JPH05110156A - Lamination piezoelectric effect element - Google Patents
Lamination piezoelectric effect elementInfo
- Publication number
- JPH05110156A JPH05110156A JP3271635A JP27163591A JPH05110156A JP H05110156 A JPH05110156 A JP H05110156A JP 3271635 A JP3271635 A JP 3271635A JP 27163591 A JP27163591 A JP 27163591A JP H05110156 A JPH05110156 A JP H05110156A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric effect
- layer
- laminated
- effect element
- internal electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000000694 effects Effects 0.000 title claims abstract description 18
- 238000003475 lamination Methods 0.000 title abstract 5
- 239000000919 ceramic Substances 0.000 claims abstract description 18
- 229920005989 resin Polymers 0.000 claims abstract description 7
- 239000011347 resin Substances 0.000 claims abstract description 7
- 239000012212 insulator Substances 0.000 claims abstract description 3
- 230000001681 protective effect Effects 0.000 claims description 10
- 239000011810 insulating material Substances 0.000 claims 1
- 238000013508 migration Methods 0.000 abstract description 3
- 230000005012 migration Effects 0.000 abstract description 3
- 238000009413 insulation Methods 0.000 abstract 2
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 238000010030 laminating Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 22
- 239000011521 glass Substances 0.000 description 8
- 239000000843 powder Substances 0.000 description 6
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 238000005245 sintering Methods 0.000 description 5
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- 230000001012 protector Effects 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000001962 electrophoresis Methods 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 2
- 230000008602 contraction Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は積層圧電効果素子に関
し、特に螺旋形の積層構造を持つ積層圧電効果素子に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laminated piezoelectric effect element, and more particularly to a laminated piezoelectric effect element having a spiral laminated structure.
【0002】[0002]
【従来の技術】従来の積層圧電効果素子は図5に示すよ
うな構造であり、圧電セラミック層23を挟んで内部電
極3が多層にサンドイッチ構造となっており、その上下
を保護層22で保護している。また内部電極が露出して
いる四側面のうち二側面に外部電極8が設けられるが、
この二側面の内部電極3の周辺部には絶縁層24が一層
ごとに交互に設けられている。これにより内部電極は一
層おきに同一外部電極と電気的に接続される。外部電極
8にはリード線9がハンダ10により電気的に接続され
ている。さらに外部電極8を設けた二側面と他の二側面
は樹脂11で被覆されている。圧電セラミック層23は
チタン酸ジルコン酸鉛の様な鉛系ペロブスカイト構造複
合酸化物からなり、電気絶縁層24は500〜700℃
に軟化点を持つガラス粉末を電気泳動法で所望の位置に
付着させ、その後600〜800℃で焼成して形成した
ガラス体から成っている。また、外部電極8は銀あるい
は銀パラジウム混合粉などの金属粉末をガラス粉末とと
ともに有機溶媒中に分散・混合させて製造した軟泥状物
質をスクリーン印刷法で所望の位置に塗布した後、60
0〜800℃で焼成した金属粉末の焼結体からなってい
る。樹脂11はエポキシ樹脂の粉体を静電塗装し、15
0〜200℃の温度で硬化したものである。2. Description of the Related Art A conventional laminated piezoelectric effect element has a structure as shown in FIG. 5, in which a plurality of internal electrodes 3 are sandwiched with a piezoelectric ceramic layer 23 sandwiched between them. is doing. The external electrodes 8 are provided on two of the four side surfaces where the internal electrodes are exposed.
Insulating layers 24 are alternately provided in layers around the inner electrodes 3 on the two side surfaces. As a result, the inner electrodes are electrically connected to the same outer electrode every other layer. A lead wire 9 is electrically connected to the external electrode 8 by a solder 10. Further, the two side surfaces provided with the external electrode 8 and the other two side surfaces are covered with the resin 11. The piezoelectric ceramic layer 23 is made of a lead-based perovskite structure composite oxide such as lead zirconate titanate, and the electric insulating layer 24 is 500 to 700 ° C.
