JPH0496B2 - - Google Patents
Info
- Publication number
- JPH0496B2 JPH0496B2 JP6373483A JP6373483A JPH0496B2 JP H0496 B2 JPH0496 B2 JP H0496B2 JP 6373483 A JP6373483 A JP 6373483A JP 6373483 A JP6373483 A JP 6373483A JP H0496 B2 JPH0496 B2 JP H0496B2
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- processing container
- processing
- container
- generation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 8
- 230000007246 mechanism Effects 0.000 claims description 4
- 238000009826 distribution Methods 0.000 claims description 2
- 238000003672 processing method Methods 0.000 claims description 2
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 239000004698 Polyethylene Substances 0.000 description 4
- 239000004743 Polypropylene Substances 0.000 description 4
- 229920000573 polyethylene Polymers 0.000 description 4
- 229920001155 polypropylene Polymers 0.000 description 4
- 125000001153 fluoro group Chemical group F* 0.000 description 3
- 230000036470 plasma concentration Effects 0.000 description 3
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- -1 polypropylene Polymers 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004873 anchoring Methods 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32357—Generation remote from the workpiece, e.g. down-stream
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0894—Processes carried out in the presence of a plasma
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/19—Details relating to the geometry of the reactor
- B01J2219/194—Details relating to the geometry of the reactor round
- B01J2219/1941—Details relating to the geometry of the reactor round circular or disk-shaped
- B01J2219/1942—Details relating to the geometry of the reactor round circular or disk-shaped spherical
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2023/00—Use of polyalkenes or derivatives thereof as moulding material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/18—Vacuum control means
- H01J2237/182—Obtaining or maintaining desired pressure
- H01J2237/1825—Evacuating means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/336—Changing physical properties of treated surfaces
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Priority Applications (11)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6373483A JPS59189130A (ja) | 1983-04-13 | 1983-04-13 | プラズマ処理方法 |
AU24671/84A AU549376B2 (en) | 1983-02-25 | 1984-02-16 | Plasma treatment |
EP84101926A EP0120307B1 (fr) | 1983-02-25 | 1984-02-23 | Appareil et procédé pour le traitement au plasma d'un matériau en résine |
DE3486470T DE3486470T2 (de) | 1983-02-25 | 1984-02-23 | Verfahren zum Plasmabehandeln von Kunststoffharz |
DE3486317T DE3486317T2 (de) | 1983-02-25 | 1984-02-23 | Vorrichtung und Verfahren zur Plasmabehandlung von Kunstharz. |
EP91115536A EP0461683B1 (fr) | 1983-02-25 | 1984-02-23 | Procédé pour le traitement par plasma de matière plastique |
US06/825,941 US4678644A (en) | 1983-02-25 | 1986-01-30 | Apparatus and method for plasma treatment of resin material |
AU82240/87A AU603397B2 (en) | 1983-02-25 | 1987-12-08 | Apparatus and method for plasma treatment of resin material |
AU82238/87A AU8223887A (en) | 1983-02-25 | 1987-12-08 | Apparatus and method for plasma treatment of resin material |
AU82237/87A AU8223787A (en) | 1983-02-25 | 1987-12-08 | Apparatus and method for plasma treatment of resin material |
AU82239/87A AU8223987A (en) | 1983-02-25 | 1987-12-08 | Apparatus and method for plasma treatment of resin material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6373483A JPS59189130A (ja) | 1983-04-13 | 1983-04-13 | プラズマ処理方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59189130A JPS59189130A (ja) | 1984-10-26 |
JPH0496B2 true JPH0496B2 (fr) | 1992-01-06 |
Family
ID=13237925
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6373483A Granted JPS59189130A (ja) | 1983-02-25 | 1983-04-13 | プラズマ処理方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59189130A (fr) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6289737A (ja) * | 1985-06-27 | 1987-04-24 | Nippon Medical Supply Corp | プラスチツクチユ−ブの製造方法 |
JPH0623569Y2 (ja) * | 1988-03-02 | 1994-06-22 | 新日本無線株式会社 | プラズマ発生反応装置 |
FR2733384B1 (fr) * | 1995-04-21 | 1997-07-04 | Univ Lille Sciences Tech | Dispositif pour creer deux ou plusieurs decharges plasma dans un meme tube guide d'onde |
US20040135828A1 (en) * | 2003-01-15 | 2004-07-15 | Schmitt Stephen E. | Printer and method for printing an item with a high durability and/or resolution image |
-
1983
- 1983-04-13 JP JP6373483A patent/JPS59189130A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS59189130A (ja) | 1984-10-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101647101B (zh) | 等离子加工设备 | |
US6396214B1 (en) | Device for producing a free cold plasma jet | |
TWI427669B (zh) | 使用中空陰極電漿處理大面積基板之裝置 | |
KR100267959B1 (ko) | 플라즈마 처리장치 | |
HK1046774B (zh) | 用於處理具有大表面的襯底的等離子反應器 | |
EP1509332B2 (fr) | Application d'un materiau de formation de revetement sur au moins un substrat | |
JP2000058297A (ja) | プラズマ処理システム | |
US20130209703A1 (en) | Hollow-cathode gas lance for the interior coating of containers | |
EP0120307B1 (fr) | Appareil et procédé pour le traitement au plasma d'un matériau en résine | |
JPH10270430A (ja) | プラズマ処理装置 | |
JPH0496B2 (fr) | ||
US4690097A (en) | Apparatus and method for plasma treatment of resin material | |
JPH10247598A (ja) | プラズマ源及びこれを用いたイオン源並びにプラズマ処理装置 | |
JPH0774115A (ja) | プラズマ処理装置 | |
EP0152511B1 (fr) | Dispositif et procédé pour le traitement au plasma de matière plastique | |
JPH0495B2 (fr) | ||
JPS6328874A (ja) | 反応装置 | |
Madveika et al. | Investigation of silicon wafers' influence on the local microwave power values in a resonator-type plasmatron | |
KR101781290B1 (ko) | 대면적 표면파 플라즈마 장치 및 이를 이용하여 전기전도성 다이아몬드 코팅방법 | |
US4786522A (en) | Method for plasma treatment of resin material | |
JPH0129141B2 (fr) | ||
JPS59189129A (ja) | プラズマ分岐処理方法 | |
JPS59189131A (ja) | プラズマ処理装置 | |
JPH0254374B2 (fr) | ||
JPS59103341A (ja) | プラズマ処理装置 |