JPH05123657A - Method for cleaning body to be cleaned - Google Patents

Method for cleaning body to be cleaned

Info

Publication number
JPH05123657A
JPH05123657A JP31751291A JP31751291A JPH05123657A JP H05123657 A JPH05123657 A JP H05123657A JP 31751291 A JP31751291 A JP 31751291A JP 31751291 A JP31751291 A JP 31751291A JP H05123657 A JPH05123657 A JP H05123657A
Authority
JP
Japan
Prior art keywords
cleaning
cleaned
liquid
ultrasonic
cleaning liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP31751291A
Other languages
Japanese (ja)
Inventor
Masahide Uchino
正英 内野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Field Co Ltd
Original Assignee
Japan Field Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Field Co Ltd filed Critical Japan Field Co Ltd
Priority to JP31751291A priority Critical patent/JPH05123657A/en
Publication of JPH05123657A publication Critical patent/JPH05123657A/en
Pending legal-status Critical Current

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  • Cleaning By Liquid Or Steam (AREA)
  • Detergent Compositions (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

PURPOSE:To produce an ultrasonic cleaning effect on a body to be cleaned while using a cleaning liq. having high viscosity such as a water insoluble terpene solvent, a silicon contg. solvent, a hydrocarbon solvent or hydrophilic higher alcohol. CONSTITUTION:A body 7 to be cleaned is first cleaned by immersion in a cleaning liq. 1 having high viscosity. It is then immersed in an ultrasonic cleaning liq. 6 based on a perfectly fluorinated liq. and ultrasonic cleaning is carried out to remove contaminants remaining in the recess, etc., in the body 7 after cleaning in the cleaning liq. 1 having high viscosity.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、機械部品、電子部品、
プリント基板等の被洗浄物の洗浄方法に係るものであ
る。
BACKGROUND OF THE INVENTION The present invention relates to mechanical parts, electronic parts,
The present invention relates to a method for cleaning an object to be cleaned such as a printed circuit board.

【0002】[0002]

【従来の技術】従来、被洗浄物に付着した汚物を確実に
除去する、精密洗浄をしようとする場合には、化学的に
汚物除去が可能な、フッ素系溶剤、塩素系溶剤等の洗浄
液中に被洗浄物を浸漬した状態で、超音波を被洗浄物に
当てて洗浄を行うことが一般的に行われていた。
2. Description of the Related Art Conventionally, in a cleaning liquid such as a fluorine-based solvent or a chlorine-based solvent, which is capable of chemically removing contaminants when it is desired to remove contaminants adhering to an object to be cleaned reliably and to perform precision cleaning. It has been common practice to apply ultrasonic waves to the object to be cleaned while the object to be cleaned is immersed in the object.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、フッ素
系溶剤、塩素系溶剤等は環境破壊を伴うことから使用が
規制されるものとなった。そこで、洗浄液に、テルペン
溶剤、シリコン系溶剤、炭化水素系溶剤、高級アルコー
ル等の親水性溶剤、を使用することが考慮されるが、こ
れらはいずれも、粘性の高い溶剤であって、超音波振動
子から発した超音波キャビテーションが、被洗浄物に到
達するまでに、粘性の高い洗浄液によって減衰され、超
音波洗浄効果を生じ得ないか、著しく低下させるもので
あった。
However, the use of fluorine-based solvents, chlorine-based solvents, etc. has been restricted because of environmental damage. Therefore, it is considered to use a terpene solvent, a silicon-based solvent, a hydrocarbon-based solvent, a hydrophilic solvent such as a higher alcohol, for the cleaning liquid, but these are all highly viscous solvents, and ultrasonic waves The ultrasonic cavitation generated from the oscillator is attenuated by the highly viscous cleaning liquid before reaching the object to be cleaned, and the ultrasonic cleaning effect cannot be generated or significantly reduced.

【0004】そのため、粘性の高い洗浄液との接触によ
って被洗浄物から剥離している汚物も、被洗浄物の凹部
等から離脱することができずに残留し、高度な精密洗浄
を行うことができない欠点を生じていた。
Therefore, the filth separated from the object to be cleaned due to contact with the highly viscous cleaning liquid cannot be removed from the concave portion of the object to be cleaned and remains, so that high precision cleaning cannot be performed. It had a flaw.

