JPH0497752A - Detection of breakthrough of antidotal agent against poisonous exhaust gas - Google Patents
Detection of breakthrough of antidotal agent against poisonous exhaust gasInfo
- Publication number
- JPH0497752A JPH0497752A JP2216358A JP21635890A JPH0497752A JP H0497752 A JPH0497752 A JP H0497752A JP 2216358 A JP2216358 A JP 2216358A JP 21635890 A JP21635890 A JP 21635890A JP H0497752 A JPH0497752 A JP H0497752A
- Authority
- JP
- Japan
- Prior art keywords
- agent
- antidotal
- exhaust gas
- abatement
- breakthrough
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 49
- 230000002605 anti-dotal effect Effects 0.000 title abstract 13
- 231100000614 poison Toxicity 0.000 title abstract 3
- 230000007096 poisonous effect Effects 0.000 title abstract 3
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 103
- XTVVROIMIGLXTD-UHFFFAOYSA-N copper(II) nitrate Chemical compound [Cu+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O XTVVROIMIGLXTD-UHFFFAOYSA-N 0.000 claims abstract description 29
- 229910010276 inorganic hydride Inorganic materials 0.000 claims abstract description 7
- 239000007789 gas Substances 0.000 claims description 32
- 231100000331 toxic Toxicity 0.000 claims description 21
- 230000002588 toxic effect Effects 0.000 claims description 21
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 10
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 claims description 7
- 229910000073 phosphorus hydride Inorganic materials 0.000 claims description 5
- SPVXKVOXSXTJOY-UHFFFAOYSA-N selane Chemical compound [SeH2] SPVXKVOXSXTJOY-UHFFFAOYSA-N 0.000 claims description 4
- 229910000058 selane Inorganic materials 0.000 claims description 4
- -1 diborane Chemical compound 0.000 claims description 2
- 229910044991 metal oxide Inorganic materials 0.000 abstract description 5
- 150000004706 metal oxides Chemical class 0.000 abstract description 5
- 238000011144 upstream manufacturing Methods 0.000 abstract description 5
- BERDEBHAJNAUOM-UHFFFAOYSA-N copper(I) oxide Inorganic materials [Cu]O[Cu] BERDEBHAJNAUOM-UHFFFAOYSA-N 0.000 abstract description 2
- KRFJLUBVMFXRPN-UHFFFAOYSA-N cuprous oxide Chemical compound [O-2].[Cu+].[Cu+] KRFJLUBVMFXRPN-UHFFFAOYSA-N 0.000 abstract description 2
- 229940112669 cuprous oxide Drugs 0.000 abstract description 2
- 238000002845 discoloration Methods 0.000 description 8
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 6
- 238000012360 testing method Methods 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 229960004643 cupric oxide Drugs 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000012780 transparent material Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000001784 detoxification Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 239000008188 pellet Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 244000144985 peep Species 0.000 description 1
- 239000012286 potassium permanganate Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Disinfection, Sterilisation Or Deodorisation Of Air (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、有毒排ガス除害剤の破過検知方法に関し、特
に半導体製造工程等から排出される揮発性無機水素化物
を含む有毒排ガスを除害処理する除害剤の破過を検知す
る方法に関する。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a method for detecting the breakthrough of a toxic exhaust gas abatement agent, and in particular to a method for detecting the breakthrough of a toxic exhaust gas abatement agent. The present invention relates to a method for detecting breakthrough of a harmful abatement agent.
上記半導体製造工程等からは、アルシン、ホスフィン
シボラン、セレン化水素等の人体に有害な揮発性無機水
素化物（有毒成分）を含む排ガスか排出されるので、該
排ガスを大気に放出する前に無害化処理する必要かある
。From the above semiconductor manufacturing process, etc., arsine, phosphine, etc.
Since exhaust gas containing volatile inorganic hydrides (toxic components) harmful to the human body such as ciborane and hydrogen selenide is discharged, it is necessary to detoxify the exhaust gas before releasing it into the atmosphere.
