JPH05115971A - Vacuum arc treating device - Google Patents

Abstract

PURPOSE:To re-utilize the metal and the scale collected with the de-scaling treatment of vacuum arc. CONSTITUTION:In the device which continuously executes the vacuum arc treatment by having a cathode 1 and an arc electrode 4 composed of the stock to be treated which moves continuously and generating the direct arc discharge between the cathode 1 and the arc electrode 4, plural collecting traps, that is, of a gravity separating system trap 8, a centrifugal trap 9 and an air filter system trap which are connected in series and collect the dust generated in the vacuum arc treating time are installed, the collecting trap of the advancing stage is composed to collect the dust of larger grain than the following stage collecting trap.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum arc processing apparatus for carrying out processing by generating a DC arc discharge between an anode and a cathode in vacuum.

[0002]

2. Description of the Related Art The vacuum arc technique is a technique widely used for vacuum circuit breakers which are electric circuit components. In recent years, attempts have been made to apply a vacuum arc to a material process.
Application examples include vapor deposition, ion plating, and oxide film removal (descaling).

On the other hand, a pickling method is generally known as a descaling method which is usually performed. In the pickling method, the treated scale is landfilled as sludge. Since this sludge also contains a neutralizing agent for neutralizing the acid, the sludge has not been reused in the past.

[0004]

However, descaling with a vacuum arc produces dust that does not contain a neutralizing agent, and since the dust also contains metal in addition to the scale, it can be recycled as a resource unlike pickling sludge. Worth doing.

Therefore, an object of the present invention is to reuse the metal and scale recovered by the descaling process by a vacuum arc.

[0006]

DISCLOSURE OF THE INVENTION The invention of the present application is a vacuum arc processing apparatus in which a cathode (1) composed of an object to be processed that moves continuously and an anode (4) are installed. At least two different collecting means (8, 9, 10) for collecting dust sometimes generated are provided and are connected in series.

Symbols in parentheses indicate corresponding elements or corresponding matters in the embodiments shown in the drawings and described later.

[0008]

According to this, since at least two different collecting means (8, 9, 10) are connected in series, for example,
The magnetic powder may be collected in the first stage, and in the subsequent stage, the coarse particles and the fine particles of the non-magnetic powder may be sequentially collected. That is, since classification is performed using the presence or absence of magnetism and the difference in particle size,
Higher scale or metal concentrations in the dust can be achieved.

Therefore, the collected dust can be effectively used.

Other objects and features of the present invention will become apparent from the following description of embodiments with reference to the drawings.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows the outline of the structure of a continuous vacuum arc descaling apparatus as an example of the present invention. This apparatus unwinds a strip-shaped object (material) 1 from an uncoiler 2 and, when passing through the lower surface of an arc electrode (3 unit setting in this embodiment) 4 in a vacuum arc processing chamber 20, a vacuum arc is used for descaling. It is a device that performs and then winds the coiler 3. In the figure, the conductor roll 5 supplies electricity to the object 1 to be treated as a cathode, and the differential pressure sealing chamber 6 is provided to maintain a vacuum state. This apparatus processes austenitic stainless steel, ferritic stainless steel, and ordinary steel, but the object to be processed is not limited to these.

When the arc power source is operated and the vacuum arc is ignited by the ignition electrode 12, the vacuum arc is ignited between the arc electrode 4 and the object 1 to be processed which is the cathode. This vacuum arc removes the scale on the surface of the object to be processed 1.

Since the dust after the scale contains metal as well as the scale, the present invention is provided with a recovery device for extracting the metal from the dust for reuse.
Further, the lower part of the vacuum arc processing chamber 20 is inclined as shown in the figure in order to facilitate the collection of dust. The vacuum arc processing chamber 20 is connected to the vacuum pump 11 via a recovery device and is in a vacuum state.

The recovery device comprises a magnetic powder recovery trap 7, a gravity separation type trap 8, a centrifugal separation type trap 9 and an air filter type trap 10, which are connected in series. Hereinafter, each recovery device will be described.

FIG. 2 shows a schematic structure of the trap 7 for collecting magnetic powder. Of the dust taken in from the vacuum arc processing chamber 20, the magnetic powder is attracted to the rotating magnet 71 and scraped off by the spatula 72 into the magnetic powder recovery chamber 73. Fe, ferritic stainless steel, and
Spinel etc. The dust from which the magnetic powder has been removed is discharged to the gravity separation type trap 8.

