JPH05112240A - Conveying device - Google Patents

Conveying device

Info

Publication number
JPH05112240A
JPH05112240A JP30409991A JP30409991A JPH05112240A JP H05112240 A JPH05112240 A JP H05112240A JP 30409991 A JP30409991 A JP 30409991A JP 30409991 A JP30409991 A JP 30409991A JP H05112240 A JPH05112240 A JP H05112240A
Authority
JP
Japan
Prior art keywords
compressed air
moving body
valve
holes
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP30409991A
Other languages
Japanese (ja)
Inventor
Shigeru Muramatsu
繁 村松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OCHIAI NEKUSASU KK
Original Assignee
OCHIAI NEKUSASU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OCHIAI NEKUSASU KK filed Critical OCHIAI NEKUSASU KK
Priority to JP30409991A priority Critical patent/JPH05112240A/en
Publication of JPH05112240A publication Critical patent/JPH05112240A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To reduce a discharge air amount and M generation of discharge noise through simple constitution, in a conveying device to convey a moving body in a way that the moving body is floated through discharge of compressed air on a conveyance passage. CONSTITUTION:A pipe body in which a plurality of holes are axially formed is disposed in such a way that a plurality of the holes are positioned above so as to form a conveyance passage 1. A moving body 6 having a plane part on the side facing the upper surface of the conveyance passage 1 is arranged on the conveyance passage 1. A valve device 10 which is closed when compressed air is fed in the hollow part of the conveyance passage 1 and opened when it is brought into contact with the moving body 6 is disposed to each of a plurality of the holes of the conveyance passage 1. When the moving body 6 is driven and brought into contact with the valve device 10, compressed air is discharged between the conveyance passage 1 and the moving body 6 and the moving body 6 is brought into a state to float on the conveyance passage 1. When the moving body 6 is moved over the conveyance passage 1 and separated away from the valve device 10, discharge of the compressed air is stopped.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は搬送装置に関し、特に搬
送路上に圧縮空気を放出し移動体を浮上させて搬送する
搬送装置に係る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a carrier device, and more particularly to a carrier device that discharges compressed air onto a carrier path to levitate a moving body for carrying.

【0002】[0002]

【従来の技術】パレット等の移動体を搬送する搬送装置
としては種々の形式のものが知られているが、近時、移
動体を搬送路上に一定の間隔を以って浮上した状態と
し、無接触で移動体を搬送するようにした搬送装置が普
及している。例えばパレットに空気タンクを搭載し、圧
縮空気を下方に放出して浮上させるようにしたもの、あ
るいはエアホースを介してパレットに圧縮空気を供給し
これを下方に放出して浮上させるようにしたものが用い
られている。
2. Description of the Related Art Various types of transporting devices for transporting moving bodies such as pallets are known. Recently, the moving bodies have been levitated on the transporting path at regular intervals. 2. Description of the Related Art Conveying devices that convey a moving body without contact have become widespread. For example, an air tank is installed on a pallet and compressed air is discharged downward to float, or compressed air is supplied to the pallet via an air hose and discharged downward to float. It is used.

【0003】また、搬送路を管体で形成し、この管体の
上方に複数の孔を穿設し、これらの孔から圧縮空気を放
出して搬送路上の移動体を浮上させるようにした搬送装
置も用いられている。例えば、図6に示すような固定子
50を有するリニアモータを搬送駆動源とし、その2次
導体を構成する移動体60を圧縮空気によって浮上させ
るようにした搬送装置が知られている。この搬送装置に
おいては、移動体60は筒体の搬送路30に跨座され、
図6中に矢印で示したように供給口31から圧縮空気が
供給され中空部32を介して孔33から放出される。こ
れにより、移動体60と搬送路30との間に微小間隙が
形成され、移動体60は浮上した状態とされている。而
して、この状態で固定子50が励磁されると移動体60
が搬送路30上を円滑に移動する。
Further, the conveying path is formed by a tube body, a plurality of holes are formed above the tube body, and compressed air is discharged from these holes so that the moving body on the conveying path is levitated. Devices have also been used. For example, a transfer device is known in which a linear motor having a stator 50 as shown in FIG. 6 is used as a transfer drive source, and a moving body 60 that constitutes a secondary conductor of the transfer motor is floated by compressed air. In this carrying device, the moving body 60 is laid across the carrying path 30 of the cylindrical body,
As shown by the arrow in FIG. 6, compressed air is supplied from the supply port 31 and discharged from the hole 33 through the hollow portion 32. As a result, a minute gap is formed between the moving body 60 and the transport path 30, and the moving body 60 is in a floating state. When the stator 50 is excited in this state, the moving body 60
Moves smoothly on the transport path 30.