そこで従来から、前記排ガスを塩化第二鉄、過マンガン
酸カリウム等の酸化剤を主成分とする除害剤に接触させ
て無害化処理していたが、この除害剤は、湿潤状態で前
記有毒成分と反応させる必要があるため、取扱いか面倒
になる不都合があった。Conventionally, the exhaust gas has been rendered harmless by contacting it with a detoxifying agent whose main component is an oxidizing agent such as ferric chloride or potassium permanganate. Since it is necessary to react with toxic components, it is inconvenient to handle.
そこで、酸化第−銅等の金属酸化物を主成分とする除害
剤を用いる除害処理方法か提案されている。この金属酸
化物による処理では、水分を必要としないので、完全な
乾式で除害処理を行うことができ、極めて取扱いか容易
になる。Therefore, a method of ablution treatment using a detoxifying agent containing a metal oxide such as cupric oxide as a main component has been proposed. This metal oxide treatment does not require moisture, so it can be completely dry to remove harmful substances, making it extremely easy to handle.
しかしながら、上述の酸化第−銅等の金属酸化物を主成
分とする除害剤を用いた除害処理方法では、この除害剤
か前記有毒成分と反応しても殆ど変色しないため、除害
処理の進行によって除害剤が破過し、除害剤通過後の排
ガス中の有毒成分が所定濃度以上になったとしても、新
しい除害剤と交換すべき時期を的確に把握することがで
きなかった。However, in the above-mentioned abatement treatment method using a detoxifying agent whose main component is a metal oxide such as cupric oxide, there is almost no discoloration even if the detoxifying agent reacts with the toxic component. Even if the abatement agent breaks through as the treatment progresses and the toxic components in the exhaust gas after passing through the abatement agent reach a predetermined concentration or higher, it is possible to accurately determine when to replace the abatement agent with a new one. There wasn't.
このため、前記除害剤を充填した除害筒の後段に高価な
分析計を設けて除害剤の破過を確認する必要があり、設
備費が高騰してしまうのか実情である。For this reason, it is necessary to install an expensive analyzer downstream of the abatement cylinder filled with the abatement agent to confirm whether the abatement agent has passed through the tube, and the cost of equipment increases.
そこで、本発明者は、高価な分析計を設けずとも、確実
に除害剤の破過を確認することのできる有毒排ガス除害
剤の破過検知方法を開発すべく鋭意研究を重ねた。Therefore, the present inventor has conducted extensive research in order to develop a method for detecting the breakthrough of a toxic exhaust gas abatement agent that can reliably confirm the breakthrough of the abatement agent without installing an expensive analyzer.
その結果、硝酸銅Ｃｕ （ＮＯｑ ） ２を、水分か存
在しない状態で前記有毒成分に接触させると、該有毒成
分か僅かな濃度であっても敏感に反応して通常の水色か
ら黒色に変色することを見出だした。本発明はかかる知
見に基づいて成されたものである。As a result, when copper nitrate Cu (NOq) 2 is brought into contact with the toxic component in the absence of moisture, it reacts sensitively even at a small concentration of the toxic component, changing its color from normal light blue to black. I found out something. The present invention has been made based on this knowledge.
即ち、本発明の有毒排ガス除害剤の破過検知方法は、ア
ルシン、ホスフィン、ジボラン、セレン化水素等の揮発
性無機水素化物を含む有毒排ガスの除害剤の破過を、硝
酸銅の変色により検知することを特徴とするものである
。That is, the breakthrough detection method of the toxic exhaust gas abatement agent of the present invention detects the breakthrough of the toxic exhaust gas abatement agent containing volatile inorganic hydrides such as arsine, phosphine, diborane, hydrogen selenide, etc. It is characterized by detection by.
さらに本発明は、前記硝酸銅を、前記除害剤に均一に混
合したこと、あるいは前記硝酸銅を、前記除害剤を充填
した除害筒の中間部と終端部との間に層状に配置したこ
とを特徴としている。Furthermore, the present invention provides that the copper nitrate is uniformly mixed with the abatement agent, or that the copper nitrate is arranged in a layer between a middle part and a terminal part of the abatement tube filled with the abatement agent. It is characterized by what it did.