FIG. 3 shows an outline of the structure of the gravity separation type trap 8. Among the dust taken in from the trap 7 for collecting magnetic powder, dust having a particle size of several tens of microns is collected in the collection chamber 81 by the action of gravity. That is, here, non-magnetic dust of several tens of microns is collected. The dust that has not been collected is discharged to the centrifugal trap 9. FIG. 4 shows an outline of the configuration of the centrifugal trap 9. This is a cyclone, and as shown in the figure seen from the upper surface of (a), the dust inlet is of the circumferential spiral inlet type,
Among the dust taken in from the gravity separation type trap 8, the dust with a particle size of several microns is caused by the action of centrifugal force (b).
It is recovered in the recovery chamber 91 shown in. That is, here, non-magnetic dust of several microns is collected. The dust that has not been collected is discharged from the upper part of the centrifugal trap 9 to the air filter trap 10.

FIG. 5 shows an outline of the structure of the air filter type trap 10. This is a flocked filter cloth air filter,
Two rotating drums 101 having a filter medium 105 on the surface rotate around a drum rotation shaft 102. The dust discharged from the centrifugal separation trap 9 is taken into the rotating drum 101 as shown by the arrow, and the dust of submicron particle size among the dust is filtered by the filter medium 105,
The dust filtered by the filter material regeneration slit 104 is scraped off. Then, the dust scraped off is sucked by the suction duct 103, and the dust box 108 is passed through the cyclone 107.
Collect inside. That is, non-magnetic submicron dust is collected here. The dust that has not been collected is discharged toward the vacuum pump 11. Since these are fine enough, the vacuum pump 11 is not damaged. In addition,
Reference numeral 106 is a suction blower.

The non-magnetic dust includes austenitic stainless steel and scale. However, since austenitic stainless steel is fine particles, the content of austenitic stainless steel becomes higher in the later trap.

Although the magnetic powder is collected in the magnetic powder collecting trap 7 regardless of the particle size, it may be classified after the magnetic powder is taken out.

The vacuum arc in the present embodiment refers to an arc in which the cathode material is vaporized and the space is maintained while filling the space. That is, it is not an ordinary arc in which the amount of residual gas in the space is overwhelmingly larger than the amount of cathode evaporation. An arc that evaporates not only the cathode material but also the anode material and fills the space is also a vacuum arc.

[0021]

According to the invention of the present application, at least two or more different recovery means (8, 9, 10) are connected in series. Therefore, for example, magnetic powder is recovered in the first stage and non-magnetic in the subsequent stage. The powder may be collected in order from coarse particles to fine particles. That is, since classification is performed by utilizing the presence or absence of magnetism and the difference in particle size, the scale concentration or metal concentration in dust can be increased. Therefore, the collected dust can be effectively used.

[Brief description of drawings]

FIG. 1 is a side view showing an outline of the configuration of a continuous vacuum arc descaler according to an example of the present invention.

FIG. 2 is a cross-sectional view showing a schematic configuration of a magnetic powder recovery trap 7 shown in FIG.

FIG. 3 is a cross-sectional view showing the outline of the configuration of the gravity separation type trap 8 shown in FIG.

4A and 4B show a schematic configuration of the centrifugal trap 9 shown in FIG. 1, in which FIG. 4A is a top view and FIG. 4B is a front view.

5 is a cross-sectional view showing a schematic configuration of the air filter type trap 10 shown in FIG.

[Explanation of symbols]

1: Object to be treated (cathode) 2: Uncoiler 3: Coiler 4: Arc electrode (anode) 5: Conduct roll 6: Differential pressure sealing chamber 7: Trap for collecting magnetic powder 8: Gravity separation trap 9: Centrifugal trap 10: Air filter type trap (8, 9, 10: collecting means) 11: Vacuum pump

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁵ Identification code Internal reference number FI technical display location C23C 14/56 8520-4K

Claims (1)

[Claims] 1. A vacuum arc processing apparatus comprising a cathode composed of an object to be continuously moved and an anode.
A vacuum arc processing apparatus having at least two different recovery means for recovering dust generated during vacuum arc processing and being connected in series.