【0004】更に、複数の短い管体を軸方向に連結して
搬送路を構成すると共に、各管体毎に圧縮空気を供給し
て各管体の上方の孔から放出するようにした搬送装置も
知られている。この搬送装置においては、センサによっ
て移動体の有無が検知され、移動体が上方に存在する管
体のみから圧縮空気が放出される。即ち、所謂区間制御
が行なわれる。
Further, a plurality of short pipes are axially connected to each other to form a conveying path, and compressed air is supplied to each pipe so that the compressed air is discharged from an upper hole of each pipe. Is also known. In this carrying device, the presence or absence of the moving body is detected by the sensor, and the compressed air is discharged only from the pipe body above the moving body. That is, so-called section control is performed.

【0005】[0005]

【発明が解決しようとする課題】然し乍ら、前述のパレ
ット等の移動体側から搬送路に向けて圧縮空気を放出す
る装置においては、空気タンクの存在により積載量が制
限され、あるいは圧縮空気を供給するホースの取り回し
に留意する必要があり、圧縮空気用のカップリングも必
要となる。また、管体の搬送路から上方に圧縮空気を常
時放出するようにしたものにおいては、圧縮空気の放出
によって騒音が発生し、また放出空気の無駄、即ち圧縮
空気を放出させるための圧縮空気源への供給エネルギー
の無駄が生ずる。
However, in the above-mentioned device for discharging compressed air from the side of a moving body such as a pallet toward the conveying path, the loading capacity is limited by the presence of an air tank, or compressed air is supplied. Care must be taken in the handling of the hose, and a coupling for compressed air is also required. Further, in the case where the compressed air is constantly discharged upward from the conveying path of the pipe body, noise is generated by the discharge of the compressed air, and waste of the discharged air, that is, a compressed air source for discharging the compressed air is generated. The waste of the energy supplied to the waste occurs.

【0006】これに対し、上述のように複数の管体毎に
圧縮空気を供給するようにし、センサによって移動体の
有無を確認し乍ら順次管体に圧縮空気を供給するように
すれば無駄を低減することができる。しかし、このよう
な区間制御を行なうこととすると、多数のセンサを必要
とし、制御も複雑となりコストアップに継がる。
On the other hand, if compressed air is supplied to each of the plurality of pipes as described above, and the presence or absence of the moving body is confirmed by the sensor, it is wasteful to successively supply the compressed air to the pipes. Can be reduced. However, if such section control is performed, a large number of sensors are required, the control becomes complicated, and the cost increases.

【0007】そこで、本発明は搬送路上に圧縮空気を放
出し移動体を浮上させて搬送する搬送装置において、簡
単な構成で放出空気量を低減し放出騒音を低減するよう
にすることを目的とする。
Therefore, it is an object of the present invention to reduce the amount of released air and the emitted noise with a simple structure in a transfer device that discharges compressed air onto a transfer path and floats a moving body for transfer. To do.

【0008】[0008]

【課題を解決するための手段】上記の目的を達成するた
め、本発明は、軸方向に複数の孔を穿設した管体を、前
記複数の孔が上方に位置するように配設した搬送路と、
該搬送路の上面と対向する側に平面部を有し前記搬送路
上に配置する移動体とを備え、前記搬送路の中空部内に
圧縮空気を供給し前記複数の孔から放出して前記移動体
を浮上させるようにした搬送装置において、前記圧縮空
気が前記搬送路の中空部内に供給されたときに閉弁し、
前記移動体と接触したときに開弁する弁装置を前記複数
の孔の各々に配設したものである。
In order to achieve the above-mentioned object, the present invention is a conveying device in which a tube body having a plurality of holes bored in the axial direction is arranged so that the plurality of holes are located above. Road,
A moving body having a flat surface portion on the side facing the upper surface of the transport path and arranged on the transport path, and supplying compressed air into the hollow portion of the transport path and discharging the compressed air from the plurality of holes; In the transfer device, the valve is closed when the compressed air is supplied into the hollow portion of the transfer path,
A valve device that opens when it comes into contact with the moving body is provided in each of the plurality of holes.