前述のように、上記硝酸銅は、前記有毒成分に接触する
と、該有毒成分か僅かな濃度であっても敏感に反応して
通常の水色から黒色に変色するため、硝酸銅を除害剤の
破過の検知手段として用い、その変色状態を監視するこ
とにより、除害剤の破過を確認することができる。さら
に上記硝酸銅は、水が存在しない状態でも有毒成分との
接触により変色するので、完全な乾式で取扱うことがで
きる。As mentioned above, when the above-mentioned copper nitrate comes into contact with the above-mentioned toxic components, it reacts sensitively even at a small concentration and changes its color from normal light blue to black. By using it as a breakthrough detection means and monitoring its discoloration state, breakthrough of the abatement agent can be confirmed. Furthermore, since the copper nitrate changes color upon contact with toxic components even in the absence of water, it can be handled completely dry.
また、除害剤中に硝酸銅を均一に混合して用いると、除
害剤の破過状態の推移を目視することかでき、除害剤の
交換時期を予測することができる。Furthermore, when copper nitrate is mixed uniformly into the abatement agent, the transition of the breakthrough state of the abatement agent can be visually observed, and the time to replace the abatement agent can be predicted.
また、前記硝酸銅を、前記除害剤を充填した除害筒の中
間部と終端部との間に層状に配置して用いると、硝酸銅
の層が変色し、硝酸銅の層よりも上流側の除害剤が破過
しても、硝酸銅の層よりも下流側の除害剤がバックアッ
プとして除害処理可能なので、直ちに除害剤の交換をし
なくて済み、交換のための時間的な余裕が得られる。Furthermore, if the copper nitrate is used in a layered manner between the middle part and the end part of the abatement tube filled with the abatement agent, the copper nitrate layer will discolor and the upstream side of the copper nitrate layer will be Even if the abatement agent on the side breaks down, the abatement agent on the downstream side of the copper nitrate layer can be used as a backup, so there is no need to immediately replace the abatement agent, saving time for replacement. You can get some leeway.
以下、本発明を図面に示す実施例に基づいて、さらに詳
細に説明する。Hereinafter, the present invention will be explained in more detail based on embodiments shown in the drawings.
まず、第１図は本発明の第１実施例を示すもので、酸化
第−銅等の金属酸化物を主成分とする除害剤１を充填し
た除害筒２の後段に、硝酸銅を主成分とする破過検知剤
３を充填した検知筒４を直列に設けたちのである。この
検知筒４は、全体をガラス等の透明材料で形成するか、
あるいは一部に透明材料を用いて内部を目視可能に形成
し、内部の破過検知剤３の変色状況を外部から確認でき
るようにしている。First of all, FIG. 1 shows a first embodiment of the present invention, in which copper nitrate is added to the rear stage of the abatement cylinder 2 filled with the abatement agent 1 whose main component is a metal oxide such as cupric oxide. Detection cylinders 4 filled with breakthrough detection agent 3 as the main component are arranged in series. This detection tube 4 may be made entirely of a transparent material such as glass, or
Alternatively, a transparent material may be used in part to make the inside visible, so that the state of discoloration of the breakthrough detection agent 3 inside can be confirmed from the outside.
アルシン、ホスフィン１ ジボラン、セレン化水素等の
人体に有害な揮発性無機水素化物（有毒成分）を含む排
ガスは、排ガス導入管５から除害筒２内に導入され、前
記除害剤１と接触して除害処理され、排ガス導出管６か
ら検知筒４を経て大気に排出される。Exhaust gas containing volatile inorganic hydrides (toxic components) harmful to the human body, such as arsine, phosphine 1, diborane, and hydrogen selenide, is introduced into the abatement tube 2 from the exhaust gas introduction pipe 5 and comes into contact with the abatement agent 1. The exhaust gas is then subjected to detoxification treatment and discharged into the atmosphere through the exhaust gas outlet pipe 6 and the detection tube 4.
そして、排ガスの除害処理に伴い、除害筒２の上流側か
ら除害剤１の破過が進行し、除害筒２に充填した除害剤
１の大部分が破過すると、除害剤１て十分に除害しきれ
なかった僅かな有毒成分が排ガス導出管６から検知筒４
内に流入し、該検知筒４内に充填した破過検知剤３の硝
酸銅か前記有毒成分と接触して水色から黒色に変化する
。As the exhaust gas is removed, the abatement agent 1 progresses from the upstream side of the abatement tube 2, and when most of the abatement agent 1 filled in the abatement tube 2 breaks through, the abatement occurs. A small amount of toxic components that could not be sufficiently removed with agent 1 are transferred from the exhaust gas outlet pipe 6 to the detection tube 4.
