようにCコア(8)にある。
The characteristic feature of the magnetic head according to the present invention resides in the C core (8) as shown in FIGS.

【0018】即ち、同図に示す第1の実施例の磁気ヘッ
ドにおいて、Iコア(9)については従来と同様である
ため、説明は省略する。この磁気ヘッドのCコア(8)
は、同図に示すように高飽和磁束密度を有するセンダス
ト等の金属磁性膜(1)とSiO2やAl23等の絶縁
薄膜(2)とを交互に積層したラミネート層(3)〔図
示しないが金属磁性膜(1)と絶縁薄膜(2)との間に
はCr膜が介在する〕を巻線窓(16)の内端面(27)に
形成し、更に、ガラス(28)を被着形成したものであ
る。Cコア(8)とIコア(9)とは、コアチップ(1
4)の媒体摺接面(15)に露呈するガラス(6)(7)
(12)(13)と共に巻線窓(16)のガラス(28)による
溶着でもって接合一体化される。尚、巻線窓(16)のガ
ラス(28)は、コアチップ(14)に絶縁被覆処理された
線材を巻回することによりコイルを形成した時に、その
線材がラミネート層(3)に接触することがないように
保護する。これにより、媒体摺接面(15)に露呈するラ
ミネート層(3)、Cコア(8)の巻線窓(16)のラミ
ネート層(3)、Iコア(9)のラミネート層(3)で
もって磁路が形成されるため、巻線窓(16)によって磁
路が遮断されることはない。従って、図2に示すように
コアチップ(14)の媒体摺接面(15)において、ラミネ
ート層(3)の磁気ギャップgに対する傾斜角度θも小
さくする必要がなく、所望の角度、例えば、30〜60°に
設定することができて、上記磁路が長くなってラミネー
ト層(3)の金属磁性膜(1)を構成する金属磁性材の
使用量が増加することもない。
That is, in the magnetic head of the first embodiment shown in the same figure, the I core (9) is the same as the conventional one, and therefore its explanation is omitted. C core of this magnetic head (8)
Is a laminated layer (3) [3] in which a metal magnetic film (1) such as sendust having a high saturation magnetic flux density and an insulating thin film (2) such as SiO 2 or Al 2 O 3 are alternately laminated as shown in FIG. Although not shown, a Cr film is present between the metal magnetic film (1) and the insulating thin film (2)] is formed on the inner end face (27) of the winding window (16), and further glass (28) is formed. It is formed by deposition. The C core (8) and the I core (9) are core chips (1
Glass (6) (7) exposed on the medium sliding contact surface (15) of 4)
Together with (12) and (13), the winding window (16) is welded and integrated by glass (28). The glass (28) of the winding window (16) should be in contact with the laminate layer (3) when a coil is formed by winding a wire that has been insulation-coated on the core chip (14). Protect so that there is no. As a result, the laminated layer (3) exposed on the medium sliding contact surface (15), the laminated layer (3) of the winding window (16) of the C core (8) and the laminated layer (3) of the I core (9) are formed. Since the magnetic path is formed, the magnetic path is not blocked by the winding window (16). Therefore, as shown in FIG. 2, in the medium sliding contact surface (15) of the core chip (14), it is not necessary to reduce the inclination angle θ with respect to the magnetic gap g of the laminate layer (3), and a desired angle, for example, 30 to 30 can be obtained. The magnetic path can be set to 60 °, and the magnetic path is not lengthened, so that the amount of the metal magnetic material forming the metal magnetic film (1) of the laminate layer (3) is not increased.

