JPH05101360A - Thin-film magnetic head slider and production thereof - Google Patents

Abstract

PURPOSE:To improve reliability by executing the integration of the thin-film magnetic head and a slider body formed of a nonmagnetic substrate by welding with middle melting glass to be executed simultaneously with magnetic gap welding of the magnetic head. CONSTITUTION:The nonmagnetic substrates 1 and magnetic films 2 are alternately superposed on each other by a high melting glass adhesive layer 3 to form a bar 10. The bar is vertically cut to form grooves 10a1 on the bar 10a. The two corresponding surfaces of the cut piece are polished and a gap material 6', such as SiO2, and a middle melting glass adhesive layer 7 are sputtered thereon. The bar 10a side is welded by the middle melting glass adhesive layer 12 previously provided on the nonmagnetic substrate 11 for the slider body simultaneously with the welding of the gap material 6'. Glass 8 is packed into a winding window at the time of forming a magnetic gap 6. The laminated bar is cut in a head unit and is worked to a slider shape. Since the molding glass of a low m. p. is not used, the reliability of the thin-film magnetic head slider is greatly improved.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin film magnetic head slider used in a magnetic disk memory device and a manufacturing method thereof.

[0002]

2. Description of the Related Art In recent years, a thin film magnetic head using a metal magnetic film having a high saturation magnetic flux density as a magnetic core has been developed in order to cope with higher density of magnetic recording.

FIG. 2 is a perspective view showing a schematic structure of a conventional thin film magnetic head. In the figure, 1 is a non-magnetic substrate,
It holds the metal magnetic film 2, and only this metal magnetic film 2 acts as a magnetic core. Therefore, the inductance of the magnetic head can be made smaller than that of the bulk type magnetic head,
It can be used in the high frequency band. Incidentally, 3 is a high melting point glass adhesive layer, which will be described later.

Further, since a material having a high saturation magnetic flux density such as a sendust alloy can be used for the metal magnetic film 2, the recording ability can be increased and high density recording can be performed. The metal magnetic film 2 has a large track width of the head, and when the film thickness is increased, a thin film of an insulating material such as silicon dioxide and a laminated body are formed to prevent eddy current loss.

FIG. 3 is a perspective view showing the structure of a magnetic head slider using the thin film magnetic head shown in FIG. The conventional magnetic head slider shown in FIG. 3 has a slit 4S formed in a slider body 4 made of a non-magnetic substrate as shown in FIG. A thin film magnetic head is mounted and molded into a composite type using low melting point mold glass 5. Incidentally, 6 is a magnetic gap, and 7 and 8 are a medium melting point glass adhesive layer and a bonding glass which will be described later with reference to FIG.

FIG. 4 is a process diagram for explaining a conventional method of manufacturing a thin film magnetic head. In the manufacture of this thin film magnetic head, first, as shown in (a), a nonmagnetic substrate 1 is sputtered with sendust or the like to form a metal magnetic layer 2, and a plurality of these are bonded by a high melting point glass adhesive layer 3 (b). As illustrated, they are adhered to each other to form a laminated bar block 9'wherein the non-magnetic substrate 1 and the metal magnetic film 2 are alternately laminated.

Next, the laminated bar block 9'is cut at a right angle to the longitudinal direction of the metal magnetic film 2 as indicated by a broken line, and the nonmagnetic substrate 1 and the metal magnetic film 2 shown in FIG. The laminated bar 9 is formed by laminating.

As shown in (d), the laminated bar 9 is further vertically cut to form cut pieces 9a and 9b. One cut piece,
In the figure, after forming the groove 9a1 for the winding window in the cut piece 9a, the corresponding both surfaces of these cut surfaces are precisely polished to form the magnetic gap body 6'of silicon dioxide or the like and the medium melting point glass adhesive layer 7. The magnetic gap 6 is formed by a sputtering method or the like as shown in FIG. 6E, butted together, and heated in a furnace to melt the middle melting point glass adhesive layer 7 to form the magnetic gap 6 as shown in FIG.

When forming the magnetic gap 6, the winding window is filled with a bonding glass 8 as a reinforcing material. The laminated bar 9 in which the magnetic gap 6 is formed has a structure in which thin film magnetic heads are continuously laminated, and the broken line portion of FIG. 7F is sliced to obtain a single thin film magnetic head as shown in FIG.

The thin film magnetic head formed as described above is
The thin film magnetic head slider is mounted on a slider body 4 (FIG. 3) made of a non-magnetic substrate in which an insertion gap of the thin film magnetic head chip is formed, and molded with a low melting point mold glass 5 to complete the manufacture of the thin film magnetic head slider.