【0009】上記の搬送装置において、前記弁装置は、
筒体の開口端に弁座を形成し前記搬送路の複数の孔の各
々に前記弁座が上方に位置するように嵌着するホルダ
と、該ホルダの中空部に移動可能に収容し前記ホルダの
上端面から一部が突出した状態で着座する弁体を備えた
ものとし、該弁体の着座時に該弁体の一部が前記ホルダ
を介して前記搬送路の上面から突出するように配設する
とよい。
In the above conveying device, the valve device is
A holder having a valve seat formed at the open end of the cylindrical body and fitted into each of the plurality of holes of the transport path so that the valve seat is located above, and a holder movably accommodated in a hollow portion of the holder. Is provided with a valve element that is seated in a state in which a part of the valve element projects from the upper end surface of the sheet, and the valve element is arranged so that a part of the valve element projects from the upper surface of the transport path through the holder when the valve element is seated. It should be installed.

【0010】[0010]

【作用】上記の構成になる搬送装置においては、管体の
搬送路上に移動体が配置される。搬送路の中空部内に圧
縮空気が供給されると、搬送路に設けられた複数の弁装
置が閉弁するので、圧縮空気が外部に放出されることは
ない。移動体が駆動され弁装置に接触すると、弁装置が
開弁し圧縮空気が搬送路と移動体との間に放出される。
これにより、移動体が搬送路上で浮上した状態とされ、
搬送路上を滑らかに移動し得る。移動体が搬送路上を移
動し弁装置から離脱すると、弁装置は閉弁し圧縮空気の
放出が阻止される。
In the carrying device having the above construction, the moving body is arranged on the carrying path of the tubular body. When the compressed air is supplied into the hollow portion of the transfer path, the plurality of valve devices provided in the transfer path close, so that the compressed air is not discharged to the outside. When the moving body is driven and comes into contact with the valve device, the valve device opens and compressed air is discharged between the transport path and the moving body.
As a result, the moving body is in a state of floating on the transport path,
It can move smoothly on the transport path. When the moving body moves on the transport path and separates from the valve device, the valve device closes and the release of compressed air is blocked.

【0011】[0011]

【実施例】以下、本発明の搬送装置の望ましい実施例を
図面を参照して説明する。図1及び図3に示すように、
長尺の管体で構成した一対の搬送路1,1が、支持台3
上に所定距離隔てて平行に配置されている。支持台3の
両側面にはガイド3a,3bが立設され、両搬送路1,
1間には搬送駆動源5が配置されている。搬送駆動源5
としては、本実施例ではリニアモータが用いられるが、
チェ−ン駆動装置等を用いることとしてもよい。そし
て、搬送路1,1上に板状の移動体6が配置されてい
る。この移動体6は、本実施例においてはリニアモータ
の2次導体を構成すると共に、被搬送物を載置するため
のパレットとして機能するものである。尚、移動体6の
形状は搬送路1,1に対向する面が平面であれば、板状
でなくともよい。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of the carrying device of the present invention will be described below with reference to the drawings. As shown in FIGS. 1 and 3,
The pair of transport paths 1 and 1 composed of a long tube are used as the support base 3
They are arranged in parallel at a predetermined distance above. Guides 3a, 3b are erected on both side surfaces of the support base 3, and both guide paths 1,
A transport drive source 5 is arranged between the two. Transport drive source 5
As a linear motor is used in this embodiment,
A chain drive device or the like may be used. The plate-shaped moving body 6 is arranged on the transport paths 1 and 1. In the present embodiment, the moving body 6 constitutes the secondary conductor of the linear motor and also functions as a pallet for placing the transported object. The shape of the moving body 6 may not be a plate shape as long as the surface facing the transport paths 1 and 1 is a flat surface.

