JPH0497347U - - Google Patents

Info

Publication number
JPH0497347U
JPH0497347U JP3138391U JP3138391U JPH0497347U JP H0497347 U JPH0497347 U JP H0497347U JP 3138391 U JP3138391 U JP 3138391U JP 3138391 U JP3138391 U JP 3138391U JP H0497347 U JPH0497347 U JP H0497347U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3138391U
Other languages
Japanese (ja)
Other versions
JPH0726842Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1991031383U priority Critical patent/JPH0726842Y2/ja
Publication of JPH0497347U publication Critical patent/JPH0497347U/ja
Application granted granted Critical
Publication of JPH0726842Y2 publication Critical patent/JPH0726842Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Packaging Frangible Articles (AREA)
JP1991031383U 1990-06-01 1991-05-08 ウエハ用バスケット Expired - Lifetime JPH0726842Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1991031383U JPH0726842Y2 (ja) 1990-06-01 1991-05-08 ウエハ用バスケット

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2-58037 1990-06-01
JP5803790 1990-06-01
JP1991031383U JPH0726842Y2 (ja) 1990-06-01 1991-05-08 ウエハ用バスケット

Publications (2)

Publication Number Publication Date
JPH0497347U true JPH0497347U (pt) 1992-08-24
JPH0726842Y2 JPH0726842Y2 (ja) 1995-06-14

Family

ID=31948442

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1991031383U Expired - Lifetime JPH0726842Y2 (ja) 1990-06-01 1991-05-08 ウエハ用バスケット

Country Status (1)

Country Link
JP (1) JPH0726842Y2 (pt)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000021966A (ja) * 1998-07-07 2000-01-21 Shin Etsu Polymer Co Ltd 精密基板収納容器
JP2007123513A (ja) * 2005-10-27 2007-05-17 Shin Etsu Polymer Co Ltd 精密基板収納容器

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62163949U (pt) * 1986-04-09 1987-10-17

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62163949U (pt) * 1986-04-09 1987-10-17

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000021966A (ja) * 1998-07-07 2000-01-21 Shin Etsu Polymer Co Ltd 精密基板収納容器
JP2007123513A (ja) * 2005-10-27 2007-05-17 Shin Etsu Polymer Co Ltd 精密基板収納容器
JP4519056B2 (ja) * 2005-10-27 2010-08-04 信越ポリマー株式会社 精密基板収納容器

Also Published As

Publication number Publication date
JPH0726842Y2 (ja) 1995-06-14

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Legal Events

Date Code Title Description
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 19960109