It consists of a glass body formed by adhering glass powder having a softening point to a desired position by electrophoresis and then firing it at 600 to 800 ° C. In addition, the external electrode 8 is formed by dispersing and mixing metal powder such as silver or silver-palladium mixed powder with glass powder in an organic solvent and applying it to a desired position by a screen printing method.
It consists of a sintered body of metal powder fired at 0 to 800 ° C. Resin 11 is a powder of epoxy resin that is electrostatically coated.
It was cured at a temperature of 0 to 200 ° C.
【0003】[0003]
【発明が解決しようとする課題】図5に示される様な従
来構造の積層圧電効果素子は、絶縁層24をガラス粉末
を電気泳動法により付着させた後、ガラスを焼成して形
成している。これは現在最も能率的な方法の一つと考え
られるが、この工程では作業者の熟練度が要求され、ま
た、絶縁層のガラスは圧電セラミック層とは熱膨張係数
が異なるため、ガラス焼成工程や外装樹脂硬化工程のよ
うに素子が加熱される工程でガラスにひび・割れ目など
が入り、素子駆動中のマイグレーション不良の原因とな
ることもある。In the laminated piezoelectric effect element having the conventional structure as shown in FIG. 5, the insulating layer 24 is formed by depositing glass powder by an electrophoretic method and then firing the glass. .. This is considered to be one of the most efficient methods at present, but the skill of the operator is required in this step, and the glass of the insulating layer has a different coefficient of thermal expansion from the piezoelectric ceramic layer. The glass may be cracked or cracked in the step of heating the element such as the step of curing the exterior resin, which may cause migration failure during element driving.
【0004】また、従来構造の素子では保護層と圧電性
セラミック層が一体化しているため両層の境界では圧電
性セラミックの伸縮にともない剪断応力が発生し、この
応力が両層境界での層剥離(素子割れ)の原因となる。Further, in the element having the conventional structure, since the protective layer and the piezoelectric ceramic layer are integrated, shear stress is generated at the boundary of both layers due to expansion and contraction of the piezoelectric ceramic, and this stress is generated at the boundary of both layers. This may cause peeling (element cracking).
【0005】本発明の目的は、従来構造の欠点である絶
縁層のガラスのひび・割れ目発生による素子駆動中のマ
イグレーション不良を防ぐことができ、かつ、保護層と
圧電性セラミック層の境界で発生する剪断応力による両
層境界での層剥離(素子割れ)を防ぐことができる積層
圧電効果素子を提供することにある。The object of the present invention is to prevent migration defects during device driving due to cracks and cracks in the glass of the insulating layer, which is a drawback of the conventional structure, and to occur at the boundary between the protective layer and the piezoelectric ceramic layer. Another object of the present invention is to provide a laminated piezoelectric effect element capable of preventing layer delamination (element cracking) at the boundary between both layers due to shear stress.
【0006】[0006]
【課題を解決するための手段】本発明の積層圧電効果素
子は、導電性の内部電極を片面に被着形成した帯状の圧
電効果を持つセラミック・グリーンシート二枚を長手方
向にずらして上下に積層する。この時、帯状グリーンシ
ートのどちらか一端には下層グリーンシート上に形成し
た電極が露出している。この端部が最上面にくるように
帯状シートを螺旋状に巻いて積層し、その最上面の端部
に外部電極部を設けそこにリード線をハンダ付けする。
また、焼結後の積層体を保護体で挟むだけにし保護体を
積層体に焼結させない。The laminated piezoelectric effect element according to the present invention comprises two ceramic green sheets having a piezoelectric effect and having conductive internal electrodes formed on one side thereof by vertically shifting them in a longitudinal direction. Stack. At this time, the electrodes formed on the lower green sheet are exposed at either end of the strip green sheet. A strip-shaped sheet is spirally wound and laminated so that this end portion comes to the uppermost surface, and an external electrode portion is provided at the uppermost end portion and a lead wire is soldered thereto.