【0005】本発明は上述のごとき課題を解決しようと
するものであって、非水溶系のテルペン溶剤、シリコン
系溶剤、炭化水素系溶剤、親水性溶剤の高級アルコール
等の粘性の高い洗浄液を、被洗浄物の洗浄に使用しなが
ら、被洗浄物に超音波洗浄効果を得ることを可能にしよ
うとするものである。
The present invention is intended to solve the above-mentioned problems, and provides a highly viscous cleaning liquid such as a water-insoluble terpene solvent, a silicone solvent, a hydrocarbon solvent, and a higher alcohol such as a hydrophilic solvent, It is intended to make it possible to obtain an ultrasonic cleaning effect on an object to be cleaned while using it for cleaning the object to be cleaned.

【0006】[0006]

【課題を解決するための手段】本発明は上述のごとき課
題を解決するため、粘性の高い洗浄液中に被洗浄物を浸
漬して洗浄を行った後に、被洗浄物を、完全フッ素化液
体を主成分とする超音波洗浄液中に浸漬し、この超音波
洗浄液中で超音波洗浄を行うことを特徴として成るもの
である。
In order to solve the above-mentioned problems, the present invention is performed by immersing an object to be cleaned in a highly viscous cleaning solution, and then cleaning the object to be cleaned with a completely fluorinated liquid. It is characterized in that it is immersed in an ultrasonic cleaning liquid as a main component and ultrasonic cleaning is performed in this ultrasonic cleaning liquid.

【0007】また、他の発明は、粘性の高い洗浄液と、
完全フッ素化液体を主成分とする超音波洗浄液とを、洗
浄槽中で混合状態とし、この混合液中に被洗浄物を浸漬
して超音波洗浄を行うことを特徴として成るものであ
る。
Further, another invention is a cleaning liquid having high viscosity,
An ultrasonic cleaning liquid containing a perfluorinated liquid as a main component is mixed in a cleaning tank, and an object to be cleaned is immersed in the mixed liquid to perform ultrasonic cleaning.

【0008】また、粘性の高い洗浄液は、テルペン溶
剤、シリコン系溶剤、炭化水素系溶剤、親水性溶剤であ
っても良い。
Further, the highly viscous cleaning liquid may be a terpene solvent, a silicon solvent, a hydrocarbon solvent or a hydrophilic solvent.

【0009】また、粘性の高い溶剤は、粘度が20℃に
て2cP以上であっても良い。
The highly viscous solvent may have a viscosity of 2 cP or more at 20 ° C.

【0010】また、完全フッ素化液体を主成分とする超
音波洗浄液は、粘度が、20℃にて2cP未満であって
も良い。
The ultrasonic cleaning liquid containing a perfluorinated liquid as a main component may have a viscosity of less than 2 cP at 20 ° C.

【0011】[0011]

【作用】本発明方法で被洗浄物の洗浄作業を行うには、
まず、粘度が20℃にて2cP以上の粘性の高い洗浄液
中に被洗浄物を浸漬して洗浄を行なう。この粘性の高い
洗浄液は、テルペン溶剤、シリコン系溶剤、炭化水素系
溶剤、高級アルコール等の親水性溶剤が考慮される。こ
れらの高い粘性の洗浄液は、この洗浄液中に浸漬した被
洗浄物を超音波洗浄しようとしても、超音波を減衰して
しまうため、被洗浄物に対して有効な超音波洗浄を行う
ことはできない。
In order to carry out the work of cleaning the object to be cleaned by the method of the present invention,
First, the object to be cleaned is immersed in a highly viscous cleaning liquid having a viscosity of 20 ° C. of 2 cP or more to perform cleaning. As the highly viscous cleaning liquid, hydrophilic solvents such as terpene solvent, silicon solvent, hydrocarbon solvent, and higher alcohol are considered. These highly viscous cleaning liquids do not allow effective ultrasonic cleaning of the objects to be cleaned, because the ultrasonic waves are attenuated even if the objects to be cleaned immersed in the cleaning solution are subjected to ultrasonic cleaning. ..

【0012】しかしながら、これらの粘性の高い洗浄液
は、被洗浄物の汚物を化学的に溶解したり、剥離するに
は有効なものである。そのため、被洗浄物から汚物を溶
解したり剥離することは可能となるが、超音波という物
理的力が作用しないため、溶解したり、剥離した汚物
は、被洗浄物の凹部等に残留し、確実に除去することは
できないものである。
However, these highly viscous cleaning liquids are effective for chemically dissolving or peeling the dirt of the object to be cleaned. Therefore, it is possible to dissolve or peel the dirt from the object to be cleaned, but because the physical force of ultrasonic waves does not act, the melted or peeled dirt remains in the recesses of the object to be cleaned, It cannot be reliably removed.

