JPH05104432A - Wire supply method for wire saw - Google Patents

Abstract

PURPOSE:To provide a wire supply method for a wire saw by which a wire supply speed can be maintained at a low speed even if a workload is increased and groove machining of a multiple groove roller can be carried out easily and a wire reel can be made lightweight and failure processing of a work can be restrained. CONSTITUTION:In a wire supply method by which two or more wires 1 and 2 are wound round respective V groove groups of plural number of multiple groove rollers 7 in a multiparallel shape, a wire supply speed can be lowered by reducing an abrasion loss of the wires 1 and 2. Thereby, in the case where the wires 1 and 2 are put in reciprocating differential motion, a workload balance of the wires 1 and 2 between an outward route and a backward route can be improved, so that processing accuracy can be also improved significantly.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire feeding method of a wire saw for cutting a hard brittle material (work) such as a semiconductor ingot and ceramics using a traveling wire.

[0002]

2. Description of the Related Art Conventionally, one wire supplied from a supply side is wound around a plurality of multi-groove rollers in a multiple parallel arrangement and then moved to a recovery side, and the wire is reciprocally differentially moved. A wire saw designed to cut a work at a position between multi-groove rollers has already been proposed.

FIG. 11 shows a wire supply system of the above wire saw.
Shown in. In the figure, the wire saw is a reciprocating wire in which one wire 61 is wound around the two multi-groove rollers 62, 62 in parallel and in parallel, and the wire 61 is gradually moved from the supply-side reel 63 to the recovery-side reel 64. The work is cut by the wire portion 61a between the multi-groove rollers 62, 62 by giving a differential motion.

As a mechanism for absorbing tension and relaxation generated by the reciprocating motion of the wire 61, between the multi-groove roller 62 group and the supply-side reel 63, and between the multi-groove roller 62 group and the recovery-side reel 64. , Fixed pulleys 65, 65a for sequentially winding the wire 61; 66, 66a and moving pulleys 67, 67a;
68 and 68a are arranged, and the movable pulleys 67a and 6a are arranged.
8a is attached to the slide carriages 69 and 70, and the forward and reverse rotations of the drive motor 75 cause the slide carriages 69 and 70 of the dynamic pulley type double speed mechanism to reciprocate to move the fixed pulley 6
5a, 66a and the endless belts 72 spanning the movable pulleys 67a, 68a are synchronously driven in parallel with the wire 61, and the wire 61 is driven by the multi-groove roller 62.
The wire feeding motor 71 is rotated in one direction outside the group to gradually move to the collecting side while performing a reciprocal differential motion. Reference numeral 73 is a rotating member that supports the multi-groove rollers 62, 62, and 74 is a motor that causes the rotating member 73 to swing.

[0005]

However, the conventional wire supply system shown in FIG. 11 has the following drawbacks.

Since the work is sliced by one wire 61, if the work is increased by increasing the size of the work, the wear of the wire 61 accelerates and the wire 61 needs to be supplied from the supply side at a high speed. .. However, in the case where the wire portion 61a moving between the multi-groove rollers 62, 62 is gradually reciprocated differentially from the supply side to the recovery side, when the wire 61 is fed at high speed,
The work balance between the outward path (direction of arrow A) and the backward path (direction of arrow B) of a is unbalanced, the slice section of the work is not uniform, and the machining accuracy is reduced.

Since it is necessary to maintain the winding pitch of the wire portions 61a wound in a multiple parallel fashion around the outer circumferences of the multi-groove rollers 62, 62 with high precision, the V-groove group of the resin multi-groove roller 62 is formed into the groove. It is performed using a checkered tool (genuine tool) with the same dimensions as the processing width. However, when the grooving width of the multi-groove roller 62 increases due to the increase in the size of the work, the checker tool also becomes longer, the cutting load resistance of the machine tool such as the lathe that is the grooving machine becomes large, and the special lathe etc. Is required.

