JPH05118289A - Protection device for vacuum pump - Google Patents
Protection device for vacuum pumpInfo
- Publication number
- JPH05118289A JPH05118289A JP25468791A JP25468791A JPH05118289A JP H05118289 A JPH05118289 A JP H05118289A JP 25468791 A JP25468791 A JP 25468791A JP 25468791 A JP25468791 A JP 25468791A JP H05118289 A JPH05118289 A JP H05118289A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- alarm
- value
- set value
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は真空ポンプの保護装置に
係り、特に真空ポンプの運転中に変化する物理量を測定
し、この測定値に基づいて真空ポンプを保護する真空ポ
ンプの保護装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum pump protection device, and more particularly to a vacuum pump protection device that measures a physical quantity that changes during operation of the vacuum pump and protects the vacuum pump based on the measured value.
【０００２】[0002]
【従来の技術】従来から真空ポンプは各種保護装置によ
って保護されていた。この保護装置は通常、異常要因を
検知し、この異常要因が発生した場合、真空ポンプを停
止させるという構成を採用していた。2. Description of the Related Art Conventionally, vacuum pumps have been protected by various protective devices. This protection device normally employs a configuration in which an abnormal factor is detected and the vacuum pump is stopped when the abnormal factor occurs.
【０００３】[0003]
【発明が解決しようとする課題】上述した従来の真空ポ
ンプの保護装置においては、運転から停止に至るまでの
過程における当該真空ポンプの異常要因を経時的にある
物理量の変化としてとらえていなかったために、真空ポ
ンプを停止させる構成を採用していた。そのため、真空
排気系において稼動している真空ポンプが突然停止する
事態が発生し、真空排気系を使用している装置に対して
悪影響を及ぼしたり、損害を生じさせたりする事態が発
生する場合があった。In the above-mentioned conventional vacuum pump protection device, the cause of abnormality of the vacuum pump in the process from the operation to the stop is not regarded as a change in a certain physical quantity with time. , Adopted a configuration to stop the vacuum pump. Therefore, the vacuum pump operating in the vacuum exhaust system may suddenly stop, which may adversely affect or cause damage to the device using the vacuum exhaust system. there were.
【０００４】本発明は上述の点に鑑みなされたもので、
その目的とする処は、真空ポンプの運転中に変化する物
理量を測定し、この測定値が第１設定値に達した時に警
報を発し、さらに第１設定値より高い第２設定値に達し
た時に真空ポンプを停止させるようにし、真空ポンプが
突然に停止することを避けることができる真空ポンプの
保護装置を提供することにある。The present invention has been made in view of the above points,
The purpose is to measure the physical quantity that changes during operation of the vacuum pump, issue an alarm when the measured value reaches the first set value, and reach the second set value that is higher than the first set value. It is an object of the present invention to provide a protection device for a vacuum pump, which is capable of sometimes stopping the vacuum pump and avoiding the sudden stop of the vacuum pump.
【０００５】[0005]
【課題を解決するための手段】前述した目的を達成する
ため、本発明の真空ポンプの保護装置は、ケーシング温
度やモータの電流値等の真空ポンプの運転中に変化する
物理量を測定する測定装置を設け、この測定装置の測定
値を制御装置に入力し、この制御装置によって前記測定
値が所定の第１設定値に達したときに警報装置を作動さ
せて警報を発するとともに、前記測定値が前記第１設定
値より高い設定値である第２設定値に達したときに停止
装置を作動させて真空ポンプを停止させるようにしたこ
とを特徴とするものである。In order to achieve the above-mentioned object, a vacuum pump protection device of the present invention is a measuring device for measuring a physical quantity that changes during operation of the vacuum pump, such as casing temperature and motor current value. The measurement value of the measurement device is input to the control device, and when the measurement value reaches a predetermined first set value by the control device, an alarm device is activated to issue an alarm, and the measurement value is When the second set value, which is a set value higher than the first set value, is reached, the stop device is operated to stop the vacuum pump.