【0013】そこで本発明では、粘性の高い洗浄液中に
被洗浄物を浸漬して洗浄を行なった後に、被洗浄物を、
完全フッ素化液体を主成分とする超音波洗浄液中に浸漬
して超音波洗浄を行う。この超音波洗浄液は、完全フッ
素化液体中で20℃に於いて粘度が2cP未満となるも
のを選択する。
Therefore, in the present invention, after cleaning the object to be cleaned by immersing the object to be cleaned in a highly viscous cleaning liquid,
Ultrasonic cleaning is carried out by immersing in an ultrasonic cleaning liquid whose main component is a completely fluorinated liquid. This ultrasonic cleaning liquid is selected so that the viscosity is less than 2 cP at 20 ° C. in the fully fluorinated liquid.

【0014】完全フッ素化液体を主成分とする超音波洗
浄液は、粘度が20℃に於いて2cP未満であるから、
超音波キャビテーションの伝達性が極めて良いものであ
る。そのため、粘性の高い洗浄液中で汚物を溶解したり
剥離したりしている被洗浄物は、凹部等に残留している
汚物を超音波キャビテーションによる物理的な力によっ
て、被洗浄物から確実に除去することができるものとな
る。
The ultrasonic cleaning liquid containing a perfluorinated liquid as a main component has a viscosity of less than 2 cP at 20 ° C.
The transmissibility of ultrasonic cavitation is extremely good. For this reason, for the object to be cleaned that dissolves or peels the dirt in the highly viscous cleaning liquid, the dirt remaining in the recesses can be reliably removed from the object to be cleaned by the physical force of ultrasonic cavitation. You will be able to.

【0015】そして、完全フッ素化液体を主成分とする
超音波洗浄液は、濯ぎ洗浄ではなく、被洗浄物に物理的
な力としての超音波キャビテーションを加えるもので、
超音波洗浄液として作用するものである。従って、超音
波キャビテーションの減衰が生じる粘度と成らない限
り、超音波洗浄液は、粘性の高い洗浄液で洗浄した被洗
浄物を、繰り返して超音波洗浄に使用することができ
る。
The ultrasonic cleaning liquid containing a perfluorinated liquid as a main component is not rinsed and rinsed, but ultrasonic cavitation as a physical force is applied to the object to be cleaned.
It acts as an ultrasonic cleaning liquid. Therefore, as long as the viscosity is such that the attenuation of ultrasonic cavitation does not occur, the ultrasonic cleaning liquid can repeatedly use the object to be cleaned that has been cleaned with the highly viscous cleaning liquid for ultrasonic cleaning.

【0016】また、別の発明では、粘性の高い洗浄液
と、完全フッ素化液体を主成分とする超音波洗浄液と
を、洗浄槽中で混合状態とし、この混合液中に被洗浄物
を浸漬して超音波洗浄を行うことも可能となる。
[0016] In another invention, a highly viscous cleaning liquid and an ultrasonic cleaning liquid containing a perfluorinated liquid as a main component are mixed in a cleaning tank, and an object to be cleaned is immersed in the mixed liquid. It is also possible to carry out ultrasonic cleaning.

【0017】この場合は、超音波洗浄液中に粘性の高い
洗浄液が混合するため、超音波洗浄液のみによる超音波
洗浄に比較すれば、超音波洗浄効果は低下するものの、
被洗浄物を2度に渡って洗浄する手数を無くし、被洗浄
物の簡易な超音波洗浄を可能とするものである。
In this case, since the cleaning liquid having a high viscosity is mixed in the ultrasonic cleaning liquid, the ultrasonic cleaning effect is reduced as compared with the ultrasonic cleaning using only the ultrasonic cleaning liquid.
This eliminates the trouble of cleaning the object to be cleaned twice and enables simple ultrasonic cleaning of the object to be cleaned.

【0018】[0018]

【実施例】以下本発明の一実施例を図1に於いて説明す
れば、(1)は溶剤洗浄槽で、テルペン溶剤、シリコン系
溶剤、炭化水素系溶剤、高級アルコール等の親水性溶剤
のごとく、高い粘性の洗浄液(2)を充填している。そし
て、これらの高い粘度の洗浄液(2)は、20℃に於いて
2cP以上の粘度を有するものであり、高級アルコール
では約7cPの粘度を有している。
EXAMPLE An example of the present invention will be described below with reference to FIG. 1. (1) is a solvent cleaning tank, which contains a terpene solvent, a silicon solvent, a hydrocarbon solvent, a hydrophilic solvent such as a higher alcohol. As described above, the highly viscous cleaning liquid (2) is filled. The high-viscosity cleaning liquid (2) has a viscosity of 2 cP or more at 20 ° C., and a higher alcohol has a viscosity of about 7 cP.

