JPS62163949U - - Google Patents
Info
- Publication number
- JPS62163949U JPS62163949U JP5208886U JP5208886U JPS62163949U JP S62163949 U JPS62163949 U JP S62163949U JP 5208886 U JP5208886 U JP 5208886U JP 5208886 U JP5208886 U JP 5208886U JP S62163949 U JPS62163949 U JP S62163949U
- Authority
- JP
- Japan
- Prior art keywords
- wafer storage
- storage carrier
- hole
- notch
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005266 casting Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5208886U JPS62163949U (pt) | 1986-04-09 | 1986-04-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5208886U JPS62163949U (pt) | 1986-04-09 | 1986-04-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62163949U true JPS62163949U (pt) | 1987-10-17 |
Family
ID=30876944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5208886U Pending JPS62163949U (pt) | 1986-04-09 | 1986-04-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62163949U (pt) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63153517U (pt) * | 1987-03-28 | 1988-10-07 | ||
| JPH0497347U (pt) * | 1990-06-01 | 1992-08-24 |
-
1986
- 1986-04-09 JP JP5208886U patent/JPS62163949U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63153517U (pt) * | 1987-03-28 | 1988-10-07 | ||
| JPH0497347U (pt) * | 1990-06-01 | 1992-08-24 |