GB2365205A - Helical piezoelectric deice - Google Patents

Helical piezoelectric deice Download PDF

Info

Publication number
GB2365205A
GB2365205A GB0124970A GB0124970A GB2365205A GB 2365205 A GB2365205 A GB 2365205A GB 0124970 A GB0124970 A GB 0124970A GB 0124970 A GB0124970 A GB 0124970A GB 2365205 A GB2365205 A GB 2365205A
Authority
GB
United Kingdom
Prior art keywords
bender
helix
along
thickness
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB0124970A
Other versions
GB2365205B (en
GB0124970D0 (en
Inventor
Anthony Hooley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
1 Ltd
Original Assignee
1 Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB9718785.0A external-priority patent/GB9718785D0/en
Priority claimed from GBGB9805053.7A external-priority patent/GB9805053D0/en
Priority claimed from GBGB9805735.9A external-priority patent/GB9805735D0/en
Application filed by 1 Ltd filed Critical 1 Ltd
Priority claimed from GB9819304A external-priority patent/GB2329514B/en
Publication of GB0124970D0 publication Critical patent/GB0124970D0/en
Publication of GB2365205A publication Critical patent/GB2365205A/en
Application granted granted Critical
Publication of GB2365205B publication Critical patent/GB2365205B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K41/00Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02Linear motors; Sectional motors
    • H02K41/035DC motors; Unipolar motors
    • H02K41/0352Unipolar motors
    • H02K41/0354Lorentz force motors, e.g. voice coil motors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0603Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a piezoelectric bender, e.g. bimorph
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1607Production of print heads with piezoelectric elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1623Manufacturing processes bonding and adhesion
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00Bearings for parts moving only linearly
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00Bearings for parts moving only linearly
    • F16C29/02Sliding-contact bearings
    • F16C29/025Hydrostatic or aerostatic
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/06Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F1/00Springs
    • F16F1/02Springs made of steel or other material having low internal friction; Wound, torsion, leaf, cup, ring or the like springs, the material of the spring not being relevant
    • F16F1/021Springs made of steel or other material having low internal friction; Wound, torsion, leaf, cup, ring or the like springs, the material of the spring not being relevant characterised by their composition, e.g. comprising materials providing for particular spring properties
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F1/00Springs
    • F16F1/02Springs made of steel or other material having low internal friction; Wound, torsion, leaf, cup, ring or the like springs, the material of the spring not being relevant
    • F16F1/04Wound springs
    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/002Devices for damping, suppressing, obstructing or conducting sound in acoustic devices
    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/16Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/162Selection of materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/44Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of magnetic liquids, e.g. ferrofluids
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K1/00Details of the magnetic circuit
    • H02K1/02Details of the magnetic circuit characterised by the magnetic material
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K33/00Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/16Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with polarised armatures moving in alternate directions by reversal or energisation of a single coil system
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K7/00Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08Structural association with bearings
    • H02K7/086Structural association with bearings radially supporting the rotor around a fixed spindle; radially supporting the rotor directly
    • H02K7/088Structural association with bearings radially supporting the rotor around a fixed spindle; radially supporting the rotor directly radially supporting the rotor directly
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/08Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/084Shaping or machining of piezoelectric or electrostrictive bodies by moulding or extrusion
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/1071Piezoelectric or electrostrictive devices with electrical and mechanical input and output, e.g. having combined actuator and sensor parts
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F2224/00Materials; Material properties
    • F16F2224/02Materials; Material properties solids
    • F16F2224/0283Materials; Material properties solids piezoelectric; electro- or magnetostrictive

Abstract

A unimorph or bimorph piezoelectric 'bender' formed into a flat- (or edge-) wound helix 50,54,55. The device may be formed by the extrusion of "green" piezoelectric material e.g. PZT.