The copper nitrate of the breakthrough detection agent 3 filled in the detection tube 4 comes into contact with the toxic component and changes from light blue to black.
従って、検知筒４内の破過検知剤３の変色を監視するこ
とにより、高価な分析計を用いずに除害筒２内に充填し
た除害剤１の破過を検知することができる。このように
して除害剤１の破過を検知した後は、従来と同様に該除
害筒２への排ガスの導入を止めるとともに、除害剤１及
び破過検知剤３を交換すれば良い。また、周知のように
、除害筒２を２基を切換え可能に設けておくことで除害
剤１及び破過検知剤３の交換時も連続して除害処理を続
けることができ、除害剤１及び破過検知剤３の交換は、
除害筒２及び検知筒４に設けた適宜な充填口（図示せず
）から行うことができる。Therefore, by monitoring the discoloration of the breakthrough detection agent 3 in the detection tube 4, it is possible to detect the breakthrough of the abatement agent 1 filled in the abatement tube 2 without using an expensive analyzer. After detecting the breakthrough of the abatement agent 1 in this way, it is sufficient to stop the introduction of exhaust gas into the abatement tube 2 and replace the abatement agent 1 and the breakthrough detection agent 3, as in the conventional case. . In addition, as is well known, by providing two switchable abatement tubes 2, it is possible to continue the abatement process even when the abatement agent 1 and breakthrough detection agent 3 are replaced. To replace harmful agent 1 and breakthrough detection agent 3,
This can be done through appropriate filling ports (not shown) provided in the abatement tube 2 and the detection tube 4.
尚、破過検知剤３には、上記硝酸銅をそのままの粉末状
で使用しても良いが、アルミナやシリカ等に担持させた
り、担持させた後でペレット状に成形すれば取扱い性を
さらに向上させることかできる。Note that the above-mentioned copper nitrate may be used in powdered form as it is for the breakthrough detection agent 3, but it may be easier to handle if it is supported on alumina, silica, etc., or it is formed into a pellet after being supported. It can be improved.
ここで、硝酸銅をアルミナに１・１０の割合で担持させ
、直径３ｍｍ、高さ３ ｍｍの円柱状のペレットにして
前記検知筒４に充填し、本発明方法の作用を確認する実
験を行った。Here, an experiment was conducted to confirm the effect of the method of the present invention by supporting copper nitrate on alumina at a ratio of 1.10, making it into a cylindrical pellet with a diameter of 3 mm and a height of 3 mm, and filling it into the detection tube 4. Ta.
この実験は、まず、前記除害筒２内を空にし、排ガス導
入管５から水素中に５ ｐｐｍのアルシンを含む試験用
ガスを導入して行い、検知筒４内の硝酸銅が通常の水色
から黒色に変色することを確認した。また、水素中に５
ｐｐ■のホスフィンを含む試験用ガスを用いた場合も同
様に変色することを確認した。This experiment was carried out by first emptying the abatement tube 2 and introducing a test gas containing 5 ppm of arsine in hydrogen from the exhaust gas introduction tube 5. It was confirmed that the color changed from black to black. Also, 5 in hydrogen
It was confirmed that a similar discoloration occurred when a test gas containing pp.■ of phosphine was used.
次に、通常の使用例での作用を確認するため、除害剤］
として酸化第一銅を用いるとともに、試験用ガスとして
水素中にアルシンを１％含むガスを用いた。Next, in order to confirm the effect in normal use cases,
Cuprous oxide was used as the test gas, and a gas containing 1% arsine in hydrogen was used as the test gas.