【0019】そして、この溶剤洗浄槽(1)は下底に超音
波振動子(3)を形成し、洗浄液(2)の量が少なく減衰が
大きくない場合には、不十分ながら超音波洗浄を、化学
的な洗浄と併せて行うことができる。この溶剤洗浄槽
(1)に於ける超音波洗浄は、洗浄液(2)の量が多い場合
等には、行うことができない場合もある。また超音波振
動子(3)は必ずしも設けなくとも良いものである。
In this solvent cleaning tank (1), an ultrasonic vibrator (3) is formed on the lower bottom, and when the amount of the cleaning liquid (2) is small and the attenuation is not large, ultrasonic cleaning is carried out though it is insufficient. , Can be performed in combination with chemical cleaning. This solvent cleaning tank
The ultrasonic cleaning in (1) may not be performed when the amount of the cleaning liquid (2) is large. Further, the ultrasonic transducer (3) does not necessarily have to be provided.

【0020】また、溶剤洗浄槽(1)に隣接して超音波洗
浄槽(4)を形成している。この超音波洗浄槽(4)には、
下底に超音波振動子(5)を設置するとともに完全フッ素
化液体を主成分とする超音波洗浄液(6)を充填してい
る。この超音波洗浄液(6)は、20℃にて2cP以下の
粘度を有するものである。そして、この完全フッ素化液
体を主成分とする超音波洗浄液(6)に、溶剤洗浄槽(1)
で高い粘性の洗浄液(2)により洗浄を行った被洗浄物
(7)を浸漬して、超音波キャビテーションによる洗浄を
行う。
An ultrasonic cleaning tank (4) is formed adjacent to the solvent cleaning tank (1). In this ultrasonic cleaning tank (4),
An ultrasonic transducer (5) is installed on the bottom and an ultrasonic cleaning liquid (6) whose main component is a completely fluorinated liquid is filled. This ultrasonic cleaning liquid (6) has a viscosity of 2 cP or less at 20 ° C. Then, the solvent cleaning tank (1) is added to the ultrasonic cleaning liquid (6) whose main component is the completely fluorinated liquid.
To be cleaned with the highly viscous cleaning solution (2)
(7) is immersed and washed by ultrasonic cavitation.

【0021】この、超音波キャビテーションによる洗浄
を行う前に、被洗浄物(7)は、溶剤洗浄槽(1)で粘性の
高い洗浄液(2)による洗浄が行われている。この粘性の
高い洗浄液(2)による被洗浄物(7)の洗浄は、被洗浄物
(7)の汚物を化学的に溶解したり、剥離するには有効な
ものである。そのため、被洗浄物(7)から汚物を溶解し
たり剥離することは可能となるが、超音波という物理的
力が十分に作用しないため、溶解したり、剥離した汚物
は、被洗浄物(7)の凹部等から確実に除去することはで
きないものである。
Before performing the cleaning by the ultrasonic cavitation, the object to be cleaned (7) is cleaned by the highly viscous cleaning liquid (2) in the solvent cleaning tank (1). The cleaning of the object to be cleaned (7) with this highly viscous cleaning liquid (2)
It is effective for chemically dissolving or peeling the dirt of (7). Therefore, it is possible to dissolve or remove the dirt from the object to be cleaned (7), but since the physical force of ultrasonic waves does not sufficiently act, the dissolved or separated dirt is removed from the object to be cleaned (7). It cannot be surely removed from the concave portion of ().

【0022】そこで、粘性の高い洗浄液で洗浄を行なっ
た被洗浄物(7)を、完全フッ素化液体を主成分とする超
音波洗浄液(6)中に浸漬し、この超音波洗浄液(6)中で
超音波洗浄を行う。完全フッ素化液体を主成分とする超
音波洗浄液(6)は、粘性が20℃に於いて2cP未満で
あるから、超音波キャビテーションの伝達性が極めて良
いものである。
Therefore, the object to be cleaned (7) washed with a highly viscous cleaning liquid is immersed in an ultrasonic cleaning liquid (6) containing a perfluorinated liquid as a main component, and the ultrasonic cleaning liquid (6) is immersed in the ultrasonic cleaning liquid (6). Ultrasonic cleaning. The ultrasonic cleaning liquid (6) whose main component is a completely fluorinated liquid has a viscosity of less than 2 cP at 20 ° C., and therefore has an extremely good ultrasonic cavitation transmissivity.