【0012】本実施例の搬送路1は図1に示すように中
空部1aを郭成する断面略矩形の管体で、その上面の軸
方向に複数の孔1bが穿設されると共に、その下面に空
気導入孔1cが穿設されている。搬送路1の下面には空
気導入孔1cと連通する空気導入管2が接合されてお
り、支持台3を貫通しエアホース等を介して圧縮空気源
4に接続されている。複数の孔1bの各々には、移動体
6の当接、離隔に応じて開閉する弁装置10が装着され
ている。弁装置10は、孔1bに螺着される筒体のホル
ダ11と、その中空部11aに収容される球状の弁体1
2を有し、以下のように構成されている。
As shown in FIG. 1, the conveying path 1 of the present embodiment is a tubular body having a substantially rectangular cross section that defines a hollow portion 1a, and a plurality of holes 1b are formed in the axial direction of the upper surface thereof. An air introduction hole 1c is formed on the lower surface. An air introduction pipe 2 communicating with the air introduction hole 1c is joined to the lower surface of the transport path 1, and penetrates the support base 3 and is connected to the compressed air source 4 via an air hose or the like. Each of the plurality of holes 1b is equipped with a valve device 10 that opens and closes according to contact and separation of the moving body 6. The valve device 10 includes a cylindrical holder 11 screwed into the hole 1b and a spherical valve body 1 housed in the hollow portion 11a.
2 and is configured as follows.

【0013】即ち、図2及び図4に弁装置10を拡大し
て示したように、ホルダ11の上方の開口端には、小径
の孔11bを有するテーパ状の弁座11cが形成されて
いる。そして、この弁座11cに着座する球状の弁体1
2がホルダ11の中空部11a内に収容されており、弁
座11cに着座したときにホルダ11の上面から弁体1
2の一部が突出する寸法関係に設定されている。一方、
ホルダ11の下方の開口端には、中空部11aの中心軸
方向に延出する環状の係止部11dが形成され、これに
より弁体12の直径より小径の孔が形成され、弁体12
がホルダ11の下方の開口端から脱落しないように係止
される。ホルダ11の外周には螺子溝が形成されてお
り、端面に穿設された孔11eに図示しない器具が係合
され、この器具を回転することによって弁装置10が搬
送路1に螺着される。
That is, as shown in the enlarged view of the valve device 10 in FIGS. 2 and 4, a tapered valve seat 11c having a small diameter hole 11b is formed at the upper open end of the holder 11. .. And the spherical valve element 1 seated on this valve seat 11c
2 is housed in the hollow portion 11a of the holder 11, and when seated on the valve seat 11c, the valve body 1
It is set to have a dimensional relationship in which a part of 2 projects. on the other hand,
An annular locking portion 11d extending in the central axis direction of the hollow portion 11a is formed at the lower open end of the holder 11, whereby a hole having a diameter smaller than the diameter of the valve body 12 is formed.
Is locked so as not to drop from the lower open end of the holder 11. A screw groove is formed on the outer periphery of the holder 11, and a tool (not shown) is engaged with a hole 11e formed in the end surface, and the valve device 10 is screwed to the transport path 1 by rotating the tool. ..