On the other hand, if a long chaser bite is used to divide the long multi-groove roller 62 into a plurality of blocks, a groove pitch circle between the blocks is likely to have a step. Due to this, an error occurs in the winding pitch circle of one wire 61, and the tension varies. As a result, cutting and rolling of the wire are caused,
Machining accuracy is impaired.

Further, as the work amount increases, the wire 61
Therefore, it is necessary to increase the amount of wire by increasing the size of the supply-side reel 63 and the recovery-side reel 64. That is, when the work amount is doubled, the wire amount is also doubled, the weight of the reels 63 and 64 is increased, and
A great deal of labor is required to carry the 64 and attach it to the machine body.

Further, during the cutting process, the wire 61 is temporarily
When is cut, the entire work is destroyed. That is, even if the cutting process is restarted with a new wire, a step remains on the cut surface, and such a step becomes a fatal defect in accuracy.

As described above, in the conventional wire feeding system, as the amount of work increases, the problem of high-speed feeding of the wire is caused, the grooving of the multi-groove roller becomes difficult, and the weight of the reel is increased. Further, there is a drawback that defective machining of the work increases.

The present invention has been made in order to solve the above-mentioned conventional problems. Even if the work amount increases, the wire feeding speed can be maintained at a low speed, and the grooving of the multi-groove roller can be facilitated. An object of the present invention is to provide a wire supply method capable of keeping the wire reel lightweight and suppressing defective machining of a work.

[0013]

SUMMARY OF THE INVENTION In order to solve the above problems, the present invention has a structure in which wires are wound in parallel in parallel on the outer sides of a plurality of multi-groove rollers and the multi-groove roller group is unidirectionally or positively wound. In the wire feeding method, the wire is moved from the feeding side to the collecting side through the multi-groove roller group by rotating in the reverse direction, and the work is cut by the wire portion moving between the multi-groove rollers. One or more wires and a multi-groove roller in which a plurality of V groove groups for winding one wire in a multiple parallel manner are provided according to the number of wires are prepared, and the two or more wires are set in the plurality of sets. The V-groove group is individually wound and guided to the recovery side.

[0014]

According to the present invention, two or more wires are supplied, and a plurality of groups of V-grooves for winding one wire around the outer circumference of the multi-groove roller are provided for each wire. Since the wire is individually wound around a plurality of sets of V-groove groups, the wear amount of the wire is halved as compared with the conventional method using one wire even if the work amount increases due to the size increase of the work. Therefore, it is not necessary to speed up the wire supply. Therefore, even when the wire is reciprocally differentially moved, the work balance between the forward path and the return path of the wire is improved.

Further, since a plurality of sets of V-grooves of the multi-groove roller are provided corresponding to each wire, even if the multi-groove roller becomes long due to the increase in size of the work, a plurality of sets are provided by the short-sized chaser tool. V-groove group can be grooved separately for each block. In this case, even if there is a step in the groove pitch circle between each set, separate wires are wound around the V groove groups of each set, so there is no risk of fluctuations in the wire tension. Therefore, the wire is neither cut nor rolled.

Moreover, each wire reel that supplies and recovers two or more wires by supplying two or more wires
Even if the number of work pieces increases, the weight of each reel does not increase even if the amount of work increases, and the reels can be easily transported and set.

Further, even if one wire is cut, the cutting work can be continued with the remaining wires, so that the whole work is not sunk, only the part corresponding to the cut wire is sunk, and therefore the work is It is possible to prevent the dispersion of processing defects.

[0018]

Embodiments of the present invention will be described below with reference to the accompanying drawings.

Referring to FIG. 1, in the wire feeding system according to the present invention, two wires 1 and 2 are wound in parallel in parallel on the outer side of a group of multi-groove rollers 7, and each multi-groove roller 7 is rotated forward and backward. By doing so, the wires 1 and 2 are gradually moved to the collecting side while reciprocating differentially moving between the multi-groove rollers 7 and 7, and the work is cut by the moving wire portions 1a and 2a. The wire saw employed is basically composed of a wire winding mechanism and a wire driving mechanism.