Description

2365205 Piezoelectric Device This invention relates to piezoelectric
devices. More particularly, the invention relates to novel constructions of piezoelectric devices for use as electromechanical drivers.
Transducers which convert electrical energy to mechanical energy are well known and come in a wide variety of forms perhaps the most common of which is the loudspeaker (which converts electrical signals into the motion of a piston or like device the movement of which is caused to displace air so as ultimately to "change" the electrical signal into audible sound).
Linear actuators of many varieties are also well known, examples including hydraulic, pneumatic and internal-combustion cylinders, electromagnetic solenoids, linear motors of many kinds, piezoelectric and magnetostrictive actuators, and inch worm devices.
Where a relatively small, self-contained, compact and electricallyoperated linear actuator is required capable of movement of merely a few millimetres and/or of the application of small forces in the Newton range, then solenoids are generally preferred. It would be attractive to utilise a piezoelectric device instead, but unfortunately the present-day piezoelectric devices generally have a problem producing millimetre-range displacements if direct acting, and even 'stacks' of piezoelectric plates produce only small deflections with practical applied voltages.
Moreover, piezo devices become quite bulky if used in the 'bender' mode; in this mode it is usual to provide an elongate two-layer cantilever beam made of a piezoelectric unimorph (a single shape-changing layer on a shape-fixed layer) or bimorph (two shape-changing layers back to back), which beam bends significantly as the activating voltage is applied, but such a beam necessarily extends some distance away from the axis of output movement.
Nevertheless, some use of piezoelectric benders Mi place of solenoids has been made, particularly in the application of pneumatic valves, where a multilayer bimorph has been used to provide reasonable deflection from relatively low operating voltages. Moreover, in GB-A-2,322,232 there is described a helical tape-wound bender geometry suited for applying radial "squeezing" pressures to a translator mounted therewithin via a linear bearing. This helical bender has electrodes on its radially inner and outer surfaces which are split half way along the axis of the helix and are cross-coupled to produce, when driven, a reduction in helix radius at one end and an fficrease in helix radius at the opposite end. The present invention concerns a more generally useful manner of substituting a piezoelectric device for a solenoid - of retaining the compact cylindrical shape of the solenoid with the main length of the actuator aligned along (rather than at right angles as in a classical bender) to the direction of movement.
The helically-wound piezo device described in the aforementioned Specification is one wherein the piezoelectric material is tape-wound, as though a length of tape or ribbon had been wound in the conventional fashion around the outside of a cylinder. By contrast, in this aspect of the present invention a piezoelectric bender is made in the form of aflat(or edge-) wound helical coil, with the direction of the applied electric field being between the two surfaces of the flatwinding (i.e. nominally aligned along the direction of the axis of the helical coil).
To best visualise the geometry of this structure, consider first a conventional elongate rectangular unimorph or bimorph piezoelectric 'bender', with a thickness t (smallest dimension), width w (intermediate dimension) and length 1 (greatest dimension). The morph is constructed of two layers (which together have the total thickness t), and the applied electric field is in the direction of the thickness, so that if V volts are applied then the electric field in the morph has magnitude VIt. Such a field will cause the morph to bend preferentially in a direction at right angles to the length and width dimensions, such that the thickness direction lies within that plane of bending. Next, consider the undeflected rectangular morph lying flat on a horizontal surface, with the thickness t vertically aligned, and placed with its side at one end adjacent to and touching a cylinder of diameter d standing on the surface with its axis also vertical. Now imagine that the morph is flexible, and with the end touching the cylinder held stationary, the morph is edgewound around the cylinder (i.e. in the plane of the surface) so that it forms after one turn an annulus - a circle of inner diameter d and outer diameter approximately d + 2w. If, as the morph is wound around the cylinder, it is raised by at least a height t per turn then it is possible to continue winding it into a continuous helix with each turn being on top of its preceding turn, thus giving a helix of pitch p (wherein this case p= t). Ifthepitchp is made greater than t then there will be a space between each turn of width.P-t. That describes the geometry of the helical bender of the invention; the thickness (or smallest dimension) is aligned substantially axially along the helix, the width (or intermediate dimension) is aligned radially along the helix, and the length (or greatest dimension) is aligned helically along the helix, and in operation the morph is polarised in the thickness direction.
Note, incidentally, that it is not being suggested that the above method is necessarily a practical means of constructing such a helical morph: this is merely a description to portray the desired geometry (however, it is in practice possible to make a helical morph in much this manner if the winding into a helix is done while the ceramic layers of the morph are still in the green or unsintered state, and in practice if the green ceramic is suitably plasticised).
Therefore, the invention provides a unimorph or bimorph piezoelectric bender' formed into a flat- (or edge-) wound helix.