【0014】而して、上記の構成になる搬送装置におい
て、圧縮空気源4から各搬送路1の中空部1a内に圧縮
空気が供給されていないときには、各弁装置10内の弁
体12は図2に二点鎖線で示すように係止部11dに係
止されている。圧縮空気源4から空気導入管2,2を介
して各搬送路1の中空部1aに圧縮空気が供給される
と、各弁装置10において弁体12が圧縮空気の圧力に
よって図2の上方に押し上げられ、係止部11dから離
脱して空気流路が形成され、ホルダ11の中空部11a
と弁体12との間隙を介して孔11bから搬送路1の上
方に圧縮空気が放出される。このとき、弁体12の上方
に何も存在しなければ圧縮空気の圧力によって弁体12
がホルダ11の弁座11cに着座し、孔11bと弁体1
2との間の空気流路が閉塞される。これにより、孔11
bから圧縮空気が放出されることはなく、従って騒音を
発することもない。
Thus, in the transfer device having the above structure, when compressed air is not supplied from the compressed air source 4 into the hollow portions 1a of the transfer paths 1, the valve element 12 in each valve device 10 is As shown by the chain double-dashed line in FIG. When compressed air is supplied from the compressed air source 4 to the hollow portions 1a of the transport paths 1 through the air introduction pipes 2 and 2, the valve element 12 in each valve device 10 moves upward in FIG. 2 due to the pressure of the compressed air. The air passage is formed by being pushed up and separated from the locking portion 11d, and the hollow portion 11a of the holder 11 is formed.
Compressed air is discharged from the hole 11b to above the transport path 1 through the gap between the valve body 12 and the valve body 12. At this time, if nothing exists above the valve body 12, the pressure of the compressed air causes the valve body 12 to move.
Is seated on the valve seat 11c of the holder 11, and the hole 11b and the valve body 1
The air flow path between the two is closed. Thereby, the hole 11
No compressed air is emitted from b and therefore no noise is emitted.

【0015】搬送路1,1上を移動する移動体6が弁体
12に当接し移動体6の荷重が弁体12に加えられる
と、図5に示すように弁体12と孔11bとの間に間隙
が形成され、この間隙を介して中空部11a内の圧縮空
気が放出され、搬送路1の上面と移動体6との間隙を介
して外部に放出される。即ち、弁体12は移動体6の荷
重によって弁体12に加えられる力と圧縮空気によって
弁体12に加えられる圧力とがバランスする位置で停止
し、搬送路1の上面と移動体6との間隙が略一定に維持
される。そして、図1に示す移動体6の側面6a,6b
とガイド3a,3bとの微小間隙を介して圧縮空気が外
部に放出されるので、移動体6は弁体12のみに接触
し、支持台3等とは無接触の状態で支持される。
When the moving body 6 moving on the conveying paths 1, 1 comes into contact with the valve body 12 and the load of the moving body 6 is applied to the valve body 12, the valve body 12 and the hole 11b are separated from each other as shown in FIG. A gap is formed therebetween, and the compressed air in the hollow portion 11a is discharged through this gap and is discharged to the outside through the gap between the upper surface of the transport path 1 and the moving body 6. That is, the valve body 12 is stopped at a position where the force applied to the valve body 12 by the load of the moving body 6 and the pressure applied to the valve body 12 by the compressed air are balanced, and the upper surface of the transport path 1 and the moving body 6 are separated from each other. The gap is maintained approximately constant. Then, the side surfaces 6a and 6b of the moving body 6 shown in FIG.
Since the compressed air is discharged to the outside through the minute gap between the guide 3a and the guides 3a and 3b, the moving body 6 contacts only the valve body 12 and is supported without contact with the support base 3 and the like.

【0016】以上のように、本実施例によれば搬送路1
の中空部1a内に圧縮空気が供給されているときには弁
装置10の全てが閉弁しており、移動体6に当接した弁
装置10のみが開弁するように構成されているので、圧
縮空気は移動体6の下部にのみ放出される。従って、圧
縮空気の供給量は必要最小限に抑えられ、圧縮空気放出
時の騒音も大幅に低減される。
As described above, according to this embodiment, the transport path 1
When the compressed air is being supplied into the hollow portion 1a, all the valve devices 10 are closed, and only the valve device 10 that is in contact with the moving body 6 is configured to open. Air is discharged only to the lower part of the moving body 6. Therefore, the amount of compressed air supplied is suppressed to a necessary minimum, and the noise at the time of discharging compressed air is also significantly reduced.

【0017】尚、上記弁装置10のホルダ11を廃し、
搬送路1の孔1b回りに直接弁座を形成することとして
もよい。また、弁体12は球状に限ることなく、突出部
を有する異形形状としてもよい。
The holder 11 of the valve device 10 is abolished,
The valve seat may be directly formed around the hole 1b of the transport path 1. Further, the valve body 12 is not limited to the spherical shape, and may have an irregular shape having a protruding portion.