Further, the laminated body after sintering is only sandwiched between the protective bodies, and the protective body is not sintered into the laminated body.
【0007】[0007]
【実施例】次に本発明に付いて図面を参照して説明す
る。図1は本発明の一実施例の斜視分解図、図2は本発
明の一実施例のグリーンシート端部の斜視図、図3は本
発明の一実施例の焼結積層体の斜視図である。DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings. 1 is a perspective exploded view of an embodiment of the present invention, FIG. 2 is a perspective view of an end portion of a green sheet of the embodiment of the present invention, and FIG. 3 is a perspective view of a sintered laminate of the embodiment of the present invention. is there.
【0008】まず、図2に示すように、組成式Pb(N
i1/3 Nb2/3 )0.5 Ti0.35Zr0.15O3 のペロブス
カイト構造複合酸化物からなる圧電性セラミックシート
2a,2bの片面に銀70%パラジウム30%の銀パラ
ジウム内部電極3を被着形成したシートを二枚ずらして
重ねる。特に上下二枚のシートのうち上シート2aの端
部には電極非形成部4があり、下シート2bの端部には
内部電極が露出している内部電極露出部5がある。図3
には図1のグリーンシートを螺旋状に巻いた積層体6を
示してある。図1の焼結積層体7は、図3の積層体6を
圧力80kg/cm2 でプレスした後に焼結したもので
ある。焼結積層体7の端部には外部電極8が銀ペースト
焼成により形成され、さらにそこにリード線9がハンダ
10によりハンダ付けされる。焼結積層体7はさらに厚
さ200μm程度の樹脂11により外装される。この螺
旋形の積層体構造を用いることにより、異なった極性の
電極が交互に積層されることになり、外部電極8は積層
体端部に局所的に設ければ良いことになる。このため、
図5の従来素子における絶縁層24を形成する工程を省
くことができる。図1の焼結積層体7は金属バネ12を
介して積層方向の上下を絶縁体から成る保護体13,1
4により挟まれる。金属バネ12は酸化アルミニウム製
の保護管15により積層体内部電極3から隔離される。
これは金属バネが異なった極性の内部電極を短絡させな
いようにするためである。また保護管15は保護体14
の円孔部16にはまり、保護体13,14の横方向の動
きを抑制する働きもある。円孔部16の中にはバネの鈎
状端部17を掛けるための梁18がある。また外部電極
8上にくる保護体13には切削加工部19があり外部電
極8を圧迫しないようになっている。First, as shown in FIG. 2, the composition formula Pb (N
i 1/3 Nb 2/3 ) 0.5 Ti 0.35 Zr 0.15 O 3 Piezoelectric ceramic sheets 2a, 2b made of perovskite-structured composite oxides were coated with silver-palladium internal electrodes 3 made of 70% silver and 30% palladium on one side. Shift the two sheets and stack them. In particular, of the upper and lower two sheets, there is an electrode non-forming portion 4 at the end of the upper sheet 2a, and an internal electrode exposed portion 5 at which the internal electrodes are exposed at the end of the lower sheet 2b. Figure 3
1 shows a laminated body 6 in which the green sheet of FIG. 1 is spirally wound. The sintered laminated body 7 of FIG. 1 is obtained by pressing the laminated body 6 of FIG. 3 at a pressure of 80 kg / cm 2 and then sintering it. An external electrode 8 is formed on the end portion of the sintered laminated body 7 by baking a silver paste, and a lead wire 9 is soldered thereto by a solder 10. The sintered laminated body 7 is further covered with a resin 11 having a thickness of about 200 μm. By using this spiral laminate structure, electrodes having different polarities are alternately laminated, and the external electrode 8 may be locally provided at the end of the laminate. For this reason,
The step of forming the insulating layer 24 in the conventional device of FIG. 5 can be omitted. The sintered laminated body 7 shown in FIG.