【０００６】[0006]
【作用】前述した構成からなる本発明によれば、ケーシ
ング温度やモータの電流値等の真空ポンプの運転中に変
化する物理量を測定装置により測定し、この測定装置に
よる測定値を制御装置に入力し、測定値が所定の第１設
定値に達したときに警報装置を作動させて警報を発し、
測定値が第２測定値に達したときに停止装置を作動させ
ることができるために、真空ポンプが突然に停止する事
態を避けることができる。すなわち、第１設定値におい
て警報を発し、その警報を発した後、第２設定値で停止
装置により停止させるまでの間、所定の時間差があるた
めに、この間に真空ポンプの停止の可能性を予め作業者
が知り、この結果、真空ポンプが停止するまでの間に作
業者は所定の対処をすることができる。According to the present invention having the above-mentioned structure, the measuring device measures the physical quantity that changes during the operation of the vacuum pump, such as the casing temperature and the current value of the motor, and inputs the measured value by this measuring device to the control device. Then, when the measured value reaches the predetermined first set value, the alarm device is activated to give an alarm,
Since the stop device can be activated when the measured value reaches the second measured value, it is possible to avoid a situation where the vacuum pump suddenly stops. That is, there is a predetermined time difference between issuing the alarm at the first set value and stopping the alarm at the second set value after the alarm is issued. The operator knows in advance, and as a result, the operator can take predetermined measures before the vacuum pump is stopped.
【実施例】以下、本発明に係る真空ポンプの保護装置の
一実施例を図１乃至図４を参照して説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a vacuum pump protection device according to the present invention will be described below with reference to FIGS.
【０００７】図１は本発明に係る保護装置を備えた真空
ポンプの全体構成を示す図であり、図２は図１のII−II
線に沿った断面図である。FIG. 1 is a diagram showing the overall structure of a vacuum pump equipped with a protective device according to the present invention, and FIG. 2 is a line II-II in FIG.
It is sectional drawing which followed the line.
【０００８】図１及び図２において、符号１はケーシン
グであり、このケーシング１内に一対の回転体２，２が
配設されている。回転体２は回転軸３とこの回転軸３の
軸方向に沿って配置された複数のロータ４とを備えてい
る。回転体２は、その一端において軸受５によって回転
支承されるとともに、その他端において軸受６によって
回転支承されており、一方の回転体２はモータ７に接続
されている。そして、一方の回転体２から他方の回転体
２へは、回転軸３の軸端に固定された歯車８（図１にお
いては、一方の歯車のみ示す）によって動力が伝達さ
れ、一対の回転体２，２は互いに逆方向に回転し、僅か
な隙間を持って相対向するロータ４，４が互いに逆方向
へ回転して、吸入排気が行われるようになっている。In FIGS. 1 and 2, reference numeral 1 is a casing in which a pair of rotating bodies 2 and 2 are arranged. The rotating body 2 includes a rotating shaft 3 and a plurality of rotors 4 arranged along the axial direction of the rotating shaft 3. The rotating body 2 is rotatably supported by a bearing 5 at one end thereof and is rotatably supported by a bearing 6 at the other end thereof, and one rotating body 2 is connected to a motor 7. Then, from one rotating body 2 to the other rotating body 2, power is transmitted by a gear 8 (only one gear is shown in FIG. 1) fixed to the shaft end of the rotating shaft 3, and a pair of rotating bodies is provided. The rotors 2 and 2 rotate in mutually opposite directions, and the rotors 4 and 4 that face each other with a small gap rotate in mutually opposite directions to perform intake and exhaust.
【０００９】また、前記アンギュラ玉軸受５は軸受ケー
ス１０内に収容され、ラジアル玉軸受６及び歯車８は軸
受ケース１１内に収容されている。そして、各軸受５，
６及び歯車８は軸受ケース１０，１１内の潤滑油によっ
て油潤滑がされるようになっている。The angular ball bearing 5 is housed in the bearing case 10, and the radial ball bearing 6 and the gear 8 are housed in the bearing case 11. And each bearing 5,
The gear 6 and the gear 8 are lubricated by the lubricating oil in the bearing cases 10 and 11.