【0023】そのため、粘性の高い洗浄液(2)中で汚物
を溶解したり剥離したりしている被洗浄物(7)は、凹部
等に残留している汚物を、超音波キャビテーションによ
る物理的な力によって、被洗浄物(7)から確実に除去す
ることができ、高度の精密洗浄を可能とすることができ
る。
Therefore, the object to be cleaned (7) in which the dirt is dissolved or peeled in the highly viscous cleaning liquid (2), the dirt remaining in the recesses is physically removed by ultrasonic cavitation. By the force, it is possible to surely remove the object to be cleaned (7), and it is possible to perform highly precise cleaning.

【0024】また、超音波洗浄槽(4)に隣接して仕上槽
(8)を形成し、超音波洗浄を行った被洗浄物(7)を、濯
ぎ洗浄または乾燥作業等の任意の作業を行うことができ
る。
A finishing tank adjacent to the ultrasonic cleaning tank (4)
The object to be cleaned (7) which has formed (8) and has been subjected to ultrasonic cleaning can be subjected to any operation such as rinsing cleaning or drying operation.

【0025】上記の図1に示す実施例では、被洗浄物
(7)を溶剤洗浄槽(1)から超音波洗浄槽(4)に移動して
超音波洗浄を行った。しかし、必ずしも被洗浄物(7)の
移動は必要なく、図2に示すごとく、溶剤洗浄槽と超音
波洗浄槽とを兼ねる共用洗浄槽(10)内に被洗浄物(7)
を位置し、他の槽に移動する事なく粘性の高い洗浄液
(2)での洗浄と、完全フッ素化液体を主成分とする超音
波洗浄液(6)による洗浄とを行うことも可能である。
In the embodiment shown in FIG. 1, the object to be cleaned is
Ultrasonic cleaning was carried out by moving (7) from the solvent cleaning tank (1) to the ultrasonic cleaning tank (4). However, it is not always necessary to move the object to be cleaned (7), and as shown in FIG. 2, the object to be cleaned (7) is placed in the common cleaning tank (10) which doubles as a solvent cleaning tank and an ultrasonic cleaning tank.
, Which is a highly viscous cleaning liquid without moving to another tank.
It is also possible to perform the cleaning in (2) and the cleaning with an ultrasonic cleaning liquid (6) containing a perfluorinated liquid as a main component.

【0026】この方法は、洗浄液タンク(11)と、超音
波洗浄液タンク(12)とを、排出ポンプ(13)(14)と
導入ポンプ(15)(16)を介して共用洗浄槽(10)に接
続する。そして、洗浄液タンク(11)には、テルペン溶
剤、シリコン系溶剤、炭化水素系溶剤、高級アルコール
等の親水性溶剤のごとく、高い粘性の洗浄液(2)を充填
する。また、超音波洗浄液タンク(12)には、完全フッ
素化液体を主成分とする超音波洗浄液(6)を充填してい
る。
In this method, a cleaning liquid tank (11) and an ultrasonic cleaning liquid tank (12) are shared by a cleaning tank (10) through discharge pumps (13) (14) and introduction pumps (15) (16). Connect to. Then, the cleaning liquid tank (11) is filled with a highly viscous cleaning liquid (2) such as a terpene solvent, a silicon solvent, a hydrocarbon solvent, or a hydrophilic solvent such as higher alcohol. Further, the ultrasonic cleaning liquid tank (12) is filled with the ultrasonic cleaning liquid (6) containing a perfluorinated liquid as a main component.

【0027】そして、洗浄液タンク(11)から、導入ポ
ンプ(15)により高い粘性の洗浄液(2)を共用洗浄槽
(10)に導入し、被洗浄物(7)の洗浄を行う。この高い
粘性の洗浄液(2)による洗浄が完了した後、共用洗浄槽
(10)から排出ポンプ(13)により洗浄液(2)を洗浄液
タンク(11)に復元排出する。
Then, from the cleaning liquid tank (11), the cleaning liquid (2) of high viscosity is shared by the introduction pump (15) in the common cleaning tank.
Introduced into (10), the object to be cleaned (7) is washed. After cleaning with this highly viscous cleaning liquid (2) is completed, the common cleaning tank
The cleaning liquid (2) is restored and discharged from (10) to the cleaning liquid tank (11) by the discharge pump (13).

