JPH0511054B2 - - Google Patents
Info
- Publication number
- JPH0511054B2 JPH0511054B2 JP63087789A JP8778988A JPH0511054B2 JP H0511054 B2 JPH0511054 B2 JP H0511054B2 JP 63087789 A JP63087789 A JP 63087789A JP 8778988 A JP8778988 A JP 8778988A JP H0511054 B2 JPH0511054 B2 JP H0511054B2
- Authority
- JP
- Japan
- Prior art keywords
- optical waveguide
- molten salt
- glass substrate
- mol
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 claims description 52
- 239000011521 glass Substances 0.000 claims description 49
- 150000003839 salts Chemical class 0.000 claims description 45
- 239000000758 substrate Substances 0.000 claims description 40
- 238000004519 manufacturing process Methods 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 14
- 229910052716 thallium Inorganic materials 0.000 claims description 12
- -1 thallium ions Chemical class 0.000 claims description 8
- 229910001413 alkali metal ion Inorganic materials 0.000 claims description 6
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 claims description 5
- 238000005342 ion exchange Methods 0.000 description 18
- 238000001816 cooling Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000001000 micrograph Methods 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000005868 electrolysis reaction Methods 0.000 description 2
- 239000005304 optical glass Substances 0.000 description 2
- 238000010583 slow cooling Methods 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000007687 exposure technique Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
- G02B6/1345—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion exchange
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
- Surface Treatment Of Glass (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63087789A JPH01261243A (ja) | 1988-04-08 | 1988-04-08 | 光導波路製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63087789A JPH01261243A (ja) | 1988-04-08 | 1988-04-08 | 光導波路製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01261243A JPH01261243A (ja) | 1989-10-18 |
| JPH0511054B2 true JPH0511054B2 (enrdf_load_stackoverflow) | 1993-02-12 |
Family
ID=13924748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63087789A Granted JPH01261243A (ja) | 1988-04-08 | 1988-04-08 | 光導波路製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01261243A (enrdf_load_stackoverflow) |
-
1988
- 1988-04-08 JP JP63087789A patent/JPH01261243A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01261243A (ja) | 1989-10-18 |
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