【００１０】次に、真空ポンプの保護装置を図３を参照
して説明する。Next, a vacuum pump protection device will be described with reference to FIG.
【００１１】ポンプケーシング１にはポンプケーシング
の温度Ｔを測定する温度センサ２１が配設されており、
この温度センサ２１は制御装置２２に接続されている。
またモータ７の電流値Ｉを測定する電流計２３が設けら
れており、この電流計２３の測定値も同様に制御装置２
２に入力されるようになっている。The pump casing 1 is provided with a temperature sensor 21 for measuring the temperature T of the pump casing.
The temperature sensor 21 is connected to the control device 22.
Further, an ammeter 23 for measuring the current value I of the motor 7 is provided, and the measured value of the ammeter 23 is similarly set in the control device 2 as well.
2 is input.
【００１２】一方、真空ポンプの冷却装置１２に冷却水
を供給するための冷却水供給経路には冷却水用流量計２
４が設置されており、この流量計２４の測定値も同様に
制御装置２２に入力されるようになっている。また真空
ポンプの不活性ガスを供給する供給経路にも不活性ガス
用流量計２５が配設されており、この流量計２５の測定
値も制御装置２２に入力されるようになっている。On the other hand, a cooling water flow meter 2 is provided in the cooling water supply path for supplying the cooling water to the cooling device 12 of the vacuum pump.
4 is installed, and the measurement value of the flow meter 24 is also input to the control device 22. In addition, an inert gas flow meter 25 is also provided in the supply path for supplying the inert gas of the vacuum pump, and the measured value of the flow meter 25 is also input to the control device 22.
【００１３】更に、制御装置２２は警報装置２６に接続
されるとともに遮断器２７に接続されている。警報装置
２６は制御装置２２の指令に基づいて何らかの事故が発
生した場合に警報を発するとともに、事故内容を表示す
るようになっている。また、遮断器２７は制御装置２２
の指令に基づいて電源２８からモータ７への電源回路を
遮断し、真空ポンプを停止させる。Further, the control device 22 is connected to the alarm device 26 and the circuit breaker 27. The alarm device 26 issues an alarm when an accident occurs based on a command from the control device 22 and displays the content of the accident. Further, the circuit breaker 27 is the control device 22.
The power supply circuit from the power supply 28 to the motor 7 is shut off based on the command of (1), and the vacuum pump is stopped.
【００１４】次に、前述のように構成された真空ポンプ
の保護装置の作動について説明する。ポンプケーシング
の温度Ｔは温度センサ２１により測定され制御装置２２
に入力され、この制御装置２２によって運転中常時監視
される。また、同様にモータの電流値Ｉもモータ電流計
２３によって測定され制御装置２２に入力され、同様に
モータの運転状態が監視される。そして、異常が発生す
ると図４に示されるようにモータ電流値またはケーシン
グ温度Ｔが、実線で示されるように運転中に上昇してき
て、この測定値が第１設定値Ｘ1を越えると、制御装置
２２は警報装置２６を作動させ、警報を発するとともに
事故内容を表示する。そして、さらにケーシング温度Ｔ
又はモータ電流値Ｉが上昇し、この測定値が第２設定値
Ｘ2に到達した時に、真空ポンプの遮断器２７を作動さ
せ、真空ポンプを停止させる。このように、本実施例に
おいては、ケーシング温度及びモータ電流値は真空ポン
プの運転中常時監視され、警報を発した後、停止させる
までの間、所定の時間差ｔAを稼ぐことができ、従来の
装置と異なってこの所定時間ｔAの間に何らかの対策を
とることができる。そして、場合によっては、図４の破
線に示されるように、この対策によってもとの状態に復
帰し、真空ポンプを停止させないですむ場合がある。Next, the operation of the vacuum pump protection device constructed as described above will be described. The temperature T of the pump casing is measured by the temperature sensor 21 and is controlled by the control device 22.