First, the wire winding mechanism will be described with reference to FIG. 2. A front row roller group and a rear row roller group are arranged corresponding to the pair of front and rear supply side reels 3, 4 and recovery side reels 5, 6. Has been done. That is, the first wire 1 pulled out from the supply-side reel 3 in the front row passes through the intermediate roller 10 and the dancer roller 11 in the front row roller group, and is successively wound on the constant pulley 12 and the dynamic pulley 13 of the dynamic pulley type double speed mechanism 30. After that, the multi-groove rollers 7 are wound around the outer front half portions in a multiple parallel manner, and further wound around the movable pulley 14 and the constant pulley 15 of the movable pulley type speed doubling mechanism 31 in order, and the intermediate portion with the dancer roller 16 It is wound around the collection side reel 5 in the front row via the roller 17.

The second wire 2 pulled out from the supply side reel 4 in the rear row also has the same winding structure as the first wire 1, and the intermediate roller 10 in the rear row roller group.
a, dancer roller 11a, fixed pulley 12a, and moving pulley 13
It is wound around the outer rear half of the three multi-groove rollers 7 in a multiple parallel manner via a, and wound around the recovery side reel 6 in the rear row via the moving pulley 14a, the constant pulley 15a, the dancer roller 16a and the intermediate roller 17a. Has been taken.

As shown in FIG. 9A, the winding method of the wires 1 and 2 around the multi-groove roller group 7 is a V-groove for winding the first wire 1 around the front half portion 7a of each multi-groove roller 7. V-groove group V2 in which group V1 is formed and second wire 2 is wound around rear half portion 7b
Are formed, and both wires 1 and 2 are wound in a multiple parallel fashion at equal pitches. Corresponding to the winding method of the wires 1 and 2, the supply side reel 3, 3 is shown in FIG.
4 wire winding state is shown.

On the other hand, immediately below the wire portions 1a and 2a which move the multi-groove roller 7 group, as shown in FIG. 1, a mounting table 32 for the work W is arranged to move up and down,
A constant tension is applied to the supply side and the recovery side of each wire 1, 2 by weights 18, 18a; 19, 19a suspended from the dancer rollers 11, 11a; 16, 16a, respectively. In addition, in order to apply a constant tension to the wires 1 and 2, an electric slip clutch may be used instead of the weight.

Next, the wire drive mechanism will be explained. As shown in FIG. 2, the moving pulley type double speed mechanism 30 located on the supply side of the wires 1 and 2 has a plurality of parallel wires in parallel at a fixed position. The fixed pulleys 12, 12a for the wire and the constant pulley 12 for the endless belt are provided at both ends of the arranged upper shaft 33.
b, and a plurality of lower shafts 34 are horizontally attached to a slide carriage 37 arranged so as to be vertically movable at the lower part of the constant pulleys 12, 12a, 12b group, and wires are attached to both ends of each shaft 34. Movable pulleys 13 and 13a for an endless belt and a movable pulley 13b for an endless belt are attached.

On the other hand, the movable pulley type double speed mechanism 31 located on the recovery side of each wire 1 and 2 also has the same structure as the above double speed mechanism 30, and the constant pulley 15 for wire is provided at both ends of the plurality of upper shafts 35. , 15a and a fixed pulley 15b for the endless belt are attached to the lower shaft 36 of the slide carriage 38 arranged so as to be vertically movable at the lower part of the fixed pulleys 15, 15a, 15b group. And a movable pulley 14b for an endless belt is attached.

The double-moving pulley double speed mechanisms 30 and 31 are arranged so as to be balanced and balanced on the supply side and the recovery side of the wires 1 and 2, and the endless belt 40 is attached to each double speed mechanism 30 and 31. The fixed pulleys 12b, 1 in the last row are driven so as to be driven in the same locus and in parallel in synchronism with the operation of both wires 1, 2.
5b and the pulleys 13b and 14b are successively laid.

