WO1998034434A1 - Piezoelectric spring element - Google Patents

Piezoelectric spring element Download PDF

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Publication number
WO1998034434A1
WO1998034434A1 PCT/CN1998/000017 CN9800017W WO9834434A1 WO 1998034434 A1 WO1998034434 A1 WO 1998034434A1 CN 9800017 W CN9800017 W CN 9800017W WO 9834434 A1 WO9834434 A1 WO 9834434A1
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WIPO (PCT)
Prior art keywords
spring
piezoelectric
vibrator
present
thickness
Prior art date
Application number
PCT/CN1998/000017
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French (fr)
Chinese (zh)
Inventor
Jingjiang Bi
Bingli Jiao
Jinduo Zhang
Original Assignee
Jingjiang Bi
Bingli Jiao
Jinduo Zhang
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jingjiang Bi, Bingli Jiao, Jinduo Zhang filed Critical Jingjiang Bi
Priority to AU57471/98A priority Critical patent/AU5747198A/en
Publication of WO1998034434A1 publication Critical patent/WO1998034434A1/en

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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers

Definitions

  • the present invention relates to piezoelectric motor/electromechanical transducer devices. current technology
  • the piezoelectric vibrator generally has a certain structure composed of piezoelectric materials, and is used as the core component of the motor/electromechanical transducing device for motor/electromechanical energy conversion.
  • there are mainly two working modes that is, using the bending mode of the composite sheet and directly using the compression or shearing mode of the piezoelectric material.
  • a bi-stack vibrator is a typical example of a bending mode. Generally, the former has higher sensitivity, so it has been widely used.
  • the purpose of the present invention is to provide a piezoelectric electro-mechanical conversion vibrator, which can reduce its natural frequency without increasing its spatial span, and can be used as a sound receiving or emitting device. In addition, its electro-mechanical/ The electrode conversion efficiency is further improved.
  • the present invention proposes the following technical scheme: the monolayer containing the piezoelectric material layer
  • One or more layers of spring sheets are wound into a planar scroll spring shape, and the thickness direction of the spring sheets is substantially perpendicular to the forming plane of the planar crucible coil spring.
  • a single-layer or multi-layer spring sheet containing a piezoelectric material layer can be wound around an axis into a helical spring shape, and the thickness direction of the spring sheet is basically parallel to the axis direction .
  • a single-layer or multi-layer spring sheet containing a piezoelectric material layer can be wound around an axis into the shape of a tower spring, and the thickness direction of the spring sheet is substantially parallel to the axis direction.
  • the single-layer or multi-layer spring sheet containing the piezoelectric material layer is wound into a spring shape, a lower natural frequency can be obtained with a smaller space span.
  • the mechanical vibration direction of the piezoelectric spring vibrator formed in this way is substantially perpendicular to the forming plane of the spring or substantially parallel to the axis of the spring, the end surface of the spring can be directly used for the receiving or emitting surface of the sound, so it is suitable for sound reception or emission.
  • the sensitivity of the piezoelectric spring vibrator of the present invention is significantly improved.
  • 1A and 1B are respectively a side view and a top view of a planar scroll spring piezoelectric spring vibrator according to a first embodiment of the present invention.
  • FIGS. 2A and 2B are a side view and a top view, respectively, of a coil spring-shaped piezoelectric spring vibrator according to a second embodiment of the present invention.