More particularly the invention provides a unimorph or bimorph (morph) piezoelectric 'bender' (bender) formed into a 'flat-wound' helix - i.e. where the thickness or smallest dimension of the bender cross section is aligned axially along the helix, the width or intermediate dimension of the bender is aligned radially along the helix, and the length or greatest dimension of the bender is aligned helically along the helix - where the pitch of the helix is greater than the thickness of the bender, and where the morph is polarised in the thickness direction (i.e. nominally along the axis of the helix), and wherein electrically-conductive electrodes are deposited along the length of the bender on both of the largest surface area sides of the bender (i.e. on either side of the thickness direction) and are drivable by an electrical signal so as to cause the helical bender to exhibit a dimensional change in the axial direction when so driven.
In use the morph is polarised in the thickness direction (i.e. nominally along the axis of the helix - a direction approximately parallel to the axis of the helix).
Consider the effect of applying an electric field in this direction along the thickness dimension. Each part of the helical bender will try to bend nominally in the thickness direction, and this attempt will, because of the helical geometry, cause the entire helix to lengthen or shorten (if the pitch p is not greater than the thickness t then the helix will not be able easily to shorten). There will also be a small - deflection orthogonal to the thickness direction which will mostly contribute to a slight increase or decrease in the diameter of the helical coil, but this effect will be small compared to the length change in the helix, due in part to the structure and alignment of the morph relative to the helix. Depending on the chosen materials, the achievable deflection along the direction of helix axis, per size of helical coil, is considerable compared to that achievable using a comparably compact bender beam or stack. For example, a practical morph of width 8nim and thickness l min formed into a helix of inner diameter 16min and outer diameter 32mm, with 12 turns at 2nun pitch, will have overall cylindrical dimensions of 32min diameter and 24min length, but will have the equivalent bender-length of a cantilever beam bender (of the same width and thickness) of approximately 91 Omm (nearly a metre), and will deflect well over 10= with practical drive voltages. This is quite comparable to the performance possible with a similarly-sized solenoid (though perhaps with somewhat less output operating force), and such a helical bender has the great advantage over a solenoid that once actuated it requires no static holding current, and therefore dissipates essentially zero energy as heat, whilst still producing a static output force.
The bender also has very small inductance, and is free from the inductive switching transients that are a problem with solenoids.
in operation the morph is, as just described, polarised in the thickness direction, and it is convenient to effect this utilising electricallyconductive electrodes deposited along the length of the bender on both of the largest surface area sides of the bender (i.e. on either side of the thickness direction), and then driving these by a suitable electrical signal so as to cause the helical bender to exhibit the required associated dimensional change in the axial direction.
One method of constructmig such a bender involves co-extrusion of two (or more) layers of plasticized piezoelectric material, typically a lead zirconium titanate (PbZTi, or M) ceramic, to form a unimorph, bimorph or multimorph. The extrusion is effected through a rectangular aperture nozzle of exit dimensions w x t and so arranged internally that extrudate issues from the exit aperture at a rate which is a flinction of position across the 'W' dimension of the aperture; the effect of this is that upon so exiting the extrudate "curls", and in fact forms into a circle or helix if so coerced by means of an external cylindrical former of diameter 'V' and winding arrangement, with inner diameter d and outer diameter d+2w. In order successfully to achieve such co-extrusion it is necessary to grind very finely and uniformly the PZT powder (obtained, for exwnple, from Morgan- Matroc), and to mix it thoroughly with a suitable plasticizer (eg polyvinyl acetate, PVA) and water.
The separate layers are loaded with more or less silver oxide to make a unimorph - active layers with a small proportion of silver oxide, say 2%, and conductive inactive layers with somewhat more silver oxide, say 20%. For a twolayer device, one active and one inactive layer are co-extruded together such that their total thickness is = t and each has a thickness of t/2 after extrusion. For a multilayer device, active layers are alternated with inactive layers, each of nominal thickness t/n, to form a total bender thickness of t after extrusion.
Once the two- or multilayer extrudate has been extruded and "wound" onto the former of diameter d, it is sintered on the former in a furnace at a temperature in the region of 900-1,000T. Surface electrodes can then be added to any external active layers by, for example, the sputtering of a conductive material such as silver or aluminium.
An embodiment of the invention is now described, though by way of illustration only, with reference to the accompanying diagrammatic Drawing in which Fig. 1 shows a perspective view of a form of piezoelectric helical bender of the 5 invention; Fig. 1 shows a helical flat-wound bender of some suitable diameter, thickness, pitch and width (shown respectively at 58, 57, 59 and 56).
The bender is comprised of a top (as viewed) layer (54) and a bottom (as viewed) layer (55) bonded together at their interface (50). If both layers 54,55 are piezoelectric then the bender is a bimorph- if only one layer is piezoelectric then it is a unimorph.
The helix extends or contracts along the direction of the axis (shown as dashed line 51) depending on the polarity of the electrical drive voltage applied between conductive electrodes (not shown) deposited one on the top (as viewed) face of the top layer 54 and one on the bottom (as viewed) face of the bottom layer 55. To allow easy application of load forces, the top and bottom turns of the helix may be flattened out somewhat as indicated in the Figure, or they may be ground flat.