【0028】次に、導入ポンプ(16)を作動して、超音
波洗浄液タンク(12)から完全フッ素化液体を主成分と
する超音波洗浄液(6)を共用洗浄槽(10)に導入する。
そして、超音波洗浄液(6)により被洗浄物(7)の超音波
洗浄を行う。
Next, the introduction pump (16) is operated to introduce the ultrasonic cleaning liquid (6) whose main component is the completely fluorinated liquid from the ultrasonic cleaning liquid tank (12) into the common cleaning tank (10).
Then, the object to be cleaned (7) is ultrasonically cleaned with the ultrasonic cleaning liquid (6).

【0029】この実施例による洗浄方法においては、高
い粘性の洗浄液(2)による洗浄と、超音波洗浄液(6)に
よる超音波洗浄とを行うのに、被洗浄物(7)の移動の必
要がなく、迅速な洗浄作業と、移動機構の必要がないた
め廉価な装置を得ることが可能となる。
In the cleaning method according to this embodiment, it is necessary to move the object to be cleaned (7) in order to perform cleaning with the highly viscous cleaning liquid (2) and ultrasonic cleaning with the ultrasonic cleaning liquid (6). In addition, it is possible to obtain an inexpensive device because there is no need for a quick cleaning operation and a moving mechanism.

【0030】また、上記の各実施例においては、溶剤洗
浄槽(1)、共用洗浄槽(10)、または洗浄液タンク(1
1)等を組み合わせて複数個用いた。しかし、他の異な
る実施例においては、図3に示すごとく、1個の共用洗
浄槽(10)に高い粘性の洗浄液(2)と、低い粘性の完全
フッ素化液体を主成分とする超音波洗浄液(6)とを同時
に充填し、この1個の共用洗浄槽(10)のみによって、
高い粘性の洗浄液(7)による洗浄とともに、超音波洗浄
液(6)よる超音波洗浄とを行うことを可能とする。
In each of the above embodiments, the solvent cleaning tank (1), the common cleaning tank (10), or the cleaning liquid tank (1)
Multiple combinations of 1) etc. were used. However, in another different embodiment, as shown in FIG. 3, one common cleaning tank (10) has an ultrasonic cleaning liquid (2) having a high viscosity and an ultrasonic cleaning liquid containing a low-viscosity perfluorinated liquid as a main component. (6) and filling at the same time, only by this one common cleaning tank (10),
It is possible to perform ultrasonic cleaning with the ultrasonic cleaning liquid (6) as well as cleaning with the highly viscous cleaning liquid (7).

【0031】上記の洗浄方法によれば、1個の共用洗浄
槽(10)によって高い粘性の洗浄液(2)による洗浄と、
超音波洗浄液(6)による超音波洗浄とを行うことができ
るから、廉価な装置によって、廉価な洗浄作業を可能と
する。
According to the above-mentioned cleaning method, cleaning with the highly viscous cleaning liquid (2) by one common cleaning tank (10),
Since ultrasonic cleaning with the ultrasonic cleaning liquid (6) can be performed, inexpensive cleaning work can be performed with an inexpensive device.

【0032】上記洗浄方法においては、超音波振動子
(5)と接触する側に超音波洗浄液(6)を位置しなければ
成らない。そして、高い粘性の洗浄液(2)で被洗浄物
(7)の洗浄を行った後、同一の共用洗浄槽(10)内を上
方または下方に移動し、超音波洗浄液(6)内で超音波洗
浄を行えば被洗浄物(7)の洗浄が完了する。
In the above cleaning method, the ultrasonic transducer
The ultrasonic cleaning liquid (6) must be located on the side that comes into contact with (5). Then, with the highly viscous cleaning liquid (2), the object to be cleaned
After performing the cleaning of (7), if the same cleaning tank (10) is moved upward or downward and ultrasonic cleaning is performed in the ultrasonic cleaning liquid (6), the cleaning target (7) can be cleaned. Complete.

【0033】この実施例によれば、1つの共用洗浄槽
(10)で洗浄が完了し、廉価な装置により迅速な洗浄作
業を可能とするものである。また、この実施例では、完
全フッ素化液体を主成分とする超音波洗浄液(6)と、高
い粘性の洗浄液(2)とは、超音波振動の作用により、多
少の混合を生じるが、超音波洗浄効果を著しく低下させ
ることはない。
According to this embodiment, one common cleaning tank
The cleaning is completed in (10), which enables a quick cleaning operation with an inexpensive device. Further, in this embodiment, the ultrasonic cleaning liquid (6) containing a perfluorinated liquid as a main component and the highly viscous cleaning liquid (2) cause some mixing due to the action of ultrasonic vibration. It does not significantly reduce the cleaning effect.