As the endless belt 40, for example, a wire belt, a plastic belt or a composite belt can be used singly or in combination, and these belts having a required length are easy and inexpensive. The fixed pulleys 12b and 15b and the movable pulley 1
The pulley wheels used for 3b, 14b, etc. have a simple structure and thus are inexpensive, and the belt has less noise and vibration when traveling at high speeds, and even if the diameter of the pulley wheel is reduced, uneven rotation does not occur. Therefore, it is possible to prevent tension breakage from being applied to the wires 1 and 2 that are being driven synchronously to induce a wire breakage accident.

As shown in FIG. 1, each of the slide carriages 37 and 38 of the moving pulley type double speed mechanisms 30 and 31 has an upper connecting rope 23 which is wound around upper fixed pulleys 21 and 21.
And a lower connecting rope 24 hung around the lower fixed pulleys 22 and 22 are connected endlessly by applying a constant tension,
Both slide carriages 37 and 38 are configured to perform linear reciprocating motions in opposite vertical directions so that tension and relaxation alternately generated on the supply side and the recovery side of both wires 1 and 2 can be absorbed.

It should be noted that the upper limit detection switch S1 and the lower limit detection switch S2 are within the vertical movement range of the slide carriage 37.
Is arranged, and switching control between forward rotation and reverse rotation of the drive motor 39 is performed.

Further, the double-moving pulley type double speed mechanism 30, 3 is used.
A rotating member 41 for mounting the multi-groove roller group 7 is arranged at an intermediate position of 1. As shown in FIG. 4, the rotating member 41 is supported so as to be rotatable around a horizontal central shaft 42, and the gear 43 of the central shaft 42 has horizontal gears 44, 45 (other Gears 46, 4 (one not shown)
7, and the central shaft 42 has multi-groove rollers 7, 7,
A roller drive motor 39 for rotating the 7 forward and backward is directly connected. Therefore, the motor 39 rotates the multi-groove roller group 7 in the forward and reverse directions, and the wires 1, 1 wound around the roller group are rotated.
2 is given a reciprocating motion.

The rotating member 41, as shown in FIG.
A worm wheel 48 of a forward / reverse drive motor 49 meshes with a worm wheel 48 provided on the outer peripheral surface of the worm wheel 48, and a reciprocating motion of a predetermined angle is applied to the worm wheel 48.
2a swings around the central axis 42 of the rotating member 41, and cuts the work W by swinging circular motion.

The forward / reverse driving mechanism of the rotating member 41 may be driven by the forward / reverse driving motor 53 using the pulley 51 and the belt 52 shown in FIG. 1. In either case, the rotating member 41 is It can be swung by the forward / reverse drive motor 53 (49).

Further, as shown in FIG. 3, a winder roller 53 and a winder roller movement control shaft 54 for axially moving the roller 53 are provided immediately above the rotating member 41. As shown by the chain double-dashed line, both wires 1, drawn out through the winder rollers 53, 53,
2 is exposed to the outer circumference of the multi-groove roller 7 group, and the continuous rotation of the rotating member 41 and the movement of the winder roller movement control shaft 54 in the arrow direction P cause the V-groove groups V1 and V2 of the multi-groove roller 7 group.
Both wires 1 and 2 can be wound at the same time, and conventionally, the winding work was done at another place, but now it can be wound at the setting position, automation of the winding work and preparatory work before processing The time can be shortened. In addition,
In FIG. 4, in order to facilitate understanding of the drawing, the winder roller 53 and its control shaft 54 are shown in parallel with the multi-groove roller group 7.

