JPH0499534U - - Google Patents
Info
- Publication number
- JPH0499534U JPH0499534U JP172591U JP172591U JPH0499534U JP H0499534 U JPH0499534 U JP H0499534U JP 172591 U JP172591 U JP 172591U JP 172591 U JP172591 U JP 172591U JP H0499534 U JPH0499534 U JP H0499534U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP172591U JP2539732Y2 (ja) | 1991-01-24 | 1991-01-24 | ウェーハ洗浄装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP172591U JP2539732Y2 (ja) | 1991-01-24 | 1991-01-24 | ウェーハ洗浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0499534U true JPH0499534U (enExample) | 1992-08-27 |
| JP2539732Y2 JP2539732Y2 (ja) | 1997-06-25 |
Family
ID=31729281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP172591U Expired - Lifetime JP2539732Y2 (ja) | 1991-01-24 | 1991-01-24 | ウェーハ洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2539732Y2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6891013B2 (ja) * | 2017-03-22 | 2021-06-18 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置およびノズル構造 |
-
1991
- 1991-01-24 JP JP172591U patent/JP2539732Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2539732Y2 (ja) | 1997-06-25 |