【0019】ここで、巻線窓(16)は図示の如く台形状
が好ましく、更に、Cコア(8)のIコア(9)との接
合面(10)と隣接する内端面(27)がその接合面(10)
となす角度δを30〜45°とするとよい。この角度δが30
°よりも小さいと、巻線窓(16)の開口面積が減少する
ために線材を巻回することが困難となり、逆に、上記角
度δが45°よりも大きくなると、後述する磁気ヘッドの
製造上、巻線窓(16)の内端面(27)に形成される金属
磁性膜(1)及び絶縁薄膜(2)からなるラミネート層
(3)の厚みを所定値に設定することが困難となる。
尚、接合面(10)と隣接する内端面(27)のなす角度δ
を30〜45°とした場合、その内端面(27)とそれに隣接
する中央の内端面(27)とのなす角度ψが135〜150°と
なる。
Here, the winding window (16) is preferably trapezoidal as shown in the figure, and further, the inner end surface (27) adjacent to the joint surface (10) of the C core (8) with the I core (9) is formed. The joint surface (10)
The angle δ formed with is preferably 30 to 45 °. This angle δ is 30
If the angle is less than °, it becomes difficult to wind the wire because the opening area of the winding window (16) is reduced, and conversely, if the angle δ is greater than 45 °, the magnetic head to be described later is manufactured. Moreover, it becomes difficult to set the thickness of the laminate layer (3) formed of the metal magnetic film (1) and the insulating thin film (2) formed on the inner end surface (27) of the winding window (16) to a predetermined value. ..
Note that the angle δ formed by the inner end surface (27) adjacent to the joint surface (10)
Is 30 to 45 °, the angle ψ between the inner end face (27) and the central inner end face (27) adjacent thereto is 135 to 150 °.

【0020】次に、上述した第1の実施例の磁気ヘッド
の製造方法を図2乃至図6に示して説明する。
Next, a method of manufacturing the magnetic head of the above-described first embodiment will be described with reference to FIGS.

【0021】まず、Cコア(8)は以下の要領で製作さ
れる。即ち、図2の(a)に示すようにセラミック等の
非磁性体板(18)を用意する。そして、図2の(b)に
示すように非磁性体板(18)に複数のガラス溝(19)を
刻設した上でガラス溝(19)にガラス(12)を充填す
る。その上で、非磁性体板(18)にガラス溝(19)と平
行して複数のトラック溝(20)を刻設する。その後、図
3の(a)に示すように非磁性体板(18)にトラック溝
(20)と直交する方向に複数の巻線窓用溝(21)を刻設
すると共に、反対側に巻線窓用溝(21)と平行して複数
の巻線溝〔図示せず〕を刻設する。次に、図3の(b)
に示すように非磁性体板(18)にセンダスト等の高飽和
磁束密度を有する金属磁性材とSiO2やAl23等の
絶縁材とをスパッタリング等により交互に被着させ、ト
ラック溝(20)及び巻線窓用溝(21)に金属磁性膜
(1)と絶縁薄膜(2)とを交互に積層したラミネート
層(3)を形成する。尚、図示しないが、金属磁性膜
(1)と絶縁薄膜(2)との間にCr膜を介在させるこ
とにより膜相互間での密着性が向上する。そして、図4
の(a)に示すようにラミネート層(3)を形成したト
ラック溝(20)及び巻線窓用溝(21)にガラスモールド
によりガラス(6)(28)を充填し、更に図4の(b)
に示すようにラッピングした上で巻線窓用溝(21)に充
填されたガラス(28)を切削加工する。そして、図中鎖
線で示すようにこの非磁性体板(18)を巻線窓用溝(2
1)と平行な方向に所定寸法で切断することによりCコ
ア(8)の基材となるCコアブロック(22)を得る。
First, the C core (8) is manufactured as follows. That is, as shown in FIG. 2A, a nonmagnetic plate (18) such as ceramic is prepared. Then, as shown in FIG. 2B, a plurality of glass grooves (19) are engraved in the non-magnetic plate (18), and then the glass grooves (19) are filled with glass (12). Then, a plurality of track grooves (20) are formed in the non-magnetic plate (18) in parallel with the glass grooves (19). After that, as shown in FIG. 3 (a), a plurality of winding window grooves (21) are formed in the non-magnetic plate (18) in a direction orthogonal to the track grooves (20) and the windings are wound on the opposite side. A plurality of winding grooves (not shown) are formed in parallel with the wire window groove (21). Next, FIG. 3B
As shown in (1), a nonmagnetic plate (18) is alternately coated with a metal magnetic material having a high saturation magnetic flux density such as sendust and an insulating material such as SiO 2 or Al 2 O 3 by sputtering to form a track groove ( 20) and the winding window groove (21) are formed with a laminate layer (3) in which the metal magnetic film (1) and the insulating thin film (2) are alternately laminated. Although not shown, by interposing a Cr film between the metal magnetic film (1) and the insulating thin film (2), the adhesion between the films is improved. And FIG.
As shown in (a) of FIG. 4, the track groove (20) and the winding window groove (21) having the laminate layer (3) are filled with glass (6) and (28) by glass molding, and further, as shown in FIG. b)
The glass (28) filled in the winding window groove (21) is lapped as shown in FIG. Then, as shown by the chain line in the figure, the non-magnetic plate (18) is connected to the winding window groove (2
The C core block (22), which is a base material of the C core (8), is obtained by cutting in a direction parallel to 1) with a predetermined dimension.