Claims (10)

Claims
1. A unimorph or bimorph piezoelectric 'bender' formed into a flat- (or edge-) wound helix.
2. A bender as claimed in Claim 1, wherein: the thickness or smallest dimension of the bender cross section is aligned axially along the helix, the width or intermediate dimension of the bender is aligned radially along the helix, and the length or greatest dimension of the bender is aligned helically along the helix; wherein the pitch of the helix is greater than the thickness of the bender, and the morph is polarised in the thickness direction, nominally along the axis of the helix; and wherein electrically-conductive electrodes are deposited along the length of the bender on both of the largest surface area sides of the bender, on either side of the thickness direction, and are drivable by an electrical signal so as to cause the helical bender to exhibit a dimensional change in the axial direction when so driven.
3. A bender as claimed in either of Claims 1 and 2, wherein the piezoelectric material forming the bender is a lead zirconium titanate (PZT) ceramic.
4. A bender as claimed in any of Claims 1 to 3 and substantially as described hereinbefore.
5. A method of constructing a bender as claimed in any of Claims 1 to 4, in which two (or more) layers of plasticized piezoelectric material are co-extruded to form a unimorph, bimorph or multimorph.
6. A method as claimed in Claim 5, in which the co-extrusion is effected through a rectangular aperture nozzle of exit dimensions w x t and so arranged internally that extrudate issues from the exit aperture at a rate which is a function of position across the 'W' dimension of the aperture, the effect of this being that upon so exiting the extrudate "curls", and forms itself into a circle or helix if so coerced by means of an external cylindrical former of diameter "d" and winding arrangement, 5 with inner diameter d and outer diameter d+2w.
7. A method as claimed in either of Claims 5 and 6, in which the separate layers are loaded with more or less potentially conductive material active layers with a small proportion of material and conductive inactive layers with somewhat more 10 material.
8. A method as claimed mi any of Claims 5 to 7, in which the wound two- or multilayer extrudate is sintered on the former, and then surface electrodes are provided by sputtering on any external active layers.
13
9. A method as claimed in any of Claims 5 to 8 and substantially as described hereinbefore.
10. A bender made by a process as claimed in any of Claims 5 to 9.
GB0124970A 1997-09-05 1998-09-04 Piezoelectric device Expired - Fee Related GB2365205B (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
GBGB9718785.0A GB9718785D0 (en) 1997-09-05 1997-09-05 Electromechanical transducer
GBGB9805053.7A GB9805053D0 (en) 1998-03-11 1998-03-11 Improvements in actuators
GBGB9805735.9A GB9805735D0 (en) 1998-03-19 1998-03-19 Improvements in linear actuators
GB9819304A GB2329514B (en) 1997-09-05 1998-09-04 Aerogels, piezoelectric devices and uses therefor

Publications (3)

Publication Number Publication Date
GB0124970D0 GB0124970D0 (en) 2001-12-05
GB2365205A true GB2365205A (en) 2002-02-13
GB2365205B GB2365205B (en) 2002-04-03

Family

ID=27451695

Family Applications (4)

Application Number Title Priority Date Filing Date
GB0124964A Expired - Fee Related GB2365251B (en) 1997-09-05 1998-09-04 Moving magnet transducer
GB0124972A Expired - Fee Related GB2364965B (en) 1997-09-05 1998-09-04 Manufacture of piezoelectric print head
GB0124978A Expired - Lifetime GB2365206B (en) 1997-09-05 1998-09-04 Piezoelectric driver device with integral sensing layer
GB0124970A Expired - Fee Related GB2365205B (en) 1997-09-05 1998-09-04 Piezoelectric device

Family Applications Before (3)

Application Number Title Priority Date Filing Date
GB0124964A Expired - Fee Related GB2365251B (en) 1997-09-05 1998-09-04 Moving magnet transducer
GB0124972A Expired - Fee Related GB2364965B (en) 1997-09-05 1998-09-04 Manufacture of piezoelectric print head
GB0124978A Expired - Lifetime GB2365206B (en) 1997-09-05 1998-09-04 Piezoelectric driver device with integral sensing layer

Country Status (1)

Country Link
GB (4) GB2365251B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006123104A2 (en) * 2005-05-16 2006-11-23 1...Limited Curved electro-active actuator
CN104600190A (en) * 2014-12-25 2015-05-06 镇江丰成民用联网设备科技有限公司 Novel piezoelectric composite structure