【0034】また、上記の実施例よりも超音波振動を強
力なものとすれば、粘性の高い洗浄液と、完全フッ素化
液体を主成分とする超音波洗浄液とが、超音波の強力な
物理力により、共用洗浄槽中で混合状態となるが、この
混合液中に被洗浄物を浸漬して超音波洗浄を行うことも
可能となる。
Further, if the ultrasonic vibration is made stronger than in the above-mentioned embodiment, the highly viscous cleaning liquid and the ultrasonic cleaning liquid containing the perfluorinated liquid as the main component have a strong physical force of ultrasonic waves. As a result, a mixed state is obtained in the common cleaning tank, but it is also possible to immerse the object to be cleaned in this mixed solution for ultrasonic cleaning.

【0035】この場合は、超音波洗浄液中に粘性の高い
洗浄液が混合するため、超音波洗浄液のみによる超音波
洗浄に比較すれば、超音波洗浄効果は低下するものの、
被洗浄物を2度に渡って洗浄する手数を無くし、被洗浄
物の簡易な超音波洗浄を可能とするものである。
In this case, since the cleaning liquid having a high viscosity is mixed in the ultrasonic cleaning liquid, the ultrasonic cleaning effect is reduced as compared with the ultrasonic cleaning using only the ultrasonic cleaning liquid.
This eliminates the trouble of cleaning the object to be cleaned twice and enables simple ultrasonic cleaning of the object to be cleaned.

【0036】また、以上の各実施例ともに、完全フッ素
化液体を主成分とする超音波洗浄液を常温で使用した
が、これを加熱し常温よりも高温とすることにより、超
音波洗浄液の粘度を更に低下させるものとしても良い。
In each of the above examples, the ultrasonic cleaning liquid containing a perfluorinated liquid as a main component was used at room temperature. By heating the ultrasonic cleaning liquid to a temperature higher than room temperature, the viscosity of the ultrasonic cleaning liquid is increased. It may be further lowered.

【0037】また、完全フッ素化液体を使用することに
より、環境に与える影響を少なくし、引火等の危険もな
い、安全な被洗浄物の洗浄作業を可能とするものであ
る。
Further, by using the completely fluorinated liquid, it is possible to reduce the influence on the environment and to carry out a safe cleaning operation of the object to be cleaned without danger of ignition.

【0038】[0038]

【発明の効果】本発明は上述のごとく、被洗浄物の化学
的汚れ除去に最も適した粘性の高い洗浄液中で、汚物を
溶解または剥離し、凹部等に残留している汚物を超音波
キャビテーションによる物理的な力によって、被洗浄物
から確実に除去することができる。
As described above, the present invention dissolves or exfoliates dirt in a highly viscous cleaning solution most suitable for removing chemical dirt from the object to be cleaned, and ultrasonically cavifies the dirt left in the recesses or the like. It is possible to reliably remove from the object to be cleaned by the physical force of the.

【0039】そのため、粘性の高い洗浄液による洗浄作
業に、超音波洗浄の効果を加えることが可能となり、従
来は困難であった、粘性の高い洗浄液による超音波洗浄
効果を得ることができ、高度の精密洗浄を可能とするも
のである。
Therefore, it is possible to add the effect of ultrasonic cleaning to the cleaning operation with the highly viscous cleaning liquid, and the ultrasonic cleaning effect with the highly viscous cleaning liquid, which was difficult in the past, can be obtained, and it is possible to obtain a high degree of cleaning. It enables precision cleaning.

【0040】また、別の発明で、粘性の高い洗浄液と、
完全フッ素化液体を主成分とする超音波洗浄液とを、洗
浄槽中で混合状態とし、この混合液中に被洗浄物を浸漬
して超音波洗浄を行えば、超音波洗浄液のみによる超音
波洗浄に比較すれば、超音波洗浄効果は低下するもの
の、被洗浄物を2度に渡って洗浄する手数を無くし、被
洗浄物の簡易な超音波洗浄を可能とするものである。
In another invention, a highly viscous cleaning liquid,
An ultrasonic cleaning solution consisting mainly of a completely fluorinated liquid is mixed in a cleaning tank, and an object to be cleaned is immersed in this mixed solution to perform ultrasonic cleaning. Compared with the above, although the ultrasonic cleaning effect is reduced, the number of steps of cleaning the object to be cleaned twice is eliminated, and the simple ultrasonic cleaning of the object to be cleaned becomes possible.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1実施例を示す概略図。FIG. 1 is a schematic diagram showing a first embodiment of the present invention.