【0022】一方、Iコア(26)についてはCコア
(8)の場合とほぼ同様で、図5の(a)に示すように
非磁性体板(23)にガラス溝(24)を刻設した上でガラ
ス溝(24)にガラス(13)を充填し、その後、ガラス溝
(24)と平行してトラック溝(25)を刻設する。そし
て、図5の(b)に示すようにトラック溝(25)に金属
磁性膜(1)と絶縁薄膜(2)とを積層したラミネート
層(3)を形成し、トラック溝(25)にガラス(7)を
充填する。そして、図中鎖線で示すように非磁性体板
(23)をトラック溝(25)と直交する方向に所定寸法で
切断することによりIコア(9)の基材となるIコアブ
ロック(26)を得る。
On the other hand, the I core (26) is almost the same as the C core (8), and a glass groove (24) is formed in the non-magnetic plate (23) as shown in FIG. 5 (a). Then, the glass groove (24) is filled with the glass (13), and then the track groove (25) is formed in parallel with the glass groove (24). Then, as shown in FIG. 5B, a laminated layer (3) is formed by laminating the metal magnetic film (1) and the insulating thin film (2) on the track groove (25), and the track groove (25) is made of glass. Fill (7). Then, as shown by a chain line in the drawing, the non-magnetic plate (23) is cut in a direction perpendicular to the track groove (25) with a predetermined dimension to form an I core block (26) which is a base material of the I core (9). To get

【0023】以上のようにして得られたCコアブロック
(22)又はIコアブロック(26)のいずれか一方の接合
面にギャップスペーサとなるSiO2等の非磁性体薄膜
〔図示せず〕を被着形成した上で、Cコアブロック(2
2)とIコアブロック(26)とをその接合面を突き合わ
せ、ガラス(6)(7)(12)(13)による溶着でもっ
て接合一体化する。この時、巻線窓用溝(21)に充填し
て切削加工により残存したガラス(28)の溶着によって
もCコアブロック(22)とIコアブロック(26)とが接
合一体化される。その後、接合一体化されたCコアブロ
ック(22)とIコアブロック(26)とを所定寸法でスラ
イスすることにより図1の(a)(b)に示すコアチッ
プ(14)を得る。
A nonmagnetic thin film of SiO 2 or the like (not shown) serving as a gap spacer is formed on the joint surface of either the C core block (22) or the I core block (26) obtained as described above. After depositing and forming, C core block (2
The joint surface of 2) and the I core block (26) are abutted against each other, and they are joined and integrated by welding with glass (6), (7), (12) and (13). At this time, the C core block (22) and the I core block (26) are joined and integrated by welding of the glass (28) which is filled in the winding window groove (21) and remains by cutting. After that, the C core block (22) and the I core block (26) that have been joined and integrated are sliced into a predetermined size to obtain a core chip (14) shown in FIGS.