  • 3A and 3B are a side view and a top view, respectively, of a tower spring-shaped piezoelectric spring vibrator according to a third embodiment of the present invention.
  • Fig. 4 is a schematic diagram showing a bending mode of a piezoelectric spring vibrator according to the present invention.
  • Fig. 5 is a schematic diagram showing torsional modes of the piezoelectric spring vibrator according to the present invention.
  • Fig. 6 is a graph showing a comparison of sensitivities in a bending mode and a torsional mode of a piezoelectric vibrator with a linear double-stack structure and a piezoelectric spring vibrator according to the present invention. The best way to practice the invention
  • a single-layer or multi-layer spring sheet containing a piezoelectric material layer with a width of w and a thickness of d is wound into the shape of a planar scroll spring, one end of the spring bar is fixed, and the other One end can be used as a sound receiving or emitting plane, and the vibration direction of the vibrator is basically perpendicular to the forming plane of the planar scroll spring, as shown by the arrow in Figure 1A.
  • Fig. 2A and 2B and Fig. 3 and 3B have respectively provided the schematic diagram of the piezoelectric spring vibrator of helical spring shape and tower spring shape according to the present invention, wherein the vibration direction of the vibrator is basically parallel to the axis of the spring, as shown in Fig. 2A and Indicated by the arrow in 3A.
  • the piezoelectric spring vibrator of the present invention is driven in a bending mode, as shown in FIG. 4 .
  • the spring sheet 1 is composed of two layers, at least one of which is a piezoelectric material layer, and the piezoelectric material is polarized along the direction X1 substantially parallel to the thickness d. Electrodes are respectively formed on the upper and lower surfaces of the spring piece 1, as shown in the shaded part in the figure, a voltage V is applied to the two electrodes, so as to realize the vibration of the end surface of the spring. On the contrary, when the end face of the spring vibrates, an electric signal can be obtained on the electrode lead due to the piezoelectric inverse effect.
  • the piezoelectric spring vibrator of the present invention is driven in a torsional mode, as shown in FIG. 5 .
  • the spring sheet is composed of a layer of piezoelectric material, and the piezoelectric material is polarized along the winding direction of the spring vibrator, that is, the x3 direction, and the electrodes on the upper surface of the spring sheet are divided into two independent electrodes in the width w direction, that is, the x2 direction 2 and 3, the electrodes on the lower surface of the spring piece are divided into two independent electrodes 2' and 3' in the direction of width w, that is, the direction of x2 , which correspond to electrodes 2 and 3 respectively, thus forming two electrode pairs.
  • a voltage V is applied on the electrode pair 2, 2 ′, while on the other electrode pair 3, V
  • V A voltage V of opposite polarity is applied on it, which causes the twisting of the spring leaf, resulting in the vibration of the spring end face.
  • the calculation results of the sensitivity of the piezoelectric spring vibrator according to the present invention under bending mode and torsional mode driving are shown in Fig. 6, wherein, as a comparison, the line shape with the same spatial span as the piezoelectric spring vibrator of the present invention is also shown The calculation results of the sensitivity of the double-stack piezoelectric vibrator.
  • the spatial span is defined as the maximum geometric dimension of the piezoelectric vibrator, where it is assumed that the detection pressure is uniformly distributed, one end of the piezoelectric spring vibrator of the present invention is fixed, and one end of the linear piezoelectric vibrator is fixed.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Luminescent Compositions (AREA)