Sandwiched by four. The metal spring 12 is isolated from the laminated body internal electrode 3 by a protective tube 15 made of aluminum oxide.
This is to prevent the metal spring from short-circuiting the internal electrodes having different polarities. Further, the protective tube 15 is a protective body 14.
It also fits into the circular hole portion 16 and has a function of suppressing the lateral movement of the protectors 13 and 14. Within the circular hole 16 is a beam 18 for hooking the hooked end 17 of the spring. Further, the protective body 13 on the external electrode 8 has a cutting portion 19 so that the external electrode 8 is not pressed.
【0009】図4は本発明の他の実施例の分解斜視図で
あり、この実施例では、焼結積層体7を保護体13によ
り挟む際に、バネではなく、ボルト20及びナット21
を用いたものである。ボルトの材質はステンレス等の適
度な弾性を有するものとし、素子の動作を阻害したり、
ボルト及び素子が破断しないようにする。FIG. 4 is an exploded perspective view of another embodiment of the present invention. In this embodiment, when the sintered laminated body 7 is sandwiched by the protective body 13, not the spring but the bolt 20 and the nut 21.
Is used. The material of the bolt shall be stainless steel, etc., which has appropriate elasticity, and may interfere with the operation of the element.
Make sure that the bolts and elements do not break.
【0010】[0010]
【発明の効果】以上の説明のように本発明は、内部電極
を被着形成した圧電性セラミック層を螺旋形に積層する
ことにより絶縁層形成の工程を省略でき、さらに保護体
を積層体に焼結させないことにより、その層境界面での
剪断応力をなくし素子の破断を防止することができる、
という効果を有する。As described above, according to the present invention, the step of forming an insulating layer can be omitted by spirally stacking the piezoelectric ceramic layers on which the internal electrodes are formed, and a protective body can be formed on the stacked body. By not sintering, it is possible to eliminate the shear stress at the layer boundary surface and prevent the element from breaking.
Has the effect.
【図1】本発明の一実施例の積層圧電効果素子斜視分解
図である。FIG. 1 is a perspective exploded view of a laminated piezoelectric effect element according to an embodiment of the present invention.
【図2】本発明の一実施例に使用するグリーンシート端
部の斜視図である。FIG. 2 is a perspective view of an end portion of a green sheet used in one embodiment of the present invention.
【図3】本発明の一実施例に使用する焼結積層体の斜視
図である。FIG. 3 is a perspective view of a sintered laminate used in one example of the present invention.
【図4】本発明の他の実施例の積層圧電効果素子斜視分
解図である。FIG. 4 is a perspective exploded view of a laminated piezoelectric effect element according to another embodiment of the present invention.
【図5】従来の積層圧電効果素子の斜視図及び縦断面図
である。FIG. 5 is a perspective view and a vertical sectional view of a conventional laminated piezoelectric effect element.