【0024】尚、上述した第1の実施例では、Iコア
(9)については従来どおりとしたが、本発明はこれに
限定されることなく、図6の(a)(b)に示すように
Iコア(9)の巻線窓(16)と対応する部分にラミネー
ト層(3)を形成するようにしてもよい。即ち、同図に
示す第2の実施例では、Cコア(8)の場合と同様、I
コア(9)の巻線窓(16)と対応する内端面(29)に金
属磁性膜(1)及び絶縁薄膜(2)からなるラミネート
層(3)を形成し、更に、ガラス(30)を被着形成す
る。これにより、コアチップ(14)の媒体摺接面(15)
に露呈するラミネート層(3)、Cコア(8)の巻線窓
(16)のラミネート層(3)、Iコア(9)のラミネー
ト層(3)でもって磁路が形成され、第1の実施例のも
のよりも磁路の長さを短くできて低インピーダンス化が
図れる。また、Iコア(9)のCコア(8)との接合面
(11)と隣接する内端面(29)が接合面(11)となす角
度は、Cコア(8)でのδ〔図1の(a)参照〕と同
様、30〜45°とすればよい。
In the first embodiment described above, the I core (9) is the same as the conventional one, but the present invention is not limited to this, and as shown in FIGS. 6 (a) and 6 (b). Alternatively, the laminate layer (3) may be formed on the portion of the I core (9) corresponding to the winding window (16). That is, in the second embodiment shown in the figure, as in the case of the C core (8), I
A laminated layer (3) composed of a metal magnetic film (1) and an insulating thin film (2) is formed on the inner end surface (29) of the core (9) corresponding to the winding window (16), and a glass (30) is further formed. Adhering and forming. As a result, the medium sliding contact surface (15) of the core chip (14)
A magnetic path is formed by the laminate layer (3) exposed to the above, the laminate layer (3) of the winding window (16) of the C core (8), and the laminate layer (3) of the I core (9). The length of the magnetic path can be made shorter than that of the embodiment, and the impedance can be reduced. Further, the angle formed by the inner end surface (29) adjacent to the joint surface (11) of the I core (9) with the C core (8) and the joint surface (11) is δ in the C core (8) [Fig. (See (a)]), the angle may be 30 to 45 °.

【0025】第2の実施例におけるIコア(9)の製作
は、第1の実施例のCコア(8)の場合と同様であり、
トラック溝加工後、そのトラック溝と直交する方向に巻
線窓用溝を刻設した上で、金属磁性膜及び絶縁薄膜から
なるラミネート層を形成するようにすればよく、具体的
な説明は省略する。
The manufacture of the I core (9) in the second embodiment is similar to that of the C core (8) in the first embodiment,
After processing the track groove, a winding window groove may be formed in a direction orthogonal to the track groove, and then a laminate layer including a metal magnetic film and an insulating thin film may be formed, and a detailed description thereof is omitted. To do.

【0026】[0026]

【発明の効果】本発明によれば、非磁性体板にトラック
溝及び巻線窓用溝を刻設した後に、金属磁性膜と絶縁薄
膜とを交互に積層してラミネート層を形成するようにし
たから、Cコアの巻線窓の内端面にラミネート層が形成
され、Iコアのラミネート層とで磁路が形成される。そ
の結果、ラミネート層で形成された磁路がCコアの巻線
窓によって遮断されることはなくなると共に、ラミネー
ト層の磁気ギャップに対する傾斜角度を所定値に維持で
きて上記磁路が長くなることもない。従って、製品のコ
ストアップを未然に防止できて低インピーダンス化も実
現容易となり、所望の出力特性を有する高品質の磁気ヘ
ッドを提供することができる。
According to the present invention, after a track groove and a winding window groove are formed on a non-magnetic material plate, a metal magnetic film and an insulating thin film are alternately laminated to form a laminate layer. Therefore, the laminate layer is formed on the inner end surface of the winding window of the C core, and the magnetic path is formed with the laminate layer of the I core. As a result, the magnetic path formed by the laminate layer is not blocked by the winding window of the C core, and the inclination angle with respect to the magnetic gap of the laminate layer can be maintained at a predetermined value, and the magnetic path can be lengthened. Absent. Therefore, it is possible to prevent the cost of the product from increasing and it is easy to realize a low impedance, and it is possible to provide a high-quality magnetic head having desired output characteristics.