Abstract

This invention discloses a piezoelectric spring element used for inter-converting the mechanical energy and electrical energy. One or more turns of the spring element, which comprises the layer of piezoelectric material, are put into the form of a flat spiral, or spirit, and can be drived in curved mode or twisted mode. This piezoelectric can reduce its natural frequency without increasing its space length, and is suitable for receiving and transmitting audio signals; and can also notably increase the sensitivity of the inter-converting of mechanical energy and electrical energy.

Description

压电弹簧振子 技术领域 Piezoelectric Spring Vibrator Technical Field
本发明涉及压电电机 /机电换能装置。 现有技术 The present invention relates to piezoelectric motor/electromechanical transducer devices. current technology
压电振子一般地由压电材料构成一定的结构，作为电机 /机电 换能装置的核心部件， 用于电机 /机电能量转换。 在现有技术中， 其工作模式主要有两种， 即利用复合片的弯曲模式和直接利用压 电材料的压缩或剪切模式。 双叠件振子是弯曲模式的典型例子。 一般地， 前者的灵敏度较高, 因此广泛地得到了应用。 The piezoelectric vibrator generally has a certain structure composed of piezoelectric materials, and is used as the core component of the motor/electromechanical transducing device for motor/electromechanical energy conversion. In the prior art, there are mainly two working modes, that is, using the bending mode of the composite sheet and directly using the compression or shearing mode of the piezoelectric material. A bi-stack vibrator is a typical example of a bending mode. Generally, the former has higher sensitivity, so it has been widely used.
在某些应用领域， 为了实现低频、 宽带情况下的高机电转换 效率， 振子应工作在其固有频率附近， 而在一般情况下振子的设 计频率越低其体积越大， 这对振子的加工和应用带来了困难。 美 国专利文献 US3781955描述了一种压电振子， 其包括含有压电 材料， 具有宽度和厚度的片状结构， 所述片状结构绕成螺旋状， 且所述的宽度方向垂直于其成形平面。 通过利用这样的结构， 可 在不增加振子空间跨度的同时实现其固有频率的降低。 但是， 这 种结构的缺点是： 其振动方向基本上是沿螺旋线的缠绕方向， 不 适合用作声的接收或发射器件。 发明内容 In some application fields, in order to achieve high electromechanical conversion efficiency in low frequency and broadband conditions, the vibrator should work near its natural frequency, and in general, the lower the design frequency of the vibrator, the larger its volume, which has a great impact on the processing and processing of the vibrator. Application presents difficulties. US patent document US3781955 describes a piezoelectric vibrator, which includes a sheet-like structure containing a piezoelectric material and having a width and a thickness, the sheet-like structure is wound in a helical shape, and the width direction is perpendicular to its forming plane. By using such a structure, the natural frequency can be reduced without increasing the space span of the vibrator. However, the disadvantage of this structure is that its vibration direction is basically along the winding direction of the helix, which is not suitable for use as a sound receiving or emitting device. Contents of the invention
本发明的目的是： 提供一种压电机电 /电机转换振子， 在不增 加其空间跨度的情况下可实现其固有频率的降低， 并且可适用作 声的接收或发射器件， 此外， 其机电 /电极转换效率得到进一步提 高。 The purpose of the present invention is to provide a piezoelectric electro-mechanical conversion vibrator, which can reduce its natural frequency without increasing its spatial span, and can be used as a sound receiving or emitting device. In addition, its electro-mechanical/ The electrode conversion efficiency is further improved.
为此， 本发明提出如下技术方案： 将含有压电材料层的单层 或多层弹簧片卷绕成平面蜗卷弹簧状， 且使弹簧片的厚度方向基 本上垂直于所述平面埚卷弹簧的成形平面。 For this reason, the present invention proposes the following technical scheme: the monolayer containing the piezoelectric material layer One or more layers of spring sheets are wound into a planar scroll spring shape, and the thickness direction of the spring sheets is substantially perpendicular to the forming plane of the planar crucible coil spring.