On the other hand, the upper running portion of the endless belt 40 shown in FIG. 2 is wound around the pulley 55 of the wire supply / recovery motor 45, and this motor 45 is as shown in FIG.
The wire supplying reels 3, 4 and the wire collecting reels 5, 6 are rotationally driven through an endless reel driving chain 58. One direction rotation of the motor 45 and the wire reciprocating motion described above are performed. The forward and reverse rotation of the motor 39 causes the wires 1 and 2 to be gradually moved from the supply side to the recovery side in a reciprocating differential motion.

Supply side and recovery side reels 3, 4;
The motors 5 and 6 may be independently driven by different motors.

The wire saw adopting the wire supply system of the present invention has the above-mentioned structure. As shown in FIG. 2, the motor 45 rotates the endless belt 40 and the wire supply side reels 3, 4 and the collecting side. By the rotation of the reels 5 and 6, the two wires 1 and 2 are continuously moved from the supply side to the recovery side, and at the same time, the multi-groove roller 7 group is driven by the drive motor 39 to rotate forward and backward. Reciprocating differential motions are applied to the first and second motors 1 and 2, and the endless belt 40 wound around the pulley 39a of the drive motor 39 is synchronized with the wires 1 and 2 and has the same locus synchronous motion.
Work W (FIG. 1) on wire portions 1a and 2a that move the group
Is pressed to supply a mixed solution of abrasive grains and lapping oil to both contact portions.

When cutting the work W, the motor 53 (or FIG.
The rotating member 41 is reciprocally rotated by the motor 49), and the wire portions 1a, 2 between the multi-groove rollers 7, 7 are rotated as shown in FIG.
Cutting is performed while rocking a. As a result, as shown in FIG. 5, the wire portions 1a, 2 are cut by the swing arc cutting.
The contact surface between a and the work W is close to a point contact, a concentrated load can be applied to the contact portion, and the allowable additional tension of the wires 1 and 2 can be effectively utilized to the maximum. 59 is an abrasive grain,
It is a chip.

Moreover, since the wire portions 1a and 2a have a combined motion of swinging and reciprocating differential, as shown in FIG. 5 and FIG.
Intrusion and discharge of 9 are positively performed, and the slice width t of the work W becomes nearly uniform.

Further, the swinging arc motion of the wire portions 1a and 2a has a great effect on the active penetration of abrasive grains and chips 59, discharge, and effective use of the additional tension for imparting rigidity to the wire. This is an essential element for increasing the processing speed and improving the cutting surface processing accuracy.

Further, the swinging arc motion of the wire portions 1a and 2a makes it possible to rationally and simultaneously proceed with the lapping of the side wall surface of the workpiece immediately after slicing, thereby further improving the machining accuracy, As a result, shortening and restoration of the next process can be omitted.

On the other hand, as shown in FIG. 7, when the work W is cut without swinging the wire portions 1a and 2a, the contact surfaces of the wire portions 1a and 2a with respect to the work W become line contact. It is inevitable that the supply of the mixed liquid of the abrasive grains 59 and the lapping oil to the contact surface and the escape of the cutting chips are poor, and the resistance to the wire portions 1a and 2a is increased, so that the cutting effect is lowered.

Further, when the wire feeding speed of the reciprocating differential motion is made high, the work balance of the forward path and the backward path is unbalanced, and as shown in FIG. 8, the wire portions 1a, 2a are processed in a one-way running method. , The slicing width t ′ of the workpiece is high because the lapping efficiency is high on the wire entrance side where the amount of abrasive grains drawn is large.
Results in a non-uniform taper-shaped cross section, resulting in a reduction in processing accuracy.

On the other hand, the wires 1 and 2 are alternately tensioned and loosened on the supply side and the recovery side during the reciprocating differential motion, but the endless belt 40 shown in FIG. Due to the loci and synchronous movements, the movable pulley type double speed mechanisms 30 and 31 on both sides of the slide carriage 37 or 38 on the side where the tension of the wires 1 and 2 is raised move up, and the slide carriage 38 or 38 on the side where the tension is relaxed or 37 descends, and due to such linear reciprocating motions of the two slide carriages 37 and 38 which are alternately generated vertically, the alternating tension and relaxation generated on the supply side and the recovery side of the wires 1 and 2 are absorbed.