【図面の簡単な説明】[Brief description of drawings]

【図1】(a)は本発明に係る磁気ヘッドの第1の実施
例を示す正面図、(b)はその磁気ヘッドの平面図
1A is a front view showing a first embodiment of a magnetic head according to the present invention, and FIG. 1B is a plan view of the magnetic head.

【図2】図1の磁気ヘッドのCコアの製造方法を説明す
る上で、(a)は非磁性体板を示す斜視図、(b)はト
ラック溝を形成した非磁性体板を示す斜視図
2A and 2B are perspective views showing a non-magnetic material plate, and FIG. 2B is a perspective view showing a non-magnetic material plate having track grooves, for explaining a method of manufacturing the C core of the magnetic head of FIG. Figure

【図3】図1の磁気ヘッドのCコアの製造方法を説明す
る上で、(a)は巻線窓用溝を形成した非磁性体板を示
す斜視図、(b)はラミネート層を形成した非磁性体板
を示す斜視図
3A and 3B are perspective views showing a non-magnetic material plate having grooves for winding windows, and FIG. 3B is a laminate layer for explaining a method of manufacturing the C core of the magnetic head of FIG. Perspective view showing a non-magnetic plate

【図4】図1の磁気ヘッドのCコアの製造方法を説明す
る上で、(a)はガラスモールドした非磁性体板を示す
斜視図、(b)はガラスモールド後ラッピングした非磁
性体板を示す斜視図
4A and 4B are perspective views showing a glass-molded non-magnetic material plate, and FIG. 4B is a non-magnetic material plate lapped after glass-molding, for explaining a method of manufacturing the C core of the magnetic head of FIG. Perspective view showing

【図5】図1の磁気ヘッドのIコアの製造方法を説明す
る上で、(a)はトラック溝を形成した非磁性体板を示
す斜視図、(b)はラミネート層を形成し、ガラスモー
ルド後ラッピングした非磁性体板を示す斜視図
5 (a) and 5 (b) are perspective views showing a non-magnetic plate having track grooves formed therein, and FIG. 5 (b) is a glass plate having a laminated layer formed thereon in order to explain the method of manufacturing the I core of the magnetic head shown in FIG. Perspective view showing a non-magnetic plate that has been wrapped after molding

【図6】(a)は本発明の第2の実施例の磁気ヘッドを
示す正面図、(b)はその磁気ヘッドの平面図
FIG. 6A is a front view showing a magnetic head of a second embodiment of the present invention, and FIG. 6B is a plan view of the magnetic head.

【図7】(a)は従来の磁気ヘッドを示す正面図、
(b)はその磁気ヘッドの平面図
FIG. 7A is a front view showing a conventional magnetic head;
(B) is a plan view of the magnetic head

【図8】図7の磁気ヘッドのCコアの製造方法を説明す
る上で、(a)は非磁性体板を示す斜視図、(b)はト
ラック溝を形成した非磁性体板を示す斜視図
8A and 8B are perspective views showing a non-magnetic material plate, and FIG. 8B is a perspective view showing a non-magnetic material plate having track grooves, for explaining a method of manufacturing the C core of the magnetic head of FIG. Figure

【図9】図7の磁気ヘッドのCコアの製造方法を説明す
る上で、(a)はラミネート層を形成し、ガラスモール
ド後ラッピングした非磁性体板を示す斜視図、(b)は
巻線窓用溝を形成した非磁性体板を示す斜視図
9 (a) and 9 (b) are perspective views showing a non-magnetic plate formed by forming a laminate layer and lapping after glass molding, and FIG. 9 (b) is a winding diagram for explaining the method for manufacturing the C core of the magnetic head of FIG. Perspective view showing a non-magnetic plate having a groove for a wire window

【図10】図7の磁気ヘッドのIコアの製造方法を説明す
る上で、(a)はトラック溝を形成した非磁性体板を示
す斜視図、(b)はラミネート層を形成し、ガラスモー
ルド後ラッピングした非磁性体板を示す斜視図
10A and 10B are perspective views showing a non-magnetic material plate having track grooves formed therein, and FIG. 10B is a glass plate having a laminated layer formed thereon in order to explain a method of manufacturing the I core of the magnetic head shown in FIG. Perspective view showing a non-magnetic plate that has been wrapped after molding