按照本发明的另一可选方案， 可将含有压电材料层的单层或 多层弹簧片绕一轴线卷绕成螺旋弹簧状， 且使弹簧片的厚度方向 基本上平行于所述轴线方向。 According to another alternative of the present invention, a single-layer or multi-layer spring sheet containing a piezoelectric material layer can be wound around an axis into a helical spring shape, and the thickness direction of the spring sheet is basically parallel to the axis direction .
按照本发明的又一可选方案， 可将含有压电材料层的单层或 多层弹簧片绕一轴线卷绕成塔簧的形状， 且使弹簧片的厚度方向 基本上平行于所述轴线方向。 According to another optional solution of the present invention, a single-layer or multi-layer spring sheet containing a piezoelectric material layer can be wound around an axis into the shape of a tower spring, and the thickness direction of the spring sheet is substantially parallel to the axis direction.
通过本发明的技术方案， 一方面， 由于含有压电材料层的单 层或多层弹簧片卷绕成弹簧状， ¾得可在较小空间跨度的情况下 得到较低的固有频率。 另一方面， 由于这样形成的压电弹簧振子 的机械振动方向基本上垂直于弹簧的成形平面或基本上平行于 弹簧的轴线， 弹簧的端面可直接用于声的接收或发射面， 所以适 用于声的接收或发射。 此外， 尤其在扭转驱动模式下， 本发明的 压电弹簧振子的灵敏度得以明显的提高。 附图的简要说明 Through the technical solution of the present invention, on the one hand, since the single-layer or multi-layer spring sheet containing the piezoelectric material layer is wound into a spring shape, a lower natural frequency can be obtained with a smaller space span. On the other hand, since the mechanical vibration direction of the piezoelectric spring vibrator formed in this way is substantially perpendicular to the forming plane of the spring or substantially parallel to the axis of the spring, the end surface of the spring can be directly used for the receiving or emitting surface of the sound, so it is suitable for sound reception or emission. In addition, especially in the torsional driving mode, the sensitivity of the piezoelectric spring vibrator of the present invention is significantly improved. Brief description of the drawings
图 1A和 1B分别为按照本发明的第一实施例的平面蜗卷弹 簧状压电彈簧振子的侧视图和俯视图。 1A and 1B are respectively a side view and a top view of a planar scroll spring piezoelectric spring vibrator according to a first embodiment of the present invention.
图 2A和 2B分别为按照本发明的第二实施例的螺旋弹簧状 压电弹簧振子的側视图和俯视图。 2A and 2B are a side view and a top view, respectively, of a coil spring-shaped piezoelectric spring vibrator according to a second embodiment of the present invention.
图 3A和 3B分别为按照本发明的第三实施例的塔簧状压电 弹簧振子的侧视图和俯视图。 3A and 3B are a side view and a top view, respectively, of a tower spring-shaped piezoelectric spring vibrator according to a third embodiment of the present invention.
图 4是表示按照本发明的压电弹簧振子的弯曲模式的示意 图。 Fig. 4 is a schematic diagram showing a bending mode of a piezoelectric spring vibrator according to the present invention.
图 5是表示按照本发明的压电弹簧振子的扭转模式的示意 图。 W Fig. 5 is a schematic diagram showing torsional modes of the piezoelectric spring vibrator according to the present invention. W
图 6是表示线型双叠片结构压电振子以及按照本发明的压电 弹簧振子在弯曲模式和扭转模式下的灵敏度的比较的曲线图。 实施发明的最佳方式 Fig. 6 is a graph showing a comparison of sensitivities in a bending mode and a torsional mode of a piezoelectric vibrator with a linear double-stack structure and a piezoelectric spring vibrator according to the present invention. The best way to practice the invention
下面结合附图详细说明本发明的优选实施方式。 Preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.
如图 1A和 1B所示， 宽度为 w、 厚度为 d的含有压电材料 层的单层或多层弹簧片卷绕成平面的蜗卷弹簧的形状， 将弹簧条 的一个端部固定， 另一端部可作为声的接收或发射平面， 振子振 动的方向基本上与平面蜗卷弹簧的成形平面垂直， 如图 1A中箭 头所示。 As shown in Figures 1A and 1B, a single-layer or multi-layer spring sheet containing a piezoelectric material layer with a width of w and a thickness of d is wound into the shape of a planar scroll spring, one end of the spring bar is fixed, and the other One end can be used as a sound receiving or emitting plane, and the vibration direction of the vibrator is basically perpendicular to the forming plane of the planar scroll spring, as shown by the arrow in Figure 1A.
图 2A和 2B及图 3和 3B分别给出了根据本发明的螺旋弹簧 状和塔簧状的压电弹簧振子的示意图， 其中振子的振动方向均基 本上平行于弹簧的轴线， 如图 2A和 3A中箭头所示。 Fig. 2A and 2B and Fig. 3 and 3B have respectively provided the schematic diagram of the piezoelectric spring vibrator of helical spring shape and tower spring shape according to the present invention, wherein the vibration direction of the vibrator is basically parallel to the axis of the spring, as shown in Fig. 2A and Indicated by the arrow in 3A.