その結果、除害筒２内の除害剤１の除害能力が十分な間
は、硝酸銅は通常の水色のままであったが、除害剤１の
破過が進行すると、時間の経過に伴い硝酸銅か黒色に変
色した。このように排ガス中のアルシンによって、除害
剤１が破過したことを知ることかできる。As a result, as long as the abatement ability of the abatement agent 1 in the abatement tube 2 was sufficient, the copper nitrate remained its normal light blue color, but as the breakthrough of the abatement agent 1 progressed, the color of the copper nitrate changed over time. As a result, the color changed to copper nitrate or black. In this way, it can be known that the arsine in the exhaust gas has broken through the detoxifying agent 1.
第２図は、本発明の第２実施例を示すもので、上記除害
剤１中に上記破過検知剤３を均一に混合して除害筒２内
に充填したものである。このとき用いる除害筒２は、前
記検知筒４と同様に内部の破過検知剤３の変色状況を外
部から確認できるように形成する必要がある。FIG. 2 shows a second embodiment of the present invention, in which the breakthrough detection agent 3 is uniformly mixed into the abatement agent 1 and filled into the abatement cylinder 2. The abatement tube 2 used at this time, like the detection tube 4, must be formed so that the discoloration of the breakthrough detection agent 3 inside can be confirmed from the outside.
このように除害剤１中に破過検知剤３を均一に混合して
用いると、除害剤１の破過状態の推移、即ち破過前線Ｂ
の位置を目視することができ、除害剤１の交換時期を予
測することができる。When the breakthrough detection agent 3 is uniformly mixed into the abatement agent 1 in this way, the transition of the breakthrough state of the abatement agent 1, that is, the breakthrough front B
The position of the abatement agent 1 can be visually observed, and the time to replace the abatement agent 1 can be predicted.
尚、除害剤１と破過検知剤３との混合比は任意であり、
破過検知剤３の変色が確認でき、かつ除害剤１の量か排
ガスの除害処理に十分てあればよい。In addition, the mixing ratio of the abatement agent 1 and the breakthrough detection agent 3 is arbitrary,
It is sufficient that the color change of the breakthrough detection agent 3 can be confirmed and that the amount of the detoxifying agent 1 is sufficient for the detoxification treatment of the exhaust gas.
第３図は本発明の第３実施例を示すもので、除害剤１の
中間部と終端部との間に、破過検知剤３を層状に充填し
、該破過検知剤３の層に対応する筒壁に覗き窓７を設け
たものである。この場合は、除害剤１の破過前線が上記
破過検知剤３の層に至り、破過検知剤３の硝酸銅が黒く
変色するのを覗き窓７から確認することができ、破過検
知剤３の層よりも上流側の除害剤１が破過しても、破過
検知剤３の層よりも下流側の除害剤１がバックアップと
して除害処理か可能なので、直ちに除害剤］の交換をし
なくて済み、交換のための時間的な余裕が得られる。FIG. 3 shows a third embodiment of the present invention, in which a breakthrough detection agent 3 is filled in a layer between the middle part and the end part of the abatement agent 1. A viewing window 7 is provided in the cylindrical wall corresponding to the cylindrical wall. In this case, the breakthrough front of the abatement agent 1 reaches the layer of the breakthrough detection agent 3, and it can be confirmed from the viewing window 7 that the copper nitrate of the breakthrough detection agent 3 turns black, and the breakthrough Even if the abatement agent 1 on the upstream side of the layer of the detection agent 3 breaks through, the abatement agent 1 on the downstream side of the layer of the breakthrough detection agent 3 can perform abatement treatment as a backup, so the abatement can be carried out immediately. There is no need to replace the agent], giving you more time for replacement.
また、破過検知剤３の層の位置を適当に設定しておけば
、あるいは層を複数設けておけば、該破過検知剤３の変
色状況を監視することて、除害筒２内の除害剤１が全て
破過する時期、即ち除害剤１の交換時期を的確にとらえ
ることができる。In addition, if the position of the layer of breakthrough detection agent 3 is set appropriately, or if multiple layers are provided, the discoloration of the breakthrough detection agent 3 can be monitored and the inside of the abatement tube 2 can be monitored. It is possible to accurately determine the time when all of the abatement agent 1 has broken through, that is, the time to replace the abatement agent 1.