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003090338A2 (en) * 2002-04-22 2003-10-30 Elliptec Resonant Actuator Ag Piezo motor
US7368853B2 (en) 2002-04-22 2008-05-06 Elliptec Resonant Actuator Aktiengesellschaft Piezoelectric motors and methods for the production and operation thereof
DE102005024192A1 (en) * 2005-05-25 2006-11-30 Siemens Ag Piezoelectric bending transducer with sensor element for detecting a deflection of the bending transducer, method for detecting the deflection of the bending transducer and use of the detected deflection
FR2951014B1 (en) * 2009-10-06 2011-11-25 Commissariat Energie Atomique PIEZOELECTRIC ACTUATION STRUCTURE COMPRISING AN INTEGRATED PIEZORESISTIVE STRAIN GAUGE AND METHOD FOR PRODUCING THE SAME
CN110297231B (en) * 2019-05-10 2021-06-22 中国船舶重工集团公司第七一五研究所 Broadband transmitting-receiving split transducer array

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05110156A (en) * 1991-10-21 1993-04-30 Nec Corp Lamination piezoelectric effect element
WO1998034434A1 (en) * 1997-02-04 1998-08-06 Jingjiang Bi Piezoelectric spring element

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB758631A (en) * 1952-01-31 1956-10-10 Nat Res Dev Improvements in and relating to ultrasonic oscillators and vibratory tools
JPS50110156A (en) * 1974-02-08 1975-08-29
US4868447A (en) * 1987-09-11 1989-09-19 Cornell Research Foundation, Inc. Piezoelectric polymer laminates for torsional and bending modal control
JPH04353463A (en) * 1991-05-31 1992-12-08 Brother Ind Ltd Manufacture of piezoelectric element for pulse droplet bonding apparatus
JP3006193B2 (en) * 1991-08-26 2000-02-07 ブラザー工業株式会社 Method for manufacturing piezoelectric element for inkjet printer head
GB9215254D0 (en) * 1992-07-17 1992-09-02 Cookson Group Plc Ceramic deflection device
US5485053A (en) * 1993-10-15 1996-01-16 Univ America Catholic Method and device for active constrained layer damping for vibration and sound control
US5748758A (en) * 1996-01-25 1998-05-05 Menasco, Jr.; Lawrence C. Acoustic audio transducer with aerogel diaphragm

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05110156A (en) * 1991-10-21 1993-04-30 Nec Corp Lamination piezoelectric effect element
WO1998034434A1 (en) * 1997-02-04 1998-08-06 Jingjiang Bi Piezoelectric spring element

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006123104A2 (en) * 2005-05-16 2006-11-23 1...Limited Curved electro-active actuator
WO2006123104A3 (en) * 2005-05-16 2007-01-25 1 Ltd Curved electro-active actuator
CN104600190A (en) * 2014-12-25 2015-05-06 镇江丰成民用联网设备科技有限公司 Novel piezoelectric composite structure

Also Published As

Publication number Publication date
GB2364965A (en) 2002-02-13
GB0124964D0 (en) 2001-12-05
GB2365206A (en) 2002-02-13
GB0124972D0 (en) 2001-12-05
GB2365251A (en) 2002-02-13
GB0124978D0 (en) 2001-12-05
GB2365205B (en) 2002-04-03
GB2364965B (en) 2002-04-03
GB2365206B (en) 2002-04-03
GB0124970D0 (en) 2001-12-05
GB2365251B (en) 2002-04-03

Similar Documents

Publication Publication Date Title
CN100375307C (en) Electro-active device
US6093995A (en) Hybrid motor
EP0867043B1 (en) Metal-electroactive ceramic composite transducers
US6677034B1 (en) Aerogels, piezoelectric devices, and uses therefor
US7068930B2 (en) Camera lens positioning using a electro-active device
US6291928B1 (en) High bandwidth, large stroke actuator
GB2365205A (en) Helical piezoelectric deice
US7161279B2 (en) Curved electro-active actuators
US20040135475A1 (en) Actuator and method of manufacturing a strain element
JP2005507323A5 (en)
GB2375884A (en) Helical electro-active devices
KR101653826B1 (en) Ultrasonic motor and method for manufacturing the ultrasonic motor
Dogan et al. Solid-state ceramic actuator designs
WO2003063262A2 (en) Curved electro-active actuators
JP2000174353A (en) Helical piezoelectric-crystal element and its manufacture
WO2004095596A1 (en) Electro-active device
KR100686774B1 (en) Electro-active devices
Dog̃an* et al. Piezoelectric actuator designs
WO2002017408A1 (en) Electro-active rotary devices
JPH06141568A (en) Electrostatic actuator and inching worm employing it
JPH0964431A (en) Bimorph-type actuator
JPH03273882A (en) Direct-acting driver
GB2376724A (en) Pumps using an electro-active device
JPS63262588A (en) Linear actuator using piezoelectric-electrostrictive element
Höppener et al. NOVEL LOW VOLTAGE PIEZOACTUATORS FOR HIGH DISPLACEMENTS

Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20110904