【0018】[0018]

【発明の効果】本発明は上述のように構成されているの
で、以下に記載する効果を奏する。即ち、本発明の搬送
装置においては、管体の搬送路の軸方向に穿設された複
数の孔の各々に弁装置が設けられ、移動体の通過時にの
み弁装置を介して圧縮空気が放出されるので、圧縮空気
の供給量を最小限に抑えることができると共に、圧縮空
気放出時の騒音を大幅に低減することができる。
Since the present invention is configured as described above, it has the following effects. That is, in the transfer device of the present invention, the valve device is provided in each of the plurality of holes bored in the axial direction of the transfer path of the tubular body, and the compressed air is released through the valve device only when the moving body passes. As a result, the amount of compressed air supplied can be minimized, and noise at the time of compressed air discharge can be significantly reduced.

【0019】前記弁装置を前記ホルダと弁体によって構
成したものにあっては、簡単な構成で容易に搬送路に装
着することができる。
When the valve device is composed of the holder and the valve body, the valve device can be easily attached to the conveying path with a simple structure.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例に係る搬送装置の断面図であ
る。
FIG. 1 is a sectional view of a carrying device according to an embodiment of the present invention.

【図2】本発明の一実施例に係る搬送装置における弁装
置の拡大断面図である。
FIG. 2 is an enlarged cross-sectional view of a valve device in the transfer device according to the embodiment of the present invention.

【図3】本発明の一実施例に係る搬送装置の平面図であ
る。
FIG. 3 is a plan view of a carrying device according to an embodiment of the present invention.

【図4】本発明の一実施例に係る搬送装置における弁装
置の平面図である。
FIG. 4 is a plan view of a valve device in the transfer device according to the embodiment of the present invention.

【図5】本発明の一実施例に係る搬送装置において、弁
体に移動体が当接した状態を示す弁装置の断面図であ
る。
FIG. 5 is a cross-sectional view of the valve device showing a state where the moving body is in contact with the valve body in the transport device according to the embodiment of the present invention.

【図6】従来の搬送装置の断面図である。FIG. 6 is a cross-sectional view of a conventional transfer device.

【符号の説明】[Explanation of symbols]

1 搬送路 3 支持台 4 圧縮空気源 5 搬送駆動源 6 移動体 10 弁装置 11 ホルダ 12 弁体 1 Transport Path 3 Support Base 4 Compressed Air Source 5 Transport Drive Source 6 Moving Body 10 Valve Device 11 Holder 12 Valve Body

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 軸方向に複数の孔を穿設した管体を、前
記複数の孔が上方に位置するように配設した搬送路と、
該搬送路の上面と対向する側に平面部を有し前記搬送路
上に配置する移動体とを備え、前記搬送路の中空部内に
圧縮空気を供給し前記複数の孔から放出して前記移動体
を浮上させるようにした搬送装置において、前記圧縮空
気が前記搬送路の中空部内に供給されたときに閉弁し、
前記移動体と接触したときに開弁する弁装置を前記複数
の孔の各々に配設したことを特徴とする搬送装置。
1. A conveyance path in which a tube body having a plurality of holes bored in the axial direction is arranged so that the plurality of holes are located above,
A moving body having a flat surface portion on the side facing the upper surface of the transport path and arranged on the transport path, and supplying compressed air into the hollow portion of the transport path and discharging the compressed air from the plurality of holes; In the transfer device, the valve is closed when the compressed air is supplied into the hollow portion of the transfer path,
A conveying device, wherein a valve device that opens when it comes into contact with the moving body is provided in each of the plurality of holes.
【請求項2】 前記弁装置は、筒体の開口端に弁座を形
成し前記搬送路の複数の孔の各々に前記弁座が上方に位
置するように嵌着するホルダと、該ホルダの中空部に移
動可能に収容し前記ホルダの上端面から一部が突出した
状態で着座する弁体とを備え、該弁体の着座時に該弁体
の一部が前記ホルダを介して前記搬送路の上面から突出
するように配設することを特徴とする請求項1記載の搬
送装置。
2. A holder of the valve device, wherein a valve seat is formed at an opening end of a cylindrical body, and the valve seat is fitted in each of a plurality of holes of the transport path so that the valve seat is located above, and a holder of the holder. A valve body that is movably accommodated in a hollow portion and is seated in a state where a part of the valve body projects from an upper end surface of the holder, and when the valve body is seated, a part of the valve body passes through the holder and the transport path. The transport device according to claim 1, wherein the transport device is arranged so as to project from the upper surface of the sheet.
JP30409991A 1991-10-22 1991-10-22 Conveying device Pending JPH05112240A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30409991A JPH05112240A (en) 1991-10-22 1991-10-22 Conveying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30409991A JPH05112240A (en) 1991-10-22 1991-10-22 Conveying device