根据本发明的一个优选实施方式， 本发明的压电弹簧振子以 弯曲模式被驱动， 如图 4所示。 这里， 弹簧片 1由两层构成， 其 中至少一层为压电材料层， 所述压电材料被沿基本上平行于厚度 d的方向 Xl方向被极化。弹簧片 1的上、下表面分别形成有电极， 如图中阴影部分所示， 在所述两电极上施加电压 V , 从而实现弹 簧端面的振动。 相反， 当弹簧的端面振动时， 由压电逆效应可在 所述电极引线上得到电信号。 According to a preferred embodiment of the present invention, the piezoelectric spring vibrator of the present invention is driven in a bending mode, as shown in FIG. 4 . Here, the spring sheet 1 is composed of two layers, at least one of which is a piezoelectric material layer, and the piezoelectric material is polarized along the direction X1 substantially parallel to the thickness d. Electrodes are respectively formed on the upper and lower surfaces of the spring piece 1, as shown in the shaded part in the figure, a voltage V is applied to the two electrodes, so as to realize the vibration of the end surface of the spring. On the contrary, when the end face of the spring vibrates, an electric signal can be obtained on the electrode lead due to the piezoelectric inverse effect.
根据本发明的另一个优选实施方式， 本发明的压电弹簧振子 以扭转模式被驱动， 如图 5所示。 这里， 弹簧片由一层压电材料 构成， 所述压电材料被沿弹簧振子的缠绕方向即 x3方向极化， 弹 簧片上表面的电极在宽度 w方向即 x2方向被分成两独立的电极 2 和 3 , 弹簧片下表面的电极在宽度 w方向即 x2方向被分成两独 立的电极 2 ' 和 3 ' , 分别对应于电极 2和 3 , 从而形成两电极 对。 在电极对 2、 2 ' 上施加电压 V , 而在另一电极对 3、 V 上施加极性相反的电压 V， 从而引起弹簧片的扭转， 导致弹簧 端面的振动。 According to another preferred embodiment of the present invention, the piezoelectric spring vibrator of the present invention is driven in a torsional mode, as shown in FIG. 5 . Here, the spring sheet is composed of a layer of piezoelectric material, and the piezoelectric material is polarized along the winding direction of the spring vibrator, that is, the x3 direction, and the electrodes on the upper surface of the spring sheet are divided into two independent electrodes in the width w direction, that is, the x2 direction 2 and 3, the electrodes on the lower surface of the spring piece are divided into two independent electrodes 2' and 3' in the direction of width w, that is, the direction of x2 , which correspond to electrodes 2 and 3 respectively, thus forming two electrode pairs. A voltage V is applied on the electrode pair 2, 2 ′, while on the other electrode pair 3, V A voltage V of opposite polarity is applied on it, which causes the twisting of the spring leaf, resulting in the vibration of the spring end face.
根据本发明的压电弹簧振子在弯曲模式和扭转模式驱动下 的灵敏度的计算结果示于图 6 , 其中， 作为比较， 也给出了具有 与本发明的压电彈簧振子同样空间跨度的线型双叠片压电振子 的灵敏度的计算结果。 这里， 空间跨度定义为压电振子的最大几 何尺寸， 其中假定探测压强为均匀分布， 本发明的压电弹簧振子 的一端固定， 线型压电振子的一端固定。 结果表明， 在相同空间 跨度下， 本发明的压电弹簧振子的灵敏度大于线型压电振子的灵 敏度， 而且， 当本发明的压电弹簧振子以扭转模式被驱动时， 其 灵敏度得以显著的增加。 The calculation results of the sensitivity of the piezoelectric spring vibrator according to the present invention under bending mode and torsional mode driving are shown in Fig. 6, wherein, as a comparison, the line shape with the same spatial span as the piezoelectric spring vibrator of the present invention is also shown The calculation results of the sensitivity of the double-stack piezoelectric vibrator. Here, the spatial span is defined as the maximum geometric dimension of the piezoelectric vibrator, where it is assumed that the detection pressure is uniformly distributed, one end of the piezoelectric spring vibrator of the present invention is fixed, and one end of the linear piezoelectric vibrator is fixed. The results show that, under the same space span, the sensitivity of the piezoelectric spring vibrator of the present invention is greater than that of the linear piezoelectric vibrator, and when the piezoelectric spring vibrator of the present invention is driven in a torsional mode, its sensitivity can be significantly increased .

