JPH0512724Y2 - - Google Patents
Info
- Publication number
- JPH0512724Y2 JPH0512724Y2 JP1987043033U JP4303387U JPH0512724Y2 JP H0512724 Y2 JPH0512724 Y2 JP H0512724Y2 JP 1987043033 U JP1987043033 U JP 1987043033U JP 4303387 U JP4303387 U JP 4303387U JP H0512724 Y2 JPH0512724 Y2 JP H0512724Y2
- Authority
- JP
- Japan
- Prior art keywords
- needle
- probe
- sample
- height
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000523 sample Substances 0.000 claims description 97
- 238000005259 measurement Methods 0.000 claims description 5
- 238000013459 approach Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 230000005641 tunneling Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987043033U JPH0512724Y2 (enrdf_load_stackoverflow) | 1987-03-24 | 1987-03-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987043033U JPH0512724Y2 (enrdf_load_stackoverflow) | 1987-03-24 | 1987-03-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63150305U JPS63150305U (enrdf_load_stackoverflow) | 1988-10-04 |
JPH0512724Y2 true JPH0512724Y2 (enrdf_load_stackoverflow) | 1993-04-02 |
Family
ID=30859512
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987043033U Expired - Lifetime JPH0512724Y2 (enrdf_load_stackoverflow) | 1987-03-24 | 1987-03-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0512724Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH079363B2 (ja) * | 1988-01-29 | 1995-02-01 | 日本電信電話株式会社 | 表面機械特性測定装置 |
-
1987
- 1987-03-24 JP JP1987043033U patent/JPH0512724Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS63150305U (enrdf_load_stackoverflow) | 1988-10-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CA1270132A (en) | Method and atomic force microscope for imaging surfaces with atomic resolution | |
US4724318A (en) | Atomic force microscope and method for imaging surfaces with atomic resolution | |
USRE33387E (en) | Atomic force microscope and method for imaging surfaces with atomic resolution | |
US5193383A (en) | Mechanical and surface force nanoprobe | |
US7100430B2 (en) | Dual stage instrument for scanning a specimen | |
JP2915554B2 (ja) | バリアハイト測定装置 | |
US5253516A (en) | Atomic force microscope for small samples having dual-mode operating capability | |
JPH06213910A (ja) | 形状を除く表面のパラメータを正確に測定し、または形状に関連した仕事を行うための方法および相互作用装置 | |
US8631510B2 (en) | Magnetic sensor and scanning microscope | |
JP2011053154A (ja) | 誘電率の測定方法及び走査型非線形誘電率顕微鏡 | |
JP2001124798A (ja) | 微小接触式プローバー | |
JPH0512724Y2 (enrdf_load_stackoverflow) | ||
JP2002156409A (ja) | 集積回路における電気信号の検出のための測定ゾンデ及びこの測定ゾンデの使用法及びこの測定ゾンデの製造方法及びこの測定ゾンデによる測定システム | |
JPH0412547A (ja) | 膜厚分布測定装置 | |
JP2853585B2 (ja) | 走査型プローブ顕微鏡 | |
JP2900764B2 (ja) | 半導体表面薄膜の評価方法 | |
JPH079363B2 (ja) | 表面機械特性測定装置 | |
JPH09251026A (ja) | 走査プローブ顕微鏡 | |
CN113588989A (zh) | 扫描卡西米尔力显微镜及使用方法 | |
JP2789244B2 (ja) | 微小プローブの形成方法 | |
JP2956144B2 (ja) | 側壁形状測定方法 | |
JPH10232240A (ja) | 表面観察装置 | |
JPH0526612A (ja) | 走査型トンネル顕微鏡 | |
JPH0850872A (ja) | 試料表面の観察方法、原子間力顕微鏡、微細加工方法および微細加工装置 | |
JPH06341808A (ja) | 走査型トンネル顕微鏡 |