【図2】本発明の第2実施例を示す概略図。FIG. 2 is a schematic diagram showing a second embodiment of the present invention.

【図3】本発明の第3実施例を示す概略図。FIG. 3 is a schematic diagram showing a third embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 洗浄液 6 超音波洗浄液 7 被洗浄物 1 Cleaning liquid 6 Ultrasonic cleaning liquid 7 Object to be cleaned

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】粘性の高い洗浄液中に被洗浄物を浸漬して
洗浄を行った後に、被洗浄物を、完全フッ素化液体を主
成分とする超音波洗浄液中に浸漬し、この超音波洗浄液
中で超音波洗浄を行うことを特徴とする被洗浄物の洗浄
方法。
1. An object to be cleaned is immersed in a highly viscous cleaning solution for cleaning, and then the object to be cleaned is immersed in an ultrasonic cleaning solution containing a perfluorinated liquid as a main component. A method for cleaning an object to be cleaned, characterized in that ultrasonic cleaning is performed therein.
【請求項2】粘性の高い洗浄液と、完全フッ素化液体を
主成分とする超音波洗浄液とを、洗浄槽中で混合状態と
し、この混合液中に被洗浄物を浸漬して超音波洗浄を行
うことを特徴とする被洗浄物の洗浄方法。
2. A highly viscous cleaning liquid and an ultrasonic cleaning liquid whose main component is a completely fluorinated liquid are mixed in a cleaning tank, and an object to be cleaned is immersed in the mixed liquid to carry out ultrasonic cleaning. A method for cleaning an object to be cleaned, comprising:
【請求項3】粘性の高い洗浄液は、テルペン溶剤、シリ
コン系溶剤、炭化水素系溶剤、親水性溶剤であることを
特徴とする請求項1記載の被洗浄物の洗浄方法。
3. The method for cleaning an object to be cleaned according to claim 1, wherein the highly viscous cleaning liquid is a terpene solvent, a silicon solvent, a hydrocarbon solvent, or a hydrophilic solvent.
【請求項4】粘性の高い溶剤は、粘度が、20℃にて2
cP以上であることを特徴とする請求項1記載の被洗浄
物の洗浄方法。
4. A highly viscous solvent has a viscosity of 2 at 20.degree.
The method for cleaning an object to be cleaned according to claim 1, wherein the cleaning rate is not less than cP.
【請求項5】完全フッ素化液体を主成分とする超音波洗
浄液は、粘度が、20℃にて2cP未満であることを特
徴とする請求項1記載の被洗浄物の洗浄方法。
5. The method for cleaning an object to be cleaned according to claim 1, wherein the ultrasonic cleaning liquid containing a perfluorinated liquid as a main component has a viscosity of less than 2 cP at 20 ° C.
JP31751291A 1991-11-05 1991-11-05 Method for cleaning body to be cleaned Pending JPH05123657A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31751291A JPH05123657A (en) 1991-11-05 1991-11-05 Method for cleaning body to be cleaned

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31751291A JPH05123657A (en) 1991-11-05 1991-11-05 Method for cleaning body to be cleaned

Publications (1)

Publication Number Publication Date
JPH05123657A true JPH05123657A (en) 1993-05-21

Family

ID=18089066

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31751291A Pending JPH05123657A (en) 1991-11-05 1991-11-05 Method for cleaning body to be cleaned

Country Status (1)

Country Link
JP (1) JPH05123657A (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02184302A (en) * 1989-01-09 1990-07-18 Taisei Shokai:Kk Method for removing water from article
JPH02191581A (en) * 1988-07-08 1990-07-27 Isc Chem Ltd Method and device for cleaning and drying parts
JPH02240198A (en) * 1989-03-14 1990-09-25 Taisei Shokai:Kk Process for washing article
JPH03167298A (en) * 1989-11-27 1991-07-19 Showa Denko Kk Detergent for flux

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02191581A (en) * 1988-07-08 1990-07-27 Isc Chem Ltd Method and device for cleaning and drying parts
JPH02184302A (en) * 1989-01-09 1990-07-18 Taisei Shokai:Kk Method for removing water from article
JPH02240198A (en) * 1989-03-14 1990-09-25 Taisei Shokai:Kk Process for washing article
JPH03167298A (en) * 1989-11-27 1991-07-19 Showa Denko Kk Detergent for flux

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