【符号の説明】[Explanation of symbols]

1 金属磁性膜 2 絶縁薄膜 3 ラミネート層 4 非磁性体板 5 非磁性体板 8 C字状コア 9 I字状コア 10 接合面 16 巻線窓 27 内端面 1 Metal Magnetic Film 2 Insulating Thin Film 3 Laminate Layer 4 Non-Magnetic Material Plate 5 Non-Magnetic Material Plate 8 C-Shaped Core 9 I-Shaped Core 10 Joining Surface 16 Winding Window 27 Inner End Surface

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 高飽和磁束密度を有する金属磁性膜と絶
縁薄膜とを交互に積層したラミネート層を非磁性体板で
両側から挟み込んだC字状コアとI字状コアとを接合一
体化した磁気ヘッドの上記C字状コアを製作するに際
し、 非磁性体板に所定の角度を有する傾斜面を持つトラック
溝を刻設し、上記非磁性体板にトラック溝が延びる方向
と直交する方向で巻線窓用溝を刻設した後に、金属磁性
膜と絶縁薄膜とを交互に積層してラミネート層を形成す
るようにしたことを特徴とする磁気ヘッドの製造方法。
1. A C-shaped core and an I-shaped core in which a laminate layer in which a metal magnetic film having a high saturation magnetic flux density and an insulating thin film are alternately laminated is sandwiched from both sides by a non-magnetic material plate is integrally bonded. When manufacturing the C-shaped core of the magnetic head, a track groove having an inclined surface having a predetermined angle is engraved on the non-magnetic plate, and the non-magnetic plate is formed in a direction orthogonal to the direction in which the track groove extends. A method of manufacturing a magnetic head, wherein a metal magnetic film and an insulating thin film are alternately laminated to form a laminate layer after engraving a winding window groove.
【請求項2】 高飽和磁束密度を有する金属磁性膜と絶
縁薄膜とを交互に積層したラミネート層を非磁性体板で
両側から挟み込んだC字状コアとI字状コアとを接合一
体化した磁気ヘッドにおいて、 上記C字状コアのI字状コアとの接合面に形成された巻
線窓の内端面に上記金属磁性膜と絶縁薄膜とを交互に積
層したラミネート層を形成したことを特徴とする磁気ヘ
ッド。
2. A C-shaped core and an I-shaped core in which a laminated layer in which a metal magnetic film having a high saturation magnetic flux density and an insulating thin film are alternately laminated are sandwiched from both sides by a non-magnetic material plate are joined and integrated. In the magnetic head, a laminate layer in which the metal magnetic film and the insulating thin film are alternately laminated is formed on the inner end surface of the winding window formed on the joint surface of the C-shaped core and the I-shaped core. And a magnetic head.
【請求項3】 C字状コアの巻線窓を台形状とし、その
巻線窓において、C字状コアのI字状コアとの接合面に
隣接する内端面がその接合面となす角度を30〜45°とし
たことを特徴とする請求項2記載の磁気ヘッド。
3. The winding window of the C-shaped core has a trapezoidal shape, and in the winding window, an angle formed by an inner end surface adjacent to a joint surface of the C-shaped core with the I-shaped core with respect to the joint surface is defined. The magnetic head according to claim 2, wherein the magnetic head has an angle of 30 to 45 °.
JP28610591A 1991-10-31 1991-10-31 Magnetic head and production thereof Pending JPH05128419A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28610591A JPH05128419A (en) 1991-10-31 1991-10-31 Magnetic head and production thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28610591A JPH05128419A (en) 1991-10-31 1991-10-31 Magnetic head and production thereof

Publications (1)

Publication Number Publication Date
JPH05128419A true JPH05128419A (en) 1993-05-25

Family

ID=17700001

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28610591A Pending JPH05128419A (en) 1991-10-31 1991-10-31 Magnetic head and production thereof

Country Status (1)

Country Link
JP (1) JPH05128419A (en)

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