Publications (1)

Publication Number Publication Date
JPH05112240A true JPH05112240A (en) 1993-05-07

Family

ID=17929017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30409991A Pending JPH05112240A (en) 1991-10-22 1991-10-22 Conveying device

Country Status (1)

Country Link
JP (1) JPH05112240A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006043434A1 (en) * 2004-10-18 2006-04-27 Nikon Corporation Bearing device and stage device, and exposure device
JP2008078643A (en) * 2006-09-08 2008-04-03 Asml Netherlands Bv Lithographic apparatus having mechanism providing gas bearing, and method of manufacturing device
CN102275589A (en) * 2011-05-18 2011-12-14 谢向勇 Air suspension railway operating device
JP2021050062A (en) * 2019-09-25 2021-04-01 島田テクノロジー株式会社 Table for object conveyance and conveyance device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58224917A (en) * 1982-06-22 1983-12-27 Tsuji Densetsu Kk Automatic transfer device of grain bag
JPS6261135A (en) * 1985-09-11 1987-03-17 Nec Corp Cache memory

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58224917A (en) * 1982-06-22 1983-12-27 Tsuji Densetsu Kk Automatic transfer device of grain bag
JPS6261135A (en) * 1985-09-11 1987-03-17 Nec Corp Cache memory

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006043434A1 (en) * 2004-10-18 2006-04-27 Nikon Corporation Bearing device and stage device, and exposure device
JPWO2006043434A1 (en) * 2004-10-18 2008-05-22 株式会社ニコン Bearing apparatus, stage apparatus, and exposure apparatus
JP2008078643A (en) * 2006-09-08 2008-04-03 Asml Netherlands Bv Lithographic apparatus having mechanism providing gas bearing, and method of manufacturing device
CN102275589A (en) * 2011-05-18 2011-12-14 谢向勇 Air suspension railway operating device
JP2021050062A (en) * 2019-09-25 2021-04-01 島田テクノロジー株式会社 Table for object conveyance and conveyance device

Similar Documents

Publication Publication Date Title
KR100916673B1 (en) Non-contact transport apparatus
JP5921323B2 (en) Transport holding tool and transport holding device
WO2011046129A1 (en) Apparatus for holding thin-board-like material and method for holding thin-board-like material
JP2000511354A (en) Non-contact cage for wafer-like articles
JPH01220636A (en) Device for conveying article
JPH05112240A (en) Conveying device
JP4293962B2 (en) Non-contact adsorption device
JP5250864B2 (en) Transport device
JPH06255775A (en) Carrying device
JPH02156651A (en) Wafer handling device
JPH11254369A (en) Non-contact carrier device
JPH06255774A (en) Moving body for carrying device
WO2011129152A1 (en) Swirl flow forming body and contactless conveyance device
US11541554B2 (en) Non-contact transport device
US4662282A (en) Switching device for pneumatic conveyance linear motor actuated
JPH0215461B2 (en)
JP2006036422A (en) Work carrying device
KR200205148Y1 (en) Docking Equipment for Wafer Transport Equipment
JP2003326487A (en) Hybrid vacuum sucking device
JP2005067890A (en) Method and device for carrying cap nuts
JPH09183089A (en) Search type vacuum suction device and air control valve for vacuum suction
JPS59128123A (en) Positioner for wafer
JPS63176216A (en) Pneumatic transfer system
JPH0541638U (en) Non-contact type chuck device
JPH09254069A (en) Conveyer