As a result, the wire feeding method according to the present invention has the following advantages.

In the market of slicing raw materials with a large diameter, simultaneous mass slicing, and ultra-precise slicing with less influence of wire wear, the conventional "single wire feeding method" is used to satisfy the requirements. Due to the increase of the work amount and the limitation of the wire wear, it is inevitable to functionally increase the wire feeding speed. However, in the "plural wire feeding method" according to the present invention, the two reciprocating rollers running between the multi-groove rollers 7, By performing a reciprocating differential motion in which the wires 1 and 2 are gradually moved from the supply side to the recovery side, it is possible to reduce the wire supply speed by dispersing the slicing work for a plurality of wires, and to move the wire forward and backward. The work load balance is maintained, and the advantage of the "reciprocating wire saw" is that the wire wrapping on the inlet and outlet sides is ideally alternated and averaged. It allows retraction of the abrasive grains with both sides becomes equal, the wrapping efficiency is averaged.
Therefore, in the conventional method, as shown in FIG. 8, the machined groove width t'has a tapered slice cross section, whereas in the method according to the present invention, the wire inlet side and the outlet side of the machined groove width t are as shown in FIG.
Each is evenly lapped, and the accuracy of slice section processing can be improved.

In the processing of the V-groove groups V1 and V2 of the resin multi-groove roller 7 shown in FIG. 9A, the V-groove processing width increases with the mass slicing, but each V-groove group V1, V2
Since the wires 1 and 2 are supplied for each, "divided grooving for each block" can be performed by using a short-sized checker tool. Therefore, it is easy to make a checkered bite,
The cost is low, the cutting load resistance of the machine tool such as a lathe, which is a grooving machine, is small, and the machining is easy, so grooving can be performed with a general-purpose machine.

Generally, the V-groove processing chaser bite of the resin multi-groove roller 7 is manufactured by correcting the V-groove pitch over the entire length of the V-groove cutting edge portion in consideration of wear of the wire during slicing.

That is, at the winding start position and winding end position of the V groove group V1 or V2 of the multi-groove roller for winding one wire shown in FIG. 9A, the wear of the wire is estimated in advance,
The groove pitch is set to be gradually smaller. In the wire supply system according to the present invention, since two V-groove groups V1 and V2 are formed for each of the two wires 1 and 2, each V-groove group can be grooved independently by a short chase tool. It will be possible. Therefore, since it is possible to use an existing short-sized chase bite used for another model under the same slice processing conditions, it is not necessary to fabricate a long-sized chase bite.

By the way, when performing the "grooving processing for each V-groove group" of the multi-groove roller by the above-mentioned short chase tool,
A processing error is likely to occur in the V-groove reference pitch circle of the multi-groove roller for each divided portion.
Since the groove groups V1 and V2 are separately wound, there is no influence due to processing error and there is no fluctuation in the tension of the wound wire. Simultaneous mass slicing improved as above is possible.

Moreover, the increase in the diameter of the workpiece (work) and the increase in the work amount due to the simultaneous mass slicing means an increase in the consumption of the supply wire, which leads to an increase in the stored and supplied wire storage dose. Although it is unavoidable, since a plurality of wires can be distributed and wound around a plurality of wire reels by supplying a plurality of wires, as in “wire reel individual winding” in FIG. It is possible to reduce the weight, and it is easy to carry out indirect work such as carrying the wire reel and attaching it to the machine body, and no special mechanical carrying or attaching means is required.

Further, even if a wire break accident occurs unexpectedly during slicing, by winding a plurality of wires separately for each of the V-groove groups V1 and V2, it is possible to prevent a work failure due to wire breakage from spreading to the entire sliced workpiece. However, it is possible to limit only the defective machining of the broken block, and it is possible to disperse the defective machining of the expensive workpiece.