1 帯状セラミックグリーンシート 2 圧電性セラミックシート 2a 上シート 2b 下シート 3 内部電極 4 電極非形成部 5 内部電極露出部 6 積層体(焼結前螺旋状積層体) 7 焼結後螺旋状積層体(焼結積層体) 8 外部電極 9 リード線 10 ハンダ 11 外装樹脂 12 金属バネ 13 上保護体 14 下保護体 15 絶縁体 16 円孔部 17 鈎状端部 18 梁 19 切削加工部 20 ボルト 21 ナット 22 保護層 23 圧電性セラミック層 24 絶縁層 1 Belt-shaped ceramic green sheet 2 Piezoelectric ceramic sheet 2a Upper sheet 2b Lower sheet 3 Internal electrode 4 Electrode non-forming part 5 Internal electrode exposed part 6 Laminated body (spiral laminated body before sintering) 7 Helical laminated body after sintering ( Sintered laminate) 8 External electrode 9 Lead wire 10 Solder 11 Exterior resin 12 Metal spring 13 Upper protector 14 Lower protector 15 Insulator 16 Circular hole 17 Hook end 18 Beam 19 Cutting part 20 Bolt 21 Nut 22 Protective layer 23 Piezoelectric ceramic layer 24 Insulating layer
Claims (2)
効果を示す帯状セラミックシートを複数枚ずらして重ね
て、帯状端部において各セラミックシート上の内部電極
の一部を外部に露出させたものを螺旋状に積層して円筒
状の積層体を形成し、露出させた電極端部に外部電極を
設け、さらに積層体中心部の空孔に通したバネを介して
積層体の上下面から絶縁物でできた保護体により挟み、
全面を樹脂で被覆したことを特徴とする積層圧電効果素
子。1. A plurality of strip-shaped ceramic sheets each having a piezoelectric effect and having a conductive internal electrode formed on one side thereof are shifted and overlapped, and a part of the internal electrodes on each ceramic sheet is exposed to the outside at a strip-shaped end portion. Items are spirally laminated to form a cylindrical laminated body, external electrodes are provided at the exposed electrode ends, and the upper and lower surfaces of the laminated body are connected via springs that pass through holes in the center of the laminated body. Sandwiched by a protective body made of an insulator,
A laminated piezoelectric effect element having an entire surface coated with a resin.
効果を示す帯状セラミックシートを複数枚ずらして重ね
て、帯状端部において各セラミックシート上の内部電極
の一部を外部に露出させたものを螺旋状に積層して円筒
状の積層体を形成し、露出させた電極端部に外部電極を
設け、さらに積層体中心部の空孔に通したボルトを介し
て積層体の上下面から絶縁物でできた保護体により挟
み、全面を樹脂で被覆したことを特徴とする積層圧電効
果素子。2. A plurality of strip-shaped ceramic sheets each having a piezoelectric effect and having a conductive internal electrode formed on one surface thereof are staggered and overlapped to expose a part of the internal electrodes on each ceramic sheet to the outside at the strip-shaped end portions. Cylindrical laminates are formed by stacking things in a spiral shape, external electrodes are provided on the exposed electrode ends, and from the top and bottom surfaces of the laminate through bolts that pass through holes in the center of the laminate. A laminated piezoelectric effect element characterized in that it is sandwiched by a protective body made of an insulating material and the entire surface is covered with a resin.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3271635A JPH05110156A (en) | 1991-10-21 | 1991-10-21 | Lamination piezoelectric effect element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3271635A JPH05110156A (en) | 1991-10-21 | 1991-10-21 | Lamination piezoelectric effect element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH05110156A true JPH05110156A (en) | 1993-04-30 |
Family
ID=17502816
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3271635A Pending JPH05110156A (en) | 1991-10-21 | 1991-10-21 | Lamination piezoelectric effect element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH05110156A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001013440A1 (en) * | 1999-08-13 | 2001-02-22 | Robert Bosch Gmbh | Method for producing piezo actuators with a multiple-layer structure of piezo layers |
GB2365205A (en) * | 1997-09-05 | 2002-02-13 | 1 Ltd | Helical piezoelectric deice |
JP2015061054A (en) * | 2013-09-20 | 2015-03-30 | 太平洋セメント株式会社 | Piezoelectric element unit, and piezoelectric actuator |
-
1991
- 1991-10-21 JP JP3271635A patent/JPH05110156A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2365205A (en) * | 1997-09-05 | 2002-02-13 | 1 Ltd | Helical piezoelectric deice |
WO2001013440A1 (en) * | 1999-08-13 | 2001-02-22 | Robert Bosch Gmbh | Method for producing piezo actuators with a multiple-layer structure of piezo layers |
US6931697B1 (en) | 1999-08-13 | 2005-08-23 | Robert Bosch Gmbh | Method for producing piezo actuators with a multiple-layer structure of piezo layers |
JP2015061054A (en) * | 2013-09-20 | 2015-03-30 | 太平洋セメント株式会社 | Piezoelectric element unit, and piezoelectric actuator |
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