JPH0512080B2 - - Google Patents
Info
- Publication number
- JPH0512080B2 JPH0512080B2 JP17389888A JP17389888A JPH0512080B2 JP H0512080 B2 JPH0512080 B2 JP H0512080B2 JP 17389888 A JP17389888 A JP 17389888A JP 17389888 A JP17389888 A JP 17389888A JP H0512080 B2 JPH0512080 B2 JP H0512080B2
- Authority
- JP
- Japan
- Prior art keywords
- mask substrate
- laser light
- reflective coating
- coating layer
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010410 layer Substances 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 17
- 239000011247 coating layer Substances 0.000 claims description 8
- 239000011521 glass Substances 0.000 claims description 5
- 239000003550 marker Substances 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- -1 ZnS Chemical class 0.000 description 1
- 229910007709 ZnTe Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 150000004770 chalcogenides Chemical class 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Laser Beam Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63173898A JPH0225289A (ja) | 1988-07-14 | 1988-07-14 | レーザマーカ用マスク基板 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63173898A JPH0225289A (ja) | 1988-07-14 | 1988-07-14 | レーザマーカ用マスク基板 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0225289A JPH0225289A (ja) | 1990-01-26 |
| JPH0512080B2 true JPH0512080B2 (enrdf_load_stackoverflow) | 1993-02-17 |
Family
ID=15969132
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63173898A Granted JPH0225289A (ja) | 1988-07-14 | 1988-07-14 | レーザマーカ用マスク基板 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0225289A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5387484A (en) * | 1992-07-07 | 1995-02-07 | International Business Machines Corporation | Two-sided mask for patterning of materials with electromagnetic radiation |
| DE19652253C2 (de) * | 1996-12-16 | 1999-04-29 | Kloeckner Moeller Gmbh | Laser-Beschriftungsverfahren zur Beschriftung von Bezeichnungsschildern |
-
1988
- 1988-07-14 JP JP63173898A patent/JPH0225289A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0225289A (ja) | 1990-01-26 |
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