Although the number of wires is two in the above embodiment, it may be three or more. In this case, the number of wire reels and the number of V groove groups of the multi-groove roller 7 may be increased according to the number of wires.

Further, in the above embodiment, the wire is shown in FIG.
As shown in FIG. 10A, the multi-grooved roller is separately wound and shown in FIG.
Although the individual winding method for the wire reel shown in (a) is adopted, parallel winding as shown in FIG. 9 (b) or divided parallel winding as shown in FIG. 9 (c) may be performed, and further, FIG. 10 (b). As shown in FIG. 10C, an individual multiple winding method may be adopted. However, the parallel winding method of FIG. 9 (b) is disadvantageous as compared with the winding methods of FIGS. 9 (a) and 9 (c) in that it is not possible to perform grooving with a short chase bite.

The wire supply system according to the present invention is
It can be widely used not only in "a wire saw that reciprocates a wire in a differential motion" but also in a "one-way traveling wire saw".

[0055]

As described above, according to the present invention, it is not necessary to supply the wire at a high speed even if the work amount increases due to the increase in the size of the work. The work balance of the forward and return paths of the wire is improved, and the machining accuracy is improved. In addition, V of the multi-groove roller
Since the groove group is provided corresponding to each wire, each V groove group can be separately cut with a short length chaser tool, the load resistance of the machine tool such as a lathe can be reduced, and groove processing can be performed with a general-purpose machine. In addition, even if there is a processing step in the groove pitch circle between the adjacent V groove groups, the wire is separately wound around each V groove group, so that the wire breaks or rolls as in the conventional case. Absent. Further, it is possible to reduce the weight of the stored wire reel and to suppress the dispersion of work defects due to wire cutting as much as possible.

[Brief description of drawings]

FIG. 1 is a front view of a wire saw adopting a wire supply system according to the present invention.

FIG. 2 is a perspective view of the wire saw shown in FIG.

FIG. 3 is a front view of the vicinity of a rotating member showing the swing reciprocating motion of the wire.

FIG. 4 is a plan sectional view showing a driving mechanism of a multi-groove roller.

FIG. 5 is a vertical cross-sectional view showing a state in which a work is cut by a wire that makes an oscillating circular motion.

FIG. 6 is a plan cross-sectional view showing a state in which a work is cut by a wire that makes a reciprocating motion.

FIG. 7 is a vertical cross-sectional view showing a state in which a work is cut by a wire that moves horizontally in a straight line.

FIG. 8 is a plan sectional view showing a state in which a work is cut by a wire that makes a one-way running motion.

FIG. 9 shows a wire winding state on a multi-groove roller, (a)
The figure shows a divided winding method, (b) is a parallel winding method, and (c) is a divided parallel winding method.

FIG. 10 shows a wire winding state on a wire reel,
(A) individual winding method, (b) multiple winding method, (c)
Is a diagram showing an individual multiple winding method.

FIG. 11 is a perspective view of a wire saw adopting a conventional wire supply system.

[Explanation of symbols]

 1, 2 Wires 3, 4 Supply-side reels 5, 6 Recovery-side reels 7 Multi-groove rollers 41 Rotating members V1, V2 V-groove group W Work

Claims (1)

[Claims] 1. A wire is wound around a plurality of multi-groove rollers in a parallel multiple manner, and the multi-groove roller group is rotated in one direction or in forward and reverse directions to feed the wire from the supply side through the multi-groove roller group. In a wire feeding method in which a work is cut at a wire portion which is moved to a collecting side and moves between the multi-groove rollers, at least two wires and one wire are wound in multiple parallel V A multi-groove roller having a plurality of groove groups provided according to the number of wires is prepared, and the two or more wires are individually wound around the plurality of groups of V groove groups and guided to the collecting side. A method for supplying a wire to a wire saw.