[0011]

However, in the structure of the conventional thin film magnetic head slider and the manufacturing method thereof as described above, the glass welding step requires three times of low, medium and high, and the glass once welded is required. In order to prevent structural loosening, it is necessary to lower the working temperature of the welding glass in each step in the order of welding.

Therefore, the low melting point mold glass 5 must be made of a glass having an extremely low melting point. However, since the low melting point glass has low weather resistance, there is a serious problem in using it as a thin film magnetic head slider for a computer which requires high reliability.

In view of the above problems, it is an object of the present invention to provide a thin film magnetic head slider which can be manufactured without using a low melting point glass and a manufacturing method thereof.

[0014]

According to the present invention, a metal magnetic film sandwiched by a non-magnetic substrate is used as a magnetic core, and a magnetic gap,
And a thin film magnetic head in which a winding window is formed is joined to a slider body made of a non-magnetic substrate by a glass adhesive layer. In manufacturing the thin film magnetic head slider, the magnetic gap in the magnetic head is It is characterized in that the thin-film magnetic head and the non-magnetic substrate forming the slider body are bonded at the same time as glass welding for forming.

[0015]

According to the present invention, the glass bonding step is performed only twice, and it is not necessary to use low-reliability low-melting glass, so that the reliability of the thin film magnetic head slider is improved.

[0016]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a process chart of an essential part of an embodiment of the manufacturing method of the present invention. First, as shown in FIG. 1 (a), a non-magnetic substrate 1 and a metal magnetic film 2 are formed in a conventional manner. A laminated bar 10 is formed by alternately laminating with the high melting point glass adhesive layer 3, and the laminated bar 10 is vertically cut to separate into 10a and 10b, and one cut piece, 10a in the figure, is used for a winding window. Groove 1
After forming 0a1, the corresponding both sides of the cut piece are precisely polished to form the magnetic gap material 6'such as silicon dioxide and the medium melting point glass adhesive layer 7 by the sputtering method or the like.

Then, in the step of welding the magnetic gap material 6'according to the present invention as shown in (b), at the same time as the welding of the magnetic gap material 6 ', the non-magnetic substrate 11 for the slider body,
Medium melting point glass adhesive layer 12 provided by sputtering in advance
Thus, the laminated bar 10a side is welded.

As in the conventional case, when forming the magnetic gap 6, the winding window is filled with the reinforcing bonding glass 8. Through the above steps, the laminated bar material having a structure in which the thin film magnetic head is continuously bonded to the non-magnetic substrate 11 for the slider body is formed.

Next, as shown in (b), the laminated bar material is cut and separated for each thin film magnetic head unit as shown by the broken line, and the floating surface and the like are processed into a slider shape. The thin film magnetic head slider is completed.

According to the present invention, the thin film magnetic head is integrated with the slider body formed of the non-magnetic substrate by welding with the medium melting point glass which is performed at the same time as the magnetic gap welding in the magnetic head. By using the mold glass having the melting point, the molding process which has lowered the reliability is eliminated, and a highly reliable thin film magnetic head slider can be manufactured.

[0022]

As described above, the thin film magnetic head slider and the method of manufacturing the same according to the present invention do not use mold glass having a low melting point, so that the reliability of the thin film magnetic head slider is remarkably improved and the glass welding step is also one step. The process can be reduced.

[Brief description of drawings]

FIG. 1 is a process chart of a main part in an embodiment of a manufacturing method of the present invention.

FIG. 2 is a perspective view showing a schematic structure of a conventional thin film magnetic head.

FIG. 3 is a perspective view showing the structure of a conventional thin film magnetic head slider.

FIG. 4 is a process drawing for explaining a conventional method of manufacturing a thin film magnetic head.

[Explanation of symbols]

1, 11 ... Non-magnetic substrate, 2 ... Metal magnetic film, 3 ... High melting point glass adhesive layer, 4 ... Slider body, 6 ... Magnetic gap, 6 '... Magnetic gap material, 7, 12 ... Medium melting point glass adhesive layer, 8 … Bonding glass, 10… Laminated bar.

Claims (2)

[Claims] 1. A magnetic head having a metal magnetic film sandwiched between non-magnetic substrates as a magnetic core and having a magnetic gap and winding windows bonded to a slider body made of a non-magnetic substrate by a glass adhesive layer. A thin film magnetic head slider having the above structure. 2. A thin film magnetic head having a magnetic core made of a metal magnetic film held by a non-magnetic substrate and having a magnetic gap and a winding window formed on a slider body made of the non-magnetic substrate by a glass adhesive layer. In manufacturing a thin film magnetic head slider constructed by bonding, simultaneously with the glass welding for forming the magnetic gap in the magnetic head, the thin film magnetic head and the non-magnetic substrate forming the slider body are bonded together. And a method of manufacturing a thin film magnetic head slider.