尚、上記除害筒２全体を、透明材料で形成すれば、覗き
窓７を設けなくても良い。また、破過検知剤３の層は、
除害筒２の全体に設ける必要はなく、除害剤２の破過状
況を確認できれば、覗き窓７の近傍のみなと、破過検知
剤３の変色を目視てきる部分のみに設けても良い。さら
に、除害剤コの終端部に破過検知剤３の層を設けても、
前記第１実施例と同様に除害剤１の破過を検知てきる。Note that if the entire harm removal tube 2 is made of a transparent material, the viewing window 7 may not be provided. Moreover, the layer of the breakthrough detection agent 3 is
It is not necessary to provide it in the entirety of the abatement cylinder 2, and if the breakthrough status of the abatement agent 2 can be confirmed, it may be provided only in the vicinity of the viewing window 7 and in the area where the discoloration of the breakthrough detection agent 3 can be visually observed. . Furthermore, even if a layer of breakthrough detection agent 3 is provided at the end of the abatement agent,
Breakthrough of the abatement agent 1 is detected in the same manner as in the first embodiment.
以上説明したように、本発明の有毒排ガス除害剤の破過
検知方法は、揮発性無機水素化物と接触することにより
変色する硝酸銅を主成分とする破過検知剤を用いるので
、高砺な分析計を用いることなく除害剤の交換時期を知
ることができる。As explained above, the breakthrough detection method of the toxic exhaust gas abatement agent of the present invention uses a breakthrough detection agent whose main component is copper nitrate, which changes color when it comes into contact with a volatile inorganic hydride. You can know when to replace the abatement agent without using a detailed analyzer.
また、破過検知剤を除害剤に混合して用いると、除害剤
が排ガスの流れ方向に沿って徐々に破過して行くのを目
視てきるので、破過する前に予め使用限界を測定するこ
とかでき、硝酸銅を除害剤の中間部と終端部との間に配
置して用いると、硝酸銅の層よりも上流側の除害剤か破
過しても、下流側の除害剤がバックアップとして除害処
理可能なので、直ちに除害剤の交換をしなくて済み、交
換のための時間的な余裕か得られる。In addition, when a breakthrough detection agent is mixed with an abatement agent, the abatement agent can be visually observed to gradually break through along the flow direction of the exhaust gas. If copper nitrate is placed between the intermediate part and the terminal part of the abatement layer, even if the abatement agent upstream of the copper nitrate layer breaks through, the downstream side Since the abatement agent can be used as a backup, there is no need to immediately replace the abatement agent, giving you more time to replace it.
さらに上記硝酸銅は、水が存在しない状態でも変色する
ので、完全な乾式で取扱うことができるとともに、硝酸
銅は腐食性が無いので、除害筒や検知筒の材質なとを自
由に選択できるなとの長所もある。Furthermore, since the above-mentioned copper nitrate changes color even in the absence of water, it can be handled completely dry, and since copper nitrate is not corrosive, the materials for the abatement tube and detection tube can be freely selected. There are also some advantages.
第１図は本発明の第１実施例を示す説明図、第２図は本
発明の第２実施例を示す説明図、第３図は本発明の第３
実施例を示す説明図である。
１・・除害剤 ２・・除害筒 ３・破過検知剤４・
・検知筒 ５・・・排ガス導入管 ６ 排カス導出
管 ７・・覗き窓
第１図Fig. 1 is an explanatory diagram showing a first embodiment of the present invention, Fig. 2 is an explanatory diagram showing a second embodiment of the invention, and Fig. 3 is an explanatory diagram showing a third embodiment of the invention.
It is an explanatory view showing an example. 1. Harm removal agent 2. Harm removal cylinder 3. Breakthrough detection agent 4.