Is input to the control unit 22 and is constantly monitored by the control device 22 during operation. Similarly, the motor current value I is also measured by the motor ammeter 23 and input to the control device 22, and the operating state of the motor is similarly monitored. When an abnormality occurs, the motor current value or casing temperature T as shown in FIG. 4 rises during operation as shown by the solid line, and when this measured value exceeds the first set value X 1 , control is performed. The device 22 activates the alarm device 26 to issue an alarm and display the content of the accident. Then, the casing temperature T
Alternatively, when the motor current value I rises and this measured value reaches the second set value X 2 , the circuit breaker 27 of the vacuum pump is activated and the vacuum pump is stopped. As described above, in the present embodiment, the casing temperature and the motor current value are constantly monitored during the operation of the vacuum pump, and a predetermined time difference t A can be obtained from the time the alarm is issued to the time it is stopped. Unlike the above device, some measures can be taken during this predetermined time t A. Then, in some cases, as shown by the broken line in FIG. 4, it may be possible to return to the original state by this measure and not stop the vacuum pump.
【００１５】一方、冷却水用流量計２４及び不活性ガス
用流量計２５の測定値も同様に制御装置２２に入力さ
れ、これら測定値が所定の値になった時に制御装置２２
は警報装置２６を作動させ、警報装置２６に警報を出さ
せる。これら冷却水流量及び不活性ガス流量は、さほど
重大な事故内容ではない場合には警報のみ発し、真空ポ
ンプの停止はさせない。その他、本実施例における真空
ポンプの保護装置においては、潤滑油レベル等の測定を
行い、この測定値に基づいて警報を出させるようにして
いる。On the other hand, the measured values of the cooling water flow meter 24 and the inert gas flow meter 25 are also input to the control device 22, and when the measured values reach a predetermined value, the control device 22.
Activates the alarm device 26 and causes the alarm device 26 to issue an alarm. If the flow rate of cooling water and the flow rate of inert gas are not so serious, only an alarm is issued and the vacuum pump is not stopped. In addition, in the vacuum pump protection device of this embodiment, the lubricating oil level and the like are measured, and an alarm is issued based on the measured value.
【００１６】[0016]
【発明の効果】以上説明したように本発明によれば、ケ
ーシング温度やモータの電流値等の真空ポンプの運転中
に変化する物理量を測定装置により測定し、この測定装
置による測定値を制御装置に入力し、測定値が所定の第
１設定値に達したときに警報装置を作動させて警報を発
生し、測定値が第２測定値に達したときに停止装置を作
動させることができるために、真空ポンプが突然に停止
する事態を避けることができる。すなわち、第１設定値
において警報を発し、その警報を発した後、第２設定値
で停止装置により停止させるまでの間、所定の時間差が
あるために、この間に真空ポンプの停止の可能性を予め
作業者が知り、この結果、真空ポンプが停止するまでの
間に作業者は所定の対処をすることができる。As described above, according to the present invention, the physical quantity that changes during the operation of the vacuum pump, such as the casing temperature and the current value of the motor, is measured by the measuring device, and the measured value by the measuring device is controlled by the control device. To activate the alarm device when the measured value reaches the predetermined first set value and generate an alarm, and to activate the stop device when the measured value reaches the second measured value. In addition, it is possible to avoid a situation where the vacuum pump suddenly stops. That is, there is a predetermined time difference between issuing the alarm at the first set value and stopping the alarm at the second set value after the alarm is issued. The operator knows in advance, and as a result, the operator can take predetermined measures before the vacuum pump is stopped.
【図１】本発明に係る真空ポンプの保護装置を備えた真
空ポンプの全体構成を示す断面図。FIG. 1 is a cross-sectional view showing the overall configuration of a vacuum pump including a vacuum pump protection device according to the present invention.
【図２】図１のII−II線断面図。FIG. 2 is a sectional view taken along line II-II of FIG.
【図３】本発明に係る真空ポンプの保護装置の構成を説
明するブロック図。FIG. 3 is a block diagram illustrating the configuration of a vacuum pump protection device according to the present invention.
【図４】本発明に係る真空ポンプの保護装置の作動状態
を説明する説明図。FIG. 4 is an explanatory view for explaining an operating state of the vacuum pump protection device according to the present invention.