Claims

权 利 要 求 Rights request
1. 一种用于电机 /机电转换的压电弹簧振子， 包括具有宽度 ( w )和厚度 (d)的包含有压电材料层的弹簧片， 其特征在于， 所述弹簧片被卷绕成平面蜗卷弹簧状，所述厚度 (d)方向基本上垂 直于所述平面蜗卷弹簧的成形平面。 1. A piezoelectric spring vibrator for motor/electromechanical conversion, comprising a spring piece with a width (w) and a thickness (d) containing a piezoelectric material layer, characterized in that the spring piece is wound into In the shape of a flat scroll spring, said thickness (d) direction is substantially perpendicular to the forming plane of said flat scroll spring.
2. 如权利要求 1所述的压电弾簧振子， 其特征在于， 所述弹簧 片被围绕一轴线卷绕成螺旋弹簧状，所述厚度 (d)方向基本上平行 于所述轴线。 2. The piezoelectric spring vibrator according to claim 1, wherein the spring piece is wound around an axis into a coil spring shape, and the thickness (d) direction is substantially parallel to the axis.
3. 如权利要求 1所述的压电弹簧振子， 其特征在于， 所述弹簧 片被围绕一轴线卷绕成塔簧状，所述厚度 (d)方向基本上平行于所 述轴线。 3. The piezoelectric spring vibrator according to claim 1, wherein the spring piece is wound around an axis into a tower spring shape, and the thickness (d) direction is substantially parallel to the axis.
4. 如权利要求 1至 3中任一项所述的压电弹簧振子， 其特征在 于， 所述弹簧片是多层的， 其中至少含有一层压电材料， 且压电 材料沿基本上平行于所述厚度 (d)方向极化。 4. The piezoelectric spring vibrator according to any one of claims 1 to 3, characterized in that, the spring piece is multi-layered, which contains at least one layer of piezoelectric material, and the piezoelectric material is substantially parallel to the Polarized in the thickness (d) direction.
5. 如权利要求 1至 3中任一项所述的压电弹簧振子， 其特征在 于， 压电材料沿基本上平行于所述弹簧片的缠绕方向的方向极 化》 5. The piezoelectric spring vibrator according to any one of claims 1 to 3, wherein the piezoelectric material is polarized in a direction substantially parallel to the winding direction of the spring piece.
PCT/CN1998/000017 1997-02-04 1998-01-27 Piezoelectric spring element WO1998034434A1 (en)

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AU57471/98A AU5747198A (en) 1997-02-04 1998-01-27 Piezoelectric spring element

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CN97201121.8 1997-02-04
CN97201121 1997-02-04
CN97221443U CN2369412Y (en) 1997-02-04 1997-07-22 Curved piezoelectric vibrator
CN97221443.7 1997-07-22

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US6833656B2 (en) 1999-12-21 2004-12-21 1 . . . Limited Electro active devices
US7068930B2 (en) 2001-06-20 2006-06-27 1...Limited Camera lens positioning using a electro-active device
US7069795B2 (en) 2001-06-20 2006-07-04 1...Limited Sensor using electro active curved helix and double helix

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CN110661450B (en) * 2019-09-23 2022-03-29 广西大学 Piezoelectric vibrator with non-linear differential geometric characteristics
WO2022006816A1 (en) * 2020-07-09 2022-01-13 诺思(天津)微系统有限责任公司 Mems piezoelectric loudspeaker

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US5452267A (en) * 1994-01-27 1995-09-19 Magnetrol International, Inc. Midrange ultrasonic transducer

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US4878207A (en) * 1986-11-07 1989-10-31 Plessey Australia Pty. Ltd. Composite sonar transducer for operation as a low frequency underwater acoustic source
US5452267A (en) * 1994-01-27 1995-09-19 Magnetrol International, Inc. Midrange ultrasonic transducer

Cited By (8)

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Publication number Priority date Publication date Assignee Title
GB2365205A (en) * 1997-09-05 2002-02-13 1 Ltd Helical piezoelectric deice
GB2365205B (en) * 1997-09-05 2002-04-03 1 Ltd Piezoelectric device
US6833656B2 (en) 1999-12-21 2004-12-21 1 . . . Limited Electro active devices
US7224813B2 (en) 1999-12-21 2007-05-29 1. . . Limited Loudspeaker using an electro-active device
GB2376796A (en) * 2001-06-20 2002-12-24 1 Ltd Motors and generators using a coiled-coil piezoelectric device
GB2376796B (en) * 2001-06-20 2004-12-15 1 Ltd Motors and generators using an electro-active device
US7068930B2 (en) 2001-06-20 2006-06-27 1...Limited Camera lens positioning using a electro-active device
US7069795B2 (en) 2001-06-20 2006-07-04 1...Limited Sensor using electro active curved helix and double helix

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AU5747198A (en) 1998-08-25

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