・Detection tube 5...Exhaust gas inlet pipe 6 Exhaust gas outlet pipe 7...Peep window Figure 1
Claims (1)
の揮発性無機水素化物を含む有毒排ガスの除害剤の破過
を、硝酸銅の変色により検知することを特徴とする有毒
排ガス除害剤の破過検知方法。 ２、前記硝酸銅を、前記除害剤に均一に混合したことを
特徴とする請求項１記載の有毒排ガス除害剤の破過検知
方法。 ３、前記硝酸銅を、前記除害剤を充填した除害筒の中間
部と終端部との間に層状に配置したことを特徴とする請
求項１記載の有毒排ガス除害剤の破過検知方法。[Claims] 1. A toxic device characterized by detecting the breakthrough of a toxic exhaust gas abatement agent containing volatile inorganic hydrides such as arsine, phosphine, diborane, hydrogen selenide, etc. by color change of copper nitrate. Breakthrough detection method for exhaust gas abatement agent. 2. The method for detecting breakthrough of a toxic exhaust gas abatement agent according to claim 1, wherein the copper nitrate is uniformly mixed with the abatement agent. 3. Breakthrough detection of a toxic exhaust gas abatement agent according to claim 1, wherein the copper nitrate is arranged in a layer between a middle part and a terminal end of the abatement cylinder filled with the abatement tube. Method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2216358A JPH0497752A (en) | 1990-08-16 | 1990-08-16 | Detection of breakthrough of antidotal agent against poisonous exhaust gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2216358A JPH0497752A (en) | 1990-08-16 | 1990-08-16 | Detection of breakthrough of antidotal agent against poisonous exhaust gas |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0497752A true JPH0497752A (en) | 1992-03-30 |
Family
ID=16687311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2216358A Pending JPH0497752A (en) | 1990-08-16 | 1990-08-16 | Detection of breakthrough of antidotal agent against poisonous exhaust gas |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0497752A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5853678A (en) * | 1993-03-17 | 1998-12-29 | Nipon Sanso Corporation | Method for removing hydrides, alkoxides and alkylates out of a gas using cupric hydroxide |
| US5885845A (en) * | 1993-12-22 | 1999-03-23 | Nippon Sanso Corporation | Method for detecting inorganic hydrides, inorganic halides and organometallic compounds in a gas using copper hydroxide |
-
1990
- 1990-08-16 JP JP2216358A patent/JPH0497752A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5853678A (en) * | 1993-03-17 | 1998-12-29 | Nipon Sanso Corporation | Method for removing hydrides, alkoxides and alkylates out of a gas using cupric hydroxide |
| US5885845A (en) * | 1993-12-22 | 1999-03-23 | Nippon Sanso Corporation | Method for detecting inorganic hydrides, inorganic halides and organometallic compounds in a gas using copper hydroxide |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| ES2366912T3 (en) | GAS SURVEILLANCE SET INCLUDING ONE OR VARIOUS GAS SENSORS AND ONE OR VARIOUS DEGASIFIER. | |
| US4365627A (en) | Filter-type respirator canister | |
| JP5001419B2 (en) | Heated combustion tube, pyrolysis device and mercury analyzer for mercury analysis | |
| JP2006518468A5 (en) | ||
| JP4673780B2 (en) | Hazardous gas removal equipment | |
| EP1043583A3 (en) | Detection of hydrogen sulfide in hydride gases | |
| JPH0497752A (en) | Detection of breakthrough of antidotal agent against poisonous exhaust gas | |
| JPS6170448A (en) | Gas detecting element | |
| JP2005077355A (en) | Apparatus and method for measuring mercury concentration | |
| JP2006284422A (en) | Method and instrument for measuring organohalogen compound | |
| JPH0679138A (en) | Method for pretreating nf3 gas | |
| JPS6227039A (en) | Boron trichloride adsorption device | |
| JPS63137736A (en) | Etching exhaust gas damage removing device | |
| JP2005009895A (en) | Measuring method of organic halogen compound and measuring device thereof | |
| JP3532256B2 (en) | Ammonia decomposition equipment | |
| JP4195831B2 (en) | How to detect harmful gases | |
| JP2018025429A (en) | Reduction filter of mercury concentration measuring apparatus | |
| JPH11267443A (en) | Dry type harm removing device and method for gas | |
| JP3834915B2 (en) | Gas sensor | |
| JP2006284423A (en) | Removing apparatus of inorganic halogen compound | |
| JP2009122001A (en) | Filter for removing hydrogen sulfide for gas detector | |
| JPS63283752A (en) | Catalyst for removing harmful gas | |
| JP2005003475A (en) | Detection agent storage container and hazardous gas detection method using it | |
| KR100522570B1 (en) | A portable air cleaner purifying the contamination air | |
| JPS52113360A (en) | Fluctuation equalization of fluid concentration |