１ ケーシング ２ 回転体 ３ 回転軸 ４ ロータ ５，６ 軸受 ７ モータ ８ 歯車 １０，１１ 軸受ケース ２１ 温度センサ ２２ 制御装置 ２３ 電流計 ２４ 冷却水用流量計 ２５ 不活性ガス用流量計 ２６ 警報装置 ２７ 遮断器 ２８ 電源 1 casing 2 rotating body 3 rotating shaft 4 rotor 5,6 bearing 7 motor 8 gear 10,11 bearing case 21 temperature sensor 22 control device 23 ammeter 24 cooling water flow meter 25 inert gas flow meter 26 alarm device 27 shutoff Vessel 28 power supply
───────────────────────────────────────────────────── フロントページの続き (72)発明者 臼井 克明 神奈川県藤沢市本藤沢４丁目２番１号 株 式会社荏原総合研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Katsuaki Usui 4-2-1 Motofujisawa, Fujisawa-shi, Kanagawa Stock company EBARA Research Institute
Claims (1)
空ポンプの運転中に変化する物理量を測定する測定装置
を設け、この測定装置の測定値を制御装置に入力し、こ
の制御装置によって前記測定値が所定の第１設定値に達
したときに警報装置を作動させて警報を発するととも
に、前記測定値が前記第１設定値より高い設定値である
第２設定値に達したときに停止装置を作動させて真空ポ
ンプを停止させるようにしたことを特徴とする真空ポン
プの保護装置。1. A measuring device for measuring a physical quantity that changes during operation of a vacuum pump, such as a casing temperature and a current value of a motor, is provided, and the measured value of the measuring device is input to a control device, and the measurement is performed by the control device. When the value reaches a predetermined first set value, an alarm device is activated to issue an alarm, and when the measured value reaches a second set value which is a set value higher than the first set value, a stop device The vacuum pump protection device is characterized in that the vacuum pump is stopped by operating the.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25468791A JPH05118289A (en) | 1991-09-05 | 1991-09-05 | Protection device for vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25468791A JPH05118289A (en) | 1991-09-05 | 1991-09-05 | Protection device for vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05118289A true JPH05118289A (en) | 1993-05-14 |
Family
ID=17268474
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25468791A Pending JPH05118289A (en) | 1991-09-05 | 1991-09-05 | Protection device for vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05118289A (en) |
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| US20100054957A1 (en) * | 2006-07-26 | 2010-03-04 | Oerlikon Leybold Vacuum Gmbh | Method for determining a statement of a state of a turbomolecular pump and a turbomolecular pump |
| JP2010084627A (en) * | 2008-09-30 | 2010-04-15 | Shinmaywa Industries Ltd | Suction device and suction vehicle |
| US7731484B2 (en) | 2002-03-20 | 2010-06-08 | Ricoh Company, Ltd. | Vacuum pump control device and vacuum device |
| KR101217539B1 (en) * | 2009-11-30 | 2013-01-02 | 스미도모쥬기가이고교 가부시키가이샤 | Geared motor |
| WO2014064514A1 (en) * | 2012-10-24 | 2014-05-01 | Marvell World Trade Ltd. | Failure prediction in a rotating device |
| CN105782048A (en) * | 2014-12-24 | 2016-07-20 | 上海东冠纸业有限公司 | Protection control method used for roots vacuum pump |
-
1991
- 1991-09-05 JP JP25468791A patent/JPH05118289A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7731484B2 (en) | 2002-03-20 | 2010-06-08 | Ricoh Company, Ltd. | Vacuum pump control device and vacuum device |
| JP4869248B2 (en) * | 2005-04-08 | 2012-02-08 | 株式会社荏原製作所 | Vacuum pump failure prediction method, vacuum pump failure prediction system, and vacuum pump centralized monitoring system |
| JP2008534831A (en) * | 2005-04-08 | 2008-08-28 | 株式会社荏原製作所 | Vacuum pump failure prediction method, vacuum pump failure prediction system, and vacuum pump centralized monitoring system |
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